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E-Mail 150/200mm Equipment 300mm Equipment

AMAT Endura II PVD

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CHAMBER SOLUTION

  • IMP Chamber (300mm)
  • MoCVD Chamber (300mm)
  • Degas Chamber (300mm)
  • CIPW Chamber (300mm)
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IMP
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MoCVD
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Degas
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CIPW

AMAT Centura ETCH

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CHAMBER SOLUTION

  • DPS II G2 POLY (300mm)
  • DPS II G5 POLY (300mm)
  • E-MaX CT + (300mm)
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DPS II G2 POLY
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DPS II G5 POLY
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E-Max CT+

AMAT Producer

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CHAMBER SOLUTION

  • SE/GT :
  • Avila TSV PECVD (300mm)
  • HARP USG (300mm)
  • PE TEOS (300mm)
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PE CVD
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HARP USG
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PE TEOS

LAM / NOVELLUS CVD (CONCEPT3)

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CHAMBER SOLUTION

  • VECTOR : PE TEOS, PE CVD, PE SiN, SiO2, SiNetc. (300mm)
  • VECTOR Express : PE TEOS (300mm)
  • Triple Speed NeXT : HDP, Max HDP (300mm)
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PE TEOS
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Max HDP

LAM ETCH

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CHAMBER SOLUTION

  • LAM 2300 :
  • STAR (300mm)
  • EXELAN (Flex) (300mm)
  • KIYO / KIYO 45 / FLEX 45 (300mm)
  • VERSYS Metal (300mm)
  • POLY Silicon (300mm)
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Versys Metal
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EXELAN FLEX

LAM / Novellus ETCH

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CHAMBER SOLUTION

  • ASHER :
  • GAMMA 2130 (300mm)
  • GAMMA Express (300mm)

DNS

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CHAMBER SOLUTION

  • SS-3000-AR (300mm)

TEL (ETCH)

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CHAMBER SOLUTION

  • TELIUS :
  • SCCM (300mm)
  • SCCM TE (300mm)
  • SCCM SE + (300mm)
  • SCCM Jin (300mm)
  • SCCM SiN(300mm)
  • DRM (300mm)

PSK

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CHAMBER SOLUTION

  • ASHER :
  • SUPRA (300mm)
  • TERA (300mm)