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For more details or ask for quotations, please contact us.

E-Mail 150/200mm Equipment 300mm Equipment

AMAT Endura5500 PVD

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CHAMBER SOLUTION

  • Aluminum Chamber
  • Ti/TiN Chamber
  • PCII/RPC Chamber
  • IMP/Encore Chamber
  • TxZ Chamber (STD, HP & HP+)
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IMP Chamber
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Preclean Chamber
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TxZ Chamber
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STD & HTHU Chamber

AMAT Centura5200 CVD

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CHAMBER SOLUTION

  • HDP Chamber
  • WxZ Chamber
  • DxZ Chamber
  • PE CVD (TEOS & SION)
  • CxZ Chamber
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Ultima Chamber
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Ultima Plus Chamber
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WxZ Chamber
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DxZ Top Mount RPS

AMAT Producer

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CHAMBER SOLUTION

  • APF (200mm)
  • SACVD / BPSG (200mm)
  • PE CVD (200mm)
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APF
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BPSG

LAM / NOVELLUS CVD (C1, C2)

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CHAMBER SOLUTION

  • C1 : PE-CVD, Nitride, PSN-CVD (150mm)
  • C1 : P-SiON, BPSG, TEOS, CVD (150mm)
  • C2 Speed : Shrink HDP Chamber (200mm)
  • C2 ALTUS : W CVD Chamber (200mm)
  • C2 Sequel : CVD, PE CVD Chamber (200mm)
  • C2 Express : TEOS, CVD Chamber (200mm)
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CVD Chamber
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HDP Chamber
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W CVD Chamber

TEL Mark V, VZ, 7, 8

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Mark V / VZ

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Mark-7, 8

TEL ACT 8, 12

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ACT-8

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ACT-12

Upgrade & Conversion

PVD

  • Std TxZ => HP/HP+ TxZ
  • IMP => SIP & Encore
  • HP Robot => HP+/VHP Robot
  • Std Heater => E-Chuck
  • Shutter
  • RF match Upgrade
  • Cryo Pump Upgrade
  • Any type of PVD Chamber
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CVD

  • RF Cleaning => RPC, RPS
  • Std W => Sprint W
  • MTR5 Robot => MAG7 Robot
  • Std Cooling => 4 Cooling Slot
  • Ultima => Ultima+, TE
  • Any type of CVD Chamber
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