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RN OEM Used Parts List 20190823

Category : OEM Used / New Parts | Download : RNX OEM Used Parts List 20190823.pdf

NO.     P/N                Description
1MKSAX-7645
2MKSASTEX DC POWER
3MKS ENIDCG 200Z
4MKS ENIOEM 1250
5MKS ENIDCG 200
6MKS ENIOEM 12A
7MKS ENIOEM 2000
8MKS ENIDCG-200Z-OPTIMA 
9MKS ENIGHW-85A
10MKSAX8405
11MKSAX8403
12AEMDX 10K SLAVE
13AEMDX 10K MASTER
14AEMDX 20K MASTER
15AEMDX - MASTER
16AEPDW 2200
17AEHFV 8000
18AERAPID
19AELF-10
20AERF-20R
21AERF-10S
22AEPE 5000
23AEPE 2500
24AEPDP 3500
25AEPINACLE
26AERF-20M
27AERFX 3000
28AERF5S
29AELF-5
30AEAPEX3013
31AEPDX 900-2V
32AEPDX-8000
33AEPDX 1400
34AEMDX- L6
35AEMDX-L12 DC P/S
36AEMDX-L12M-650
37AELF-10A
38AEMDX-L18M
39AEMDX-L12M
40AEMDX20K
41AELF-10
42AERFG 5500
43AERFG-1250
44AEMDX-L12-650
45ADTECAX- 1000 III
46ADTECAX-2000 III
47ADTECAX-2000
48ADTECAX-2000 II
49ADTECAX-1000 II
50ADTECAX-3000 III
510190-07906DC POWER SUPPLY
520190-16526DC POWER SUPPLY
53010-2000124V Power supply
541140-01104P/S Ion Gauge 8 channel
55-15V POWER SUPPLY
560190-76030CDX-2000 Dual RF P/S
571140-01086 10KW Power Supply  
581140-0109210KW P/S (Master)
590010-2000015V P/S ASSEMBLY
600010-20442Assy,8" RF Match
61NPNPG 10K
62-RFK30-ST1
63RFMP5000 MATCHER
64DAIHENMFG-20SA
65DAIHENMFG-20SA3
66DAIHENMFG-20SA3
67COMDELCPS-1001S
68COMDELCPS-1001
69COMDELCX-600S
70COMDELCX 1250
71COMDELCS 600S
72COMDELCLK-10KW
73COMDELCX-2500S
74COMDELCS-10KS
75COMDELMFG 15SA
760100-76259ASSY PCB WAFER ORIENTER CONTROLLER BD
770100-00634Gas Detect Board
780100-20000wPCB ASSY,64 CHANNEL MUX
790110-20004PCB FAB, CHAMBER INTERCONNECT
800100-20313CHAMBER INTERCONNECT PCB
81-Convectron guage board
820100-20098PCB ASSY,DUAL DEGAS DRIVER
830100-20078PCB ASSY LASER DRIVER
840100-20004wPCB ASSY, CHAMBER INTERCONNECT
850100-20026wPCB ASSY,STEPPER DRIVER DISTRIBUTION
860100-20216Stepper Driver/Direct Drive Interface
870100-35170PCB, ASSY,DIVIDER EXHAUST SWITCHING SYS
880130-76029PCB CHBR TRAY INTC A & C CENTURA MCVD
890100-09214PCB ASSEMBLY, CHAMBER INTERFACE BOARD
900100-76029PCB CHBR TRAY INTC A & C CENTURA MCVD
910100-76017PCB ASSY, INTERFACE PROCESSOR DISTRIBUTI
920100-76030PCB CHBR TRAY INTC B & D CENTURA MCVD
930100-20069OBS,PCB WAFER ORIENTER
940100-76013PCB ASSY, CENTURA CHAMBER A/C INTERCONNE
950100-35212PCBA, CHAMBER A/C TRAY, IPS, 5200 MCC
960100-00386PCB, LIGHTPEN SELECT INTERCONNECT
970190-10691CARD CRT VIDEO GRAPHICS CONTROLLER FOR P
980100-20183PCB ASSY VIDEO 3 MONITOR W/SW
990100-09058wPCB ASSY OPERATOR CNTRL PANEL,
1000100-35054PCB ASSY,CHMBR INTERFACE
1010100-35065PCB ASSY, SERIAL ISOLATOR
1020100-20009wPCB ASSY,SYSTEM STEPPER DISTRIBUTION
1030100-76280PCB,ASSY SMIF INTERCONNECT BOARD WITH COVER
1040100-09380PCB ASSEMBLY HEATER RETRACT WXZ
1050110-09084PCB Monitor light pen interconnect
1060110-09244AMAT BOARD
1070110-09162-
1080100-09009PCB ASSY, BUFFER BOARD
1090100-20063PCB ASSY, TC GAUGE
1100100-00008w PCB TC GAUGE
1110100-35049ASSEMBLY PCB SYS RESET/ INTLK SEL BD
1120100-35250PCB ASSY,CHAMBER INTERFACE,DPS CENTURA
1130100-35207PCB, CHAMBER INTERFACE IPS, 5200
1140100-00493PCBA, CHAMBER INTERFACE 5200 HDPCVD ULTI
1150100-76042CENTER FINDER PCB ASSY
1160100-35058wASSY PCB,LOADLOCK INTERLOCKS
1170100-35175CHAMBER INTERFACE BOARD
1180100-35053PCB ASSY,MAINFRAME INTERLOCKS
1190100-35036PCB ASSY, DUAL GAS LEAK DET
1200100-00014PWB OPTO DETECTOR
1210100-00112PCB OPTO SW 3 ASSY F/A INDXR
122603625-104UMAC-CPCI Turbo CPU
1230100-09389TC AMP/INTERLOCK BD
1240100-20133SERIAL/VIDEO INTERCONNECT BD
1250100-35353PCB ASSY 5 PHASE STEPPER DRIVER INTERFAC
1260020-22821Wafer map LED Cover
1270020-13965Fast Wafer mapping cover
1280020-13963Bracket
1290100-76038ASSY, PCB LED-NB, FAST WAFER MAPPING
1300010-20291DETECTOR ASSY, LLB, LEFT
1310010-20292DETECTOR ASSY, LLB, RIGHT
1320190-00318
0100-02735
VGA VIDEO CONROLLER ASSY BD
VGA VIDEO CONTROLLER BOARD
1330100-00499PCB ASSEMBLY, DC POWER/SERIPLEX BUS DIST
1340190-00387CARDMOTION CONTROLEER DEPPRE-VME/OPT VME
1350100-00752PCB ASSY, MAINFRAME INTERFACE BD
1360190-11529card piii 400mhz 128mb ram vmebus single
1370100-00215PCB ASSY, AC DIST
1380090-00811ASSEMBLY, PCB DUAL GAS LEAK DETECTOR
1390100-35231PCB,SERIPLEX I/O DISTRIBUTION, GPLIS
1400015-01857MODIFICATION, ASSY, PCB, CHAMBER SET INT
1410100-01792PCB ASSY, 5-PHASE STEPPER DRIVER INTERFA 
1420090-76133v452
143 V440
1440190-09939OMS Board
1450100-20003OBS DIGITAL INPUT OUTPUT PCB
1460100-00259PCB ASSY,SERIPLEX I/O DISTRIBUTION,GPLIS  
1470100-11001w PWB, ANALOG OUTPUT
1480100-11002PWB DIGITAL I/O **
1490190-35066DUAL GAS LEAK DETECTOR
1500190-09547SCD, APC VME SERIPLEX BOARD
1510190-35763SERIPLEX MUX I/O PCB
152I4808064CTI Connect Tech Inc Intellicon FLEX-8 PCB 45807 REV C Board 
1530190-35762SERIPLEX MUX I/O PCB(2), (048-079H)
1540190-35775MULTIPLEXED I/O CONTROL BOARD, CH C
1550100-01321ASSY PCB DIGITAL I/O DIO BD
1560100-76059PCB ASSY, MAINFRAME EXPANSION BOARD
1570100-20153OBSOLET USE 0100-76059
1580100-20135PCB ASSY MAIN FRAME DUAL
1590190-75084VGA video interconnect PCB, ESW X3347
1601381-647847-13N/A
1610100-20173REV A STEPPER CONTROLLER BD ASSY
1620100-20001System Electronics interface PCB board
1630190-76050VGA VIDEO CONTROLLER
1640190-09469PCB,APC CH D
1650190-35653SERIPLEX MUX I/O PCB(1),(016H-047H)
1660100-20100wPCB ASSY, ANALOG INPUT/ OUTPUT
1670190-09467PCB,APC CHAMBER B
1680100-00003w PWB VME STEP CONT. I
1690190-35773MULTIPLEXED I/O CONTROL BOARD, CH A
1700100-00396ASSY PCB ANALOG I/O AIO BD
171sv21PCB ASSY CCD
172810-017095-010PCB REV,B
1730100-01996ASSY, PCB SEI
1740100-09054PCB ASSY, ANALOG INPUT
1750190-35651SERIPLEX MUX I/O PCB(6), (176H-207H)
1760120-20162PCB Artwork, Stepper Controller
1770040-70360N/A
1780040-18053PEDESTAL, HOLES 200mm BLUE SNNF
1790010-36278CHAMBER ASSEMBLY, AXZ
1800010-20129BLADE ASSY 6" BUFFER
1810010-20030TRANSFER ROBOT ASSY (1 SET FAIL: \500,000)
1820020-70336WING FROG LEG
1830040-13377
0040-13378
WING, LT, ENHANCED HP
1840010-70264ASSY HP/HP+ UPGRADE ROBOT DRIVE (UPPER, LOWER)
1850010-76430ASSY A.L.L.MOTOR LEFT
1860010-01711ASSY, HP, UPGRADE ROBOT, ENDURA (UPPER, LOWER)
1870010-76061ASSY CENTURA HP ENP TRANSFER ROBOT  (UPPER, LOWER)
1880010-70264
0010-13263
ASSY HP/HP+ UPGRADE ROBOT DRIVE (UPPER, LOWER)
1890020-20667MOUNT LIFTER BEARING
1900010-20753WAFER LIFT ASSEMBLY PRECLEAN 2 
1910010-76428ASSY, PVD SLIT VALVE ACTUATOR
1920010-20681ASSY SPECIAL HANDLER (L.L.A)
1930020-41030TOP PLATE PLATFORM METAL CASSETTE 
194 L/L STAGE SET 
1953400-01383HOSEASSY TFE/SST BRD 3/16IDX48"L FEM JIC LONG-EL
1963400-01384HOSEASSY TFE/SST BRD 3/16IDX84"L FEM JIC LONG-EL
1973400-01385HOSEASSY TFE/SST BRD 3/16IDX84"L FEM JIC ELBOW
1983400-01386HOSEASSY TFE/SST BRD 3/16IDX48"L FEM JIC ELBOW
1990010-04561ASSEMBLY, BIASED ELECTRODE, AC BOX
200-P5000 ROBOT BLADE
2010010-76506MOTORIZED HP LIFT ASSEMBLY
2020010-06464ASSY, SZ BESC MOTORIZED LIFT
2030020-20913Box Heater AC Power
2040020-23438COVER HOUSING MOTORIZED LIFT
2050020-23442COVER PLUMBING MOTORIZED KIT
2060020-20510HSNG HTR PKG
2070040-13569COVER, RF WATER BOX,HT ESC
2080020-23441BRKT PLUMBING MOTORIZED LIFT (WITH 23442)
2090020-20914COVER HTR AC POWER BOX
2100240-76250KIT, 101% BELLOWS
2110021-00101SHIELD TC AMP WXZ
2120010-30703INTERLOCK/ TC AMP ENCLOSURE ASSY WXZ
2130010-20092OPERATOR CONTROL PANEL ASSY, UHV 5500
214-ASSY, REMOTE DISTRIBUTION
2150010-20705RESONATOR
216SEC-Z512MGXN2 100 SCCM
217SEC-Z512MGXN2 550 
218SEC-Z512MGXN2 3SCLM
219UFC-81601SLIM (MF3)
220UFC-8160200SCCM (WF6)
221UFC-81602SLIM (H2)
222UFC-81603SLM (Ar)
223UFC-816030SCCM (SIH4)
224UFC-8160N2 500
225UFC-81613SLM(Ar)
226UFC-8161200SCCM(Ar)
227UFC-81611SLM(NF3)
228UFC-16605SLM Ar
229UFC-1660200SCCM N2 (NF3)
230UFC-1660500SCCM
231UFC-16605SLM Ar
232UFC-16601.5SLM
233UFC-1661200CC WF6N2
234UFC-1661Ar 300SCCM
235UFC-16613L H2 2000
236UFC-16612LH2 N2 300SCCM
237UFC-1661300CC N2 WF6
238UFC-1661H2 2500 SCCM
239UFC-16612SLM H2
240UFC-16617.5 L Ar
241UFC-1661H2 2000SCCM 2L
242UFC-1661Ar 5000
243UFC-1661H2 2000
244UFC-1661N2 200
245UFC-1661H2 3000
246-MKS MASS FLOW CONTROLLER 200 SCCM 1159B-02000RV-ST
247STEC 4400NF3 200SCCM
248STEC 4400N2 300SCCM
249STEC 4400NF3 1000SCCM
250STEC 4400N2 200 SCCM
251STEC 4400N2 20 SCCM
252STEC 4400WF6 30SCCM
253STEC 4400SIH4 30SCCM
254STEC 4400WF6 200SCCM
255STEC 4400Ar 5SLM
256STEC 4400N2 100 SCCM
257STEC 7440WF6 200SCCM
258STEC 7440SIH4 30SCCM
259STEC 7440WF6 30SCCM
260STEC 7440N2 200 SCCM
261STEC 7440N2 100 SCCM
262STEC 7440Ar 50 SCCM
263STEC 7440N2 50 SCCM
264UFC-8160-
265UFC-8161-
266STEC 4400H2 2SLM
267STEC 4400H2 1SLM
268STEC 4400Ar 20SCCM
269STEC 4400He 500SCCM
270STEC 4400H2 20SCCM
271STEC 4400N2 100 SCCM
272STEC 4400Ar 50 SCCM
273BROOKS 6256S200SCCM
274BROOKS 6256S1SLPM 
275BROOKS 6256S20SCCM
276BROOKS 5964D5SLPM
2773030-13510MFC
2783030-08487MFC
279MKS640A-27962
2800190-36237VALVE, INJ. 208V TEPO/TEOS 150C STEC
2813870-02238VALVE INJECTION CNTRL PNEU TC W/HEATER
282MFC1179A-23682
283MFC1179A00423CR 18V-K
2840140-20286HARNESS ASSY CHAMBER 1 AND 4 AC ( WITH 0020-21405)
285FC-D980CSIH4 100SCCM
286FC-D980CSIH4 600SCCM
287 MFC 8160 (Pin Board Type) N2 20 (Working)
2880020-20817COVER, FRONT LEG
2890020-20719RAIL SUPPORT RF GEN CABINET
2900020-40158BRACKET, MOUNTING 
291-IMP WATER LINE
2920100-20181 PCB ASSY, OPERATOR CONTROL PANEL WITH IN
2930010-21616MAGNET ASSY P4
294-Signal Tower
2950030-20101SOURCE COVER, 13 VECTRA IMP
2960030-20006ARM,WELDMENT SOURCE STD OBSOLETE
2970020-20296FRAME SOURCE 13
2980040-2149513" DEGAS LID FRAME (with Target)
2990020-20295wFRAME SOURCE 11.30
3000020-20164COVER, INSULATOR SOURCE 11.30
3010020-20171COVER, INSULATOR 13
302_11.30 SOURCE
303_G-12 SOURCE
3040010-11925ASSEMBLY, MAGNET
3050040-07772 Cover, Insulator, ALPS+ Center Injection source
3060030-00294HOIST COVER
3070030-20020COVER SOURCE 13" G-12
3080030-00015COVER, PULLEY SOURCE 200 CENTER WATER IN
3090010-20225MAGNET 'A' 13.O AL ASSY
3100010-20819MAGNET ASSY UNCHARGED 13TI ***
3110010-20768MAGNET ASSY G-12 8 ***
3120010-21465MAGNET ASSY TI DURA SOURCE 11.3
3130010-20818MAGNET ASSY A-TYPE 13AL ***
3140010-20328MAGNET ASSY DURA SOURCE 13 AL
3150010-12864MAGNET ASSY, LP-8.8, SHIM, 200MM SIP ENC
316_MAGNET ASSY
3170010-20389MAGNET ASSY DURA SOUCRCE 11.3
3180010-21127MAGNET ASSY  TI DURASOURCE  13
3190010-21206MAGNET ASSY DURA SOURCE 13 JMW1
3200010-21844MAGNET ASSY DURASOURCE TTN ENCAPSULATED
3210010-20258MAGNET ASSY A-TYPE 13 TI
3220010-20222MAGNET,REM 11.3 TIW
3230240-28279KIT, FRONT DOOR COVER, NB, CONDUCTIVE PAINT
324 CHILLTER MONITOR
325-5 PHASE DRIVER
326-2 PHASE DRIVER SYSTEM LECK
3270870-010032 PHASE DRIVER SOURCE
3280021-35989LID PLATE, TxZ VIEW LID (1ea 2nd NEW)
3290010-20722ASSY BRKT FL METER NESLAP
3300100-20051PCB ASSY, TURBO INTERCONNECT (WITH 0020-70536)
331K0043-DBRUSHLESS DC MOTOR DRIVER
3320100-20097WATER LEAK DETECTOR
333-VI-PU03-EYW 1417
3340010-09416ETCH RF MATCH
3350010-20524 MODIFIED  8 RF MATCH
3360010-20525 MODIFIED  6" RF MATCH (ENDURA 5500)
3370010-20442ASSY, 8” RF MATCH
3380010-36408R1 DPS  RF MATCH
3390010-15877ASSY, RF MATCH, BIASED ELECTRODE BESC
3400010-13627ASSY, HIGH EFFICIENCY RF MATCH-BIAS
3410010-13602OBS-ASSY, HIGH EFFICIENCY RF MATCH - BIA
3420190-35076120 VAC/30 AMPS
3430020-20895BASE HEATER 5/6 DEGAS
344-EDWARD INTERFACE MODULE
3450010-20331DEGAS DRIVER
3460190-09419DRIVE SINGLE PHASE, PHASETRONICS
3470100-20079ASSY, PVD CHAMBER DRIVER
3480190-00839DRIVER, LTESC/LTBESC, PVD DUAL ZONE
349 ONBOARD 3PHSAE CONTROLLER 
3500190-01485DRIVER,PVD LAMP/DUAL MODE HEATER 120/120
3510030-20025ENCLOSURE 90 DEG COVER LIFT
3520030-20007COVER SOURCE 11.30"
35303911-735180498 OPEN SOURCE
3540020-22983BRKT, PILLOW BLOCK SOURCE
3550020-20156BRKT, PILLOW BLOCK SOURCE
3560040-76073ARM, WELDMENT
3570040-70150ARM, WELDMENT
3580040-20911ARM, WELDMENT
3590010-17136LIFT ASSEMBLY, 200MM CWXZ/WALD
360IRDIA Microwave P/SASTEX D13765
3611140-01104P/S Ion Gauge 8 channel
3620020-28711VIEWPORT SHIELD, 10", CH A OR B LID 
3630040-13527OBS, CHAMBER ORIENTER DEGAS NO BLANKOFF
3640040-03734CHAMBER ORIENTER DEGAS NO BLANKOFF
3650020-70376CHAMBER ORIENTER/DEGAS
3660020-23249CHAMBER, EXT P/C
3670010-20317ASSY 8" DEGAS LAMP 350C
3680010-203515/6" PVD Degas
369-NT151/361
370-NT150/360
371-NT20
372-IONGUAGE POWER SUPPLY
37302-147659-00 
3740010-13897HEATER ASSY, 8 JMF BIASED ELECTRODE MCA
375 KSI GENERATOR
3760010-70252ASSY 6" HEATER VCR W/2 TC'S
377-6" 6FINGER
3780010-21530ASSEMBLY, NON-NTM ADVANCED 101-6"
3790040-20136MANIFOLD, H20 SOURCE 13"
3800020-23640BLOCK FTG LIFT MOUNT
3810020-76432 Bracket, lid
3820040-22202SPACER, PILLOW BLOCK, VECTRA IMP
3830020-21713PILLOW BLOCK SPACER 1
384-PILLOW BLOCK SPACER 2
3850020-22739CASSETTE SUPPORT
3860020-20509CVR HTR PKG
3870040-22295BLOCK
3880020-22296COVER ORIENTATION PCB
389 BELLOWS 
390 BELLOWS WAFER ORIENTER
391-KAV-100M-P1034
392-KIV-075-P
393-VHV-25-AKK-ENVN
3943870-01244VALVE PNEU NW40 FLANGE
3950020-75852PLATE TOP PLATFORM WBLL CMF CENTURA
3960040-76557PLATE BASE PLATFORM WBLL CMF CENTURA (WITH 0040-13012 3EA)
3970020-47952REFLECTOR ADJ PLATFORM WBLL CMF CENTURA
3980010-13335Heater Hose Assembly 57", SST
3990020-22089SPACER, PVD LIFT
4000020-26692HTHU Upper Spacer
4010020-24839HTHU Lower Lift Spacer
402-LUGPING BELLOWS
403 0010-03244 Assy Heater SNNF, 200MM HP TxZ TC
4040190-09372ASSY, TC, HTR, WxZ
4050190-01403T/C ASSY HEATER WXZ
4063310-01055GAUGE CONVECTRON TUBE 1/4 FVCR
4070020-21024CLAMP 6 INCH BLADE  TRANSFER FROG LEG (UPPWER LOWER SET)
4080020-21112CLAMP 6 BLADE BUFFER ROBOT (UPPWER LOWER SET)
4090010-22230WRIST ASSY
4100021-22419BLADE, 8 TRANSFER, HP+, CVD COMPATIBLE
4110021-20390BLADE, 8" XFR, HTHU/CVD COMPATIBLE
4120021-22108BLADE, 6" TRANSFER, HP+, JMF
4130020-70237BLADE 6" JMF TRANSFER
4140020-21114BLADE 6" BUFFER ROBOT
4150010-70091ASSY 6" BLADE JMF TRANSFER (BLADE 0020-70237)
4160020-21028BLADE 8" TRANSFER FROG LEG
417-CERAMIC BLADE
4180020-21025CLAMP 8" BLADE TRANSFER FROG LEG
4190020-21104CAP 8" BUFFER FROG LEG
4200020-22570LIFT HOOP 6", SHUTTER CHAMBER
4210021-20983ORIENTER HOOP
4220020-21707LIFTER 8"
4230040-76555TRAY STORAGE WAFER DUMMY WBLL CMF CENTUR
4240040-76217PIVOT ARM ASSY LEFT SIDE ORIENTER HINGE
4250021-36658VACCUM PORT ADAPTE AXZ 
4260020-23035CAM, RIGHT INBOARD
4270020-23031CAM LEFT INBOARD
4280021-20437DISK 8" B101 TI SHUTTER
4290020-05384DISK, 8" SHUTTER, JMF BESC/ICE W CUTOUT
4300020-283906" JMF DISK, SHUTTER, 101 PROCESS
4310020-269716" TI SHUTTER DISK
4320040-22651CLAMP V-BLOCK MAGNET HOLDER
4330021-15587BLADE, SHUTTER, 8 B-101
4340020-27668BLADE 8 101 SHUTTER
OEM
4350020-252568" 101 SHUTTER DISC
27677 2EA
4360020-25227ADAPTER, HTHU LIFT
437-SPRING SHOCK LONG 
438-SPRING SHOCK SHORT
4390020-25226OBS: HOOP, HTHU 8" HEATER
4400010-03705ASSEMBLY, ACTUATOR SUPPORT PLATE (with 0020-27135 3EA)
4410045-20002CLAMP ACTUATOR SHUTTER LINKAGE
4420010-21336BAR ASSY, LINKAGE SHUTTER
4430010-21587SHUTTER ENCLOSUR
4440021-21469RING RESTRAINT, 1.574 DIA SHFT, 8 BESC
4450020-28963BRACKET, ANTI-ROTATION, 200MM HTBESC TTN
4460040-01829BLADE SHUTTER, 8' BESC/ICE W/PIN
4470020-28258LIFT HOOP 6" ADV 101 WB
4480020-29029BLADE 6" 101 SHUTTER
4490020-23635LIFT HOOP 6 101% W/B CH
4503020-01060CYL PNEU 2.5L STROLE 63MM BPRE DBL ENDED
451 NCDQ2B50-25DZ-X
4520010-70876ASSY, SMC VLV 2.5 BORE 1.0 STRK LFT
4530021-20494HEAT SHIELD, LEFT HALF, HTHU
4540040-23664PLATFORM, LEVEL
4553870-01352VALVE H VAC RTANG 1-1/2" CONFLAT 2-3/4 F
4560040-23094PANEL, DISK DRIVE SUPPORT, CONTROLLER 
4570090-76102VALVE ASSY, N/C, AUTO SHUT-OFF, HTESC
4580150-22055CABLE ASSY, PVD CH WATER SHUT-OFF
4590030-70084HOLDOWN RING,VIEWPORT
4603870-01805VALVE PNEU RTANG 2-3/4CF NW40XNW40
24VDC (WITH 0140-20910)
4610020-20790AC COVER CHAMBERS C, D, E, & F
4620020-20791A/C  COVER,  PRECLEAN
463-627A-14974
464127A-11014127A-11014 .1TORR
4650015-20002PULLEY, MODIFIED SOURCE
4660021-06427HOOP, LIFT, OPEN, 8" MCA E-CHUCK
 (WITH LIFT FINGER 1EA 0020-22241)
4670020-23209lift hoop,8"wide body,101% coverage
468-GENERATOR CABLE
4690020-27124PEDESTAL, PCII 6" JMF/SMF @ C&D
4700040-22710PLATE, G-TYPE MAGNET HOLDER
4710020-20500SHIELD CRYO,ROUND
4720020-20815PLATE, CASSETTE 150MM
4730040-09920GAS FEED THRU TUBE
474 LEADSCREW (KNOWN)
4750020-20831BAR TIE DOWN PCD CHAMBER
4760020-70481BAR TIE-OFF BODY CHAMBER
4770020-76437BAR
4783320-01032GSKT SHLD RF 172DIA 30LB/LIN-IN STD-FOS
4793320-01060GSKT SPIRA SHIELD.097DIA SST (300FT)
4800021-21873SHIELD, RF HEATER BOTTOM, 1.574" SHAFT
4810020-20508SHLD HTR RF BOT
482-GENERATOR INTEROCK COVER
483-WATER FLOW METOR
4840020-21705LIFTER 6"
4850020-27123PEDESTAL, PCII 8" SNNF
48603-042622-00-
48703-042622-01CABLE ASSY,PWR,TRBO,BLZ,LT,SPD.
48803-042620-00CABLE ASSY,TURBO CNTRL,SPD-S
4890020-21706CHUCK 6" SEE
4900020-27127PEDESTAL, PC II 8" JMF @ C&D
4910020-21691PLATE 8" CCD VACUUM SEAL
4920020-21261GUIDE SHAFT WAFER ORIENTER
4930020-29127BRACKET FLOW SWITCH PVD IMP
4940020-22018FLANGE, HUB, HEATER, 1.574 DIA SHAFT, BESC
4950020-13974BLOCK, MOUNTING, BOTTOM SENSOR LLKA, WBL
4961080-01190MOTOR SPEED BRUSHLESS 24VDC 4A 1/18.5HP
497-ONLY MOTOR K0043-M
4980020-24414UPPER INTLCK COVER PC 2 CATH INTLK
4990020-22838LIFT HOOP, PRELEAN 
5000020-21690PLATE 6" CCD VACUUM SEAL
5010020-23593BLOCK LASER (WITH CLAMP, WINDOW, CCD,
ORIENTER,  WAFER 1EA 0030-70052)
5020020-70500COVER WINDOW PVD CHAMBER
5030020-13975BLOCK, MOUNTING, TOP SENSOR LLKB, WBLL
5040020-13977COVER, SENSOR, WBLL
5050020-70732COVER, PVD CHAMBER VIEWPORT
5060020-22898COVER DISC
5070021-04652LIFT COVER B101, BLT, 101, HTESC
5080040-22829STOP, SHUTTER BLADE, 8" E-CHUCK
5090020-22665SPACER, SOURCE CONTACT SPRING
5100040-23544BLOCK, MOUNTING 1.575" SHAFT, MOTORIZED LIFT INCOMPLETE
ASSY,  SZ BESC MOTORIZED LIFT
5110020-23479PLATE MNTG PNEUM CYL/MTR LFT WITH
0140-20504, 0020-24064 1EA)
5120020-24064BRKT FLAG SENSOR MOTO LIFT
5130020-76383INTLK TRIP BRACKET, EXT PCII
5140020-76384INTLK TRIP BRACKET, PCII RESN
515-MOTORIZED SENSOR BRACKET
5160021-21859SENSOR BRACKET MOTORIZED ENDURA LIFT
5170020-21708CHUCK 8" SEE
5180020-21675ARM LIFTER DEGAS/ ORIENTER
5190020-20699CLAMP AR FLEX 8  GATE VALVE
5200020-20700CLAMP END AR FLEX 8" GATE VALVE
5210020-24836STD DC BIAS
5220020-20579EXTENSION ARM, DC BIAS
5230020-40063/40030BRACKET, BOTTOM, MOTOR
5240020-26829OBS: CONNECTOR HEAT SHLD HTHU-HTR
525-CLAMP
5260020-20587INSERT, SLIT VALVE MACHINED
5270020-76258INSERT, SLIT VALVE, ALUMINUM
5280020-24057BRKT VALVE WATER (with 0020-20700)
529-HEATER AC BOX
5300040-76528WELDMENT, 8 HOOP, PVD STD CHAMBER
5310040-20321HOOP LIFT 8" WELDMENT
5320020-23138BRACKET SENSOR, A.L.L. CASSETTE SENSOR 2 
5330021-04631BLOCK, PLUNGER, 2 INTERLOCK, WXZ 
5340045-20040COLLAR 1.574" SHFT HTR ISOLATOR 
5350040-23545BRACKET,CONNECTOR,1.574 
5360020-22412UPPER COVER, SLIT VALVE BELLOWS
5370020-20938BRKT CBL TIE SLIT VALVE 
5380021-76290RING, RESTRAINT, HTESC, 6", 9MM 
5390020-02920BRACKET, SENSOR FLAG, MOTORIZED LIFT, SZ
5400020-21243BRACKET SAFETY HTR 
5410020-20945BRKT, SW MAG/H-SENSOR
5420020-23437BLOCK MOUNTING HEATER MOTORIZED LIFT (WITH ASETAL)
5430040-13659BLOCK MTG HEATER 1.18 DIA SFT MTR LIFT H
5440020-24727PLATE, SPACER 101%
5450020-22126COVER LIFT PVD
5460050-20099MANIWATER SOURCE
5473300-02022FTG FLG WELD 90 DEG EL 1.0 OD SST
5483300-02155FTGTBG TEE UNION FLANGE NW25KF SST304
5490140-21614Harness Assy Single Phase UPS Bypass
5500140-20118Harness Assy CCD B/D Laser Driver Int  
5513910-01108LABEL CE WARNING REMOTE FRM TIPOVER TRIA
5520020-28867DISK 8" ADVANCED 101 SHUTTER
5530020-21266FLAT COVER, CHAMBER INTERCONNECT BD.
5540020-20485COVER LAMP SIDE
5550021-76309COVER, DET. ADJUST ASSY, FAST WAFER MAPP
5560020-13650COVER, DET ADJUST ASSY, FAST WAFER
5570020-21444BRACE, FRONT SKIN
5580020-21045HOUSING LAMP HTR POWER
5590010-21699ASSY, TC ISOLATION AMPLIFIER
5600010-20138ASSY TC AMP HSNG
561-ASSY, TC ISOLATION AMPLIFIER
5620090-01432ASSY TC AMP LOW TEMP BESC
563-122B-11441
5641350-01067627A.1TBD
565-127AA-00001B
566-624A-13764
567-629B-15894
568-E28B-24565
569-628A01TBE
570-627A-13092
571-627B01TBC1B
5720020-22242LIFT HOOP 8" (WITH IFT FINGER 1EA 0020-22241)
5730020-27103Lift Hoop 8" ADV 101 WB
5740020-21685PLATE BLANKOFF DEGAS/ ORIENTER
5750021-70380BLANK, SHUTTER
5760020-22548PLATE BLANKOFF SHUTTER ARM
5770020-20558BLANK SLIT VALVE
5780020-20483HUB  LAMP CORNER COVER
5790020-20524HUB  LEFT CORNER COVER LAMP BAKE OUT
5800020-21043COVER, SWITCH W/ CONNECTOR
5810020-13265HOUSING,WB ELECTRICAL
5820040-22164HOUSING,LAMP/HEATER PWR, HTESC, W/ INNER
5830040-22165COVER, LAMP END, HTESC, W/ INNER ZONE CO
5840020-19708COVER RING, 200MM SIP TA/TAN, ESC, INTEL
5850020-23642GUIDE RF MATCH MODIFIED
5860040-20048FEED THRU
587-FEED THRU (SHORT)
5880020-20523CAP, LAMP FEEDTHRU
5890010-70254ASSY 8" HEATER VCR W/2 TC'S
5900010-21246A101 HEATER (ASSEMBLY, NON-NTM ADVANCED 101 - 8")
5910620-01164CABLE ASSY 332CG 6"LG + 2.75" 15P-DSUB /
59202-046223-00Vacuum Gauge Assy
593253B-11203GATE VALVE
5943030-05392CNTRL FLOW MON SIGNAL PROCESSOR 1 CHAN
5950140-09718HARNESS, 1/2 ATM/BARO WxZ
5960150-38434CABLE ASSY, MICROWAVE INTERLOCK
5970140-20502HARN ASSY AC 2-PHASE DRIVER
5980150-35547CABLE ASSY-6PIN SPLIT DC PWR
5990150-36947UWAVE AUTO TUNER PWR CABLE
6000140-20038HARNESS ASSY DI/O INVERTER ENABLE CONTRO
60110-10164-00 
60260-00193-00 VACUUM, SWITCH, ATMP
6030040-13658CLAMP HEATER 1.18 DIA SFT MTR LIFT HTESC
6040140-20139HARNESS ASSY,TURBO ON/OFF CONTROL
6050150-70047CABLE NUET 2 GEN RACK 5500
6060150-20238CABLE ASSY.,LLA LED PWR
6070150-20184CABLE ASSY,SOURCE GND
608-CYLINDER SENOR (NEW VERSION, NEED REPAIR CONNECT)
6090100-35279PCB ASSY, LOAD LOCK BEEPER
6100090-76034ASSY, SENSOR, WAFER PRESENT/WAFER SLIDE
6110090-03823ASSY, SENSOR, WAFER PRESENT/WAFER SLIDE
6123060-01186BRG BALL BSHG 1.0 BORE 1.56OD
613-51A31TCA2BA010 30TORR
6140050-20813GASLINE MFC BYPASS
6150050-25198GAS LINE, VENT CH D W/B UPPER W/ OD CH
6160050-20961GAS LINE, VENT CH D W/B UPPER W/ OD CH
6170090-20003SENSOR ASSY,VALVE SENSOR AND HARNESS
6180090-20139ASSY SENSOR WFR LIFT TOP MID/BOTTOM 1ea sensor Broken
619-MAGNET SENSOR
620-FILLAMENT 
62179-109823-04DOME LIFT MOTOR
62245300141Parker Veriflo Valve, 45300141, 955Y2NC/NCFSFFFREV
6230090-76035ASSY, SENSOR, WAFER SLIDE RECEIVER
6240090-03822OBSOLETE REPLACED BY 0090-03822
62539-10138-00Connector, Bulkhead, HN, F-F
6260020-23160BRKT WAFER SENSOR SM312CV2 MONOLITH COVE
6270020-76522PIN, DOWEL FRAME ALIGNMENT
628-PEN
6290020-28647PIN SENSOR/GUIDE K3/P4 SOURCE
6303550-01098PIN DOWEL 3/8DIA X 1-3/4 LG SST 303
6310021-09758MANIFOLD, OUTPUT, DXZ
632 HOKE VALVE 
6330020-21222HOOP CD/PT 150 MM
6340040-87211BLANKOFF, 200MM MONOLITH
6350020-70299Flange Blankoff Orienter Port W/RGA Pos E
6360020-70203PLATE CHAMBER BLANKOFF
6370021-21857PLATE, MOUNTING, PNEU CYL/MOTOR LIFT
6380150-20660CABLE PC II RF MATCH TO CHAMBER
6390020-22549PLATE BLANKOFF MGN COUPLING
640-3 POS. GATE VALVE INTEG. KIT
641 SLIT VALVE DOOR CENTURA PDD E 38 (DB)
6420020-20340DOOR TRANSFER SLIT VALVE
643683B-29016MKS Throttle valve 683B-29016
644-HARD DISK FAIL
645-FD-253HS
6460150-22043CABLE ASSY, MFC TO CONTR BOX & SYST. CON
6470140-20655HARNESS ASSY  SERIAL/PARALLEL INTCON
6480090-20108ASSY, SENSOR CASSETTE
6490150-20183CABLE ASSY CHASSIS GND MDX SLAVE
6500140-20183HARNESS ASSY CHAMBER EMO
6510050-76115GAS LINE, TOP VENT, WIDE BODY
6520050-08618ADAPTER, BARATRON W/B SHUTTER @ 2 & 4 MI
653-2PHASE DRIVER BRCAKT
6540020-21035BRACKET SOURCE WATER LINE
6550020-22263ADAPTER PVD WATER LINES ON BOARD CRYO
6560020-23487BRACKET MOUNTING 2-PHASE DRIVER
6570020-20149PLATE H-SENSOR SOURCE
658-BROW VALVE SCREW
6590140-20039HARNESS ASSY AI MUX CONTROLLER
6600140-75335H/A CD ADAPTER,PHASE I TO PHASE II,WATER
6610140-20679HARNESS ASSY RGA VALVE INTFC
6620140-21314HARN ASSY, LINE OVERTEMP, CVD ON ENDURA
6630140-20741HARNESS ASSY SOURCE COVER PVD
664153D-15973  Valve, Throttle 153D, Heatable, MKS 153D-15973
66515-053394-02fork finger minimum contact
66615-150214-00N/A
6670050-24855ADAPTER CONVECTRON & BARATRON W/B PVD CH
6680050-76319WB, PRESSURE GUAGE ADPTR, CAJON
6690040-20733W/B BARATRON ADAPTER
6700050-26707ADAPTER ELBOW VCR TO MINI CF LONG ELBOW,
6710050-24757ADAPTER, PRESS GAUGES, SHTR, W/B CH AT 3
6720020-21073BLANK FLANGE TRANSFER W/RGA PORT 
6730020-70223PLATE CHAMBER MONOLITH
6740020-40564BLANK-OFF POSITION E&F NON-ENP
675-GATE VALVA PLATE
6760520-01011ACTR VALVE 3 POS 8" GATE
6770020-20512Shld Htr RF Top
6780040-20726SHIELD,HTHU HEATER RF TOP
6790021-21874SHIELD, RF HEATER TOP, 1.574" SHAFT
680-DC MOUNT KIT
6810150-16166C/A, SMIF-ASYST LPT2200 INTERFACE, LLA
6820140-76362HARNESS ASSY, W/ ORIENTER CH E LIFT INTE
6830150-75008N/A
6840140-20649HARNESS ASSY MFRM SMK SNSR INTCON
6850150-21890CABLE ASSY, WATER LEAK DET 2 GEN
6860150-70162CBL, SEC GEN RACK WATER FLOW INTLK
6871341054A4.5 FT MASTER AND SLAVE CABLE
6881342795BSCT06509
6890140-00334HARNESS ASSY,LLA & LLB MODULE STD CNTRLS
6900140-20366HARNESS ASSY, L/L DOOR INTERLOCK, EXTERN
6910140-70410H/A SMIF ADAPTED WB LLA INTRCNCT PHASE I
6920090-00768LOADLOCK BRAKE INDEXER ASSEMBLY
6930140-76294HARNESS ASSY, 5-PHASE AC VHP
6940140-76223HARNESS ASSY, INTERCONNECT CH. 1/2
6950140-70413HarnessSMIF24VDCLickPaneltoPCB
6960140-20688HARNESS ASSY  STORAGE CH LIFT/COVER
6970150-20716CABLE ASSY FINAL VLV/INTLK DI REMOTE
6980140-20603HARNESS ASSY JUMPER
6990620-01078CABLE ASSY CONVECTRON CONTROL 11 FT
7000140-35240CA ASSY, WxZ CHAMBER
7010140-20242HARNESS ASSY EBARA PUMP EMO
7020140-07702HARNESS ASSY, WAFER SLIPPAGE W/B LLK ON
7030150-20762CABLE ASSEMBLY, CENTURA MAINFRAME, WATER
7040140-20710HARNESS ASSY PCII CHBR MATCH INTERLOCK
7050140-20709HARNESS ASSY  EXTERNAL C & D PCII INTERC
7060140-20694HARNESS ASSY PVD SHUTTER SENSORS
7070150-20640CABLE ASSY 2-PHASE DRIVER OUTPUT
7080140-21528HARNESS ASSY, H20 FLOW CH1-4
7090140-76222HARNESS ASSY, INTERCONNECT CH. W/B
7100150-36084CABLE ASSY,OVERTEMP SWITCH TxZ,MCVD
7110140-20501HARN ASSY DRVR +24/+5 POWER
7120020-20835BRKT MTG PLATE DISK DR
7131360-01048XFMR PWR MULTI TAP PRI 24 VAC SEC34A 50
714-VA22-XX2-B15
715-1GB SCSI Flash Drive
716-HARD DISK
717-5PHASE STEPPER MOTOR 
718-PANASONIC AC SERVOMOTOR  MSM0ZZAIEU
7190090-750102PHASE STEPPER MOTOR (WITH 0090-75010)
720 TRANSFORMER 
7210190-13041VALVE, TWO STAGE INLINE NW40 316L
7220040-32695CAVITY APPLICATOR UWAVE MCVD
7230040-07564CAVITY, APPLICATOR, UWAVE MCVD
724 DC POWER CABLE CONNECT
725 PANASONIC  DV-707
726 MO VALVE 
727-5PHASE STEPPER MOTOR  DFUS14W
7280020-21825PLATE DOOR
7290140-70414HARNESS ASSEMBLY, SMIF EMO INTERCONNECT
7300150-21778CABLE ASSY MF, PNEU DIST TO GAS INTLK,
7310140-02655H/A, SMIF WB LLB INTRCNCT PHASE 2 FACIL 
7320150-76156CABLE ASSY, INSERTION FLOW SENSOR
7330150-22451HARNESS, 13.56MHZ MATCH INTEGRATION
7340140-75000craHARN ASSY LOAD LOCK DOOR SENSORS
7350140-70112HARN ASSY, PRI GEN RACK PWR SPL DIST
736-Control Valve
7370140-20693HARNESS ASSY NEW MAIN CONNECT SHUTTER
7380140-20257HARNESS ASSY., F/A LOAD LOCK
7390140-20651HARNESS  GEN RACK SMK SNSR INTCON
7400150-10047CABLE ASSY, UPC INTERCONN
7410150-10049CABLE ASSY, UPC FEEDBACK D-CONN
7420150-76770CABLE ASSY INSERTION FLOW SENSOR MCVD PH
7430140-20361HARNESS ASSY, WATER LEAK DETECTOR EMO
7440150-20639CABLE ASSY 2-PHASE DRIVER INPUT
7450140-20563HARNESS ASSY OVERTEMP DEGAS
7460140-20092HARNESS ASSY, 5-PHASE DRIVER TRANSFER
7470140-20054HARNESS
7480140-20056HARNESS AC 5-PHASE
7490140-70441HARNESS ASSEMBLY, SMIF EMO INTERCONNECT
7500140-21983HARNESS ASSY, 24V KICKPLATE TO PCB
7510150-02955C/A, INTRLCK TO KICKPLATE JENOPTIC LLB
7520150-20378CABLE ASSY, SMOKE DETECT MAINFRAME
7530150-02953C/A, INTRLCK TO KICKPLATE JENOPTIC LLA
7540150-22296CABLE ASSY ENDURA INTEGRATED SMIF 50' RS
7550150-22813CABLE ASSY, SMIF PCB TO KICKPLATE, LLA
7560150-22814CABLE ASSY, SMIF PCB TO KICKPLATE, LLB
7570150-00882FLOW SENSOR CABLE A/C/E POS CHAMBER HX
7580150-00881FLOW SENSOR CABLE
7590150-20470CABLE ASY,COAXIAL 400KHZ
7600150-76315CABLE ASSY, COAXIAL 13.56 MHZ
7610150-21686CABLE ASSY, HN(M), STR TO N(M), STR RG-217 52FT 
7620150-20181CABLE ASSY,EMO INTERCONN SYS. AC/MAIN FR
7630150-20075Cable Assy EMO Interconnect
7640150-20260CABLE ASSY,CRYO UPS UMBILICAL
7650150-21665CABLE ASSY, N(M), R/A TO N(M), STR RG-21 
7660050-83207HOSE ASSEMBLY HEAT EXCHANGER 1/2 DIA 10FT , NEW 
7670190-13325/13321CABLE, 75' UMBILICAL, HTESC
7680150-21666CABLE ASSY, HN(M), R/A TO SQ(M), STR RG-393 52FT
7690150-21667CABLE ASSY, HN(M), R/A TO SQ(M), STR RG-
7700190-70059PURCH SPEC 45FT NUDE ION GAUGE CABLE
7710190-03283PURCHASE SPEC. 75' NUDE ION GAUGE CABLE
7720150-21221CABLE ASSY24V POWER INTCNT 52FT 
7730190-21305PURCH SPEC 60FT NUDE ION GAUGE CABLE
7740150-70148CABLE ASSY CHAMBER DC SOURCE INT
7750150-20209CABLE ASSY., FINAL VAL EXTERNAL INTL
7763400-01084 HOSESTEEL FLEX W/ELBOW 39"LE 
7770150-76288CABLE ASSY 50FT DC SOURCE - MDL
7788112463G050
8112463G500
CTI CRYOGENICS
7790140-21408 
0150-20197
HARNESS ASSY PVD W/B CH INTERCONN Harness Assy TC Interface
7800150-20262CABLE ASSY DEGAS AC
7810620-01079CABLE ASSY CONTROLLER ONBOARD 50'L SP-CIRCCONN M/F
7820150-21695CABLE ASSY, ICE DC SOURCE, QDS, UHF, 75'
7830150-20389CABLE ASSY, RFR POWER I20.0LONG
7840150-21939CABLE ASSY,ENDURA INTEGRATED ASYST SMIF
7850140-16128H/A, SMIF-JENOPTIK PLC OUTPUT
7860140-25820N/A
7870150-21936CABLE ASSY, ENDURA INTEGRATED SMIF - LLA
7880150-76116ROBOT CALIBRATION CABLE
7890150-21241CABLE ASSYEMO FRONT BEZEL INTCNT65FT
7900140-11619HARNESS ASSY WAFER SLIPPAGE W/B LLK ON
7910140-76877H/A, SMIF INTEGRATED WB LLA INTRCNT PHAS
7920140-20944HARNESS ASSY WAFER SLIP W/B LLK ON ENDUR
7930150-76821CABLE, HEATER AC, HTESC, POS 1,2,3,4,C &
7940150-03091CABLE ASSY, MOTOR CONTROL, CWXZ
7950140-36020N/A
796600-1002-P50RS485 CABLE
797600-10003-P1RS485 CABLE
798600-1002-P30RS485 CABLE
799600-1002-P10RS485 CABLE
8000140-21104HARNESS, SMIF INTERFACE, PCB PWR
8010140-21107HARNESS, SMIF I/F, CASSETTE IN PLACE
8020620-02271 CABLE ASSY CONTROLLER ONBOARD 15'L 9P-CIRCCONN M/F 
803-3POIONT CONTECTOR SENSOR
8040150-76461CABLE,COAX,COUNTERMATCH,DXZ
8050150-76458CABLE, 79 FT RF COAXIAL 13.56 MHz, W/CON
80603-00288-03Novellus RF Cable CA57
8078115161G020SIGNAL CABLE
8080140-04267HRNS ASSY MF INTERCONNECT
8090190-21841CABLE ASSY,SQS(M)R/A TO SQS(M)STR.W/INTL
8100150-21692CABLE ASSY. SQ RIGHT ANGLE W/ INTERLOCK
8110090-20129HOIST UPDOWN CABLE
8120150-36085CABLE ASSY, GATE VALVE, CLOSED SW, TxZ, MCVD
8130050-25326ADAPTER, ELBOW TURBO PUMP PCII @ C OR D
8140050-76884EXHAUST LINE, NBLL, CENTURA COMMON M/F
8150020-60772RING
8160040-23670BRACKET, WATER FLOW
8170190-35864AC INOUT CABLE, 2015P-MS CONNECTOR
818-Housing Gate Valve
819-Gate valve Sealkit Plate
820CIRKIT3P15A (WITH 0020-23958)
821-2POSITUIB 45A
822-1POSITION 60A
823-1POSITION 40A
824-1POSITION 15A
825-2POSITION 15A
826-3POSITION 20A
827-3POSITION 50A
828-3POSITION 30A
829-1POSITION 20A
830-1POSITION 15A
831-2POSITION 15A
832-3POSITION 40A
833-CIRKIT JD 35K
834-CIRKIT KD 35K
8350020-21089COVER, CHAMBER INTERCONNECT BD.
836-EH 550
837-BuSS Bar
8380040-02653 LANE CLOSURE
839-CC040329
8401400-01047SNSR SMOKE DETECTOR SENSING HEAD
841CIRKITUPL111-1-64-403
842CIRKITCA3-BO-42-650-121-D
843CIRKIT3POSITION 15A
844CIRKIT3POSITION 30A
84505-134263-00200mm Novellus Speed HDP ESC
8460010-76097Monitor Base Assy
8470021-35744PLATE,BLOCKER,TXZ 200MM
8480020-20691PEDESTAL CD/PT WAFER200 MM
849 6" PEDESTAL
8500021-76708PEDESTAL CD/PT WAFER 150 MM
8510020-70459PLATE, CONVERSION ROBOT TRANSFER CHAMBER
8520020-21218BASE CD WAFER 200 MM
8530020-24230BASE PRECLEAN 2
8540020-42082PLATE, PUMPING, 8 FC, WXZ
8550050-20237NT LINE CH 4
8560050-20257GAS LINE # 1 CH4, PROCESS, MFC15
8570050-70078GAS LINE PRCS CH 4 W/B UPPER
8580051-12673AMAT 0051-12673 WELDMENT FOR FACILITY WO6225-2 LOT OF 2 
859 CH 4  Gas Line MFC 5.6
8600010-13445Base
8610150-20061
0090-20020
0150-09884
cable
8620020-75998BRACKET, SUPPORT, WBLL FASTER WAFER MAPP
8630020-20896REFLECTOR HEATER, 5/6", DEGAS
8640020-42287PLATE,PERF 8 EC WXZ
8650040-31980GAS BOX EC WXZ
8660040-20549ELBOW CRYO ON BOARD HT HTR
867-SEIKO STP-H200CV
868-SEIKO STP-H200C
8690020-40706108383 338 9343390
8700020-40705108383 158 S98857C
8710020-4070411764601
8720190-13321POWER SUPPLY, 1.5KV DC, HTESC
873 E-chuck Power Supply
874-IONGUAGE POWER SUPPLY
8750010-70385wASSY, VGA VIDEO MONITOR THRU THE WALL
8760010-13524SIDE LOCAL MATCH ASSY, BALANCED COIL
8770020-09533HANDLE, GAS BOX
8780200-20492INSULATOR, RCPT, RIGID SUPPORT, VECTRA-
8790140-21407HARNESS ASSY 2MHZ RF MATCH/WTR FLOW INTL
8800040-86016GAS FEED BLOCK, TOP CLEAN, 200MM ULTIMA PLUS, HDPCVD
881-Entegris Filter
882-UNIT MFC NF3 2SLM
8830100-76013PCB ASSY, CENTURA CHAMBER A/C INTERCONNE
8840100-76014PCB ASSY, CENTURA CHAMBER B/D INTERCONNE
8850190-06279CARD, DIGITAL DNET DIO 391-4
8860020-702858" BUFFER BLADE FROG LEG
8870020-28622ROBOT BLADE 8" HTHU TRANSFER
8880010-76317CENTURA INDEXER MOTOR ASSY.
8890010-76859DETECTOR ASSY, LEFT FAST WAFER MAPPING
8903020-00573 
8913300-05482FTG TBG EL 3/4T X 3/4MNPT SST
892-TC Guage DV 
8930100-00975ASSY PCB STEPPER CONTROLLER2
8940020-22841RF ROD, PRECLEAN
8950190-01404SERIPLEX VME CONTROL BOARD SPXVME6U1V2
8960100-35124PCB,SERIPLEX I/O DISTRIBUTION
897 MFC 8160 (Pin Board Type) N2 20 (Working)
898-Z512 STEC MFC N2 100SCCM
8990660-01809SQUARE D VME 30299-083 SERIPLEX BUS VME 6U1V2
900 CQ2Z63-YVR07-20
9010020-18357ARM, LIFT, HDP-CVD
9020200-20163INSULATOR, LAMP COVER, LEFT
9030090-05790INDEXER BRAKE ASSY ENDURA
9040010-02171ASSY, RIGHT HAND PIVOT AND BEARING, HP+/
9050021-01333CAPTIVE SCREW LIFT PLATE 200MM TXZ
9060100-20086wPCB ASSY,WAFER MAP LED
9070090-20036MOTOR MODIFIED ORIENTER
9080100-09287CENTURA APC MATRIX BD
9090090-20120ELECT ASSY LIFT MOTOR
9101080-01131GEAR BOX REDUCTION 7.5:1 1/2" DIA. OUTPU
9113030-04879SNSR FLOW INSERTION SST
912-SS-4-VCR-1-00032
9130150-05412CABLE ASSY, HEATER 200MM HP TXZ
914 FDD
9150020-23046ADAPTER 13" SOURCE WIDE BODY CHAMBER
9160190-18427VALVE,TURBO ISO,FITTING AT 180DEG ULTIMA
9170680-01187CB MAG THERM 3P 600VAC 250A INTCHG TRIP
9180200-20331COVER RING 8" B101 CERAMIC, 10.75" OD
9190040-23753Cover
920-Ceramic Top Ring
9210020-22647SHIELD, COHERENT UPPER 
9220200-10144ISOLATOR,PUMPING PLATE,DXZ GECO
9230150-76318CABLE COAXIAL
9240020-22648CLAMP SHIELD COHERENT LOWER 11.3
9250190-18122RF CABLE ETO BIAS ULTIMA HDP-CVD
9260020-21468CLAMP SHIELD 5 & 6
927-CDQ2WB50-G0476-75
928-NCDQ2WBS63-G0639-50
92902-109457-01TOXIC GAS DETECTOR
93002-048752-00N/A
93102-282305-00Multiple Pedestal Position
932-Novellus Doom Assy
933-Gate Valve
93427-255873-00MERCURY 3013 MATCH
93527-258087-00Controller, NTM 500, Detachable Fiber
936-VAT, F03-112494145 03009-NA24-1001
93703-252573-00N/A
93819-10094-00PULLY
93919-134725-00PULLY
94016-103973-00SCRN,TURBO PUMP, 8 INCH,ALUM
94103-258416-00PCB,  7/8  CHANNEL  GAS  BOX  INTLK
94202-116197-00Detector Power Controller
94305-118790-01Cable Interface
94427-10348-00VALVE, NOVEL 
94527-10324-00 
94615-105432-05Screen ,Louvered,TMP
94715-146603-00Hub,200mm,Pedestal Conc Lift 35CW
94815-119981-00N/A
949-ET-202 (STS)
950-Differential Output Amplifier P>100MT
95102-057438-27LPB Assy, Speed-S Rev.7
95238-138582-00AC, PWR CORD, IEC 3 METERS
953-99D0362
95410-10350-00CAL WELD
9551006329Verity Model SD2048DL
95602-150749-00ATC Ass'y
95702-253272-00RF MATCH,HI-PWR STD,TUNABLE,C2SPD.
9581270-01475 SW FLW H20 1"FNPT 0-20LPM 3500 PSI Dual 
9591005972Verity Model PC,NVLS,30mm
96002-053788-00Assy,PNEU,SED-S 7/8 6B
96102-029723-00Assy,HPM/GAS SHTDWN Box,SPD-S
96203-166293-00Assy,PCA,TOGGLE Clean, HDP
96303-251777-00GE FANUC IC200PWR001A,IC200MDD845D,
IC200ALG431 2PCS,NOVELLUS BD
964 ATP-15B
9650020-26967PC II GAS TRENCH COVER
9660020-21667CLAMP SHIELD 8 WAFER
9670020-23074SHIELD TIN LOWER SST 8 WAFER
9680020-29161SHIELD, 8" CLAMP TYPE, SST
9690020-26588SHIELD 8" PCII @C & D
9700020-21665SHIELD AL/TI 8" WAFER (WITH 0020-27710)
9710020-23043SHILD TIN, UPPER 8 INCH WAFER
9720020-23277SHIELD LOWER, SST, 8 101% TIN
9730020-22499SHIELD, COLLIMATOR LOWER 8"
9740020-29344SHIELD 8 101 .190 THK AL 3 SPRTS VECTR
9750020-29343SHIELD CLAMP, DARKSPACE .727 TALL VECTR
9760020-25077SHIELD  LOWER 8 101 G-12 SST
9770020-22498SHIELD, COLLIMATOR UPPER 8
9780020-22509CLAMP RING AL/TI 8"JMP REDUCED EDGE 
9790020-23585SHIELD/LOWER 8 WAFER G-12
9800020-25920SHIELD LOWER 8 G12 SST
9810020-24746SHIELD LOWER HIGH COND 101 AL 8
9820020-24531SHIELD ADAPTER G-12 SST
9830020-47723SHIELD LOWER, PVD CLEAN TUNGSTEN (W) / D
9840020-22494HONEYCOMB COLLIMATOR 1/2 HEX 1:1  8
9850020-47722SHIELD UPPER, PVD CLEAN TUNGSTEN (W) / D
9860020-25730shield upper g12 dbl knee sst
9870040-21178PRECLEAN II BELL JAR
9880020-23041Clamp Shield 8" Wafer
9890200-07448HOUSING, DOUBLE RF CONN, 300MM SIP ENCOR
9900020-23168COVER RING  SST  8 101 COVERAGE
991_CLAMP PEDESTAL
9920020-24804COVER RING SST 8 101
9930020-23023REDUCED EDGE CLAMP RING 6"" TI
9940020-28754PEDESTAL COVER 8
9950021-20610PEDESTAL, 8"A101(FLAT)-CUST PRVD FLM SPR
9960020-20061SENSOR BRACKET
9970020-244358 PC II JMF EXT INSULATOR TI PEDESTAL
9980200-20285PEDESTAL COVER UPPER 8" B101 V
99915-032503-00RING,INSULATOR
10000020-00632Shadow Ring
10010200-00622Outer Ring
10020200-00624Purge Ring
10030020-20462VIEWPORT COVER TRANSFER CHAMBER
10040020-27191CLAMP RING 8 TIN SNNF 11402ARS ACAM SST
1005 0020-48987COVER PEDESTAL
10060020-24912N/A
10070020-27455DISK  8 ADVANCED 101 SHUTTER
10080020-27842PEDESTAL 8 PINLESS 101% AL COVERAGE
10090020-22237cover ring 8" 101% TIN coverage
10100020-24914CONVER RING
10110020-24913PEDESTAL SST 8 101 COVERAGE
10120021-20718PEDESTAL COVER LOWER 8 B101 REV 2.1 SST
10130150-70038RG 217U RF CABLE
10148112099G017CABLE, ON_BOARD POWER
1015 TARGET
10160020-21664INSULATOR SOURCE 13
10170200-09072SHIELD 200MM
10180020-22975COVER RING 8" B101 CERAMIC, 10
10190020-22547ADAPTER 11.3 SOURCE WIDE BODY CHAMBER
10200020-22671ADAPTER,13 SOURCE SHUTTER CHAMBER
10210020-23042ADAPTER SOURCE 13
10220020-21668ADAPTER 13 SOURCE HIGH NECK,
10230020-21467ADAPTER SOURCE 11.30
10240020-25938ADAPTER EXT PCII, W/CRYO BELLJAY
10250020-02513SHIELD, RF EMISSIONS, SIDE, SIP TTN SOUR
10260020-02514SHIELD, RF EMISSIONS, CRYOSIDE, SIP TTN
10270020-02515SHIELD, RF EMISSIONS, SIDE, SIP TTN SOUR
10280040-07287/00721PLATE, RF EMISSIONS GROUNDING, SIP SOURC
10290020-22982ADAPTER TIN 8 WAFER CHAMBER 16
10300040-21377ADAPTER G-12 WB M3 SCREW FLAT TARGET COM
10310040-21705ADAPTER,HI-PWR TTN,WB,H2O COOLED,TOP/BTM
10320040-03932ADAPTOR UPPER, SIP-CU 290MM, WATER COOLE
10330020-22950ADAPTER, COLLIMOTER SOURCE 13"
10340040-22274ADAPTER, REV 4.3/4.2 VECTRA IMP
10350040-20705ADAPTER,HI-PWR TTN,WB,H2O COOLED,TOP/BTM 
1036-Blade Assy 8"
10370021-23836PLATE, LEVELING, 200MM HEATER, HP+ TXZ
10380020-24385SHIELD UPPER 5/6" 101 SST/MATL
10390150-20801CABLE ASSY 75FT WATER LEAK GEN RACK INTC
10400150-20802CABLE ASSY 75FT SMK DET GEN RACK INTCNT
10410150-04642CABLE ASSY, 2-PHASE DRIVER SIGNAL I/F 75
10420200-18081COVER LOW PROFILE HDP-CVD,ULTIMA
10430021-18436Cover Ring 8"
10443020-01070CYCL PENUMATIC 2-1/2 BORE .787 STROKE
10450020-29582GUARD, LEAD SCREW
10460020-20818COVER PANEL PNEUMATIC DISTR BD
1047-FILTER DIFFUSER ISO NVV25 FLANGE 1/4" MALE GASKET SEAL WG3D25LR2
10480021-36689PLATE LEVELING, HEATER, TXZ
10490020-22846GAS TRENCH COVER
10500020-26312Shield Upper 8" Durasource TTN SST
10510020-26311Shield Lower 8" Dura TTN SST
10520020-22646CLAMP, SHIELD, COHERENT UPPER 11.3.
10530020-226526" Hex Foil Collimator Plate 
10540020-22892PIN, PRECLEAN PEDESTAL.
10550240-26778KIT, SHIELD CLAMP, DARKSPACE, REV 4.5-VE
10560020-22852SHIELD,8, PRECLEAN
10570020-24243SHIELD UPPER SST FLAME SP AL
1058-B4Y9612-01 MLAKK105501
10590021-20645SHIELD, OUTER CONTAINMENT, HI PWR G3
1060 IMP PROCESS KIT SHILED
10610040-63457WATER BOX TXZ 200MM CIP
1062-CDG1FA63-S4268-100
1063-ManiFold Box(JMP Box)
1064Cable8147061G001
1065Cable8147064G001
10660140-00246HARNESS ASSY,WXZ WALL/LID WATER FLOW SEN
10670150-20580CABLE ASSY 2-PHS DRVR OUT MTR
10680150-20509CABLE ASSY,LLA WAFER MAP CASS.SENSE
10690150-20584CABLE ASSY LOFT CH 3 4 C& D
10700150-20583CABLE ASSY, MTR LIFT CH 1 & 2 DIST
10710020-13336COVER, ORIENTER CHAMBE
10720140-20866HARNESS ASSY.
10730150-76367N/A
10740150-20257CABLE ASSY, MAIN AC SPARES
10750150-21249CABLE ASS. 2-PHASE DRIVER 
10760140-20504HARN ASSY LIFT UP/DOWN SENSOR
1077ACE2000128N/A
1078-B4Y9611-01 MLAKK104114
10790010-76764ASSY, OTF RECEIVER, 200MM BANK
10803300-09255FTG TBG 4-WAY CROSS NW50-NW25 SST 
10810200-20216PIN, COVER RF SCREW, VECTRA IMP
10820020-70529BRKT WATER SWITCH
10830190-25635SPECIFICATION, SOFT-PUMP ANGLE VALVE, NW
10840190-01546.08 GPM SST WATER FLOW SWITCH (TWO PORTS
10850050-22087VENT LINE AR INLET #1 CAJON ONLY
10860150-20510CABLE ASSY,LLB WAFER MAP/CASS. SENSE
10870040-02798DUPLEX CLAMP, HP ROBOT WRIST, NON
10880100-20040REMOTE SUPPLY DISTRIBUTION PCB
10890620-01092COLD HEAD CABLE
10900270-20082TOOL 6" HOOP ADJUST W/B CHB
10910270-700476" LIFT TO ROBOT CAL PLATE, REVISED
10920270-20058WAFER,TEST ORIENTOR 8"
10930010-38424PLATE ASSY, TUBE LIFT, DXZ
10940150-21772CABLE ASSY, GASBOX TO GASBOX INTERCONNEC
1095-SELAKIT GAS KET
1096-SELAKIT GATE
10970041-04443N/A
10980242-70466KIT, HEATER HOSE CH 2, CH 3, CH D, SST
10990010-76087WAFER VALVE ASSY. CH 2,4,& D
11000010-76765ASSY, OTF EMITTER, 200MM BANK
11010270-76128DC BIAS POST WB ALIGN JIG
11020021-17725DISK, SNNF, SHUTTER, TA/BESC, AL-APRAYED
11030190-75080BRG BALL 8.62 ODX8 ID X .3125 W 4-PT W/C
11040020-22844PEDESTAL SHIELD, 8 PRECLEAN
11050010-70823ASSY, SMC VLV 2.5" BORE SRTK 200003SNSR
11060020-76473BRKT, GEN RACK, FLOOR MOUNT
11070021-70378MANIFOLD,WATER,INPUT,TXZ
1108-DV707S200A(PANASSONIC)
11090040-75117ENCLOSURE, VALVE, REAR, RIGHT
11100040-23559BRACKET, RF MATCH MOUNT
11110150-18061CABLE ASSY, HTR CARTRIDGE, ULTIMA HDP-CV
11120020-18280SHAFT, DRIVEN THV HDP-CVD
11130040-22487FINGER EXTENDED LIFT HOOP 8" B101
11140020-76954BRACKET CLAMP 1 1/2-2 1/2
11153880-01311WSHR LKG SPLIT .190ID X .334OD
11160020-22737WEIGHT, 200MM CASSETTE CLAMPING
11173700-02717SLIT VALVE DOOR SEAL
11180090-75024ASSY, FAST COOLDOWN AIR CYLINDER
11190020-18279SHAFT, SIDE THV HDP-CVD
11200021-42604N/A
11210020-21221HOOP CD 200MM
1122-NETWORK CABLE 75FT
11230020-22909PEDESTAL SHIELD, 6" PRECLEAN
11240020-34444FACEPLATE, DXZ, DCVD
11250020-246416" JMF TIN/SST CLAMP RING
11260020-24386COVER RING 6 101 SST/MATL
11270150-00479CABLE ASSY LIFT HEATER CHAMBERS B/C SACV
11280150-18896CABLE ASSY 75FT DC SOURCE - MDL(OEM NEW)
11290150-21340CHAMBER 2 INTERCONNECT
11300150-21234CABLE ASSYCHAMBER 1 INTCNT 50FT
11310620-01254CABLE NETWORK TERM I/F FOR ON-BRD CRYO 3
11320150-21342CHAMBER 4 INTERCONNECT, (EMC COMPLIANT)
11330021-22090PLATE, FRONT SKIN, AMAT LOGO, PAINTED
11340021-22084PLATE, FRONT SKIN, ENDURA HP, PAINTED
11351010-01116LAMP HALOGEN 120V 800W
11360060-00964VALVE ASSY, THROTTLE MXP
11370020-40085MOUNT,BRAKE INDEXER
11380040-23558CLAMP, RF MATCH MOUNT
11390020-21007BLOCK, WALL CLAMP
11400020-75890CLAMP, PIVOT, EXTENDED REACH WRIST
11410010-76858DETECTOR ASSY, RIGHT FAST WAFER MAPPING
11420190-00879VALVE ISOLATION 90DEG ELBOW NW-40
11433620-02332KYPD REMOTE W/CABLE FOR ONBOARD CRYO PUM
11440880-01004ENCDR, OPTICAL
11450990-01004KT HTR TAPE END SEAL FOR SLF-REG HEATING
1146-KAYDON BEARING
11470030-20041SOURCE COVER, PVD DEGAS 13 SOURCE
11480190-13035LAMP, BAKEOUT WITH LUGS
11490150-20537CABLE ASSY,PUMP CONTROL CH C
11500150-20197HARNESS ASSY, TC INTERFACE
11510010-00865BAKEOUT LAMP CLAMP ASSEMBLY
11520150-09607CABLE ASSY,FLOW SWITCH, CVD, SST
1153-A3723-9215
11541200-01081AMAT RLY CNTOR 3P 600V 32A,RES 45A,NONRES 1200-01081
11550242-76611KIT, ELEC, PER HTESC PVE CHAMBER, ENDURA
11560680-01258CB MAG THERM 1P 240VAC 10A BOLT-ON QOB-T
11570680-01207CIRCUIT BREAKER 2P 15A
11580020-34112PLATE,REFERENCE,INDICATOR
11590190-21067LOADLOCK DIFFUSER
11600020-28946SPACER, SOURCE STAND-OFF, VECTRA IMP
11610020-20123HEATER, ISOLATOR CERAMIC
11620020-23352DISK HEATER
11630020-20511HUB HTR INSULATOR
11643060-01233BRG   SNAP RTNR .250ID X .75OD DBL SHIEL
1165 VALVE BLANK PLATE ASSY FOR SMC DOUVBLE
11663870-01281VALVE BLANK PLATE ASSY FOR SMC
11670090-20033SENSOR ASSY,VALVE SENSOR AND HARNESS
11683500-01153NUT LOCK NO 6 SST
11690020-29342NUT RF FEEDTHRU .250" WIDE VECTRA IMP
11700020-28889BLANK-OFF ADAPTER, GASLINE
11713780-02265SPR   CPRSN 1.25FL X .300OD X
11720020-29975BAR RF CONNECTOR .125"L SHLDR VECTRA IMP
11730020-07375BLOCK, GROUNDING BUTTON SUPPORT
11740020-22805PLATE ADAPTER CLAMP WIDE BODY CHAMBER
11750020-20522WSHR,INSULATOR LIFTER
11760020-25897TUBE INSULATOR, 3.60"
11770020-26577TUBE INSULATOR 1.60"
11780200-09716PIN, LIFT, HEATER, WxZ
11790020-28744PLATE, COVER
11800020-75982HT ESC SPRING GRAND
11813220-01051CPLG FLOATING JOINT 1/2-20 UNF 1061 OD
11820020-05750PLUG, W/B LOADLOCK, ENDURA INTERFACE
11830020-21336BAR, SUPPORT TRANSFORMER
1184 SPACER 2MM MAGNET ROTARY FEEDTHRU SHIM
11850021-20207SPACER 3.5MM MAGNET ROTARY FEEDTHRU SHIM
11860020-27885SHIM, MAGNET ASSY, .50MM, SST
11870020-21863SHIM,ROTARY FEED THRU .06 THICK
11880020-21804SHIM,TIN ROTARY FEEDTHRU
11890020-27886SHIM, MAGNET ASSY, .75MM, SST
11900020-28773RING CLAMP, SHIELD INTERNAL
11910020-20274CLAMP HOLDER, SOURCE
1192-PROCESS KIT, CONSUMABLE KIT
11930190-35524ASSY, PNEUMATIC, MAINTENANCE CONTROL
1194-RGA ALVE
11950010-40155ASSY, WAFER SENSOR LOW PROFILE TC
11960150-36097C/A MFC ADPTR W/PURGE/SHUT-OFF,9PIN D:CA
11970020-28743BLOCK, WATER
11980040-05142WELDMENT, HEATER CONN HPTXZ 
1199-NVJ324 WAY VALVE
12000020-20484HUB END LAMP COVER
12010040-20054HTR GAS LINE
12020040-20055FEED THRU ADJ AR
12030040-21838BRACKET, VCR CROSS HEATER BYPASS
12040020-16091BUTTON, REST, PEDESTAL, TIN COATED
12050020-29303BRACKET, SOURCE GUIDE, VECTRA IMP
12060020-13999BRKT, SOURCE ALIGNMENT PIN
12070020-22551COLLIMATOR,BRACKET GUIDE SOURCE
12080020-20651BRACKET GUIDE SOURCE
12093300-02263FTG RLF VALVE VENT APTR CRYOPUMP AL
12103690-03071SCREW
12113690-02978SCR CAP SKT HD 6-32 X 7/16L
12123300-01983FTG TBG INSERT 3/8OD X 1/4ID S
12130150-00796CABLE INTERLOCK, FAN ROTATION
12140021-22011TUBE, FLANGED, HEATER LIFT BEARING, BESC
1215 N2 PURGE KIT
12160190-09312wPCB ASSY VME CPU SYNERG
12173300-01405FTG, REDUCER KF-50 KF-40
12180020-20753PLATE POWER SUPPLY CORD STRAIN RELEIF
12190020-20416PANEL,BLANK-OFF,PLUG,RF GEN, CABINET
12200020-76699PANEL AC 30A OUTLET
12210200-20000LAMP, BAKE OUT (0020-20488 WITH CLAMP BAKE OUT LAMP)
12220020-70822BRACKET, COMMON CONNEC- TOR
12230690-01583FLG 1-1/3 OD CF BLANK
1224BARTRON750B12TCD2GA
1225BARTRON750B13TCD2GA
1226-750B11TCE2GK
12270020-20617BRACKET HANDLE
12280010-21558ASSY PNEUMATIC MNFLD PUMP I/F
12290040-20056ADAPTOR ELBOW .25VCR TO MINI CF, GAS LIN 2ea Short
1230-MAGNET SENSOR
12310200-35780QUARTZ PIN, STANDOFF, COOLDOWN
12320030-70046MACHINING, BRKT CLAMP SOURCE
12330020-23836PLATE ADAPTER CLAMP G-12
12340020-22906PIN, PRECLEAN PEDESTAL
12350020-24236CLIP SPRING PC II ANTENNA DOWELL
12360020-24018PIN ANTENNA PC II POLI SI, 200MM ENDURA
12370190-36174SEAL METAL RING IS 4.618 CSD .135
12380020-20488CLAMP BAKEOUT LAMP
12390020-42317SCREW BLOCKER VENTED EC LID WXZ
12400020-42316SCREW PER PLATE VENTED EC LID WXZ
12410200-35596WINDOW,SLIT AL203
1242-TUNGSTEN VIEWPORT
12430020-22839PIN, PRECLEAN LIFT
12440020-29640REST BUTTON,ADV. 101,3.4 MM, FULL-COV.,T
1245-TXZ LIFT ASSY HARDSTOP
12460680-01202CB K-FRAME PLUG NUT LOAD SIDE
12470140-70069JUMPER HARNESS, SOURCE 5-PHASE STEPPER
1248-MAGNET SENSOR
12493780-01079SPR CPRSN .375 FL X .240OD X 0.38WIRE DIA SST
12503140-01025BSHG SNAP 1/2 ID X 5/8OD NYLON BLACK
12510020-26245SUPPORT ARM, 6" HTHU HTR HEAT SHIELD
12523870-01400VALVE FLOW CNTRL 10-32 8 TURN
12533300-01612ADAPTOR, 1/8MPX10-32
12540020-23837SPACER 6-12 SOURCE GUIDE PIN G12 10EA, 12.9 10EA
12550020-13998PLATE, SOURCE ALIGNMENT PIN G12 10EA, 12.9 10EA
12560150-20103CABLE ASSY, CCD BD INT.
12570090-20152ASSY OVERTEMP SW DEGAS CHAMBER WITH 0020-24143
1258-SWAGELOK HOSE
12593300-02240FLG 1-1/3 OD CF BLANK
12600720-01598CONN COAX ADPTR ANGLE JK-PLUG TYPE N UG
12610150-20638CABLE ASSY IGNITION NETWORK
12620150-05104CABLE ASSEMBLY, IGNITION NETWORK
12630015-20221CB PADLOCK 1-3 POLE LOCK OFF ONLY
12640020-20114ISOLATOR, DC BIAS
12653690-02848SCR CAP FLT HD 6-32X1/4L SLOT 82DEG SS
12663630-01092RTNR RING INT 5/8 HSG .035THKSST
12670020-25746PAD  8 ZX HEATER DC BIAS
12680190-09132SW, 15 HG, VCR-4 OPEN DECREASING VAC, P
12693300-09254FTG TBG ADAPTER NW25 X 3/8" TUBE SWAGE
12703300-03436FTG TBG ADPTR NW25 X 1/4MVCR 1.4"LG SS
12710200-20215HOUSING, DOUBLE RF CONNECTOR, VECTRA IMP
1272-INSULATOR, LAMP COVER, LEFT
12730910-01073FUSE HLDR BODY HI CURRENT SHOCKPROOF PA
12740910-01074FUSE CARR FOR 1/4X1-1/4 FUSES
12750020-29974CLAMP FEEDTHRU COIL SUPPORT 1.365L VECT
12760090-01534SENSOR ASSY, MASK PRESENT, PHOTOMASK
12770020-23917BRACKET CABLE COVER LIFT
12780020-27942BRACKET CABLE VHP COVER LIFT
12790140-20233
0140-76169
0140-70172
HARNESS ASSY, SHIELD TREAT/TURBO/ CONT.
with 0720-01243
12800720-03443CONN RCPT SNGLE LOCKING PNL MTG 2P 3WR
12813690-02174SCR CAP SKT HD 10-32 X 1/2L HEX SKT ST
12820010-01100ASSEMBLY, SOURCE LOCKING PIN
12830020-20342PIVOT TRANSFER SLIT VALVE
12840020-20752FINGER HOOP CD/PT 200 MM
12850020-25991SUPPORT BAR  HEAT SHIELD   ZX HEATER
12860020-20113HUB DC BIAS, SHIELD ASSY
12873630-01091RTNRRING EXT 3/4 SFT .062THKSST
1288-852B12PCJ2GC
1289 852B13TCA2GC
1290 Cryo Pump Purge Solenoid Valve
12913300-02248FTG ELBOW 1.0OD-TBG X 2.04L X 1.57OD-F
12924020-01040FLTR IN-LN GAS 3000PSIG 1/4-GSKT SEAL M
12934020-01203USE 4020-01285 FLTR GAS 1000PSIG 1/4MVCR
1294-IMP PROCESS KIT 
12953300-02457FTG TUBE TEE
1296-CRYO HELIUM "T" LINE
1297-ZB5 AZ101
12980020-20380ENCLR, PWR TURBO PUMP
12990190-13175LIGHT PEN
13003700-01415O RING STATIC SEALS ID9.225 CSD.210 SILI
13010010-20511ASSY, DC BAIS SHORT MONITOR
13023310-01081GAUGE ION NUDE 2.75 INCH CF WITH CABLE L with ADAPTOR 3ea
1303-LAMP SWITCH
1304-EMO SWITCH
1305 IMP TOGGLE
13060690-01579CLAMP TOGGLE GLNG SST 100LB W/VINYL CTD
13070150-10076SENSOR ASSY CABLE ASSY MICROWAVE REMOTE
13080140-09596HARNESS ASSY, CHAMBER ILMINATION
13090150-10125CABLE ASSY, SHORTING, SPARE1, WxZ
13100150-10063CABLE ASSY SAFETY SWITCH JUMPER
1311-G12 MAGNET SHIM
1312CL40-76241TRANSPECTOR POWER SUPPLY CL40-76241
13130020-23286COVER INSULATOR TIN 8" 
1314AX8403AX8403 Ozone Generator
1315 AX8405AX8405 Ozone Generator 
13160010-23840300mm Magnet Ass`y
13170010-21767Magnet Ass`y
13180010-26451Magnet Ass`y
13190010-21403Endura Source TTN Minus G Type
13200010-21810Magnet Ass`y, G12+, Encapsulated, Durasource
13210010-21676RH-2 Magnet Ass`y
13220010-21940Magnet Ass`y, G-3 Encapsulated
13230010-01198G-3 Magnet Ass`y
13240010-04065Magnet Ass`y, SIP-TTN, REV2, 8"
13250010-20223Magnet REM 11.3, TIN Ass`y
13260010-20224MAGNET -A- 11.3 AL ASSY