2nd Source Parts List

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RNX 2nd New Parts List (12") 20200106

Category : 2nd Source Parts List | Download : RNX 300mm 2nd New Parts List 20200106.pdf

NO.       P/N                       Description
1 3480-01322 MOUNT LEVELING STUD 3/4-10X5-1/2"L 2-1/2
2 0090-05024 RF FILTER PRODUCER SE/GT 
3 3870-04552 VALVE PM KIT FOR ACTUATOR OF C INSERT V. DNS 2-F3
4 0041-13891 300mm HARP SHOWER HEAD (Center Hole)
5 0190-16928 4-Channel CPCI Devicenet Scanner SST DNP-CPCI-3U-4 
6 1350-00360 727A-29130
7 0040-41703 DOOR, SLIT VALVE, DPS 2
8 VALVE 74-3061TSN30-056
9 Veriflo VALVE 944AOPLPNCSFSFF
10 Veriflo VALVE 945AOPLPNC5FSFF
11 0190-07685 95238-PAGQ-ADH2
12 0015-00881 ACTR, RTRY, 90 DEG DBL END SHAFT, SINGLE
13 0040-84017 ADAPTOR 1 COMPRESSION TO SAE 1-1/16-12
14 0200-02763 AMAT, NOZZLE SLEEVE, ULTIMA X HDP CVD 300MM 
15 0140-04962 ASSY HARNESS LIFT SENSORS PRODUCER SE
16 0100-75548 ASSY PCB CHAMBER DIO PACKPLANE
17 0090-04276 ASSY, LIMIT & HOME SENSORS, BOSCH PIN LI
18 0200-04294 BAFFLE, ALN, 2.47ODX1.14L, 8X.100CLN, 8X
19 0200-05593 BAFFLE, ALN, IPM, 2.47ODX1.14L, 8X.100CL
20 3700-04475 DUPONT DOW KALREZ SAHARA O-RING1.984" ID X 0.139" CS.
21 0040-47126 BLADE, SST, VHP ROBOT, 300MM, PRODUCER S
22 0021-51937 BLOCKER, DD3328, SACVD, 300MM PRODUCER
23 0040-38036 BRACKET RF FLANGE PRODUCER 200MM
24 0040-90355 BRACKET, DRIVER MOUNT, PIN LIFT, PRODUCE
25 0190-14801 BRG, LOWER 8-INCH HYBRID CERAMIC, SHIELD
26 0190-00958 BRG,4PT CONT,8.625OD X 8ID X .3125W W/CA
27 0200-00454 BUSHING, LIFT PIN, 300MM HDPCVD
28 0190-28862 C3H6-B3000
29 0150-07365 CABLE ASSEMBLY, EMO SPLITTER, HEAT EXCHA
30 0150-10063 CABLE ASSEMBLY, SAFETY SWITCH JUMPER
31 0620-01459 CABLE ASSY DNET DROP .2METER 300V 80C RSC-RKC
32 0620-02354 CABLE ASSY DNET TRUNK 5.0METER 300V 80C
33 0150-15432 CABLE ASSY ETHERNET, INTER 
34 0150-09540 CABLE ASSY OZONE CONTROLLER TO CHILLER E
35 0140-14453 CABLE ASSY RF FILTER BOX FAN PRODUCER
36 0190-17102 CABLE ASSY, 50 FT, HP DC PWR SUPPLY 
37 0150-00863 CABLE, ASSY. SIGNAL, CONTRL I/O TO REMOT
38 0140-14619 CABLE, WELDED, RF STRAP, APF PRODUCER SE
39 0190-07908 CARD FOUR CHANNEL DEVICENET CPCI 3U
40 0190-26873 CARD MOTION DELTA TAU PMAC2 CPU 160MHZ F
41 0270-70043 CENTER ALIGNMENT PERP JIG, REV
42 0200-04235 Isolator Ceramic, 300mm Producer SE
43 0190-28861 CFG-NC IFC-125C NFC 3000
44 0020-93869 CKER, DD3328, SACVD 300MM
45 0021-30906 CLAMP, BLADE 300MM DBR
46 0015-00871 COVER, LOTO CAPABLE SWITCH, CENTURA AP
47 3020-00056 CYLINDER, AIR, DOUBLE ACTING
48 - DECUDFACE PLATE RING MR18S16M-104A
49 - 61234-KAGO-AU02
50 0190-04457 DIP CDN491-AB-1 DEVICENET 48 DIGITAL 3U
51 0190-12739 DNET CARD, SMC H2000 DNET HX
52 0190-36787 ELECTRICAL ASSY, INTEGRATED SIMPLIFIED C
53 0150-76186 EMC COMP.,CABLE ASSY,PUMP UMBILICAL
54 0190-70106 ENDURA DOCULINK CD ROM MANUALS-WINDOWS
55 3300-08885 Female Hose
56 0242-22434 HANGER, EXTERNAL, DRIP TRAY, 300MM
57 4020-00164 FLTR IN-LN GAS 3000 PSIG 1/4-GSKT 
58 0041-10389 FOC/ CLAMP PLATE
59 0010-46935 FREE DHL/EMS
60 3300-02422 FTG TBG CONN 1/4T X 10-32MNPT ONE-TOUC
61 3300-01752 FTG TBG CONN 3/8T 3/8TS SST PORT CONN
62 3300-01178 FTG TBG UN 3/8T SST
63 0140-17530 FULLERTON DOLD DRLL BIT
64 0190-37371 FV50D XL CHAMBERGARD,FAST VENT DIFFUSER
65 0050-89867 GAS LINE N2 PLASMA 2.5 LITER HP+ AXZ 300
66 3320-00105 GASKET, 2.115 COIL ID, .148 HEIGHT, .168.
67 0010-15489 GASLINE ASSY, 300MM PIB BACKSIDE ISOLATO
68 0010-08581 GEN RACK DNET, I/O BLOCK, 300MM
69 3320-01040 GSKT VCR 1/2 IN CONTOURE
70 3870-03341 Ham-Let HMS20-4VKLQ-LD Valve 
71 0140-20255 HARNESS ASSEMBLY STEC MFC PANEL 1 SYS
72 0140-76006 HARNESS ASSY SHORTING 2-PIN
73 0140-18951 HARNESS ASSY, AMAT KVM TO USER INTERFACE
74 0140-15068 HARNESS ASSY, EV MANIFOLD NO.3 GAS PANEL
75 0140-07381 HARNESS ASSY, INTERLOCK SILANE BYPASS OV
76 0140-11597 HARNESS ASSY, PNEUM MANIFOLD&SENSORS, 30
77 0140-12653 HARNESS ASSY, REMOTE, PROD SE
78 0140-14445 HARNESS ASSY, WAFER HEATER RF FILTER BOX,
79 0050-81213 HOSE ASSEMBLY, FACEPLATE COOLING LOOP, H
80 3400-01570 HOSE ASSY FLEX TFE/SST BRAID 3/16IDX36""
81 0050-83207 HOSE ASSY HEAT EXCHANGER 1/2 IN DIAMETER
82 3400-01057 HOSE GAS/LIQ .375ID X .63OD 350PSI SYNTH
83 - ALL IFC-125C Series
84 0190-37703 INFO PAD PIN A - B, ADO-S7
85 0021-06798 INSERT BOTTOM MIXING MANIFOLD LID SACVD
86 3420-01170 INSUL PIPE SLIT AP ARMAFLEX SS 7/8ID X 1
87 0190-22275 INTEGRATED CONTROLLER PCBA
88 0190-07970 INTERLOCK MODULE PRODUCER SE CDN 500-19
89 0190-31284 LAMP, 2KW 120V, USHIO BNA8, EPI 300MM 
90 3030-14690 LF-F40M-A-EUD TEOS
91 0041-00360 LID,LOADLOCK,UPPER
92 0200-03314 LIFT PIN 170 FIXED FLOATING 300MM PRODUCER
93 0200-18100 LIFT PIN, CERAMIC, 300MM HDPCVD
94 0040-54098 MANIFOLD, INPUT, LID ASSEMBLY, PMD PRODU
95 0040-03490 MANIFOLD, OUTPUT LEFT, 300MM PRODUCER
96 0190-32369 MFC, GF-125C 7201-15000 SCCM N2 EQ, DNET
97 0040-85003 MIXING BLOCK INSERT, TOP, CHAMBER LID MA
98 1080-00074 MOTOR SERVO 24VDC 20W W/INCR-ENCODER&BRA
99 0190-15328 DRIVER, SERVO PANASONIC 208V 100W, MQDB012AADO2
100 3500-00036 NUT KEPS HEX FULL 6-32 SST W/TOOTH WASHER 
101 0021-44028 NUT PLATE CLAMP HEATER 300MM PRODUCER
102 1120-00254 OPTICAL HOUSING ASSEMBLY VERTICAL RIGHT SENSOR 
103 1120-00252 OPTICAL HOUSING ASSEMBLY,VERTICAL-LEFT
104 3700-01533 ORING ID .299 CSD .103 CHEMRAZ SC513 80
105 3700-02137 ORING ID .924 CSD .103 CHEMRAZ SC513 80
106 3700-02206 ORING ID 1.174 CSD .103 CHEMRAZ SC513 80
107 3700-03773 ORING ID 2.859 CSD .139 KALREZ 8085 BEIG
108 3700-02377 ORING ID 2.987 CSD .103 CHEMRAZ SC513 80
109 3700-00081 ORING LID KALREZ 8085 AS-568A-011, .301X
110 0090-01666 PC SELECT SWITCH/MONITOR SELECT SWITCH
111 0100-01363 PCB ASSEMBLY, SIGNAL CONDITIONING, PROD
112 - PF2W520-03-1-X126
113 SMC PF2W720-03-27-Q
114 0090-02138 PHOTOELECTRIC SENSOR AMP, 300MM L-DOOR
115 0021-23290 PIN POCKET LOAD LOCK PRODUCER SE
116 0021-22794 PIN, LIFT, 300MM TXZ, SST, ELECTROLIZED
117 0041-35182 PLATE, GAS DISTRIBUTION, 300MM ALD TIN
118 0020-64720 PLATE, SHIELD, STD PVD, 300MM
119 3310-00125 PRESSURE GUAGE
120 0090-04947 RF Filter Box Ceramic Heat in Equipo y 
121 3690-01257 SCR   CAP SKT HD 1/4-20 X 1L HEX SKT SST
122 3690-01199 SCR CAP SKT HD 10-32 X 7/8L HEX SKT SS
123 0021-13477 SCREW, BLOCKER, AL, 8-32X7/8L, VENT, 
124 3700-01088 SEAL CTR RING ASSY NW50 W/VITON ORING S
125 3870-05098 SLIT VALVE SLIT PLATE 
126 0190-25290 SPEC., LM DARP EDGE GRIP END EFFECTOR 
127 0021-44059 STRAP, 10 DEG CLAMP HEATER 300MM PRODUCE
128 0020-62657 STRAP, GROUND, 200MM HDP-CVD ULTIMA
129 0020-81407 STRAP, OUTER SHIELD GROUND, 300MM SIP EN
130 0020-62656 STRAP, RF, 200MM HDP-CVD ULTIMA
131 0020-61271 STRAP,RF RETURN 300MM B101 HEATER
132 1270-02934 SW PRESS VAC ATM GAUGE DECR 1/4M VCR 24VDC 9P
133 0190-21713 SWITCH, HALF ATM
134 3840-01013 TAPE  TEFLON PTFE 1/4W 260L PER MIL-T-27
135 3860-01050 TBG   PLSTC 1/8 OD .032 WALL POLYURETHAN
136 0190-75082 TC, PROBE K-TYPE QUICK-DISCONNECT CVD-PV
137 0190-75083 TC, PROBE K-TYPE QUICK-DISCONNECT INTEGR
138 3030-13780 UNIT-8161 8560 H2
139 0190-16320 UNIT-8161 8560 N2
140 0190-16329 UNIT-8161 8560 O2 400
141 3030-00336 UNIT-8161 N2 2L
142 0190-16115 UNIT-8161 N2 NF3 300SCCM
143 0041-26882 UPPER INLET MANIFOLD, 300MM ALD TIN
144 3070-00900 VALVE
145 3870-03929 VALVE ASSY PNEU DIAPH NC/NO 1/4 VCR 
146 3870-04001 VALVE GATE 35 X 336 MM SEAL W/SHORT PLA;
147 - VAT 26432-KA11-BJ11
148 3870-04344 VAT 760TORR,80PSI/ ASSY, VALVE SLIT DBL ACTUATOR
149 - VEXTAASD18B-KON-86 DRIVER
150 0190-05111 VIDEO AND CONTROL SWITCH SPECIFICATION
151 3870-04759 VLV NO 3PORT 1.5C SM PI VESPEL
152 0270-20032 WAFER,TEST ORIENTOR 8"
153 0020-18899 WASHER, NOZZLE, ULTIMA HDPCVD
154 0021-27777 WASHER, WAVE, HAYNES 242, #6
155 0050-91474 WELDMENT, 2-LIQ DIVERT VLV SM BLK
156 0051-04424 WELDMENT, FINAL LINE ALD 300MM
157 0050-06171 WLDMT 3 FINAL VALVES FUJIKIN ULTIMA HDP-
158 3880-01107 WSHR FLAT #6 .375OD X .149ID X .031THK B
159 1220-00004 XMTR, CLASS 2 LASER, VISIBLE RED 670NM,
160 0190-27379 300MM Part
161 0050-96570 300MM Part
162 0040-76241 300MM Part
163 1410-00621 300MM Part
164 0190-39073 300MM Part
165 3890-00536 300MM Part
166 0041-10615 300MM Part
167 0150-25298 300MM Part
168 0090-05813 300MM Part
169 0010-47681 300MM Part
170 0010-43979 300MM Part
171 0190-41692 300MM Part
172 0041-08452 300MM Part
173 1270-02069 300MM Part
174 0190-23747 300MM Part
175 0021-42571 300MM Part
176 0040-80294 300MM Part
177 0190-37082 300MM Part
178 0150-23939 300MM Part
179 0021-51909 300MM Part
180 0090-00076 300MM Part
181 0100-01693 300MM Part
182 0021-64786 300MM Part
183 0200-13597 300MM Part
184 0041-50977 300MM Part
185 0021-34886 300MM Part
186 0041-65453 300MM Part
187 0041-65454 300MM Part
188 0140-14146 300MM Part
189 0140-14138 300MM Part
190 0020-47647 300MM Part
191 3220-01123 300MM Part
192 0240-64048 300MM Part
193 0050-90705 300MM Part
194 3700-00030 300MM Part
195 0246-02744 300MM Part
196 0200-06422 300MM Part
197 0041-32731 300MM Part
198 0200-03694 300MM Part
199 0040-84108 300MM Part
200 1200-00705 300MM Part
201 0200-13465 300MM Part
202 0022-02598 300MM Part
203 3400-01007 300MM Part
204 0190-33486 300MM Part
205 0190-16442 300MM Part
206 0200-42948 300MM Part
207 0021-33863 300MM Part
208 0020-43068 300MM Part
209 16-132590-00 WELDMENT, SHWRHD, PINNED, 300MM
210 16-256990-00 SHOWERHEAD,PINNED,300mm
211 16-289070-00 SHOWERHEAD,300mm ,CVD
212 3D10-101152-13 SHUTTER BTM TYPE SE, TEL SCCM 300MM
213 3D10-100844-11 RING, BTM SHIELD SE, TEL SCCM 300MM
214 3D10-100845-11 PLATE EXHAUST SE, TEL SCCM 300MM
215 3D10-101195-11 SHIELD DEPO, TEL SCCM 300MM
216 0200-03313 BASE RING PRODUCER
217 6X1376Y-70621 GAP SPACER, TEL SCCM 300MM
218 16-033931-01 SHOWER HEAD
219 16-033932-00 SHOWER HEAD
220 16-271392-00 SHOWER HEAD
221 15-053271-02 TUBE CLEAN INJECTOR 300mm
222 15-150002-00 RING GUARD LTM HDP300 SPEED
223 15-304718-00 SHWRHD,300mm,DROP-IN W3
224 02-252432-00 300mm SPINDLE, INDEX 270 C3 VECTOR
225 02-259457-00 C3 Vector Spindle Assembly
226 02-259783-00 PED LIFT ASSY, PREHEAT, C3 VECTOR
227 02-269293-00 SPINDLE ASSY,300MM NOVEL
228 02-288189-00 ASSY 300MM LFT PIN ACTUATOR VECTOR
229 02-312735-00 SPINDLE ASSY, C3 VECTOR
230 02-324753-00 SPINDLE,INDEX C3 ALTUS
231 02-326084-00 ALTUS 300MM SPINDLE
232 02-347420-00 NOVELLUS 300MM SPINDLE  
233 17-191208-00 COVER, PLASTIC, PCB AC, C3 ALTUS
234 17-191209-00 COVER, PLASTIC, PCB DC, C3 ALTUS
235 17-432334-00 COVER, C3ALT, CLEAR, CB, LPB, RIGHT
236 0021-22065 SHIELD, LOWER HI-COND TTN, 300MM PVD
237 0021-25296 ENDURA ALPS, SHUTTER DISK
238 0021-26609  SHUTTER DISK, A101, 300mm
239 0040-55456 300mm Bell Jar 12" Endura Preclean 
240 0040-61519  WRIST, VACUUM ROBOT, PRODUCER, 200/300MM
241 0020-48305 COVER RING, TI WITH CLEANCOAT, 300MM ESI
242 0020-60810 SHIELD, INNER, AL WITH CLEANCOAT, 300MM
243 0020-45231 DISK, SHUTTER, ENCORE TAN, CENTER PIN, R
244 0020-48304 CLAMP RING, LOWER SHIELD, SST WITH CLEAN
245 0040-83331 LINER, CATHODE, DIRECT-COOLED, BAFFLE, 300MM, CT
246 0190-12806 300mm EMAX GATE, ANODIZED ALUM WITH 513 CHEMRAZ ORI
247 0190-12805 300mm GATE, ANODIZED ALUM WITH 747 VITON ORING
248 0020-48891 BLOCKER,APF, PRODUCER
249 0020-49785 FACE PLATE,APF, PRODUCER SE
250 0020-51923 FACEPLATE,SILANENIT,PRODUCER
251 0021-12790 BLOCKER,SILANE,RPS II, PRODUCER
252 0021-18725 BLOCKER,LOW K, GASBOX ,PRODUCER
253 0021-18844 FACEPLATE,BLOCK,LOWK,PRODUCER
254 0040-86514 SHIELD, LOWER 300mm PCXT/RPC+
255 0021-19342 SHIELD, INNER 300mm PC II/RPC
256 0040-04586 SHIELD, INNER,TxZ 300mm ,CVD
257 0021-07984 SHIELD, OUTTER,TxZ 300mm ,CVD
258 0020-54284 RING,EDGE PURGE GUIDED AFEOL 300mm
259 0040-07291 DEPOSITION RING,ADV, A101 300mm
260 0021-21234 SHIELD,UPPER HI-COND TIN L.G 300mm
261 0021-22064 COVER RING ,TTN 300mm PVD
262 0021-15657 SHUTTER DISK,MDP 300mm
263 0021-22177 COVER RING ,ADV,101,300mm PVD
264 0021-11486 DISK,SHUTTER SNNF,BESC,300mm
265 0021-25014 DISK,SHUTTER,BESC,CENTER PIN RPG CHBR 30
266 0021-16783 COVER RING, NARROW POCKET, 300MM SIP CU
267 0021-16781 SHIELD, UPPER, 300MM, REV 2.0 SIP CU, 17
268 0020-26374 CLAMP, MIDDLE SHIELD
269 0020-02348 CLAMP, LOWER SHIELD, 300MM SIP
270 0040-76651 SHOWERHEAD,UPPER,SGD,.328RA
271 0040-76652 SHOWERHEAD,LOWER,SGD,.328RA
272 0200-03407 C-CHANNEL SIDE PRODUCER
273 0200-03414 LINER CERAMIC BOTTOM PRODUCER
274 0200-01903 Insulator 300 mm Endura Preclean Quartz 
275 0020-29711 SHIELD, LOWER HI-C SST
276 0021-07586 RING, MIDDLE PURGE SST, 300MM TXZ
277 0021-12063 LOWER SHIELD(IMP)
278 0021-22224 Pedestal .300mm IMP B101
279 0200-02421 Isolator , TxZ 12" Endura Thin Film Ceramic 
280 0200-00531 Pump Plate TXZ 12" Thin Film Ceramic 
281 0200-02114 Housing HOVSING DOUBLE RF CONN 12" Thin Film Ceramic
282 0200-02916 Deposition Ring 12" Thin Film Ceramic
283 0200-36399 SHIELD TOP CERMIC TxZ 300MM Thin Film Ceramic
284 0200-76050 Cover , Pedestal 12" Thin Film Ceramic
285 0200-76057 Ring , Cover 12" Thin Film Ceramic
286 715-801021-012 CHAMBER LINE, LAM2300 METAL
287 715-030860-001 CHAMBER LINER, LAM2300
288 715-443178-300 RING PLATE, LAM2300
289 715-801021-839  CHAMBER LINER, LAM 2300, METAL
290 714-801511-002  CHAMBER LINER, NECK 300MM
291 715-801021-838 CHAMBER LINER, 2300 METAL, LAM
292 715-801916-008 AL GDP(METAL) LAM2300
293 715-042721-809 WELDMENT LINER 2, LAM2300 METAL
294 715-045264-242 RING, GROUND, EXT, AL, SLOTTED, 300MM
295 0200-03406 C-CHANNEL SIDE PRODUCER
296 0200-03691 EXTERNAL INSULATOR PRODUCER
297 0200-03837 INTERNAL INSULATOR PRODUCER
298 0200-03969 LINER SR TOP PRODUCER SE
299 0200-04086 SHADOW RING 0.8MM PRODUCER SE
300 3M10-150079-11 Sensor Plate, Shower Spacer 300 TiN S(2-PIECE ASSY)
301 0020-94130 WxZ Shower Head MOD2 300mm(Non Welding)
302 3M87-029068-11 Ti Shower Head ASSY 300mm(2-PIECE ASSY)
303 3M10-202626-13 Shower Head/Shower Lower V3 300 TiN
304 3220200133 Shower Head MAHA HP2 (Welding Type)
305 050-1125 Shower Head 300mm Flat
306 M200-005-003 Shower Head BJM1000
307 734-007524-294 CHAMBER WALL O RING  300MM POLY KIYO
308 734-007524-295 ORING   300MM POLY KIYO
309 839-802923-006 VIEW PORT ASSEMBLY   300MM POLY KIYO
310 716-012640-011 Star Quartz Window 12" Quartz  300mm STAR
311 716-331142-305 Top Edge Ring 300MM  Quartz  300mm STAR
312 716-800951-311 BASE RING  300mm STAR
313 716-012639-024 GAS INJECTOR 12" Quartz  300mm STAR
314 716-031257-309 HPQ QTZ EDGE RING TOP(LAM2300 KIYO)
315 716-026652-002 HPQ QTZ EDGE RING BOT(LAM2301 KIYO)
316 716-077262-004 TOP EDGE RING 300mm CX
317 716-026652-911 HPQ BOTTOM EDGE RING(KIYO 3X)
318 713-034964-001 THICK WASHER 300mm FLEX
319 839-039317-003 CAP 300mm FLEX
320 713-037072-007 HANGER, 4R-3PC  300mm FLEX
321 713-034965-001 THIN WASHER  300mm FLEX
322 713-027299-002 PLUNGER ADAPTER-3PC 300mm FLEX
323 857-072806-005 Flex45 Talon Graphite Shim on AL Plate  300mm FLEX
324 857-073299-001 Flex45 Talon Top Plate Graphite Shim  300mm FLEX
325 713-069935-003 Flex45 Talon AL Plate Edge Kapton Shim  300mm FLEX
326 713-072792-003 Flex45 Talon Outer UEL Edge Kapton Shim  300mm FLEX
327 715-075954-003 Inner UEL Clamp Hex Washer  300mm FLEX
328 716-038612-003 Flex45Talon DC Bias Detected Si PIN  300mm FLEX
329 2L80-001537-11 Tube,SPIRAL..E01M24HAS, 20CM (VESTA)
330 2L47-000002-11 Tube,SPIRAL..E01M44HAS, 1M (VESTA)
331 047-005908-1 TUBE SPIRAL EMI GASKET, 1,395MM (VIGUS)
332 2L80-000271-11 AL/TI.TUBE SPIRAL, 1.5M (VIGUS)
333 047-004452-1 TUBE SPIRAL EMI GASKET, 1,256MM (VIGUS)
334 047-005420-1 TUBE SPIRAL EMI GASKET, 1,256MM (VIGUS)
335 047-005419-1 TUBE SPIRAL EMI GASKET, 1,287MM (VIGUS)
336 047-004186-1 TUBE SPIRAL EMI GASKET, 1165MM (VIGUS)
337 047-005412-1 TUBE SPIRAL EMI GASKET, 1165MM (VIGUS)
338 047-003627-1 TUBE,SPIRAL (VIGUS / SHIN)
339 3Z10-401792-11 TUBE,SPIRAL 30M(VIGUS / SHIN)
340 1802-420161-11 TUBE SPIRAL, 30M (VIGUS / SHIN)
341 1802-420160-11 TUBE SPIRAL 30M (VIGUS / SHIN)
342 F-STNI06302 TUBE SPIRAL, 30M (VIGUS / SHIN)
343 047-003069-1 TUBE,SPIRAL (SHIN)
344 0040-81425 Slit Valve Long,Process Chamber
345 0020-63125 DEP RING ALAMPED CLEANCOAT 300MM ESC
346 0020-44976 SHIELD ,OUTER 300MM SIP ENCORE TA(N)
347 0020-44975 SHIELD,INNER FINGLE EB3 ALASP SIP ENCORE
348 0020-63124 COVER RING CLAMPED CLEANCOAT 300MM ESC
349 0200-04017 DEPOSITION RING
350 0200-01902 PIN ANTENNA POLI SI 300MM PCII
351 0015-01573 Spring PCII 300MM
352 0200-20437 DEPOSITION RING 300MM ESC
353 17-132974-00 CONTACT,RING,NEXT,PAL7,300MM
354 0010-29842 Robot Wrist
355 02-113911-00 MOER Holder
356 02-344085-02 Assy MOER
357 15-250878-00 MOER Screw
358 0041-31335 TxZ chamber Blocker Plate(TXZ CVD 300MM #2, AMAT)
359 0020-48628 Txz 300 MCA heater edger ring AL
360 0021-19312 Plate Blocker TxZ 300mm
361 0010-03291 ASMBly Edge Ring IFC SST HTR 300 TxZ
362 17-318098-00 CONTACT,1MM,APC,N6
363 0021-80332 FLUX OPTIMIZER MONOLITHIC CIP RFx Cu
364 0200-20441 SUPPORT CENTER VENTED,PEDESTAL, B101 300
365 0200-00466 HOUSING, DBLE RF CONN, REV 5.0 VECTRA IM
366 0200-20492 INSULATOR, RCPT, RIGID SUPPORT, VECTRA-
367 0020-20494 Cap ,Rigid Bushing Support
368 3680-01177 Scrcap
369 3880-01836 Wshr Blvl
370 3690-01889 SCREW MACH SKT HD 6-32X1/4
371 3690-01914 Scrcap
372 0021-22583 Bushing ,Rigid Support
373 0200-07443 Ring ,Cover
374 0021-07480 BAR, RF CONNECTOR FT5, REV 5.0 VECTRA
375 0021-07482 CUP OUTER, RIGID SUPPORT, REV 5.0 VECTRA
376 0021-07483 CUP OUTER, DUAL FEEDTHRU, REV 5.0 VECTRA
377 0021-07497 Bar , RF Connector ft1
378 0021-07747 SCRW,CAPTIVE,RF FT,1/4"-20 TORX HD,VCTR
379 0020-02344 SHIELD, LOWER, 300MM (SIP Chamber)
380 0021-17770 COVER RING, 300MM SST (SIP Chamber)
381 0020-08299 CLAMP, INNER SHIELD, 300MM (SIP Chamber)
382 0020-23549 SHIELD, UPPER, AL ARC-SPRAY, SST, 300MM (SIP Chamber)
383 0020-54777 SHIELD, INNER, 300MM (SIP Chamber)
384 0200-03337 Deposition Ring  (Al Chamber)
385 0021-24752 SHIELD, UPPER LIFTABLE, ALIGN, AL, 300MM (Al Chamber)
386 0021-26565 DISK, SHUTTER, ESC, HOT AL, CENTER PIN (HP AI Chamber)
387 0020-48011 RING, COVER, FWC, A101, 300MM  (CO/Ni Chamber)
388 0021-18068 SHIELD, DARK SPACE,0.050 GAP,300MM ALPS (CO/Ni Chamber)
389 0021-18960 DEPOSITION RING, A101 SELF ALIGN SHADOW  (CO/Ni Chamber)
390 0040-76737 RING, GROUNDED,  6/10.5 OD, 2.0/2.7H (CO/Ni Chamber)
391 0020-48185 SHEILD LOWER, 250MM SPACING, 3.35 LEAF A (CO/Ni Chamber)
392 0040-08492 PLATE, GAS DISTRIBUTION, TXZ 300MM CVD
393 0020-47196 DISK, SHUTTER, B101, CENTER PIN, RPG CHB (IMP Chamber)
394 0021-16782 SHIELD, MIDDLE, 12.46 LG 300MM SIP CU, R (CU Chamber)
395 0020-24164 SHIELD, LOWER, STANDARD TAN, PVD 300MM (Dura Ta Chamber)
396 0020-28033 SHIELD UPPER LIFTABLE STDTAN SHORT A101 (Dura Ta Chamber)
397 0020-24166 COVER RING ADV 101, STD. TAN, 300MM PVD (Dura Ta Chamber)
398 0021-26969 DISK, SHUTTER, A101, AL ARC SPRAY, RPG C (Dura Ta Chamber)
399 0040-51718 DEPOSITION RING STD TAN SHORT A101 (Dura Ta Chamber)
400 027-003765-1 ARMOR crystal AS568-274 A70(UPPER) oring for APC vacle
401 027-003179-1 ARMOR crystal AS568A-275 A60 (LOW) for TEL SCCM Chamber APC Valve
402 ES027-007117-1 FLUORITZ AS568-394 12" TEL VIGUS
403 734-022231-278 SCCM VAT Cover
404 027-003185-1 ARMOR crystal AS568A-391 A60 for tel sccm chamber lid
405 713-00010-274 O-RING AS568A-274 Pendulum Valve 12" AMEC
406 713-00010-277 O-RING AS 568A-277 Pendulum Valve 12" AMEC
407 713-00013-275 O-Ring AS568A-275 Kalrez #8085   Pendulum Valve 12" AMEC
408 713-00013-274 O-RING AS568A-274Kalrez #8085 Pendulum Value 12" AMEC
409 713-00010-393 O-RING AS 568A-393 VITON  TM lid oring 12" AMEC
410 713-00013-012 O-RING AS568A-012 Kalrez #8085  vacuum blade oring 12" AMEC
411 713-00010-282 O-Ring AS568A-282 Viton  loadlock oring 12" AMEC
412 713-00038-383 O-RING AS568A-383 Fluoro Silicon 12" AMEC
413 713-00038-389 O-RING AS568A-389 Fluoro Silicon  pm lid oring 12" AMEC
414 713-00013-129 O-RING AS568A-129 Kalrez #8085  heater back o-ring 12" AMEC
415 713-00013-011 O-RING AS568A-011 Kalrez #8085  heater back oring 12" AMEC
416 1000529 TM chamber lid 0-ring 12" Mattson
417 1000527 PM slit door o-ring 12" Mattson
418 1000669 L/L chamber lid o-ring 12" Mattson
419 456-00226-26 TM slit door o-ring 12" Mattson
420 456-00226-56 Mad door o-ring 12" Mattson
421 1000920 PM chamber lid o-ring 12" Mattson
422 456-23323-00 Quarz tube o-ring 12" Mattson
423 456-24416-00 Vat valve o-ring 12" Mattson
424 456-20574-00 Vat valve o-ring 12" Mattson
425 1006146 SEAL RING,BONDED KLZ 9100 12" Mattson
426 1001064 VAT valve cover O-ring (DN100) 12" Mattson
427 1005185 VMH O-RING DUPONT PROCESS 1 12" Mattson
428 027-004878-1 O-RING..ARMOR CRYSTAL AS568A-176 B60 12" SCCM
429 027-003180-1 O-RING..ULTIC ARMOR AS568A-280 12" SCCM
430 ES2L27-000011-11 O-RING…KVZP08024 12" TEL VIGUS
431 ES2L27-000012-11 O-RING…KVZP08025  12" TEL VIGUS
432 ES027-000424-1 O-RING…Viton AS568-227 BLK  12" TEL VIGUS
433 ES027-006548-1 O-RING…D2570 AS568-283 BLK HUVC RBR  12" TEL VIGUS
434 ES3D27-050063-11 O-RING CHEMRAZ SC657 AS568-266  12" TEL VIGUS
435 ES3D27-000042-11 CHEMRAZ SC675-1621  12" TEL VIGUS
436 ES2L27-000013-11 AS345-SHAP  12" TEL VIGUS
437 ES2L27-000007-11 AS329-SHAP  12" TEL VIGUS
438 ES027-007372-1 FD2570 AS568A-274  12" TEL VIGUS
439 ES027-007373-1 FD2570 AS568A-280  12" TEL VIGUS
440 0010-23840 300mm MAGNET ASSY
441 0190-77188 BEARING, DOUBLE SEAL (Hybrid Bearing)
442 0190-77187 BEARING,.25IDX.625OD (Hybrid Bearing)
443 0190-77189 BEARING,3.0IDX3.5OD (Hybrid Bearing) 
444 0190-14833 Hybrid Bearing (CMP)
445 3060-00285 Hybrid Bearing 
446 0021-25762 SPACER BEARING INNER BRUSH MODULE 300MM
447 0040-84148 SHAFT IDLER, BRUSH MODULE, 300MM DESICA
448 0010-17014 IDLER ASSY, MEGASONIC TANK, 300mm Bearing ASSY
449 0190-19948 Bearing ASSY VITON G4051
450 0040-80748 HOUSING MAGNET BRUSH MODULE 300mm DESICA 
451 0021-25759 BEARING HOUSING IDLER BRUSH MODULE 300MM
452 716-800951-300 BASE,FCS RNG,SHLD,200&300MM
453 716-017112-330 Ring WAP Twist Top, 17in, DFC300mm
454 716-023013-004 Ring, Hot Edge, Si, DFC 300mm
455 716-027740-001 QTZ WINDOW OES 2300KIYO
456 716-031257-542 HPQ TOP EDGE RING(KIYO45)
457 716-042579-301 WAP RING FLEX45
458 716-044668-435 Ring, Hot Edge, 4XX ESC, W/O Flat 300mm, SS
459 0200-02301 300MM SI COVER RING(POLY)
460 0200-05032 INSERT RING NMS L-SHAPE 300MM
461 0020-84596 FACEPLATE, 300MM SILANE, FLOW TESTED
462 0041-25016 Face Plate .70 THK No Center Hole 300mm
463 0021-03568 FACEPLATE 200MM SACVD PRODUCER DCVD xZ 300MM
464 0270-05576 TOOL,  DUMMY  COIL,  SHIELD-COIL  ASSY,  300MM  SIP  ENCORE  TAN
465 0020-19258 PEDESTAL TITANIUM 300MM PCII
466 0040-42228 MANIFOLD, OUTPUT RIGHT, 300MM PRODUCER,
467 0040-42229 MANIFOLD, OUTPUT LEFT, 300MM PRODUCER, L
468 0040-53688 GAS BOX, REMOTE CLEAN, PRODUCER SE
469 0040-54085 MOUNT LOWER, ASTRON EX, LOW K, PRODUCER
470 0040-63107  MANIFOLD ALUMINUM CH. 2, PRODUCER SE
471 0040-63108  MANIFOLD ALUMINUM CH. 1, PRODUCER SE
472 0020-52965  SLIT LINER, EHA, 300MM EMAX
473 0040-82517 PLUG, SGD, EHA ANODIZED, 300MM EMAX
474 0040-51159 PLUG, ANODIZED SGD, 300MM EMAX
475 0021-13434 SCREEN, FLAT, 300MM POLY DPS2 (POLY)
476 0040-43978 CHAMBER UPPER LINER, COOL ETCH 300MM DPS(POLY)
477 0040-43977 LINER, LOWER 300MM DPS2(POLY)
478 0021-13430 LINER CATHODE, SCREEN, NON-COOLED, 300MM
479 0040-88340 CHAMBER UPPER LINER THICK 300MM DPS 2(METAL)
480 0040-81155 LINER LOWER 300MM DPS2(METAL)
481 0040-41919 ADAPTER, AE TOP MOUNT, 300MM HDPCVD ULTI
482 0020-16113 PLATE - PLATEN BELT TENSIONER - 300MM RE
483 0021-38106 BRACKET TEOS LINE 300MM, DCVD
484 0020-46168 BRACKET TTW SUPPORT KVM SWITCH 300MM
485 0021-01109 WINDOW, 200/300MM MANUAL
486 0021-18165 BRACKET W-OUT VLV SLD ENC PRODUCER SPLIT
487 0021-01133 GASKET EXHAUST FLANGE GP 300MM PRODUCER
488 0021-18166 BRACKET W/OUT VLV SLD ENC SHORT PRODUCER SPLIT
489 0021-02284 BRACKET, SHIPPING, RIGHT 300MM
490 0021-02283 BRACKET, SHIPPING, LEFT 300MM
491 0020-82679 GUIDE NUT, LID INTERLOCK, 300MM PRODUCER
492 0020-64982 WAFER LIFT PIN SST, 300MM EMAX CT+
493 0040-44492 MOUNTING RING, 300MM DPS2
494 0021-14137 BLOCK, 1-1/8 SM, TOXIC/CORR, REGULATED STICK
495 0020-19123 CLAMP HEATED INTRG GAS LINES 300MM DPSII
496 0020-19124 CLAMP HEATED RIGHT INTRG GAS LINES 300MM DPSII
497 0020-19150 CLAMP, LEFT, INTGR GAS LINES, DPS 2
498 0021-26626 INSULATOR, EXTERNAL ALUMINUM 300MM EMAX
499 0040-82895 LINER CHAMBER VHF W/LEAK CHECK PORT 300M
500 0040-81165 DOOR SLIT VALVE DPS 2
501 0021-13612 LINER, CATHODE W/ LWR LINER, 300MM DPS I
502 0040-84652 GAS FEED THRU TUBE/SEAL PLATE, 300MM L-DOOR
503 0040-87045 SGD, INNER COOL PLATE, 300MM EMAX CTS
504 0040-87048 10D, OUTER COOL PLATE, 300MM EMAX CTS
505 0021-22627 BLADE, ROBOT 300MM, NO POCKET
506 3M87-029068-11 Ti Shower Head ASSY 300mm(Non Welding)
507 3M87-029068-11 Ti Shower Head ASSY 300mm(2-PIECE ASSY)
508 0140-00287 CABLE ASSY. PRODUCER 300MM
509 0140-00305 CABLE ASSY. PRODUCER 300MM
510 0140-00306 CABLE ASSY. PRODUCER 300MM
511 0140-00307 CABLE ASSY. PRODUCER 300MM
512 0140-01183 CABLE ASSY. PRODUCER 300MM
513 0140-01184 CABLE ASSY. PRODUCER 300MM
514 0150-00466 CABLE ASSY. PRODUCER 300MM
515 0150-00494 CABLE ASSY. PRODUCER 300MM
516 0150-00496 CABLE ASSY. PRODUCER 300MM
517 0150-00498 CABLE ASSY. PRODUCER 300MM
518 0150-00499 CABLE ASSY. PRODUCER 300MM
519 0150-00500 CABLE ASSY. PRODUCER 300MM
520 0150-01304 CABLE ASSY. PRODUCER 300MM
521 0150-01305 CABLE ASSY. PRODUCER 300MM
522 0150-02219 CABLE ASSY, EMO INTERCONNECT,300MM HDPC
523 0020-60617 WASHER PLATE, LCF PRODUCER SE
524 0040-40553 FACEPLATE,CTRHOLE23,SACVD
525 0020-22846 GAS TRENCH COVER
526 0021-12555 SHIELD,UPPER LEFTABLE SHORT PVD
527 3700-01035 O-RING ID .424 CSD .103 VITON 75DURO AS568-111 VITON BLOCK
528 3700-01170 O-RING ID18.955 CSD.210 VITON 75 DURO/O-RING 388 VITON
529 3700-03384 GIMBAL BASE ORING ID 3.489 CSD.070 EPDM 80DURO BLK
530 3700-01943 ORING ID.176 CSD.070 VITON 75 DURO BLK
531 3700-04704 ORING ID.296 CSD.139 KALREZ8085 BEIGE
532 3700-01176 O-RING ID11.484 CSD.139 AS568-277 VITON 75 DURO
533 3700-02183 ORING ID.546 CSD.139 AS568A-207 VITON BLK
534 3700-01658 ORING ID.426 CSD.070 CHEMRAZ SC513 80
535 3700-01379 ORING ID9.975 CSD.210 AS568-377 VITON 75 DURO BLK
536 3700-02089 ORING ID.070 CSD CHEMRAZ SC513 GREENE TWEED AS568-004
537 3700-01147 ORING ID.614 CSD.070 VITON FLUORCBN
538 3700-01063 ORING ID.926 CSD.070 VITON75 DURO
539 3700-01177 ORING ID.101 CSD.070 VITON 75 DURO BLK
540 3700-01155 ORING ID13.984 CSD.139 VITON 75 DURO/G5 TGV COVER ORING
541 3700-01208 ORING ID12.984 CSD.139 AS568A-279 VITON 75 DURO BL
542 3700-01245 O-RING ID.364 CSD.070 AS568A-012 VITON 75 DURO BLK
543 839-086924-021 ASSY,STUD,SOCKET
544 716-022030-004 SLV,QTZ,STEPPED,PIN(1C)
545 839-052157-010 ABE AL INNER
546 839-086924-025 ASSY,STUD,SOCKET
547 716-012640-012 Quartz disk(Kiyo)
548 839-044157-031 UPPER ELECTRODE INNER FLEX45
549 716-082039-025 TOP ELECTRODE OUTER
550 716-069688-041 TOP ELECTRODE INNER
551 716-018468-092 GND cover ring
552 716-013402-053 Hot edge cover ring
553 716-087943-812 QUARTZ COVER RING INNER
554 839-052158-020 ABE AL OUTER
555 716-031257-531 TOP EDGE RING
556 839-020965-020 UPPER ELECTRODE OUTER
557 734-073584-121 O-RING,KALREZ 9100,1.049
558 734-007524-284 O-RING,CHEMRAZ,AS568-284
559 734-061280-014 ORING ID .489 CSD .070 VITON
560 734-007524-275 O-RING,CHEMRAZ,AS568-275
561 734-007524-274 O-RING,CHEMRAZ,AS568-274
562 734-061280-275 O-RING,VITON,10.484ID X
563 734-061280-274 O-RING,VITON,9.984 ID
564 734-061280-329 O-RING, VITON
565 734-007524-122 O-RING,CHEMRAZ,SSE38,1.1
566 0010-36734 300mm Producer Ceramic Heater
567 0010-38646 ASSEMBLY, HINGE, TI-XZ
568 0010-70252 Assy 6" Heater VCR W/2TC'S *MSG* STD 
569 0010-76149 HTHU 6" Heater
570 0015-09334 SCREW 10-32 X 1.25 CAPTIVE
571 0020-09450 Tube Gas Feed OD 6.35MM BWCVD
572 0020-13958 FINGER, 8" HTHU HEATER
573 0020-13973 BLOCK, MOUNTING, TOP SENSOR LLKA, WBLL
574 0020-13975 BLOCK, MOUNTING, TOP SENSOR LLKB, WBLL
575 0020-13974 BLOCK, MOUNTING, BOTTOM SENSOR LLKA, WBL
576 0020-13976 BLOCK, MOUNTING BOTTOM, SENSOR LLKB, WBL
577 0020-21675 ARM LIFTER DEGAS/ORIENTER
578 0040-22203 BRACKET, PILLOW BLOCK, VECTRA IMP
579 0020-05750 PLUG, W/B LOADLOCK, ENDURA INTERFACE
580 0020-20666 Themal Insulator Lifter
581 0150-21231 Cable Assy Chamber 4 INTCNT-50FT
582 0010-21246 ASSEMBLY, NON-NTM ADVANCED 101 - 8" (8" A101 Heater)
583 0020-21707 ASSEMBLY, NON-NTM ADVANCED 101 - 8"
584 0020-20439 VIEWPORT, COVER BUFFER/WAFER ORIENTER
585 0020-21708 CHUCK ORIENTER 8"
586 0010-01231 Magnet assy
587 0010-03485 300mm Magnet Assy
588 0010-03487 MAGNET, TIN/TTN ASSY 300MM PVD
589 0021-14501 BLANKOFF, EXHAUST DUCT, BOTTOM, PROD S,
590 0040-85138 PRODUCER MESH
591 0021-26909 PRODUCER MESH
592 5176-48006 SUPREMA5 BAFFLE
593 5160-06603 TERA21 BAFFLE
594 0021-26274 SCREEN(POLY)
595 0040-87219 WALL LINER (Centura E-MAX CT+)
596 0020-63668 SLIT DOOR LINER (Centura DPS2)
597 713-018296-003 INJECTOR SPACER
598 720-092464-008 MOUNTING SCREW
599 716-008608-001 SAPPHIRE WIDONW
600 716-012639-117 QTZ INJ,DUAL,IEP W/ SMOOTHER SURFACE FINISH,LAM2300 
601 716-012640-012 WDO. GAS INJ, FACE SEAL, QR
602 716-031257-531 RING, EDGE, TOP, QTZ, EBP, 300MM
603 716-026652-902 RING, EDGE, BOT
604 715-042721-810 LINER, SYM, HI FLOW, 2300 (Chamber Liner)
605 714-045744-008 LINER, CANTILVR, OUTR LNR (Liner Door)
606 714-045709-002 BLK, FLOW, SIM CANTILVR, 23 (Liner or Shutter)
607 714-045743-809 LINER, FIXED OUTR, ACME, 23 (ACME Liner out 31)
608 715-802381-104 PLATE ROCKER BARRIER
609 715-802381-002 PLATE ROCKER BARRIER
610 715-078385-200 COVER KITS (LAM 2300 Exelan FLEX45)
611 715-013639-007 GROUND STRAP_3X (LAM 2300 Exelan FLEX45)
612 839-045710-807 ASSY, SYM DOOR, 2300 (Shutter)
613 839-020965-095 ASSY,ELCTD,OUTER,.18 STEP,300M
614 839-021113-095 ASSY,ELCTD,INNER,TC,300MM
615 15-151335-00 LVR SCRN ROUND HDP 300 LOUVERED
616 15-157795-00 Gas Ring
617 15-169647-00 SPEED Nozzle 45
618 16-253739-00 Gas Ring 300mm
619 0805-6125-0030 DEPO SHIELD ASS'Y (TEL DRM 300mm)