2nd Source Parts List

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RNX 2nd New Parts List (6", 8") 20190822

Category : 2nd Source Parts List | Download : RNX 150, 200mm 2nd New Parts List 20190822.pdf


NO.

          P/N

                  Description

1 0040-09136 CHAMBER 200MM BW
2 0020-09999 PLATE, FRONT, THROTTLE DRIVE
3 0020-30335 QUARTZ TUBE HOUSING
4 0020-10135 MANIFOLD-WETER SUPPLY
5 0020-30102 OUTPUT MANIFOLD
6 0190-13175 Centura 5200 EPI - Light Pen
7 0190-75073 LOAD LOCK LEAD SCREW
8 0150-22550  CABLE ASSY, STATUS LAMP TO CNTLR-
9 0030-70046 MACHINING,BRKT CLAMP SOURCE
10 0020-20488 CLAMP BAKEOUT LAMP
11 0100-18051 Ultima HDP Plus
12 0021-09758 MAINFOLD, OUTPUT,DXZ
13 0050-75433 ROUGHING LINE,TURBO ADAPTER CVD TIN,TXZ
14 0040-54484 EXHAUST TEE, TURBO, 200MM TXZ
15 0040-63457 WATER BOX, TXZ 200MM C I P
16 0190-13558 FEEDTHRU, VECTRA IMP
17 0010-20317 Degas Lamp Assy
18 0240-23355 KIT, HTHU HEAT SHIELD, W/C, 6", 8"
19 0010-20754 PEDESTAL LIFT ASSY PC II
20 0100-01792 5Phase Drive Interface BD
21 0050-26886 WELDMENT N2 PURGE INPUT XFER
22 0050-30403 WELDMENT N2 PURGE COOLDWN CHM
23 0090-70019 SW MAGNETIC CONTACT ASSY
24 0140-05204 HARNESS ASSY, W/ ORIENTER CH E LIFT INTE
25 0010-25249 TOP COVER-3 & EXHAUST GASKET
26 0010-70871 L/L Chamber
27 0020-10763 ISOLATOR, TEFLON 200 MM, MODIFIED
28 0020-13519 BOTTOM PLATE, DUMMY CASSETTE CENTURA
29 0020-13520 TOP COVER, DUMMY CASSETTE CENTURA
30 0020-13521 WAFER REST, LEFT, DUMMY CASSETTE CENTURA
31 0020-13522 WAFER REST, RIGHT, DUMMY CASSETTE CENTURA
32 0020-13523 SIDE WALL, LEFT, DUMMY CASSETTE CENTURA
33 0020-13524 SIDE WALL, RIGHT, DUMMY CASSETTE CENTURA
34 0020-13529 INDEXER HOUSING, LEFT W/DUMMY CASETTE CENTURA
35 0020-13530 INDEXER HOUSING, RIGHT W/DUMMY CASSETTE CENTURA
36 0020-20162 PLATE, BACKINGSOURCE 11.30" ENDURA
37 0020-22909 PEDESTAL SHIELD, 6" PRECLEAN ENDURA
38 0020-25443 CLAMP RING 8" SNNF COH TIN .2MM WAF ENDURA
39 0020-27207 CLAMP RING 6" SMF PADDED HTHU HTR ENDURA
40 0020-27773 PUMPING PLATE, 200MM W/SKIRT, LPCVD XGEN
41 0020-29459 CLAMP RING, 6" SMRMF, SST, EE 3.429 ENDURA
42 0020-30066 Block Mounting
43 0020-34720 SCREW, NOSE LINER, TEFLON, SIN, DXZ P5000
44 0020-38328 COVER,HOLE 125/150MM LIFT PIN RTP PRODUCTS
45 0020-39504 COVER, SPDT SWITCH, DXZ P5000
46 0020-42284 PLATE,BLOCKER 6" EC WXZ 5000 TUNGSTEN
47 0020-42446 RING, PUMPING PLATE, 24HOLES, 200MM SING
48 0020-52785 PLATE, BLOCKER, 144 SIDE HOLES, 200
49 0020-61886 WINDOW FRAME
50 0020-64185 Pumping  Plate
51 0020-78642 FLANGE,  UPPER  EXHAUST
52 0020-79943 CLEAR  PVD  WINDOW
53 0021-02321 HINGE, OUTER, LID, DXZ, DCVD P5000 CVD
54 0021-03057 SHAFT,  HINGE,  LID,  DXZ,  DCVD
55 0021-03654 BLOCK  GAS  SPRING  CH  200MM  PRODUCER
56 0021-04277 INSERT,SLIT VALVE RTP PRODUCTS
57 0021-04304 BUSHING DELRIN GAS BOX 200MM PRODUCER
58 0021-04404 BLANKOFF,SINGLE  FREQ,  BOTTOM  MODULE,  NITRIDE550
59 0021-04795 MANIFOLD, GAS SINERGY
60 0021-06185 PLUNGER,  INTERLOCK,  SINERGY
61 0021-06315 LATCH,  LID,  DXZ
62 0021-06373 BODY,  LOWER  HINGE
63 0021-06374 BODY,  UPPER  HINGE
64 0021-06376 SHAFT  GRND,  HINGE  SINERGY  CHMBR
65 0021-06430 MANIFOLD, PLASMA TRANSPORT, CHMBR LID, S
66 0021-06952 PERF PLATE, 200MM SINERGY
67 0021-09077 ADAPTER,MCVD/DCS CHAMBER P5000 TUNGSTEN
68 0021-09625 CHAMBER,LOWER,DPS
69 0021-09721 BRACKET,HEATER LIFT DXZ
70 0021-16857 GAS MIXER, 200MM OXZGEN, LPCVD
71 0021-16858 MIXER MANIFOLD, 200MM OXZGEN, LPCVD
72 0021-17725 DISK, SNNF, SHUTTER, TA/BESC, AL-APRAYED
73 0021-18081 PLATE BOTTOM
74 0021-18082 PLATE TOP
75 0021-18083 PLATE CENTER
76 0021-18436 COVER RING, 200MM, BESC, TITANIUM 5000 TUNGSTEN
77 0021-20044 DISK 6"B101 SHUTTER SST ENDURA
78 0021-20198 SHIM  0.50MM  G-TYPE  ENCAPSULATED  MAGNET  C
79 0021-20207 SPACER 3.5MM MAGNET ROTARY FEEDTHRU SHIM
80 0021-21002 MANIFOLD WATER NESLAB B101@CH1,2,3,4
81 0021-24158 PLATE, SHIM
82 0021-27072 FACEPLATE,  ADVANCED  PATTERNING
83 0021-28010 SST  SEAL  CLAMP
84 0021-35788 PLT BLOCKER, 200MM P5000 TUNGSTEN
85 0021-37705 SIDE  RECEIVER,  LEFT  150MM,  316-EP
86 0021-37706 SIDE  RECEIVER,  RIGHT  150MM,  316-EP
87 0021-38133 BALL STUD, 5/16-18 X .86LG DXZ GAS SPRIN
88 0021-38833 PLATFORM  ELECTRO  POLISH
89 0021-38834 CASSETTE  SUPPORT  EP
90 0021-39748 BLOCKER,  PERF,  SILANE,  NITRIDE550
91 0021-46147 P-5000  DXL  RPS  PLUNGER  INTERLOCK  SW
92 0021-70210 DEPOSITION  RING,8  SNNF,  9MM,  E-CHUCK,  TI
93 0021-70375 COVER  6  PEDESTAL  LOWER,  B101  SST  IMP
94 0021-70396 COVER  DISC  W/DUMMY
95 0021-77204 GROPPER  MOUNTING
96 0021-78165 COVER  FRONT
97 0021-79977 COVER
98 0040-00904 BRACKET,AC  LINE  FILTER,BOTTOM  MODULE,NIT
99 0040-00941 CONNECTOR  RF  IN
100 0040-00942 CONNECTOR  RF  OUT
101 0040-00943 CONNECTOR  RF  RETURN
102 0040-01183 MNFLD,OUTPUT,MIXING  BLOCK,DXZ,FLUORINE  GENERATOR
103 0040-02325 HINGE,  INNER,  LID,  DXZ,  DCVD
104 0040-03149 HANDLE,  L  SHAPE,  LID  ASSY
105 0040-03771 LID,PUMPING  PLATE,GAS  SPRING,SILANE  DXZ
106 0040-18158 RING,  SYM  GAS  DIST,  ULTIMA  HDP-CVD
107 0040-22811 FINGER  EXTENDED  LIFT  HOOP  6  B101
108 0040-38666 RF  COVER,  RIGHT,  PRODUCER  200MM
109 0040-39551 LID, PUMPING PLATE, TEOS, DXZ, DCVD
110 0040-44901 GAS  BOX
111 0040-47677 FACEPLATE,  SIN,  XG,  DXZ  DCVD
112 0040-53927 GAS  BOX  CHAMBER  LID  200MM  PRODUCER
113 0040-54106 LID,  REMOTE  PLASMA,  SINERGY
114 0040-60523 RF  COVER,  LEFT,  PRDUCER  200MM
115 0040-77501 SST DISC CARRIER DDF HD
116 0040-77604 6  INCH  CASSETTE  TRAY  PLATE
117 0040-80376 BASE  GIMBAL
118 0040-89837 GIMBAL  BASE  (UNIVERSAL)  PAD  CONDITIONER
119 0041-00087 CHAMBER  BODY  200MM  XZ
120 0041-11268 CONTACTOR  GROUNDING  FOR  SOURCE
121 0041-12671 P-5000  DXL  RPS  2  HOLE  PLASMA  INPUT  MANIFOLD
122 0041-12673 P-5000  DXL  RPS  2  HOLE  LID  PLATE
123 0045-00126 PUMPING  CHANNEL,  ANODIZED,  PRODUCER  200MM
124 0270-00649 SHAFT,  PLUG,  SHIPPING,  SINERGY
125 0270-01021 CLAMP,  SHIP,  CHAMVER  LID,  200MM  SINGEN
126 0270-01133 SHIPPING  PLUG,  200MMM  SIGEN
127 3790-01259 STDF M/F 1/4 HEX X 1-3/4LG SST 8-32 THD PASSIVATE
128 3790-01400 STDFM/F 1/4 HEX X 1.50 LG SST 6-32 THD PSVT
129 3790-01114 STDFM/F  3/8HEX  8-32  X  1/2L  SST  NO-FINISH
130 0021-07128 CLAMP,TUBE  SUPPORT,OTB  FCW,CENTURA  MMF
131 0021-39097 GASLINE  HOLD  SUPPORT  3HOLE
132 0040-42386 COVER,  FLOOR  REAR  FAC,  MIDDLE,  CMF
133 0020-09064 WINDOW  FLANGE
134 0021-14255 COVER,  LEADSCREW,  LIFT
135 0021-36198 BLOCK  EXHAUST  PORT  DCSXZ
136 0040-01348 HUB,  DUAL  ZONE  HEATER
137 0040-01356 PLATE,  CHAMBER  MOUNTING
138 0040-34219 LEFT  BLOCK  CLMP/GAS  SPRNG  DXZ  FLUORINE  GENERATOR
139 0040-40598 CARRIER,  LOWER  LIFTER
140 0190-09459 Optical  cable  (RE_C)
141 3700-01351 SEAL  CTR  RING  ASSY  NW100  W/VITON  ORING  SST
142 0020-07281 PLATE,  WBLL  TOP  PLATFORM,  A200-B3MJ-PK
143 3480-01128 Bracket,  Minibeam  Sensor
144 3690-03888 SCREW
145 3780-02272 SPRING
146 3690-00436 SCREW
147 3690-01081 SCR  CAP  SKT  HD  1/4-20X  3L  HEX  SKT  SST
148 0060-13135 LABEL  FLOWMETER  ADAPTER  GEN  RACK
149 0200-05959 SINGLE RING QUARTZ
150 0040-76820 GRANITE SURFACE PLATE
151 0200-10324 DOME, CERAMIC, DPS CHAMBER, R1 ROUGH KC
152 0040-47488 Ultima RF Side Coil
153 0040-09095 GAS BOX MOUNT(8-6")
154 0020-10402 PUMPING PLATE
155 0020-10117 TEOS SHOWER HEAD 200mm
156 0040-09091 GAS BOX 456PL
157 0020-30108 CLAMP SHIELD NITRIDE
158 0020-30086 PLATE PERFORATED 150MM NITRIDE GIANT GAP
159 0020-10721 COVER,SCREW,TEFLON THIN PERF PLATE
160 0020-10403 PUMP PLATE 4,5&6 SILANE/OX
161 0020-10134 MANIFOLD OUTPUT PL
162 0020-09885 ISOLATOR THICK PLATE
163 0020-09602 INPUT MAINFOLD
164 0020-09307 BUSHING TERMINAL
165 0020-30580 BLOCKER PERF COM SIL4-6
166 0020-10936 BLOCKER PLATE,SILANE 200MM
167 0020-30797 P5000 ARC wPLATE PERF 200MM GIANT GAP NITRIDE
168 0020-09135 SUPPORT HINGE LMP MODULE
169 0020-09270 COVER, FRONT
170 0020-09604 HOUSING
171 0020-09609 BUSHING TERMINAL
172 0020-10185 SUPPORT HOOP 200mm
173 0020-10186 COVER TOP 200MM
174 0020-10759 COVER, FRONT
175 0021-10296 OUTPUT MNFLD,UNIV CH.,W/ALIGN. HOLES
176 0040-09096 VACPORT/SLIT WDW/HINGE SUPPORT-THNGSTEN
177 0040-09221 CHAMBER 200MM SACVD
178 0040-32073 GAS BOX, UNIVERSAL LID,W/ALIGNMENT HOLES
179 0020-10189 PLATE CONNECTOR 200M
180 0020-10059 RING,WAFER LIFT RP
181 0020-10943 ISOLATOR TEFLON 200mm
182 0020-42187 INPUT MAINFOLD
183 0020-42258 OUTPUT MAINFOLD- OUTER
184 0020-42262 OUTPUT MAINFOLD- INNER
185 0040-31980 GAS BOX EC WXZ
186 0040-09699 CHAMBER(WXZ)
187 0020-30407 SHOWERHEAD
188 0020-10190 PLATE CONNECTOR SACVD / WB
189 0021-07573 BRACKET, INTERFACE, LLB SIDE, SMIF
190 0021-07574 BRACKET, INTERFACE, LLA SIDE SMIF
191 0021-06742 SHIELD,TERM. BLOCK 5 POS. 9/16 CTR CENTU
192 00190-13351 BRACKET, LLB SIDE
193 0021-02249 SUPER-E(FLNAGE-A)
194 0040-38995 SUPER-E(FLNAGE-B)
195 0021-02250 SENSOR STOP
196 0021-02248 FLAG LIFT ARM
197 0021-02246 SUPER-E(SIDE COVER)
198 0040-38996 SUPER-E(BODY)
199 0040-39988 COVER UPPER
200 0020-34695 LINER, CATHODE, FULL FLOW
201 0020-38055 SUPPORT PEDESTAL
202 0040-22803 BRACKET, LEFT MATCH BOX SUPPORT
203 0020-28935 MOUNTING BRACKET, LEFT
204 0040-22489 BASE
205 0040-23215 COVER, RF WATER BOX, IMP-CU, BLT PED
206 0040-22813 CASE
207 0040-22802 HUB SPACER B101 HEATER
208 0040-08896 CASE
209 0020-34048 SUPPORT, BELLOWS
210 0050-20037 MANIFOLD PEDESTAL CD WAFER 150MM
211 0020-21114 BLADE 6" BUFFER ROBOT
212 0020-21112 CLAMP 6" BLADE BUFFER ROBOT
213 0020-21113 CAP 6" TRANSFER BLADE FROG LEG
214 0020-20356  CAP 8 BLADE, FROG LEG
215 0020-21025 CLAMP 8 BLADE TRANSFER FROG LEG
216 0020-20431 COUMATOR 6"
217 0020-21033 BLADE 6" TRANSFER FROG LEG
218 0020-21486 PLATE CONTACT DC SOURCE 11.3 LEFT
219 0020-29127 BRACKET FLOW SWITCH PVD IMP
220 0020-75872 HOOP, 6 HTHU HEATER
221 0040-13384 SLEEVED CAP, EXTENDED REACH
222 0020-75889 CLAMP, BLADE, EXTENDED WRIST
223 0020-20354 CAP 6" BLADE FROG LEG
224 0020-21024 CLAMP 6" BLADE TRANSFER FROG LEG
225 0020-27869 PEDESTAL, 6 SMF @ C & D MOD FLAT
226 0040-70187 HOUSING VGA TTW
227 0020-20972 BLOCK, FIXTURE, GAS SPRING 13"
228 0020-21219 BASE CD/PT WAFER 150 MM
229 0020-20023 OUT CASE
230 0020-20295 wFRAME SOURCE 11.30"
231 0020-20558 BLANK SLIT VALVE
232 0020-21069 SLIP-HINGE, MALE, REAR STEP
233 0020-21073 BLANK FLANGE TRANSFER W/RGA PORT
234 0020-21089 COVER, CHAMBER INTERCONNECT BD.
235 0020-22805 PLATE ADAPTER CLAMP WIDE BODY CHAMBER
236 0020-24085 PLATE ADAPTER CLAMP WIDE BODY CHAMBER
237 0020-70495 BLANK FLANGE TRANSFER CH 5 W/RGA PORT
238 0040-76073 ARM, WELDMENT, SOURCE, W/B
239 0020-25193 LOL COVER RING
240 0020-23042 ADAPTOR SOURCE 13"
241 0020-20919 COVER PVD POST
242 0020-22263 ADAPTER PVD WATER LINES ON BOARD CRYO
243 0020-23836 PLATE ADAPTER CLAMP G-12
244 0020-24748 PIN DOWEL 375 DIA 2.88LG SST
245 0020-70822 LID BRACKET
246 0020-20815 CASSETE STAGE
247 0020-20510 HEATER BOX
248 0020-20913 BOX HEATER AC POWER
249 0020-20914 COVER HTR AC POWER BOX
250 0020-70237 BUFFER BLADE
251 0020-20124 CLAMP 6" BLADE BUFFER ROBOT
252 0020-13336 CLEAN CHAMVER BASE
253 0020-20164 FRAME COVER INSULATOR
254 0020-22838 LIFT HOOP, PRELEAN
255 0020-10758 HOUSING, TC AMP
256 0020-20074 PANEL
257 0020-28364 6" ALOL SHUTTER BLADE
258 0020-21222 HOOP CD/PT 150 MM
259 0020-75199  FRAME, CHAMBER TRAY
260 0040-75141 PCD BRACKET
261 0020-76632 COVER A
262 0040-05835 MANIFOLDER OUTPUT-R
263 0040-05836 MANIFOLDER OUTPUT-L
264 0020-70823 ORIENT COVER
265 0021-70240  DXZ LIFT ASSEMBLY
266 0020-23490 MODULE BOX ASS'Y
267 0020-34831 PLATE, MOUNTING,RF/HV,W/INTERLOCK
268 0020-57450 PCW VALVE PANEL
269 0040-39754 FLANGE(T-ELBOW ASS'Y)
270 0040-22203 AL BLOCK
271 0040-20703 WIDE CHAMBER WALL
272 0020-21377 CHAMBER LID(ADAPTOR)
273 0020-70336 ROBOT ARM
274 0020-20390  ROBOT ARM HINGE-R
275 0020-20390 ROBOT ARM HINGE-L
276 0020-25769 VHP ROBOT ARM(REAR ARM(R))
277 0020-25770 VHP ROBOT ARM(REAR ARM(L))
278 0040-75906 VHP ROBOT ARM(FRONT ARM(R))
279 0040-75907 VHP ROBOT ARM(FRONT ARM(L))
280 0020-20159 PLATE
281 0021-35744 PLATE,BLOCKER,TXZ 200MM
282 0040-76072 ARM, WELDMENT SOURCE CHAMBER
283 0020-34031  CATHODE ASS'Y(HOUSING)
284 0020-24967 BLADE
285 0010-21803 UPPER DC HOUSING W/BUSS BAR
286 0020-20784 TC HOLDER
287 0020-20896 REFLECTOR HEATER, 5/6" DEGAS
288 0020-20895 BASE HEATER, 5/6" DEGAS
289 0020-20897 SOCKET RETAINER 5/6" GEGAS
290 0020-20911 BUSS BAR, LOWER 5/6"
291 0020-21686 DISC, 5/6" DEGAS
292 0020-20898 COVER, ELECTRICAL 5/6" DEGAS
293 0020-21261 GUIDE SHAFT ORIENT
294 0020-21488 PLATE CONTACT DC SOURCE RIGHT
295 0020-21688 CLAMP WINDOW CCD SEE
296 0020-21704 CHUCK ORIENTER 5"
297 0020-21706 CHUCK ORIENTER 6"
298 0020-22079 FINGER SUPPORT, HOOP CD/PT 150
299 0020-22362 HOOP, LIFTER T/C 6"
300 0020-22414 8 CHUCK, TC
301 0020-22547 SOURCE ADAPTOR(G-12 WIDE)
302 0020-22844 PRECLEAN PEDESTAL SHIELD 6"
303 0020-22982 ADAPTER TIN 8 WAFER CHAMBER 16
CHAMBER LID(ADAPTOR)(G-12)
304 0020-23208 LIFT FINGER, 101% COVERAGE,WIDE BODY
305 0020-23209  lift hoop,8"wide body,101% coverage
306 0020-23286  COVER, INSULATOR SOURCE(G-12)
307 0020-23346 RETAINER RING
308 0020-23411 WATER BOX COVER
309 0020-23442 COVER PLUMBING MOTORIZED LFT
310 0020-23441 BRACKET PLUMBING MOTORIZED LFT
311 0020-23591 TUBE, 5/6/8 VIEW SUPPORT
312 0020-23593 HOLDER ORIENTER 6"
313 0020-23621  FRAME, SOURCE G12
314 0020-24291 MOUNTING PLATE PC 2 RF MATCH
315 0020-25304 CAP, HTHU  6 HEATER
316 0020-26899 HEAT SHIELD HTHU HEATER LEFT
317 0020-27103 LIFTER HOOP(8")
318 0020-27124 PEDESTAL PC IT 6" JMF/SMF
319 0020-28258 LIFT HOOP 6" ADV 101 WB
320 0020-75128 6" CASSETTE
321 0030-75872 HOOP
322 0020-76708 FLANGE ASS'Y
323 0021-20495 HEAT SHIELD, RIGHT HALF, HTHU
324 0021-20572 PEDESTAL,6" ADV.101 FULL CVRG
325 0040-20276 UPPER SHIELD
326 0040-20727 TUBE FLANGED HTR RF LOWER ESC/HT HTR/P
327 0040-22651 CLAMP V-BLOCK MAGNET HOLDER
328 0040-24190 COVER FULL BOTTOM CHAMBER E, F
329 0020-22296 COVER ORIENTATION PCB
330 0021-07978 REFLECTOR, 8 HIGH UNIFORMITY 34 DEG  BE
331 0040-05037 BASE, HEATER
332 0020-20663 BRACKET TERMINAL
333 0020-20656 BUSS BAR LOWER 8"
334 0020-20655 BUSS BAR UPPER 8"
335 0021-08320 SOCKET RETAINER BRACKET
336 0021-08319 RETAINER, 8 HIGH UNIFORMITY KEYED SOCKE
337 0020-21218 BASE CD WAFER 200 MM
338 0040-43748 LEFT ROBOT ARM, HP+ EXT REACH ROBOT
339 0040-43749 RIGHT ROBOT ARM, HP+ EXT REACH ROBOT
340 0040-01144 BRK,AC BOX SUPPORT SIDE,MCE CHMB
341 0020-20115 SCREW,ISOLATOR DC BIAS
342 0020-22868 BUSHING, INNER SHUTTER MGN COUPLING
343 0020-27136 SUPPORT, ACTUATOR SHUTTER LINKAGE
344 0020-24782 SHUTTER ASS'Y(BRAKCET)
345 0020-28293 BLANKOFF SHUTTER ENCLOSURE
346 0020-24775  SHUTTER ASS'Y(SENSOR BRAKCET)
347 0040-21164  COOLING PLATE  ACTUATOR  SHUTTER LINKAGE
348 0040-75976 VHP ROBOT ARM-R(FRONT ARM-R)
349 0020-75907 HUB, LAMP FEEDTHROUGH
350 0020-23286 COVER INSULATOR TIN 8
351 0020-05389 PIN, REACTIVE PRECLEAN PLUS LIFT
352 0020-20781  SCREEN MONOLITH BUF/XFER CHAMBER CRYOPUM
353 0020-22263  ADAPTER PVD WATER LINES ON BOARD CRYO
354 0020-22387 8HOOP WITH TC
355 0020-22570 LIFT HOOP 6, SHUTTER CHAMBER
356 0020-22844  PRECLEAN PEDESTAL SHIELD 8"
357 0020-22980 PLATE CONTACT DC, LEFT TIN 8 WAFER
358 0020-22970 SHIELD, HI CONDUCT.UPPER 8"
359 0020-23046 ADAPTER 13" SOURCE WIDE BODY CHAMBER
360 0020-23259 HOOP LIFT 8" HIGH TEMP
361 0020-23355 PC II PEDESTAL
362 0020-23487 BRACKET MOUNTING 2-PHASE DRIVER
363 0040-23557 COVER
364 0020-26444 LIFT HOOP, WAFER, 6 HTESC
365 0020-26691 PIN, HTHU 6" HEATER
366 0020-29614 BLADE SHUTTER, 8 E-CHUCK
367 0020-37551 BRKT,ASP,MFC,REMOTE ELECTRONICS
368 0020-37947  PALLET, GAS BOX, 5200 CENTURA
369 0020-39842  LIFTER,WXZ ORIENTOR, 200MM P5000/CENTURA
370 0040-75889 BLADE HOLDER COVER
371 0040-13265 GEAR(RIGHT)
372 0020-75890 CLAMP, PIVOT, EXTENDED REACH WRIST
373 0021-04348 BLADE,PADDED 8" BUFFER FROG LEG ROBOT
374 0040-01415 COVER
375 0020-34030 BASE,PEDESTAL,ESC,SIMPLE  CATHODE
376 0020-34035 SUPPORT, LIFT CYLINDER, SIMPLE CATHODE
377 0020-34044 BLOCK, RF INSULATOR, BOTTOM
378 0040-31846  COVER, ACCESS, HELIUM AND WATER LINES
379 0040-31845 COVER, CYLINDER SUPPORT
380 0020-34074 CATHODE ASS'Y(LOWER COVER)
381 0020-34034  CYLINDER,LIFTER,ETCH CHAMBER
382 0020-34048  SUPPORT, BELLOWS
383 0020-30347 CYLINDERICAL SPACER
384 0020-09029 COOLING PIPE
385 0040-09005 BASE STD CATHODE NOT REPAIRABLE
386 0200-10246 UNI-INSERT,GDP,LINER,88 HOLD, QTZ
387 0020-31627 FLANGE BASE ESC
388 0200-01766 RPS SUPPORT
389 0040-02538 SHAFT, ALUM, CONSOLIDATED HTR, 200MM SA-
390 0021-06977 HINGE, PLATE 1/2 RABBIT, 200MM PRODUCER
391 0020-92881 RPS2 MANIFOLD, CHAMBER LID, SACVD 200MM
392 0021-06099 COVER MIXING INSERT LID PRODUCER 200MM
393 0021-06499 MANIFOLD, TEFLON FEED THRU, LID, CH PRDC
394 0021-06500 PLATE, MANIFOLD, LID, CHAMBER PRODUCER 2
395 0021-06569 INSERT RING 200MM PRODUCER
396 0021-18097 LINER, SEAL, SECTIONED, 200MM HT USG
397 0021-25875 PLATE, BLOCKER, SACVD 200MM PRODUCER
398 0021-26841 SHORT MIXING BLOCK INSERT, CHAMBER LID M
399 0040-00796 GAS BOX CHAMBER LID 200MM PRODUCER
400 0040-01618 MANIFOLD, INPUT, 200MM PRODUCER
401 0040-47028 MANIFOLD, OUT, RH, 200MM, PRODUCER, SACV
402 0040-47029 MANIFOLD, OUT, LH, 200MM, PRODUCER, SACV
403 0040-54104 SUPPORT CENTER RPS2 LID 200MM PRODUCER
404 0040-70319 FACEPLATE, WATER COOLED, 200MM SACVD PRO
405 0040-97965 MANIFOLD, RPS2, 200MM SACVD PRODUCER
406 0021-03637 FACEPLATE, SILANE PRODUCER 200MM
407 0040-54082 PLATE MOUNT, ASTRON EX, LOW K, PRODUCER
408 0020-30111 PLATE,BLOCKER 200MM BW
409 0020-10771 PERF PLATE 150MM OX(TEOS)
410 0021-30797 SHOWERHEAD 8" (PASSIVATION)
411 0020-42286 PLATE,PERF 6" EC WXZ
412 0021-01572 FACEPLATE, GIGA-FILL SACVD, BPSG CENT 23
413 0020-16215 PLATE BLOCKER 200MM,BW FOR WSIX LID
414 0020-30406 PERF.PLATE 150MM BW
415 0020-32036 PLATE, BLOCKER .100 SX, UNIVERSAL CHAMBE
416 0040-37667 LID PLATE, TXZ CIP
417 0040-02132 LID PLATE BKM1 ENHANCED TXZ 200MM
418 0020-61943 BOCKER PLATE
419 0020-42083 PLATE, PUMPING, 6" FC, WXZ
420 0040-02520 GAS BOX, SILANE, 200MM PRODUCER
421 0020-33677 TUBE, LIFT, DXZ
422 0021-09914 PLATE,BLOCKER,DXZ SACVD,CENTURA
423 0040-61877 LID, PUMPING PLATE, TEOS, GIGAFIL, SACVD
424 0021-02797 SHIM,CLAMP SPRINGS,CXZ LID
425 0020-20340 DOOR TRANSFER SLIT VALVE
426 0021-20718 PEDESTAL COVER LOWER 8" B101 REV 2.1 SST
427 0020-29343 SHIELD CLAMP, DARKSPACE .727 TALL VECTR
428 0010-36522 ASSY,EDGE RING,TXZ,200MM,SNNF
429 0020-27804 PEDESTAL, A101 HI-PWR POIS COH-TITIN
430 0020-28715 PIN, RESTRAINT, HTESC
431 0020-23811 8" COHERENT W/1.25:1 0.5" HEX
432 0020-38753 LIFT PIN,CONDUCTIVE,SIMP. CATHODE
433 0020-76301 ADAPTER, SLIT VALVE
434 0020-70643 OBS, DOOR, SLIT VALVE, ADOIZED, CENTURA
435 0020-34326 GAS INLET, COVER SSGD
436 0020-30190 wADAPTER,TOP,METAL ETCH CHMBR
437 0020-09030 BASE FLANGE
438 0050-31101 COVER, GAS INLET, SSGD, MxP
439 0021-10223 LINER,CHAMBER,CLAMP LID
440 3690-03341 SCR CAP PNL SKT HD 1/4 X 1.50L HEX SST
441 0020-33881 TUBE,STD CATHODE,R2
442 0020-33883 CYLINDER,HOT INNER,R2 STD CATHODE
443 0020-31613 CYLINDER,LIFT,ALUM,150MM
444 0020-04194 TOP LID
445 0020-33998 PLATE,COVER ACCESS PANEL- P/C END POINT(SUPER E)
446 0020-32046 BASE EXTENSION, ESC, FOCUS RING
447 0020-01416 Clamp Ring, 8" SNNF, SST, E/E 3.302mm, 1
448 0020-22492 CLAMP, SHIELD COLLIMATOR LOWER 8"
449 0020-22493 CLAMP, SHD COLLIMATOR UPPER 8"
450 0020-23041 CLAMP, SHD 8" WAFER
451 0020-24101 8 PC II SNNF PROCESS TI PED
452 0020-24914 COVER RING  SST  8 101 COVERAGE
453 0020-26112 CLAMP RING 8 HOT SNNF ALUMINUM
454 0020-26967 PC II GAS TRENCH COVER
455 0020-26973 8 TI SHUTTER DISK
456 0020-27690 CLAMP RING 8 SNNF SHUT COMP 10405ARN SS
457 0020-28754 PEDESTAL COVER 8 101 VECTRA-IMP
458 0020-28867 DISK 8 ADVANCED 101 SHUTTER
459 0020-28906 HUB DC BIAS MODIFIED SHUTTER COMPATIBLE
460 0020-28937 COVER, 8 PEDESTAL ADVANCED 101
461 0020-29320 SHIELD, DARK SPACE, VECTRA IMP
462 0020-42082 PLATE, PUMPING, 8 FC, WXZ
463 0020-34694 LINER,GDP,R2 OXIDE
464 0021-02983 SHIELD, INNER, TXZ, STD
465 0021-35752 OBS SHIELD,INNER,TXZ
466 0021-35869 ERF PLATE,TxZ 200MM
467 0021-35946 EDGE RING, TxZ 200mm
468 0021-02395 INSERT RING, ALUMINUM, DXZ SACVD
469 0021-09104 LINER, CATHODE, ALIGNED, OXIDE ETCH
470 0200-35579 INSERT,CHB TxZ
471 0020-23400 CLAMP RING 8TIN SNNF MOTOROLA
472 0021-36625 COVER,SIDE,LOWER CHAMBER,DPS
473 0040-33998 LINER, SLIT LINER DOOR
474 0040-02609  LINER, CATHODE, MAGNET, SUPER-E
475 0040-09893 CHAMBER BODY,R2,EDGES GAS FEED
476 0020-34297 TOP COVER, SSGD, R2 CHAMBER
477 0040-38994 SHROUD TOP
478 0040-39619 LID, CLAMP, SLIT VALVE DOOR - 200MM CENT
479 0020-75041 DOOR LOAD LOCK
480 0020-19002 DOOR, SLIT VALVE SHO
481 0020-38663 SPACER,SLIT VALVE,MXP CENTURA
482 0020-23981 LoadLock Housing(A)/SIDE RECIVER
483 0020-31774 CYLINDER, HOT INNER
484 0010-01412 ACTURATOR ASSY-SLIT LINER DOOR
485 0040-22274 ADAPTER, REV 4.3/4.2 VECTRA IMP
486 0020-26823 SHIELD  6 HTHU DEPO LOW KNEE
487 0040-20133 COOL DOWN FLANGE
488 0020-33808 ADAPTER, GAS FEED ASSY, A3 DPS(METAL)
489 0020-75988 LIFTER, 200MM WAFER ORIENTER, OPTIMA
490 0040-31953 ADAPTER,GV,LOWER CHAMBER,DPS MEC
491 0020-33804 ADAPTER, GAS FEED, DPS MEC(METAL)
492 0020-33805 COVER, GAS FEED, DPS MEC(METAL)
493 0020-33806 CHAMBER, UPPER, DPS A3(POLY)
494 0021-00540 PLATE, UPPER CBR BLANK,DPS-200MM(POLY)
495 0021-01421 CHAMBER, UPPER,A-COAT,M-DPS(METAL)
496 0020-63668 DOOR, SV BLOCKER, SINGLE ROD, DPSII
497 0040-41703 DOOR, SLIT VALVE, DPS 2
498 0021-42764 LOWER LINER
499 0041-08152 LOWER LINER WITH SPOOL DPS
500 0021-38119 FACEPLATE, DXZ DCVD CENTER HOLE
501 0021-19495 HOOP, 200MM, ASP
502 0040-35487 REDUCER LINE, SS316L, METCH R2 SEIKO 301
503 0040-34866 LINER, CATHODE, MAG RING, WAFFEL-LESS, D(E-Max)
504 0040-03260 DOOR, SLIT VALVE DOOR, EMAX 200MM
505 0040-03264  LINER, CATHODE, MAGNET RING, DIRECT-COOL
506 0040-03265 LINER, DGDP, CHAMBER(E-Max)
507 0040-50414 DOOR, SLIT VALVE, WAFFLE-LESS, 200 EMAX
508 0021-09007 COVER, UNI-LID, SSGD, MXP
509 0021-09835 LINER POLY, MXP PLUS, 1/4 THICK
510 0040-77343 SUS FLEXTUER
511 0020-09881 ADAPTOR MANIFOLD
512 0020-10123 PLATE PERF NI 200MM
513 0020-30983 PLATE, TOP, CHMBR, PRSP
514 0021-09761 GAS BOX, SIN, DXZ
515 0020-30681 MANIFOLD, INPUT SACVD(IMO)
516 0020-34736 MANIFOLD INPUT(DXZ TEOS)
517 0021-09760 GAS BOX(DXZ TEOS)
518 0021-09601 CHAMBER, UPPER, DPS(METAL)
519 0040-34865 LINER, DGDP, CHAMBER, WAFFLE-LESS, 200MM Emax
520 0040-90491 LINER CHAMBER , 1.25 GAP, 200MM EMAX VH
521 0020-04993 BLOCK GAS FEED ULTIMA HDP-CVD
522 0020-23152 PIVOT ARM RIGHT W/HELICOILS
523 0020-31493 GAS DISTRIBUTION PLATE, 133 HOLES
524 0020-32259 TAS DIST PLATE, 119 HOLES, .156 THICK
525 0040-09723 UNIBODY, ETCH CHAMBER WITH .397 STEP
526 0020-31035 MANIFOLD INPUT BWCVD
527 0020-34840 MANIFOLD OUT, BSE MCVD
528 0040-09323 GAS BOX UNIVERSAL LID
529 0020-30198 TUBE, EXTERNAL, TAPERED, EXT CATHODE
530 0020-32117 HOUSING,INNER THROTTLE VALVE
531 0020-10119 PLATE PERF 100-150M
532 0020-19003 INSERT, SLIT VALVE SHO(BUFFER)
533 0021-06092 DOOR SLIT LINER
534 0020-09610 PLATE RETAINER
535 0020-23106 CLEAR COVER, PVD CH
536 0020-26961 PLATE PUMPING 200MM SHADOW RING BWCVD
537 0020-30602 PLATE PUMPING 200MM SHADOW RING BWCVD
538 0020-64327 HOUSING, GRIP ACTION SUSCEPTOR SUPPORT S
539 0021-01598  FACEPLATE, NICKEL TI-XZ
540 0021-04793 SPOOL, EXHAUST, CHAMBER TICL4 TIN
541 0021-06043 ADAPTER, DXZ, TOP MOUNT, FLUORINE GENERA
542 0021-06044 INSERT, MIXING BLOCK, FLUORINE GENERATOR
543 0021-09718 LINER,SLIT VALVE
544 0021-09787 LID, PUMPING PLATE, SIN, DXZ
545 0021-37053 BRACKET, RECESSED ENDPOINT WINDOW
546 0040-00221 PUMP TO BY PASS 200MM(NIT)
547 0040-00906 BASE,HEATER,NITRIDE550
548 0040-01075 BASE CONNECTOR, HEATER
549 0040-01783 ADAPTER GAS LINE DXZ
550 0040-01834 MANIFOLD, INPUT, DXZ, FLUORINE GENERATOR
551 0040-02954 MOUNTING RING,DOME,.40 COIL HT,HR DTCU,
552 0040-04650 RING, SYM. GAS DIST. 24 PORTS, ULTIMA
553 0040-09094 CHAMBER STD 200MM
554 0040-35132 BASE PLATE EPi CHAMBER
555 0040-47723 MANIFOLD, OUTPUT, 1 HOLE, RIGHT, 200MM P
556 0040-47724 MANIFOLD, OUTPUT, 1 HOLE, LEFT, 200MM PR
557 0040-61266 GAS BOX, SIN, DXZ DCVD
558 0040-62900 CENTER GAS FEED BLOCK TOP CLEAN ULTIMA 1
559 0040-89620 BUFFER ROBOT BLADE
560 0020-33333 FILTER, UV, CHAMBER
561 0020-09969 COVER PLATE RF
562 0020-13262 BLOCK, MANIFOLD, RF GEN. WATER, SAE/MS F
563 0020-40190 UV Filter for Ultima HDP
564 0040-53913 MNFLD,OUTPUT,MIXING BLOCK,DXZ,FLUORINE G
565 0020-21067 STEP, REAR
566 0020-20595 STRIP, HOLD DOWN, 10 CHANNEL GASBOX
567 0020-20596 GASKET, 10 CHANNEL GASBOX
568 0040-75117 ENCLOSURE, VALVE, REAR, RIGHT
569 0020-20597 10 channel gasbox cover
570 0020-21217 COVER, 10 CHANNEL GASBOX
571 0020-21068 BRACKET, REAR STEP, RIGHT
572 0020-21091 COVER, CHAMBER A/B INTERCONNECT BD.
573 0010-01419 LONG LEVELING FOOT ENDURA
574 0021-09218 circuit breaker box cover
575 0040-75200 PANEL BLKHD. PROCESS CHAM.
576 0040-23559 BRACKET, RF MATCH MOUNT
577 0040-22976 BRACKET,2 STAGE LL VENT,MAINFRAME SUPPORT
578 0020-21214 SPACER, REAR STEP
579 0020-40137 LOCK SHIPPING DOOR, LLC
580 0040-52152 BLADE, SHUTTER, 8 TA/BESC; W/PIN
581 0040-76086 BRKT, GEN RACK, STABILIZER NON-OFFSET
582 0040-85134 SHIPPING FIXTURE, BESC MOTORIZED LIFT
583 0020-20018 TOP COVER, REAR
584 0020-22635 CABLE HOLD DOWN
585 0020-13138 COVER, GAS BOX, INTERCONNECT
586 0020-23687 BRACKET, GUIDE SOURCE, SIMP 200MM
587 0040-23558 CLAMP, RF MATCH MOUNT
588 0020-21070 SLIP-HINGE, FEMALE, REAR STEP
589 0021-23198 HOOP, LIFT, OPEN, 8 MCA E-CHUCK
590 0020-70460 PLATE AIR EXHAUST, TECH SINGAPORE
591 0040-76087  BRKT, GEN RACK, STABILIZER W/OFFSET
592 0020-27437 COVER TURBO PANEL SINGLE NT20
593 0020-20818 COVER PANEL PNEUMATIC DISTR BD
594 0020-34431 BRACKET, ENDPOINT, DPS MEC(Metal)
595 0020-18330 HARD STOP,UPPER,ROBOT EXTENSION
596 0020-18333 ROBOT FLAG,ROBOT EXTENSION
597 0020-18329 HARD STOP,LOWER,ROBOT EXTENSION
598 0020-18462 PLATE,LOWER MOTOR,ROBOT EXTENSION
599 0040-00022 WELDMENT RF WATER BOX CU SZ ESC CHILLER
600 0040-08952 WATER, WATERBOX COOLING LINES
601 0020-44559 COVER, WAFER ORIENTER CONTROLLER PCBA
602 0020-21325 BUSS BAR, SHORT AC REMOTE
603 0020-21326 BUSS BAR, LONG AC REMOTE
604 0020-13145 COVER, FRONT, LEFT/RIGHT INDEXER, NBLL
605 0040-22592 COVER SHIPPING PC MOD. FOR GAS TRENCH
606 0040-81262 COVER LEFT SIDE RIGHT INDEXER LEFT INDEXER
607 0020-75379 SHIELD, BUS MAIN AC
608 0040-37907 RETROFIT BRACKET, MOUNTING ASSEMBLY, TTW MONITOR
609 0040-45473 COVER LEFT SIDE RIGHT INDEXER
610 0040-45475 COVER RIGHT SIDE RIGHT INDEXER
611 0040-45477 COVER RIGHT SIDE LEFT INDEXER
612 0040-08953 BLANKOFF, SZBESC WATERBOX FLOW SWITCH
613 0040-21338 SUB PANEL 3RD MON W/2ND SW
614 0020-21194 BRACKET, SHIPPINGCLDWN, WATER LIFT
615 0020-20460 BASE, ADAPTER HANDLE, CASSETTE LOADLOCK CHAMBER
616 0020-20839 INSULATOR, COVER HARNESS TRANSFER & BUF. CHAMBER
617 0040-49556 COVER PRE-CLEAN/COOL DOWN MONOLITH
618 0020-02394 DUMMY TARGET, 200MM SIP TTN SOURCE
619 0020-09680 BRACKET HANDLE
620 0020-20929 INSULATOR MAG SWITCH
621 0020-20838 BRACKET,HARNESS CONNECTOR, HP TRNFR & BU
622 0020-20930 BRACKET MAG SWITCH
623 0020-18295 COVER, SCREW, 3/8-16 UNC, ALUM
624 0020-98018 ASP+ Applicator Flange
625 0020-75144 ACTUATOR SAFETY VALVE
626 0020-75145 MOUNT, SAFETY VALVE
627 0020-21266 FLAT COVER, CHAMBER INTERCONNECT BD.
628 0020-18366 SCREW,SLOTTED PAN HD, 8-32 X 5/16L, MONE
629 0020-18367 SCREW,SLOTTED PAN HD, 8-32 X 0.15L, MONE
630 0020-07293 Bracket B/D HX Valves TPCC
631 0040-84641 Cover Floor Right Rear FAC, W/DPN, CMF
632 0190-05335 Outrigger Support Assy, TPCC AC Box
633 0040-50293 Cover Floor Pneumatic Section DPN. CMF
634 0040-50290 Cover Floor Rear FAC, Middle DPN, CMF
635 0020-76216 OBS: SHIELD CONTACTOR MAIN AC
636 0040-51377 PANEL, DUAL TURBO CONTROLLER, LEYBOLD NT
637 0020-33815 PLATE, BLANKOFF, DPS MEC
638 0020-21582 STRAP UPPER AC BOX
639 0040-49047 STRAP CENTER AC BOX
640 0021-22230 CLAMP,BOTTOM CABLE HOLDER SOURCE GROUNDS
641 0040-49046 STRAP SIDE AC BOX
642 0040-49048 ASSEMBLY PLATE ADAPTER
643 0020-20791 AC COVER CHAMBER 1-4,A&B
644 0021-22229 CLAMP,TOP CABLE HOLDER SOURCE GROUNDS
645 0020-02922 SPACER LOWER GUARD LONG MOTORIXED LIFT
646 0020-02921 SPACER LOWER GUARD SHORT MOTORIXED LIFT
647 0020-11162 SPACER LOWER SLIT VALVE SIDE MOTORIXED LIFT
648 0040-42380 ADAPTER PLATE
649 0040-42379 CONNECTING PLATE
650 0021-22484 SHIELD MAIN AC CB1 600A
651 0020-29033 PLATE, ADAPTER, CB1, 600A MAIN AC
652 0020-08099 BRACKET,BV4 PALLET 5200 CENTURA
653 0040-84643 COVER FLOOR RIGHT REAR FAC TPCC
654 0040-04110 COVER FLOOR CH.B Sin.CMF
655 0020-75199 FRAME CHAMBER TRAY ASSEMBLY
656 0020-37562 CLAMP,BOTTOM WF6/SIH4
657 0020-37563 CLAMP,TOP WF6/SIH4
658 0020-76953 BRACKET CLAMP 1/2-1 1/2WALL
659 0020-21007 BLOCK WALL CLAMP
660 0020-76473 BRKT, GEN RACK, FLOOR MOUNT
661 0270-04796 jig(emax)
662 0040-34244 SLD ASS
663 0270-01726 lift(emax turbo)
664 0227-61662 200mm cassette
665 0020-23213 lift pin
666 0040-21529 MOUNTING BRACKET
667 0020-40706 REAR INDEXER COVER
668 0020-05228 TUBE SUPPORT CLAMP
669 0020-13611 BRACKET HOLD MFLD ADAPT
670 0040-06368 Floor Panel
671 0021-10902 KICK PLATE
672 0021-23214 LIFT PIN, ADJUST, FAST LIFT, 200MM, EMAX
673 0020-27674 COVER
674 0040-01089 OTB BRACKET
675 0020-05227 BRACKET,TUBE SUPPORT,OTB FCW,CENTURA MMF
676 0020-70348 WINDOW, UPPER CLEAR
677 0040-32595 rear mounting bracket
678 0020-70347 WINDOW, LOWER CLEAR
679 0021-35569 PANEL, FLOOR, BLANK, POS C/D
680 0021-35570 PANEL, FLOOR, BLANK, POS E/F
681 0010-76136 ASSY, WAFER LIFT HTHU HEATER
682 0040-20811 ADPATER ELBOW WITH CRYO BAFFLE ROUGHING
683 0040-20697 ARM SOURCE WELDMENT HIGH  TEMP CHMBR
684 0020-10002 FLAGE THROTTLE DRIVE
685 0021-35054 CLAMP,QUARTZ WINDOW,ATM CHMBR LAMP HOUSING
686 0021-04266 CLAMP, LAMP HOUSING, ATMOSPHERIC CHAMBER
687 0040-62234 WELDMENT SIDE TUBE FI OUTRIGGER
688 0020-37471 BRKT, LEFT HINGE,ATM CHMBR LAMP HOUSING
689 0020-37472 BRKT,RIGHT HINGE,ATM CHMBR LAMP HOUSING
690 0020-37473 RING,SUPPORT,WINDOW,QUARTZ,ATM CHAMBER
691 0020-75990 BLANKOFF, MAINFRAME FLOW SWITCH
692 0021-03667 SPACER, HARD STOP, HEATER LIFT, TXZ MOD
693 0040-22457 WELDMENT, OUTRIGGER, CVD GASBOX
694 0020-76580 DUMMY TARGET FOR 6"/8" WAFER
695 0021-08190 BRACKET, SUPPORT XDCR
696 0020-20627 BLOCK MOUNTING MFC
697 0020-28744 COVER PLATE
698 0020-20060 PANEL TURBO CONTROLLER
699 0020-24412 CATHODE SWITCH COVER PRECLEAN 2
700 0040-22819 COVER, AC BOX B101 WATER BOX
701 0020-27123 PEDESTAL, PCII 8" SNNF
702 0020-76384 INTLK TRIP BRACKET, PCII RESN
703 0020-23959 PANEL AC OUTLET 20A GEN RACK
704 0020-20699 CLAMP AR FLEX 8"  GATE VALVE
705 0020-20700 CLAMP END AR FLEX 8 GATE VALVE
706 0021-76346 COVER, LEAD SCREW HT ESC
707 0020-29957 DEFLECTOR, WATER, GENRACK
708 0021-22268 BLOCK MOUNTING SHUT-OFF VALVE MODIFIED
709 0021-24811 INSERT LINER, EXHAUST, TXZ 200MM
710 0021-20450 TEE NUT PINCH GUARD HTESC RF
711 0020-27864 PANEL PNEUMATIC CONTROL 6 STATION
712 0021-04258 PLATE, RETAINER ALUMINUM
713 0021-20744 BRACKET DC BLANKOFF RIGHT RF MATCH REV
714 0021-21874 SHIELD, RF HEATER TOP, 1.574" SHAFT
715 0021-20777 Gas panel cover, MFC Access Left
716 0021-20787 GAS PANEL COVER, MFC ACCESS, RIGHT
717 0021-20449 GUARD,PINCH POINT,HT ESC STD/WC CHAMBER
718 0050-75354 FEEDTHRU ADJ AR, MIX
719 0020-21673 LOAD LOCK MECHANISM SHIELD
720 0020-23951 BLADE 8" SHUTTER
721 0020-20752 FINGER HOOP 200MM CD
722 0020-29409 CONDUCTOR,FLEX DC BIAS
723 0021-04256 BLACKOFF, MAINFRAME FLOW SWITCH
724 0021-04257 CUP OUTER FEEDTHRU SUPPORT SST RECESSED
725 0020-70633 BRKT, MTG, STATUS LMP
726 0040-84493 MOUNT, LEAD SCREW GUARD
727 0020-29582 GUARD, LEAD SCREW
728 0040-23472 BLANKOFF HTESC PWR SUPPLY SHASSIS
729 0040-76528 WELDMENT, 8" HOOP, PVD STD CHAMBER
730 0020-07128 CLAMP, 3/8 IN GASLINE, BOTTOM
731 3180-01048 CATCH PUMP
732 0020-79260 MOUNT, NOZZLE
733 0020-78401 RIGHT HOOK
734 0040-77742 EXHAUST BRACKET
735 0020-79261 BRACKET , MTG
736 0020-36430 BRKT,MTG CURRENT XFORMER
737 0020-78383 CATCH BRACKET
738 0020-13460 PROT COVER, GFI SENSOR, PVD CENT
739 0020-79339 MANIFOLD
740 0020-76435 BRACKET, MOUNT, LASER
741 0020-42254 CLAMP BYPASS/FORELINE GAS MOD
742 0020-76975 BLOCK, CLAMP, REAR, UPPER, CHBR C&D, CENTURA
743 0021-76439 ADAPTER, STANOFF, EARTHQUAKE CENTURA
744 0021-22493 BUTTON, RF MATCH INTERLOCK
745 0020-13261 BLOCK, CLAMP REAR, LOWER, CHBR C&D, CENTURA
746 0021-22495 CLAMP, RF MATCH INTERLOCK
747 0021-08978 BRACKET LEFT POWER SUPPLY CNTLR CENTIRA II
748 0021-08977 BRACKET RIGHT POWER SUPPLY CNTRL CENTURA II
749 0020-76980 MOUNT, CLAMP, REAR CHAM A&B, CENTURA GASLINES
750 0020-76979 MOUNT, CLAMP, REAR CHAM C&D, CENTURA GASLINES
751 0021-22494 PLATE, RF MATCH INTERLOCK SW HOUSING
752 0020-07259 PLATE, ISOLATOR CLAMP, WXZ
753 0020-76976 BLOCK, CLAMP, REAR, MIDDLE, CHBR C&D, CENTURA
754 0020-42255 BASE CLAMP BYPASS/FORELINE GAS MOD
755 0020-42259 CLAMP ISOLATOR EC WXZ
756 0020-76995 RUNWAY HORIZONTAL, GASLINE CENTURA GASPANEL
757 0020-30511 MANIFOLD WATER
758 0020-42171 SHIELD, HTR RETRACT INTLK GECO
759 0020-76981 RACEWAY, REAR, LEFT, CENTURA UHP GAS PNL
760 0020-75265 COVER, LEFT RUNWAY, COMMON CENTURA GASLINES
761 0020-76982 RACEWAY, REAR, RIGHT, CENTURA UHP GAS PNL
762 0020-41512 BRACKET, PNEUMATIC MANIFOLD COVER, LOW PRESSURE
763 0040-54479 BRACKET, PNEUMATIC MANIFOLD COVER, HIGH
764 0040-13577 PANEL ASSY, SID EPANEL, A/C FRONT
765 0021-76435 PANEL, A/C RR, B/D FR COVER SIDE EQ, MF
766 0040-13576 PANEL ASSY, SID EPANEL, B/D FRONT
767 0021-70161 PANEL,SIDE UPPER FRAME,REAR,CENTURA COMMON
768 0020-75264 COVER, RIGHT RUNWAY, COMMON CENTURA GASLINES
769 0020-37652 PLATE MID COVER LEFT
770 0020-37653 PLATE MID COVER RIGHT
771 0020-76475 BRKT, GEN RACK, STABILIZER MARKER
772 0020-76572 CLAMP, PLT REAR WATER LINE FAC I/F CENTURA 5200ST
773 0020-76618 CLAMP, HOLD REAR WATER LINE FAC I/F CENTURA 5200ST
774 0020-76571 CLAMP, BASE REAR WATER LINE FAC I/F CENTURA 5200ST
775 0020-76570 CLAMP, HOLD FRNT WATER LINE FAC I/F CENTURA 5200ST
776 0020-76569 CLAMP, BASE FRNT WATER LINE FAC I/F CENTURA 5200ST
777 0040-23995 FLOOR COVER REAR SEC POST B&D
778 0040-76587 PANEL FLOOR, FRONT, POST A/C, MCVD, SECTION TWO
779 0021-76374 COVER FLR REARFRAME MID SEC MCVD CMMN M/F PH II
780 0021-76378 FRONT COVER GL SECII MCVD CMMN M/F PH II
781 0021-76372 COVER FLR CHBR TRAY C&D MCVD PH II
782 0021-76373 COVER FLR CHBR TRAY A&B MCVD CMMN M/F PH II
783 0021-76375 FLOOR COVER, FRT OUTER POS. C, MCVD PH II
784 0020-76431 CENTER PLATE UPPER FRAME REAR CENTURA 5200ST
785 0020-40161 PLATE, KICK
786 0020-13335 COVER,GL,REAR,MCVD COMMON M/F
787 0021-06354 FLOOR COVER, FRT OUTER POS. D, MCVD PH II
788 0020-47600 PANEL FLOOR, FRONT, POST A/C, MCVD, SECTION ONE
789 0021-06367 FRONT COVER, POS. D MCVD CMMN M/F PH II
790 0021-35565 PANEL, FLOOR, PNEUMATICS
791 0021-35566 COVER, GAGES, INERT GASES
792 0021-70169 COVER, FLR REARFRAME, OUTER SECTION
793 0021-70288 FLOOR COVER FRT SEC. POST B&D
794 0020-13217 PLATE, REINFORCING, EARTHQUAKE BRKT MTG
795 0040-23656 cassette nest 25slot mod
796 0020-76429 SIDE PLATE UPPER FRAME REAR CENTURA 5200ST
797 0040-76091 FRONT PANEL, RIGHT REAR, CENTURA SKINS
798 0040-76090 FRONT PANEL, LEFT REAR, CENTURA SKINS
799 0040-02980 EMO Bracket
800 0040-07423 TOP PANEL, REAR, UGP
801 0040-08003 Front Panel 3 for singen skin
802 0040-76092 FRONT PANEL, TOP REAR, CENTURA SKINS
803 0020-43511 PANEL, LEFT FRONT WITH LAMP TOWER
804 0040-76093 FRONT PANEL, TOP FRONT, CENTURA SKINS
805 0020-07431 EMO BLANK OFF CENTURA SKINS
806 0021-10965 SKID MICROWAVE GENERATOR REMOTE PLASMA SOURCE
807 0021-03844 ENCLOSURE APPLICATOR WATER SWICH GIGA-FILL SACVD
808 0020-27383 BRACKET PNEUMATIC MANIFOLD COVER
809 0040-21333 Sub Panel Standard Serial/Video PCB
810 0030-00292 Washer Flat 0.562ID*1.50OD*0.78THK Teflon
811 0040-64739 DOOR REAR COMMON
812 0020-75460 Panel Water Switch MF
813 3090-01250 Bolt, Eye Forged 1/2-13*1L
814 0020-22821 Cover, Wafer Map LED
815 0020-23203 Cup, RF Match INTLK
816 0020-29311 spacer, source guide pin, vectra imp
817 0021-10789 BRACKET, TXZ SLIT WINDOW
818 0020-27365 Baratron Shipping Fixture
819 0021-06361 Bracket, 486PC P2 Distri BD PVD
820 0021-22587 NUT RF CONNECTOR, 10-32
821 0020-76742 Bracket, Endura Xfer Lid
822 0020-52812 Endura Front Bracket Bottom
823 4000-01321 CDCGE Front Panel, 2HP*3U
824 0020-76740 Bolt, Lid Bracket Assy
825 0020-29350 Cover, Shipment Packing Vectra-IMP Feedthru
826 0020-76474 BRKT, GEN RACK, CONNECTOR PLATE
827 0021-07979 Bracket, Collimator High Unifomity
828 0021-04234 Bracket, Enhanced Handler Shipping
829 0020-20817 COVER, FRONT LEG
830 0020-10107 Top Cover Front Left/Right Side
831 0021-12427 GUARD, WATER BOX TO WAFER LIFT, SZBESC
832 0040-02069 PANEL, SECONDARY SERIPLEX GENRACK BULKHEAD
833 0040-05881 COVER RF WATER BOX SUB-ZERO ESC 1.574" SHAFT
834 0040-07936 GUARD, UPPER SLIT VALVE SIDE, MOTORIZED LIFT
835 0040-20165 BRACKET VCR CROSS MIXED
836 0040-61804 GUARD, LOWER, CLEAR, MOTORIZED LIFT
837 0040-38711 POST,PVD CHAMBER CART
838 0040-79705 GUARD, LOWER, CLEAR, FLAG ACCESS, MOTORIZED LIFT
839 0040-86545 BRACKET WATER FLOW
840 0021-22011 TUBE, FLANGED, HEATER LIFT BEARING, BESC
841 0020-20719 RAIL SUPPORT RF GEN CABINET
842 0020-05808 CLAMP, INSERT INSULATOR
843 0020-07274 SPACER, SOURCE GUIDE PIN, SIP
844 0020-28743 BLOCK,  WATER IMP
845 0020-02513 SHIELD, RF EMISSIONS, SIDE, SIP TTN SOURCE
846 0040-20037 UNION, FLEX "T" 8" GATE VALVE
847 0040-07287 PLATE, RF EMISSIONS GROUNDING, SIP SOURCE
848 0020-02514 SHIELD, RF EMISSIONS, CRYOSIDE, SIP TTN SOURCE
849 0020-02515 SHIELD, RF EMISSIONS, ROBOTSIDE, SIP TTN SOURCE
850 0020-02920 BRACKET SENSOR FLAG MOTORLIZED LIFT,SZBESC
851 0021-31991 FLAG SENSOR MOTORIZED LIFT
852 0040-23542 POST, FLAG MOUNT, MOTORIZED LIFT
853 0020-70717 LEVER, GAS POST, MACHINED
854 0020-70781 PLATE 18KW POWERSP CORD STRN RLF
855 0020-13998 PLATE, SOURCE ALIGNMENT PIN
856 0020-20841 BOLT,GAS POST
857 0021-08783 HOLDER LEAD SCREW COVER CU SZ ESC WATERBOX
858 0020-08104 PLATE, CONVERT SZ CHILLER TO ROOM TEMP WATER BOX
859 0020-19544 BRKT, INTERLOCK SWITCH SMIF
860 3790-01723 STDFM/F 3/8 HEX 8-32 X 1.0L SST NO FINIS
861 0020-24319 CLAMP 2" & 1.5" PIPE
862 0270-20069 8" CASS INDEXER TO ROBOT CAL PLATE
863 3480-01055 SMC SHOCK ABSORBER
864 0020-40703 KEY, COUPLING MAIN SHAFT INDEXER
865 0270-20037 TOOL, INDEXER CALIBRATION BAR
866 0020-40704 COVER FRONT INDEXER
867 0020-40705 TOP COVER
868 0040-13907 COVER SIDE,LL A CENTURA MF
869 0040-07937 GUARD, UPPER CRYOSIDE, MOTORIZED LIFT
870 0040-76179 CROSS BAR, TRANSPORT CART
871 0010-22156 ASSY BESC MOTORIZED LIFT
872 0021-21858 STUD,MOUNTING,MOTORIZED LIFT
873 0040-23543 CLAMP,HEATER,1.574 SHAFT,PNEUMATIC/MOTO
874 0040-23544 BLOCK,MOUNTING,1.574
875 0040-24228 SHLD RF HTR BTM 1.574
876 0040-23546 BRACKET ASSEMBLY,BELLOWS TWIST,1.574
877 3710-01085 SHAFT GND .4499
878 0020-34299 FLANGE, INSULATION, UNIBODY, .400THK
879 0045-20040 COLLAR 1.574
880 0020-21192 BRACKET SHIPPING PVD WAFER LIFT
881 0020-21193 BRACKET SHIPPING HEATER LIFT
882 0040-04134 STRAP, GROUNDING SHIELD SUPPORT
883 0030-00027 BLOCK MOUNTING SHUT-OFF VALVE
884 0020-20575 BRACKET MOTOR BRUSHLESS
885 0020-20500 SHIELD CRYO, ROUND
886 0020-20484 HUB END LAMP COVER
887 0040-70165 VACUUM LINE 1.50 X 58" KF-40
888 0020-04606 Grounding Button Support Strap
889 0020-23642 GUIDE RF MATCH MODIFIED
890 0010-39650 DPS Wafer Lift Pin Assy
891 0020-44764 CENTURA II WB HEATED LOCK
892 0020-13952 BRACKET VALVE DIFFERENTIAL PLUMBING MF POST MOUNT
893 0040-06936 PLATE LOWER BACK HEATED LL
894 0040-06934 COVER WIRE HEATED LL
895 0020-75852 Load lock Cassette stage(WBLL) Kit
896 0021-21984 BRACKET, PROTEUS FLOW SWITCH
897 3790-01779 STDF F/F 5/16HEX 10-32 X 5/8L SST
898 0020-40710 BRACKET, CASSETTE PRESENT, LLC
899 0020-28612 STEP, REAR CVD POSN 3
900 0040-44415 BRKT, ENDURA STAND SUPPORT W/HE MANIFOLD
901 0021-36020 SOCKET, LIGHT BULB,TxZ
902 0021-02155 RING, LOWER, ISOLATOR
903 0020-48700 EDGE RING, 9 HOLE, PURGE HEATER 200MM TXZ
904 0020-21716 PLUG, CVD/MONOLITH INTERFACE
905 0020-24982 COVER CVD LAMP DRIVER
906 0020-28083 STOP, H2 SENSOR ASSY
907 0020-26323 FRONT COVER
908 0050-13038 DUCT AIR METAL 2
909 0041-02999 COVER, H2 SENSOR AND DISPLAY BRACKET, CVD GAS BOX
910 0020-22313 SHIELD TERM BLOCK 2 POS
911 0020-13992 CASSET 200MM WBLL CMF CENTURA
912 0020-16149 COVER, AC BOX ON KICK PLATE, CENTURA
913 0021-02863 TOP RING, SPRING COIL, DTCU, DPS
914 0050-07045 ADAPTER, VCR VALVE, CM PORT, MXP+/EMXP+
915 0190-36045 GROUND STRAP WITH CLEARANCE MAG BRACKET
916 0020-39745 BASE H.O.T PACK 5200
917 0020-39746 PLATE BASE H.O.T PACK 5200
918 0040-75075 CLAMP AC CONDUIT CENT CHMBR FAC
919 0021-39779 FLOOR PANEL eMxP/MxP+/RPS POS
920 0021-10610 BRACKET ELBOW POS A&B R2 PH II COMMON
921 0021-00487 FLOOR PANEL MXP POS
922 4000-01254 CDCGE SCREW PAN HD, M6 X 16 POZIDRIVE ZINC-PLATED
923 0020-61544 2-PHASE DRIVER MOUNTING BRACKET
924 0021-21704 SCREEN RF SHIELD, 6 VIEWPORT IMP, PVD
925 0021-20371 BLANKOFF, N-CONNECTOR B101 HEATER WATER BOX
926 0020-34261 BRKT,GAS LINES,BOTTOM,CENTURA
927 0020-49604 BRACKET, GAS PANEL DOOR, INTERLOCK BYPASS
928 0020-20967 PANEL, 2-PLUG,RF GEN CABINET
929 0040-38840 STRAP, RACK, DXZ+
930 0270-20044 TOOL CALIB. ORIENTER 8" SEE
931 0040-38839 RACK, BASIC, NITRIDE550
932 0020-39869 BRKT., BLOCK VALVE, GAS BOX, CENTURA
933 0021-36821 BRKT, FLAT, VERIFLO, SINGLE VALVE, GAS P
934 0040-61064 STIFFENER, LOWER, DOOR FRAME TIM ASSEMBLY, CENTURA
935 0021-76134 PLATE OTB LEFT REAR,PH2 OTB COMMON MAINFRAME
936 0021-76133 PLATE OTB RIGHT REAR,PH2 OTB COMMON MAINFRAME
937 0021-70240 CARRIER, LOWER, HEATER LIFT DXZ
938 0021-46620 TOOL SPANNER WRENCH FOR SMC AIR CYL
939 0021-76956 COVER, FLOOR, REAR - MIDDLE, CENTURA
940 0021-39989 INSULATOR SHIELD, FACEPLATE, SILANE DXZ
941 0021-38336 MANIFOLD,COOLING,NITRIDE550
942 0021-12883 PLUNGER, INTLK SWITCH, DUAL FREQ., BOTTOM MODULE
943 0021-12882 CARRIER, INTRLK SWITCH, BOTTOM MODULE
944 0021-11722 PLUG, THROTTLE VALVE, SIN, DXZ
945 0021-10841 COVER,FRONT,LEFT,CENTER,CENTURA DCVD
946 0021-06151 BRACKET, VALVE, TOP MOUNT, FLUORINE GENE
947 0021-09724 STRAP,RF INPUT, SIN,DXZ
948 0021-06083 BRACKET, SUPPORT, OUTER, DXZ, FLUORINE GENERATOR
949 0020-34112 PLATE,REFERENCE,INDICATOR
950 0020-34617 PLATE,MTG,T/C AMP
951 0020-34111 PLATE,LEVELING,HEATER,DXZ
952 0020-33343 CUP,CLAMP SCREW
953 0020-13658 LOCK SHIPPING DOOR, LLC, CENTURA
954 0040-92679 COVER, FLOOR L/L B, BACK, UNIV. CENTURA
955 0020-08423 BRACKET, FUSE BLOCK
956 0020-13047 WAFER, ALUMINUM CALIBRATION
957 0020-13996 Plate OTB Center, Rear, Ext Umbilicals, CMF
958 0021-39253 BUMP GUARD, DOOR, GAS PANEL
959 0021-39259 BUMP GUARD, VERTICAL W/ADHESIVE, GAS PANEL
960 0021-39260 BUMP GUARD, HORIZONTAL, W/ADHESIVE, GAS PANEL
961 0021-39261 BUMP GUARD, END PIECE, W/ADHESIVE, GAS PANEL
962 0021-76955 COVER, FLOOR, SIDE - MIDDLE, CENTURA
963 0040-36486 FAB, PLATE, TOP, TIM IQ PUMPS, EDWARDS
964 0040-02229 BASE, LATCH, LID, DXZ
965 0040-61063 STIFFENER, UPPER, DOOR FRAME TIM ASSEMBLY, CENTURA
966 0040-36487 FAB, PLATE, BOTTOM, TIM IQ PUMPS, EDWARDS
967 0040-01892 LEFT BLOCK CLMP/GAS SPRNG DXZ FLUORINE GENERATOR
968 0020-37948 BRACKET SINGLE VALVE GAS BOX CENTURAGECO
969 0040-01893 RIGHT BLOCK CLMP/GAS SPRNG DXZ FLUORINE GENERATOR
970 0020-44040 BRACKET, EMO SWITCH, NO SKINS CENTURA MAINFRAME
971 0020-40923 LOADLOCK INDEX UP-DOWN ASSY BLOCK
972 0020-76870 BLANKOFF BOTTOM EXHAUST CONTROLLER/AC ENCL.
973 0021-02795 CAPTIVE WASHER, HASTELLOY, 4-40 X .5THK
974 0021-06082 BRACKET, SUPPORT, INNER, DXZ, FLUORINE GENERATOR
975 0021-04402 PIN, INTLK SWITCH, BOTTOM MODULE
976 0020-76306 BRACKET, SUPPORT, CHAMBER LID LIFT
977 0021-13286 COVER,FLOOR,SIDE-FRONT, CENTURA AC BOX
978 0021-41451 VIEWPORT COVER TRANSFER CHAMBER
979 0030-40007 BRACKET, MAIN, LLC, NON-ENP
980 0020-34252 BRACKET BV5
981 0020-40156 WINDOW FRONT DOOR COVER
982 0020-40977 COVER, WIRE, DOOR MECH
983 0020-41091 MOUNT SAFETY VALVE
984 0020-70583 DOOR, LOADLOCK ALUMINUM
985 0020-33803 PAD, FOOT, UPPER CHAMBER DPS MEC
986 0040-02807 DTCU POWER CONNECTOR COVER
987 0020-13088 PLATE, BKT MTG, HARD DISK DRIVE
988 0020-40157 CLIP, SPRING
989 0040-82067 COVER, FRONT LLK DOOR
990 0227-98809 Bracket Clip
991 0225-96857 Bracket Cover Switch
992 0041-08813 Bracket Upper Valve 13 Drop TF
993 0041-08811 Enclosure Top Feed SLD Facility 13 Drop
994 0021-41820 Plate top TF SLD Encl 13 Drop Centura
995 0040-35796 Plate APC Controller Gas panel
996 0041-08812 Door Facilities TF SLD Encl 13 Drop TF SLD
997 0021-39008 Bracket, 4-position Fuijikin Gas Box 31
998 0021-39840 Bracket 7-position Fujikin Gas Box 31
999 0020-33098 BRACKET,COIL,REAT TOP,R2
1000 0021-09097 PLATE, LINER ALIGNMENT, VESPEL
1001 0020-48489 COVER, PNEUTRONICS BOARD BULKHEADS
1002 0021-12852 BRACKET SENSOR TRANSDUCER MEGASONICS
1003 0021-79491 BRACKET, 1 DI FLOW VALVE DDF3
1004 0020-79635 BRACKET, VACUUM GENERATOR MEMBRANE
1005 0040-32323 COVER,DIRECT DRIVE MOTOR SACVD THROTTLE
1006 0021-04541 COVER, TERMINAL, SAFETY
1007 0020-46639 HANDLE, RND .50 DIA, OFFSET, 4
1008 0020-23837 SPACER 6-12 SOURCE GUIDE PIN
1009 0020-22664 SPACER SOURCE GUIDE PIN WIDE BODY CBR
1010 0040-20055 FEED THRU ADJ AR
1011 0020-20149 PLATE, H-SENSOR SOURCE
1012 0020-13999 BRKT, SOURCE, ALIGNMENT PIN
1013 0020-27668 BLADE 8 101 SHUTTER
1014 0040-01215 COVER RF OUTPUT ENI 288
1015 0021-37154 SHIELD TERM BLOXK 8 POSITION
1016 0020-76423 CLAMP VACUUM LINE CENTURA CHAMBER FACILITIES
1017 0040-76365 COVER SIDE LL B CENTURA
1018 0040-76364 COVER, SIDE LL A CENTURA
1019 0040-88065 RF TUBE PRECLEAN II
1020 0020-24890 LIMITER WAFER LIFT PC II
1021 0270-35395 ASSEMBLY, VIEW LID W/ GUARD, DXZ
1022 0020-21901 2HOLE BRACKET
1023 0020-75377 SHIELD, CONTACTOR MAIN AC
1024 0020-79132 CONTROL PANEL CONTROL UNIT SLURRY
1025 0021-79292 BRKT,MOUNTING FRONT,STAND ALONE FLAT PANEL DISPLAY OPTION
1026 0021-77914 BRACKET, MOUNT REAR
1027 0040-77688 DUCT ADAPTER, SLURRY MAIN TRAY, LOWER TO
1028 0021-78275 GASKET, DUCT ADAPTER, LOWER EXHAUST
1029 0021-79549 BRACKET, SUPPORT FI-SMIF
1030 0020-79398 PLUG 3 LINE SPLASH GUARD
1031 0021-79551 BRACKET, LEFT SIDE FI-SMIF
1032 0040-41146 BRKT WELDMENT EXTERNAL MOUNT FABS COMBO ARM FPD
1033 0021-79550 BRACKET, RIGHT SIDE FI-SMIF
1034 0021-78957 PLATE, COVER, LOAD FLANGE, SAMSUNG
1035 0021-78499 SHIELD, REAR
1036 0040-79557 PANEL,REAR LEFT F1-SMIF
1037 0020-42781 PANEL, REAR RIGHT, FI-SMIF
1038 0021-79020 FLANGE, LOAD FI
1039 0021-78958 PLATE, COVER, UNLOAD FLNGE FI
1040 0040-75432 PANEL, FRONT LIGHT TOWER ASSY CMP CONTRO
1041 0021-79548 BRACKET, TOP REAR PANEL FI-SMIF
1042 0020-14450 BRACKET, WAFER LOSS SENSOR
1043 0040-78365 COVER, SENSOR, WAFER LOSS
1044 0021-47311 LINK MANAGER MOUNTING PLATE
1045 0021-77920 MOUNTING PLATE FLAT PANEL DISPLAY OPTION
1046 0021-79293 BRKT,MOUNTING REAR FLAT PANEL DISPLAY OPTION
1047 0021-11593 PLATE ADATER FOR BROOKS AUTOMATION
1048 0040-50639 BRACKET, BOTTOM REAR PANEL FI-SMIF
1049 0040-09559 SHELF, DEIONIZER TANK, MODIFIED
1050 0040-77881 SKIN, REAR, UPPER LEFT
1051 0021-79528 COVER, REAR, LEFT, WB
1052 0022-77109 COVER, REAR RIGHT WB
1053 0020-05067 PCW bulk bracket Right
1054 0020-23640 LIFT MOUNT BLOCK
1055 0020-76383 TRIP BRACKET,INTLK,EXT PCII
1056 0020-26753 WASHER,INSULATOR PVD LIFTER,HTHU HOOP
1057 0020-29036 FLAG,UPPER MOTORIZED LIFT EXTENSION
1058 0040-75314 PVD CHMBR POS D WATER RETURN PANEL
1059 0040-32596 PLUG SIGNAL TOWER CONDUCTIVE PAINT
1060 0020-27205 CLAMP RING 8 INCH SNNF HTHU 6 PADS
1061 0040-33908 PANEL INTERFACE,UPPER CONTROLLER W/BCR
1062 0040-23094 PANEL DISK DRIVE SUPT SYSTEM CONTROLLER
1063 0040-62473 PANEL REAR LEFT FI-SMIF
1064 0020-31691 CENTERING RING GATE VALVE
1065 0040-75375 TEE STAINLESS THREADED W/ 1/2
1066 0020-27127 PEDESTAL, PCII 8 JMF @ C&D
1067 0020-38925 DOME BLANKOFF SHIPPING PLATE DPS CHAMBER
1068 0020-23760 INTERLOCK BRACKET PC 2 RF MATCH
1069 0020-24410 BRACKET INTERLOCK CATHODE LIFT
1070 0020-23759 INTERLOCK HOUSING PC 2 RF MATCH
1071 0020-23754 RF MATCH INTLK BRACKET PREDEAN2
1072 0020-24063 FLAG SENSOR MOTORIZED LIFT
1073 0040-23545 BRACKET,CONNECTOR,1.574
1074 0020-25639 INSERT SLIT VALVE CENTURA CLAMPED DEGAS
1075 0040-23539 BRACKET CASS PRESENT
1076 0040-34840 BRACKET VCR CROSS CAJON
1077 0040-79075 GUARD LOWER CLEAR FLAG ACCESS MOTORIZED LIFT
1078 0021-22018 FLANGE, HUB, HEATER LIFT 1.574 DIA SHAFT BESC
1079 0021-35819 CHUCK, ASP, 200MM, TOP MOUNT TYPE
1080 0021-76849 ALIGNMENT PIN
1081 0020-24230 BASE PRECLEAN 2
1082 0040-22570 MTG PLATE PCII W/TRUBO RF MATCH
1083 0270-01597 U-FRAME,PRODUCER,200&300MM
1084 0020-47952 REFLECTOR-ADJ PLATFORM WBLL CMF CENTURA
1085 0015-16036 BRKT RELAY MOUNT RF GEN
1086 0020-39067 BRACKET BOTTOMFRONT PANEL
1087 0021-37395 COVER BOX 1-CONNECTOR CHX CABLE
1088 0021-27546 DIFFUSER,AIR AMPL, E-DTCU, DPS
1089 0021-37393 BOX SHIELDING CHX CABLE
1090 0021-37394 COVER BOX 2-CONNECTOR, C-HX CABLE
1091 0020-13977 L/L Wafer Present&Slid Sensor Cover(Wide)
1092 0021-07272 PANEL, BLANKFOFF 19 INCH RACK 1.060 INCHES HIGH
1093 0021-36639 BRACKET, SHROUD RACEWAY, HTD PROC LN
1094 0021-36141 BRACKET MNFRM,HTD GAS LN
1095 0040-02642 PANEL, FLOOR DPS, CHBR POS C#2 MCE
1096 0040-32593 PANEL,FRONT,COND.PAINT,WIDE BODY,ETCH
1097 0040-76439 BRKT,COVER DET ADJUST ASSY FAST WAFER MAPPER
1098 0021-35801 BRACKET MNFRM VDS LN
1099 0021-10295 PANEL BLANK-OFF 19 INCH RACK, 1.58 INCH HIGH
1100 0021-33627 GAS LINE BLOCK ARM
1101 3005-6500 GAS LINE SIDE BLOCK
1102 0020-20835 BRKT MTG PLATE DISK DR
1103 0021-39098 BRKT,BLNK TRIPLE GAS LINE
1104 0040-01752 CLAMP FORELINE,BOTTOM NON-DPA
1105 0040-39482 BRACKET FINAL INTEGRATION,
1106 0040-39483 BRACKET FINAL INTEGRATION,Upper
1107 0270-35058 CLAMP SHIP CHAMBER/LID WXZ
1108 0020-28888 PLUNGER DC BIAS
1109 0020-29207 POST DC BIAS
1110 3550-01097 PIN
1111 0020-24836 EXTENSON ARM HTHU HEATER
1112 0020-23352 DISK HEATER
1113 0020-20667 MOUNT LIFTER BEARING
1114 0050-21983 GAS LINE, ADAPTER, FEED THRU-MIXED
1115 0020-39305 BRACKET,RACEWAY
1116 0040-23218 BASE TC ISOLATION AMPLIFIER,SUB-ZERO LTBESC&BLT
1117 0021-45789 BLOCK MOUNTING STEC SEC-Z500X MFC
1118 0020-35903 STACK,6" EXHAUST
1119 0020-36426 COVER,CUTOUT,EXHAUST STACK
1120 0020-36423 BRKT,MOUNTING,CONNECTOR
1121 0020-05066 PCW bulk bracket Left
1122 0021-70094 PANEL,ADAPTER UPPER,IPS HYBRID
1123 0041-13342 STABILIZER/FRKLEFT RAIL, EQUIPMENT RACK, CENTURA
1124 0020-34131 BASE,RF
1125 0021-39803 COVER, TC AMP
1126 3880-01123 3/8 ROUND MALE-FEMALE STANDOFFS
1127 0041-04807 ROD,CONDUCTOR,RF FEEDTHROUGH,PRODUCER 200MM
1128 0021-03006 BRACKET PIN LIFT SST, PRODUCER
1129 0021-01634 BALL STUD 5/16-18 GAS SPRING PRODUCER 20
1130 0021-36269 CUP,PIN LIFT BELLOWS
1131 0021-04297 MANIFOLD CLEAN GAS 200MM PRODUCER
1132 3300-03512 ISO-KF ELDOW90 SMOOTH RADIUS
1133 0021-32330 INSULATOR,SLEEVE,RF FEEDTHROUGH,PROUCER 200MM
1134 0021-14670 SCREW, ALUM, DXZ PUMPING PLATE, SACVD
1135 0021-07149 SHIELD, TERM BLOCK, 4 POSITION
1136 0021-76018 BUSS BAR GRN
1137 0021-15955 BRKT. BLANK 1/2&1/4 GAS LINE 300 MM PROD
1138 0021-23744 DELRIN BUSHING CHAMBER LID GAS BOX PMD 2
1139 0021-16142 BUS BAR, GROUND, LOTO BOX, EPSILON
1140 3790-01402 STDF M/F 1/4 HEX X 3/4 LG 4-40 THD SST
1141 0040-75224 SHIM, CLAMP, RIGHT OR LEFT PRODUCER
1142 0040-01558 BRACKET, CLAMP SUPPORT, FORELINE,
1143 0021-01810 L-BRACKET, RAMPED SACVD DXZ
1144 0040-33199 PANEL, FRONT, CH B/C, AC DIST BOX, PROD S
1145 0020-08436 BRACKET, MOUNTING, ACDIST CONDUIT, PROD
1146 0020-54436 BRACKET, TEOS LINE, 1.375 OD, PRODUCER
1147 0040-23552 COVER, RF HEATER ACE, HT BESC
1148 0020-75864 BRACKET, CONN DUAL AXIS MOTOR AND
1149 0020-75993 BLOCK NEST CAAETTE 200MM ENP WBLL CMP CENTURA
1150 0020-34287 BRKT,GAS LINES,MIDDLE,CENTURA
1151 0020-40022 BAR SAFETY DOOR MECH
1152 0020-41092 ACTUATOR SAFETY VALVE
1153 0020-34286 BRKT,GAS LINES,SIDE POST,TOP,CENTURA
1154 0020-13597 BRACKET, TALL MANIFOLD, HEC
1155 0020-41483 COVER, ENCLOSURE, CHMB A/C/E CENTURA CMF
1156 0020-13596 BRACKET, TALL MANIFOLD, HEC
1157 0020-34265 BRKT,GAS LINES,SIDE,TOP,CENTURA
1158 0020-42469 SHIELD, DUPLIX RECEPTACLE
1159 0020-41484 COVER, ENCLOSURE, CHMB B/D/F CENTURA CMF
1160 0020-34263 BRKT,GAS LINES,SIDE,BOTTOM,CENTURA
1161 0020-34285 BRKT,GAS LINES,SIDE POST,BOTTOM,CENTURA
1162 0020-34264 BRKT,GAS LINES,SIDE,MIDDLE,CENTURA
1163 0020-34262 BRKT,GAS LINES,TOP,CENTURA
1164 0020-13594 BRACKET, SHORT MANIFOLD, HEC
1165 0020-13595 BRACKET, SHORT MANIFOLD, HEC
1166 0040-81827 BRACKET,TUBING SUPPORT,MANIFOLD
1167 0021-37972 BRACKET, TUBING SUPPORT, N2/AR INLET
1168 0021-36159 BRACKET, 1/4 TUBING SUPPORT ALUMINUN, B
1169 0021-36162 BRACKET, DIGITAL DISPLAY CLAMP
1170 0021-36161 BRACKET, DIGITAL DISPLAY HOLDER
1171 0021-36160 BRACKET, 1/4 TUBING SUPPORT ALUMINUN, T
1172 0021-37967 BRACKET, TUBING SUPPORT, H2 & N2/AR
1173 0021-36952 CLAMP,3/8"TUBING
1174 0021-36951 CLAMP, 1/4 TUBING
1175 0021-45781 BRACKET,DIGITAL DISPLAY HOLDER
1176 0021-45782 BRACKET,DIGITAL DISPLAY CLAMP
1177 0021-04248 HOOP LEFT EXTENDED 8"/6" B101
1178 0040-20726 SHIELD,HTHU HEATER RF TOP
1179 0270-76079 INSERT, 6" CASSETTE HANDLER SHIPPING CLAMP
1180 0020-21444 BRACE, FRONT SKIN
1181 0020-21003 BRACKET, LOADBLOCK
1182 0020-22983 BRACKET PILLOW BLOCK
1183 0030-00084 HOLDDOWN RING VIEWPORT
1184 0020-23007 END PLATE, 6 AUTO LOADLOCK
1185 0020-22994 SIDE RECEIVER, LEFT 6
1186 0020-22996 ACTIVATOR PIN ,6 ALL
1187 0020-23161 COUNTERWEIGHT, CASSETTE SENSOR
1188 0020-22995 SIDE RECEIVER, RIGHT 6
1189 0020-23063 SHAFT,SENSOR,FLAG
1190 0020-23136 REVERSE BLOCK 150MM PLASTIC CASSETTE
1191 0020-23233 BRACKET RIGHT 150MM CASSETTE
1192 0020-23138 BRACKET SENSOR, A.L.L. CASSETTE SENSOR 2
1193 0020-23234 BRACKET LEFT 150MM CASSETTE
1194 0020-22629 ROLLER MOUNT CASSETTE CLAMPING
1195 0020-23064 REFLECTOR, SENSOR, FLAG
1196 0020-22630 WEIGHT CASSETTE CLAMPING 150MM PLASTIC
1197 0020-23154 HARD STOP, SENSOR FLAG
1198 0020-23228 RECEIVER BASE, AUTO LOADLOCK HANDLER
1199 0020-23165 BRACKET CONNECTOR, A.L.L. CASSETTE SENSO
1200 0020-22740 CASSETTE SUPPORT
1201 0020-22627 LEVER CASSETTE CLAMPING
1202 0020-22626 PIVOT BLOCK CASSETTE CLAMPING
1203 0020-23060 BRACKET, MOUNTING, SENSOR, FLAG
1204 0020-22628 PIVOT POST CASSETTE CLAMPING
1205 0020-20802 BUSS BAR, MEDIUM 250A
1206 0040-46059 HOOK, LID LATCH, BUFFER / TRANSFER LID H
1207 0021-11038 BLANKOFF, LCF LID, BUFFER CH, C-E OR D-F
1208 0020-17523 HARDSTOP, BUFFER / TRANSFER LID HOIST
1209 0200-00669 WINDOW,QUARTZLCFC-EORD-F,BUFFERCHLID
1210 0021-16503 COVER, EMITTER INTFC PCB, LCF, C-E OR D-
1211 0040-32841 PANEL, LCF CABLE BULKHEAD, MAINFRAME
1212 0021-04587 PLATE, BLANKOFF, LCF, XFER CH LID
1213 0040-08192 LID,BUFFERCHAMBER,LCFCOMPATIBLE
1214 0020-26319 INSULATORLIGHTLID
1215 0040-28990 Bracket, 8 Mounting Holes, Status Lamp
1216 0021-01593 POST REFERENCE HEIGHT MOD I RTP
1217 0021-01594 CAP REFERENCE HEIGHT MOD I RTP
1218 0020-44415 COVER, TOP, CLEAR, CHAMBER RACK PRODUCER S
1219 0021-25070 SPACER CHAMBER RACK PRODUER S
1220 0020-40702 FLAG,ROTATION
1221 0020-13753 COUPLING, DRIVEN
1222 0020-40701 FLANGE, DRIVER
1223 0020-43126 BRACKET, IVL, 3WAY DIVERT VALVE, PRODUCE
1224 0020-10464 NUT, FEED THRU
1225 0040-05781 BRACKET, LOWER FINAL LINES, CH. C PRODUC
1226 0040-34816 COVER, RF FILTER PRODUCER
1227 0040-42934 BRACKET, RIGHT, FINAL LINES, PRODUCER S
1228 0040-34564 BRACKET, UPPER TEOS LINE, CH C, PROD S S
1229 0021-23517 C-CLAMP, SACVD
1230 0040-01496 BRACKET, BACK SUPPORT, FL GEN 200MM SACV
1231 0040-61563 BRACKET, CLAMP, IVL, VALVE, 200MM PRODUC
1232 0040-60934 CLAMP, TOP, IVL, VALVE BRCKET, 200MM PRO
1233 0021-02999 CONNECTOR, BOTTOM, HEATER 200MM PRODUCER
1234 0270-76077 INSERT CLAMP 6"/8"CASSETTE HANDLER SHIPPING
1235 0021-37168 MANIFOLD WATER TOP MOUNT
1236 0021-38840 BLANK-OFF, HR DTCU W/O IEP, DPS CHAMBER
1237 0040-13239 OUTRIGGER INNER MAINFRAME
1238 0040-13240 OUTRIGGER OUTER MAINFRAME
1239 0200-00166 WINDOW QUARTZ LCF SLITVQCTUATOR
1240 0021-54188 SUPPORT UPPER ADAPTER RF SOURCE 200MM
1241 0270-09350 TOOL TOP BASE WINDOW SUPPORT RTP
1242 0270-35199 TOOL COVER REFLECTOR PLATE MOD I
1243 0020-34585 BRACKET, LF, GENERATOR, DXZ
1244 0040-22804 BRACKET, RIGHT MATCH BOX SUPPORT
1245 0020-20113 HUB DC BIAS, SHIELD ASSY
1246 0040-46057 BRACKET, LID LIFT, BUFFER / TRANSFER LID
1247 0040-70214 BUMPER, ENDURA SHIPPING BUMPER
1248 0040-01195 CRYO-PUMP PROTECTION BRACKET
1249 0020-40002 KEY ACTUATOR
1250 0020-35979 COVER TOP XFMR PEC
1251 0020-36606 BUSS BAR GROUND XFMR BOX CENTURA 15 POS
1252 0020-75670 RAIL, SUPT DIST. & FILTER BOX CENTURA CO
1253 0021-03282 BRACKET TMS,SEIKO SEIKO 1300 DPS METAL
1254 0040-38340 BRACKET, MOUNTING, SIGNAL TOWER, W/O, PE
1255 0040-01278 ENCLOSURE TRANSFORMER PEC
1256 0040-06741 BRACKET,VAT CONTROLLER, TO PUMP
1257 0020-35980 SHIELD CRT BREAKER XFMR PEC
1258 0021-03481 BRACKET, VAT-CONTROLLER
1259 0021-10087 PLATE, SINGLE PLUG, RF GENERATOR RACK
1260 0020-40006 MOUNT, DOUBLE SENSOR, INDEXER
1261 0041-05223 MANIFOLD INFUT CVG TXZ CHAMBER
1262 0041-05230 MANIFOLD OUTPUT CVG TXZ CHAMBER
1263 0020-06487 ENDURA AC RACK POWER Line Block
1264 0020-06484 BUSS BAR 250A LEFT LINE MAIN CONACTOR
1265 0020-06485 BUSS BAR 250A CENTER LINE MAIN CONACTOR
1266 0040-01566 ENCLOSURE, LCFCONTROLCARD, STAND-ALONE
1267 3690-03088 SCRCAP SKT HD 4-40X1-3/4L HEX SKT SST SLVR-PLT
1268 0040-38041 MANIFOLD, WATER, SAE 9/16-18 PRODUCER 20
1269 0020-45095 STRAP, PLT, RF&HV FEED, CERAMIC ESC
1270 0021-25141 PLUG, IRM, SGD, 200MM EMAX
1271 0015-01375 SCREW, BASE MOUNTING, SHOULDER, AG PLATED
1272 0021-24029 WASHER, BASE MOUNTING, AG PLATED
1273 0021-15954 BRKT. 1/2 & 1/4 GAS LINE 300 MM PRODUCER
1274 0270-76908 CAL TOOL B101 LIFT TO ROBOT 6"
1275 0021-61251 CLAMP BRACKET NON-TOXIC GAS CENTURA CMF
1276 0020-13606 BRACKET, TTF BASE HOLD, COMMON CENTURA
1277 0020-75381 PANEL, FRONT, HARD DISK DRIVE
1278 0021-06241 BRKT,CDA, TTF FTG MOUNTING TPCC, MODULAR
1279 0021-06432 BRACKET, GAS SPRING, CH. LID, SINERGY
1280 0021-04687 NUT, LOCK, HEATER LIFTER
1281 0021-06115 SUPPORT, VCR GLAND, LIFT
1282 0021-04686 PLATE, HEATER LEVELING, 200MM UNIVERSAL
1283 0021-04679 PLATE, LOCK, HEATER LIFTER
1284 0021-04680 PIVOT BLOCK, BALL END, LEVELING STUD
1285 0021-04677 RETAINER, SEAT, SPRING, LIFTER
1286 0021-04673 FLAG, SENSOR, LIFTER
1287 0021-04671 CLAMP, ACME NUT, LIFTER
1288 0021-04672 PLATE, END, LIFTER
1289 0021-06375 COVER, HINGE SINERGY CHAMBER
1290 0021-02609 BRACKET, 24V FAN ASSY WXZ
1291 0021-04670 HOLDER, ACME NUT, LIFTER
1292 0021-04674 PLATE, SENSOR, LIFTER
1293 0021-04676 SEAT, SPRING LIFTER
1294 0020-09533 HANDLE, GAS BOX
1295 0020-07292 BRACKET A/C HX VALVES TPCC
1296 0020-76422 CONDUIT, AC INLET, CENTURA CHAMBER
1297 0021-04669 SPACER, LIMITED EXTENSION, UPPER CARRIER
1298 0021-07812 SMIF T-BAR FOR ROLLER PIN ASSY
1299 0040-21826 FLANGE, EDWARDS PUMP, CVD EXH SW
1300 0020-21251 GENERATOR SUPPORT SHELF
1301 0021-22267 BRACKET MOUNTONG GAS MODULE TXZ
1302 0021-36056 TXZ GAS FEED THROU END CAP
1303 0020-28703 BRACKET, LOADBLOCK PANEL TOP
1304 0040-22196 PANEL, PCB MOUNT, ASYST SMIF I/F
1305 0040-16091 COVER, SMIF-ASYST PCB 0220
1306 0020-24411 CATHODE INTLK COVER PRECLEAN 2
1307 0020-75458 PANEL, FRONT, RIGHT, MAINFRAME
1308 0020-28584 PANEL, DEGAS COOLDOWN ITLK
1309 0020-43074 WBLL BRKT, LED BOARD MOUNT, FAST WAFER M
1310 0020-20068 SIDE COVER, GAS BOX
1311 0040-22199 BRACE, RIGHT, FRONT PANEL, ENDURA WB LL
1312 0040-22200 BRACE, LEFT, FRONT PANEL, ENDURA WB LL
1313 0020-70529 BRKT WATER SWITCH
1314 0021-13032 SIDE COVER FRONT LEFT SIDE
1315 0021-21025 COVER, FRONT SKIN EMO/PCB
1316 0020-21674 LOAD LOCK SHIELD BRACKET
1317 0020-22616 ROLLER SUPPORT LEFT WITH HELICOIL
1318 0021-02793 CAPTIVE SCREW, HASTELLOY, 4-40X .35LG
1319 0021-70346 COVER, LEAD SCREW HT ESC
1320 0050-25994 PVD SUS MANIFOLDER
1321 0021-13339 BRACKET, DPA  MOUNTING, CH B/C
1322 0021-04974 COUNTER BALANCE TOP 2 SPRING
1323 0021-03642 SUPPORT ASTRON 200MM SACVD PRODUCER
1324 0021-04973 COUNTER BALANCE BASE 2" SPRING
1325 0020-52097 BRACKET MIRRA BULKHEAD EXPANSION
1326 0020-62595 BRACKET, MIRRA, VACUUM SUPPORT
1327 0020-62870 DRAIN SUPPORT BRACKET
1328 0020-76863 HINGE BLOCK OUTER BOTTOM
1329 0020-76928 STRIKE PLATE LATCH
1330 0020-25477 DISK HUB HEATER ESC/HT HEATER
1331 0021-39093 BRKT, BLNK TRIPLE GAS LINE
1332 0020-22379 BRKT MTG SMOKE DETECTOR
1333 0021-23177 WASHER ALUMINUM
1334 0021-22621 SCREW, STRIKE PLATE, AL
1335 0040-84847 COVER, FLOOR, FAC TRAY 3 REAR, CMF
1336 0040-84846 COVER, FLOOR, FAC TRAY 3 FRONT, CMF
1337 0041-03669 ADAPTER LHS/RHS, ENP PLATFORM, 200MM
1338 0020-40160 BRACKET, BOTTOM 
1339 0020-34002 INSERT COVER, GAS FEED R2 CHAMBER
1340 0021-10539 BLOCK, TAPERED RETAINER, 1/4LINER POLY M
1341 0020-38497 BLOCK, SPACER, H/V INTERLOCK
1342 0021-09938 PLUG, MANOMETER PORT, R2
1343 0020-31909 CLAMP, SHIELD, GATE VALVE, BOTTOM
1344 0020-38066 COVER, SUPPORT BOTTOM, SIMPLE CATHODE, M
1345 0021-10538 BLOCK, ROUND PIN RETAINER, 1/4 LINER, POL
1346 0020-31907 SUPPORT, SHIELD, GATE VALVE
1347 0040-31885 SHIELD- FRONT, R2 5000
1348 0040-31889 SHIELD- LEFT, R2 5000
1349 0020-34320 PLATE ALIGNMENT, R2 CHAMBER, SGD
1350 0020-33316 HANDLE, HINGE, R2
1351 0021-10134 SLEEVE, EXTENDED, IR TEMP SENSOR
1352 0040-31888 SHIED- REAR, LEFT, R2, 5000
1353 0021-10601 CYLINDER, SUPPORT, POLY
1354 0020-38062 INSERT 5/16-24
1355 0020-34076 GUIDE, HINGE, UPPER, R2 CHAMBER
1356 0021-10370 COVER, TURBO SIDE
1357 0020-34328 GUIDE, LOWER HINGE, SLOTTED, R2 CHBR GECO
1358 0020-38064 COVER, L/L SIDE
1359 0020-38082 PLATE, STOPPER
1360 0020-38067 WING, GUIDE, RF-BOX
1361 0020-38081 NUT, STOPPER
1362 0020-38083 BOLT, STOPPER
1363 0020-31780 BRKT, PROTECTIVE GATE VLVE SHIPPING
1364 0020-38080 HOLDER, STOPPER
1365 0020-38084 ROD, STOPPER"G"ECO
1366 0020-38085 SCREW, ROD STOPPERGECO
1367 0226-95950 BASE, PLATEFORM, LLA
1368 0040-33422 TRAY MOD WAFER DUMMY WBLL CMF CENTURA
1369 0020-04389 BRACKET. OTB 3/8" N2 LINE, TOP VENT WBLL
1370 0226-95951 BUSHING, PLATFORM,.138-32
1371 0226-98108 SCREW, PLATEFORM SWIVEL
1372 0227-64140 LEXAN EMO COVER, FINGER SAFE
1373 0020-08582 PLATEFORM, TOP WBLL, MOD LOCK, CMF CENTURA
1374 0020-15127 GROMMENT, 25 ID, TEFLON
1375 0226-95959 BASE, PLATEFORM, LLB
1376 0020-56969 FILTER, SLIT WINDOW, ASP
1377 0690-01796 CLAMP FLG SGL-CLAW M10-BOLT SST SLVR-PLD W/SPLIT
1378 0020-18713 PLATE, SINGLE VALVE MOUNTING .190 THK
1379 0020-07034 P-5000 DXL RPS QUARTZ WINDOW CONVEX
1380 0020-29024 INSULATOR, MAGNETIC SWITCH
1381 0020-22310 SHIELD NEUTRAL BUSS- MAIN AC
1382 0020-22068 SHIELD NEUTRAL BUSS- MAIN AC
1383 0020-01326 HOSE FITTING, MCA+ WATERBOX MOUNT
1384 0270-02508 ALIGMENT TOOL
1385 0020-27812 PIN ALIGNMENT G-12 SOURCE FRAME
1386 0020-29035 FLAG, LOWER MOTOR LIFT EXT
1387 0020-25690 BLANKOFF AC REM CONTROLLER BULKHEAD
1388 0020-22312 SHIELD TERM BLOCK 12 POS
1389 0020-22311 SHIELD TERM BLOCK 6 POS
1390 0020-28373 SHIELD SYSTEM AC CB WITH PROBE HOLES
1391 0020-24057 BRKT VALVE WATER
1392 0020-22314 COVER TB 6 POS (B)-AC CHANNEL
1393 0040-13664 FIXTURE, SHIPMENT MOTOR LIFT
1394 0040-21289 ADAPTER 16
1395 0040-20090 KICK PLATE, PAINTED, NO SMIF, NARROW BOD
1396 0021-20790 DISK, SHUTTER, 8 SNNF, E-CHUCK
1397 0021-21656 PANEL, BLANKOFF, DISK DRIVE SUPPORT, CON
1398 0030-00026 MFC UNIVERSAL MOUNTING BLOCK
1399 0021-21657 BRACKET, BLANKOFF, DISK DRIVE SUPPORT, C
1400 0020-05833 PANEL, FLOOR REAR AC BOX COVER, MCE
1401 0040-01337 SIDE CVR, LL A
1402 0020-13612 BRACKET HOLD MFLD ADAPT, B-D SIDE
1403 0020-31422 BRKT, MTG, MAG GEN INTERFACE, ASP
1404 0020-38726 INSULATION, UPPER FRNT, BTM CHMBR, DPS
1405 0040-04868 HOLDER BARATRON ASSY
1406 0021-35562 PANEL, FLOOR, XFER, OVERPRESS
1407 0021-38021 PANEL, UPPER FLOOR, DPS CHBR, POS C, PH-
1408 0020-90540 8HOOP WITH TC
1409 0021-01791 BRACKET, FRONT PANEL, NBLL W/SPACER
1410 0020-75140 COVER CHAMBER TOP
1411 0020-12519 LIFTER, 6 ORIENTER, NARROW HOOP
1412 0021-01927 OUTRIGGER, FRONT PANEL, NBLL W/SPACER
1413 0040-13274 TOP COVER, CHAMBER TRAY AC, CENTURA
1414 0020-39646 SUPPORT BRACKET, 5200 AUTOTUNER
1415 0020-30977 ASP CH# LID COVER
1416 0021-35957 CLAMP #2, SHROUD RACEWAY, HEATED PROCESS
1417 0020-76918 BRACKET TOP SIDE CENTURA
1418 0020-22129 STIKER, MAG LATCH
1419 0040-75065 FLANGE, FAN FAILURE ALARM
1420 0040-13129 PLATE BASE PLATFORM ENP WBLL CMF CENTURA
1421 0020-75994 PLATE TOP PLATFORM ENP WBLL CMF CENTURA
1422 0020-36378 BLOCK ROTATION LOCK INDEXER
1423 0020-36610 BASE ROTATION LOCK INDEXER
1424 0040-13149 BRACKET, ANALOG SYNC PWA, FAST WAFER MAP
1425 0040-03345 PANEL ASSY.,SIDE COVER W/DOOR CMF, RIGHT
1426 0040-75430 BRACKET, CATCH PLATE
1427 0020-25694 BLOCK MTG HEATER 1.18 DIA SFT MTR LIFT
1428 0040-13128 TRAY STORAGE WAFER DUMMY ENP WBLL CMF CENTURA
1429 0020-76917 ANGLE BRACKET TOP SIDE CENTURA
1430 0040-50006 PANEL REAR EXHAUST COVER M/F FAC.BOTT CONN, CMF
1431 0020-25637 INSULATOR MAG SWITCH PCI CLR CVR EXT
1432 0040-75252 INTERFACE PANEL, LOWER
1433 0021-02733 COVER
1434 3020-01126 AIR CYLINDER, FLOATING JOINT COUPLING, ELBOW TUBIN
1435 0200-09005 QUARTZ WINDOW
1436 0021-04939 WATER COVER
1437 0690-01113 CLAMP FLG SGL-CLAW NW63,80,100 AL 5/16-1
1438 0040-01101 CHAMBER, COOLDOWN, DPS 200MM
1439 0020-39201 COVER, BRACKET, WAFER LIFT, DPS
1440 0035-00087 WAFER LIFT MOUNTING BLOCK
1441 0040-01102 FAST COOLDOWN CHAMBER ASSY
1442 0040-04940 HOOP, COOLDOWN, DPS 200MM
1443 0040-01103 PEDESTAL, COOLDOWN, DPS 200MM
1444 0010-38646 TXZ CHAMBER HINGE ASS'Y
1445 0021-22570 STYLUS, OPERATOR CONTROL PANEL
1446 0040-51499 BRACKET EYED MOUNT EMAX 300
1447 0040-61544 BUS BAR, SIDE PANEL FEED, PHASEB, CENTURA, 400A
1448 0021-38125 TUBE LIFT PLATE, SCREWED DOWN, DXZ
1449 0021-03733 CAP, RF, DXZ UNIVERAL
1450 0040-61543 BUS BAR, SIDE PANEL FEED, PHASEB, CENTURA, 400A
1451 0040-61545 BUS BAR, SIDE PANEL FEED, PHASEB, CENTURA, 400A
1452 0020-39499 RING, RTNR, SI INSERT RTP
1453 0190-75087 COVER, JA-FRAME SIDE PANEL CENTURA PHASE 2
1454 0021-13131 SIDE PANEL, BLANKOFF LOWER CENTURA PHASE
1455 0021-13132 SIDE PANEL, BLANKOFF UPPER CENTURA PHASE
1456 0020-33354 PLUG, CONNECTOR, RF
1457 0020-18597 CLAMP, FNL LINES, INTERRATION, ULTIMA, DXZ
1458 0040-75660 BRACKET, CHAMBER PNEUMATIC MOUNTING
1459 0040-02632 MANIFOLD, TALL, CENTURA MMF
1460 0040-02634 MANIFOLD, SHORT, CENTURA MMF
1461 0040-04109 COVER, FLOOR, CH A, SIN, CMF
1462 0020-76902 PANEL, BOTTOM EXTENSION FRAME CENTURA
1463 0020-76895 PANEL, SIDE EXTENSION FRAME CENTURA
1464 0020-06569 COVER, ENCL, PCB/MANIFOLD, SIN, CMF
1465 0020-20523 CAP, LAMP FEEDTHRU
1466 0020-23978 SHIELD TERM BLOCK 6-POS
1467 0020-23664 BOX CB 250A MOD GFI 3132
1468 0020-20816 PLATE, CASSETTE 200MM
1469 0020-24393 PANEL THROUGH CB MOUNTING
1470 0020-29078 BRUSHIN, GROUND
1471 0020-93159 COVER, BOX GFI CIRCUIT BREAKER 250 AMPS
1472 0020-29077 BUSHING GUIDE
1473 0020-27279 SHIELD TERM BLOCK 12 POS
1474 0020-24388 PANEL SUB-DOOR REMOTE AC (8) GFI CB 
1475 0020-26452 BLANK OFF GFI CB
1476 0020-26487 COVER PLASTIC GFI SENSOR&CB SYS AC
1477 0040-42398 ADAPTER, GFI CB FOR NESLAB III 
1478 0020-17584 BRACKET, FRONT UNIV FRM FLAT PNL DISPLAY STAND
1479 0020-78415 GUARD SPRAY 6LOAD CUP
1480 0040-77108 SUPPORT, 6CASSETTE TRAY
1481 0020-12813 BRACKET BPSG ASSEMBLY 2ND GAS CH A RTP C
1482 0020-39836 BRACKET,ADAPTER,H.O.T.,DETECTOR
1483 0020-10611 BLANK OFF PRS2 PORT
1484 0021-15991 BLANKOFF WATLOW, PROD S, SPLIT FRAME
1485 0020-31740 SCREW, VESPEL
1486 0021-01109 WINDOW, 200/300MM MANUAL
1487 0040-02922 PANEL FLOOR, SUPER E, POS A,MCE
1488 0040-02924 PANEL FLOOR, SUPER E, POS C #1, MCE
1489 0040-02925 PANEL FLOOR, SUPER E, POS D, MCE
1490 0020-05667 BRKT 4 PNEUMATIC VALVES ULTIMA HDP-CVD
1491 0040-75433 PANEL MAIN GAS PALLET ULTIMA HDP-CVD
1492 0040-75444 BAR, MTG, PALLET HDP-CVD
1493 0020-18709 PLATE, SINGLE VALVE MOUNTING .315 THK
1494 0021-35063 BRKT VERIFLO/NUPRO VLV, SLD
1495 0020-18383 BRKT THREE FINAL VALVES GAS PANEL  LOW K
1496 0020-18382 BRKT TWO FINAL VALVES GAS PANEL  LOW K
1497 0020-18381 BRKT SNGL VALVE STICK LOW K HDPCVD
1498 0020-18708 PLATE, SIDE PALLET ULTIMA HDP-CVD
1499 0021-06729 PLATE,SEAL, PDD CENTURA 5200
1500 0021-37080 SPACER, SERVICE LAMP
1501 0020-32049 CAP, VESPEL, ESC
1502 0040-62802 BRACKET, MOUNTING, 5-PHASE DRIVER
1503 0020-39837 BRACKET, SUPPORT ENDPOINT
1504 0020-42250 BLOCK EXHAUST PORT WXZ
1505 0020-42036 SHAFT, GROUND, CAP MANO PNL, WXZ
1506 0020-42128 PAD, SHAFT, WFR RCVRY
1507 0020-42252 BRACKET, VALVE, WXZ
1508 0021-03814 BRACKET, HANDLE WXZ LID.
1509 0021-02640 WINDOW, POLYCARBONATE, QRTZ LID WXZ, AXZ
1510 0020-42042 PANEL, DUAL CAP MANO BD, WXZ
1511 0040-75142 BRACKET, PNEUMATIC MANIFOLD CENTURA
1512 0021-02634 CLAMP, QUARTZ WINDOW, WXZ
1513 0020-76718 SEMI S2 H2O PANEL
1514 0020-37000 COVER, CIRCUIT BREAKER, 5KVA
1515 0020-76644 BRACKET(TRANSFORMER COVER1)
1516 0040-01484 COVER, TOP 5KVA TRANSFORMER PHII CONTROLLER
1517 0020-37077 BUSS BAR, 5KVA TRANSFORMER
1518 0270-09228 TOOL, PLATE LID, BAFFLE PURGE
1519 0270-09227 TOOL, PLATE, LID COVER, WXZ
1520 0020-18710 PLATE, BLOCK VALVE MOUNTING .315 THK
1521 0020-18384 BRKT BLOCK VALVE LOW K HDPCVD
1522 0040-01641 BRACKET, MTG CH. A, DPA, PRODUCER, 200MM
1523 0021-03413 COVER, DUAL AXIS DRIVER
1524 0040-83884 COVER PLATE EMO
1525 0040-40489 BRACKET, REAR LAMP TOWER, PROD S SPLIT F
1526 0020-42492 BLANKOFF NF3 GAS, 200MM PROD APF, PECVD
1527 0020-39604 BRACKET FJKN BV4 MANIFOLD
1528 0021-14501 BLANKOFF, EXHAUST DUCT, BOTTOM, PROD S,
1529 0021-18167 CLAMP W/OUT VLV SLD PRODUCER
1530 0040-16037 BRKT, MNTG, M/F ROBOT FRAME
1531 0021-76742 OUTRIGGER SUPPORT BAR SMIF INTERFACE
1532 0020-02319 PLATE, COVER, POWER SUPPLY FLAT
1533 0021-16887 COVER, VIEWPORT, TRANSFER CHAMBER
1534 0040-85041 PLATE, ADAPTER, 200MM GEN RACK
1535 0020-23931 PAD THIN POST COVER LIFT
1536 0020-04570 LARGE INLETMAIN AC ENCLOSURE
1537 0020-23932 PAD THIN POST COVER LIFT
1538 0040-86959 BRACKET LAKE FLOW METER
1539 0020-23035 CAM, RIGHT INBOARD
1540 0020-28371 ASSY, CONTROLLER/AC FRAME
1541 0020-23917 BRACKET CABLE COVER LIFT
1542 0040-20584 MIRROR POLISHED SST KICK PLATE
1543 0021-08111 BRKT, SOURCE PIN GUIDE, SIP CU
1544 0040-70213 PUSH BAR, ENDURA SHIPPING BUMPER
1545 0020-76388 TRIP BRACKET,INTLK,EXT PCII
1546 0020-20991 PANEL, BLANK TURBO CNTL
1547 0090-20430 PANEL ASSY, MFC ACCESS, (CH 2,1,C)E-CLE
1548 0020-21221 HOOP CD 200MM
1549 0040-43230 COVER, TRANSFER CH, HP ROBOT,
1550 0227-29405 ASSEMBLY, DUCT EXHAUST GAS PANEL
1551 0020-31081 PRODUCER TRANSFER CHAMBER 
1552 0020-76598 PANEL-REAL MAIN AC FRAME, SEMI-
1553 0020-63929 BRACKET, CHILLER VACUUM 
1554 0020-76599 PANEL-RIGHT MAIN AC FRAME, SEMI-
1555 0020-20993 PANEL TOP
1556 0020-76600 PANEL-LEFT MAIN AC FRAME, SEMI-
1557 0020-21046 COVER, FRONT
1558 0020-20588 COVER RF GEN PCB
1559 0020-25476 HUB INSULATOR HEATER ESC/HT
1560 0020-70767 BUSS BAR 400A, LEFT LINE MAIN
1561 0020-70768 BUSS BAR 400A, CENTER LINE MAIN
1562 0020-70769 BUSS BAR 400A, RIGHT LINE MAIN
1563 0020-70770 BUSS BAR 400A, LEFT LOAD MAIN
1564 0020-70772 BUSS BAR 400A, RIGHT LOAD MAIN
1565 0020-70771 BUSS BAR 400A, CENTER LOAD MAIN
1566 0021-02420 BRACKET ALIGNMENT RTP
1567 0040-03008 BASE RING DISPLAY COVER
1568 0021-03724 CENTER FIND FLANGE, COOLDOWN,
1569 0020-18288 SUPPORT, TURBO CONTROLLER, EBARA
1570 0020-18287 BLANKOFF, TURBO CONTROLLER, EBARA
1571 0020-19980 BRACKET, TURBO SUPPORT, HDPCVD ULTIMA
1572 0020-75759 BRACKET, CDA TTF FITTING MOUNTING
1573 0021-36142 BRACKET, SUPPORT, GAS LN
1574 0021-38136 COVER, PROTECTION, 150MM, ESC
1575 0020-20002 BUSS BAR GND
1576 0020-18789 BLANK-OFF GATE-VALVE BONNET PLATE ULTIMA
1577 0020-18617 CLAMP, TOP, GAS MANIFOLD, HDP-CVD, ULTIMA
1578 0020-18616 CLAMP, BASE, GAS MANIFOLD, HDP-CVD, ULTIMA
1579 0021-06770 SCREW, OUTER CAPTIVE, BPSG, RTP
1580 0040-38114 PLATE, MNTG, DPA SYSTEM INTERCO
1581 0040-37948 STANDOFF, M/F, DPA SYSTEM INTERCO
1582 0040-70159 STABILIZER LEG LEFT
1583 0040-70158 STABILIZER LEG RIGHT
1584 0020-39306 BRACKET, RACEWAY LINES
1585 0040-37310 COVER, DC POWER SUPPLY, AUTO
1586 0021-39361 BRACKET, PANEL, MOUNTING
1587 0020-39580 BRACKET, TOP/BOTTOM CLAMP
1588 0040-02923 PANEL FLOOR, SUPER E, POS B, MCE
1589 0020-33165 RING ADAPTER
1590 0020-04910 BRACKET, MAINFRAME NON-HEATED
1591 0020-05811 BRACKET, MNFRM, NON-HTD GAS LN
1592 0040-22415 PANEL MANIFOLD REAR WATER RF
1593 0021-45466 PRODUCER PILOT GIDE 2(RIGHT) 200MM
1594 0270-35187 WAFER, CALIBRATION OTF 200MM FRONT END
1595 0020-04680 COVER, FLOOR, D POS, OUTER, ULTIMA
1596 0020-05986 COVER, FLOOR A POS INNER, ULTIMA
1597 0020-06467 COVER, FLOOR REAR R, CH A,C,B, AND 
1598 0020-14645 COVER, FLOOR, L/L B BACK, UNIV. CENTURA
1599 0020-18588 COVER, FLOOR, FLOOR, FACILITIES INNER
1600 0020-18582 COVER, FLOOR, C POS, OUTER, ULTIMA
1601 0020-32022 PANEL, FLOOR B POS, INNER, ULTIMA
1602 0021-09915 COVER, FRONT, LL B, #1, CENTURA DCVD
1603 0021-29290 COVER, FLOOR C POS OUTER ULTIMA
1604 0021-01928 COVER, BOX, CIRCUIT BREAKER, 250 AMP
1605 0040-60925 PLUG, UNIVERSAL SHIPPING, ALL
1606 0021-21469 RING RESTRAINT, 1.574 DIA SHFT
1607 0021-21470 RESTRAINT PIN, CERAMIC RINGS,
1608 0020-05749 ADAPTER, W/B LOADLOCK, ENDURA
1609 0022-77490 BRACKET
1610 0022-77491 BRACKET
1611 0020-31082 PRODUCER CH SHIPPING CLAMP
1612 0270-35098 TOOL, PROBE WRENCH, MOD II
1613 0020-40018 COVER DOOR SWMT
1614 0020-05750 PLUG, W/B LOADLOCK, ENDURA
1615 0020-20416 PANEL,BLANK-OFF,PLUG,RF GEN, CABINET
1616 0040-01338 SIDE CVR, LL B
1617 0040-01149 BRACKET, MOUNTING MAGNET TERMINAL
1618 0020-04039 COVER PLATE RF
1619 0021-09524 BLOCK, MOUNTING, GASLINE NYLON
1620 0020-31126 PLATE, MTG, PPS, POSN B & C, ASP
1621 0020-70525 SCREW LIFT HOOP HAYNES 242 PRODUCER
1622 0020-39500 HANDLE, MOLDED, PUMPING PLATE,
1623 0020-21366 SCR SHOULDER DC BIAS TIW
1624 0040-03146 STABILIZER/FRKLFT RAIL, EQUIPMENT
1625 0020-08730 PLATE DUAL VALVE MTG FUJIKIN VALVE
1626 0040-34572 DUCT, EXHAUST, PROD S, SPLIT FRAME
1627 0020-41227 FLAG Z-DIR INDEXER
1628 0020-23349 HUB HEATER INSULATOR
1629 0020-37985 SPACER, STUD PALLET MOUNTING
1630 0040-05783 BRACKET, LOWER FINAL LINES, CH. A/B, PRO
1631 0021-70160 PANEL, SIDE UPPER FRAME, FRONT,CENTURA
1632 0021-76434 PANEL, A/C FR, B/D RR COVER SIDE
1633 0021-76954 COVER, FLOOR, SIDE-FRONT, CENTURA
1634 0020-34276 COVER, REAR, SIDE, TEOS, CENTURA
1635 0021-36131 COVER, REAR, SIDE, RIGHT CENTURA
1636 0020-34280 COVER, MIDDLE, CENTER, CENTURA
1637 0020-76743 FOOTING, TEFLON, LID BRACKET
1638 0227-62331 KTI, WBLL CASSPLAFRM 200MM 
1639 0040-13012 POST SUPPORT SPRING PLATFORM 
1640 0040-76555 TRAY STORAGE WAFER DUMMY WBLL
1641 0021-36240 DELIVERY GAS LINE BRACKET
1642 0021-39990 SPACER SLOTTED INSYKATIR SHIELD
1643 0040-01785 CLAMP, H-BAR, DXZ, FLUORINE 
1644 0021-06045 BAR, TEFLON, DXZ, FLUORINE
1645 0270-35354 JIG, CALIBRATION, ROBOT COLLAR
1646 0270-35355 TOOL, ROBOT/INDEXER CALIBRATION
1647 0021-37156 BRACKET, MAGNET POWER 
1648 0021-04573 GAS BOX COVER
1649 0020-21485 PLATE CONTACT DC SOURCE 13 LEFT
1650 0020-21482 PLATE CONTACT DC SOURCE 13 RIGHT
1651 0020-07776 BRKT, MAINFRAME HV IND WIDEBODY
1652 0020-22577 BRACKET SYSTEM MANIFOLD INLET
1653 0020-27333 BLANK OFF ADV 101 HEATER BOX
1654 0020-76954 BRACKET CLAMP 1 1/2-2 1/2
1655 0020-25746 PAD 8 ZX HEATER DC BIAS
1656 0020-22548 PLATE BLANKOFF SHUTTER ARM
1657 0020-26829 CONNECTOR HEAT SHIELD HEATER
1658 0020-05678 SPACER, NON-HTD FRLN, CENTURA COMN. MF,
1659 0021-36627 CLAMP, SHROUD RACEWAY, PROC /VDS LINES
1660 0021-36819 PALLET SIDE DCVD CENTURA
1661 0020-18430 PALLET RIGHT SIDE EXTENDED DCVD
1662 0020-21035 BRACKET SOURCE WATER LINE
1663 0020-20156 PILLOW BLOCK SOURCE BRACKET
1664 0020-20617 BRACKET HANDLE
1665 0020-75204 BRACKET, CONDUIT MOUNT
1666 0040-13270 BLANKOFF, AC RECEPTACLE, CHAMBER
1667 0020-23633 VENT LINES BRACKET 3 OF 3
1668 0020-05683 COVER CHAMBER TEMPERATURE MONITOR
1669 0270-20088 TOOL PRE-CLEAN II 8" ROBOT ALIGNMENT
1670 0021-21857 PLATE, MOUNTING, PNEU CYL/MOTOR
1671 0060-76187 PC GUIDE COVER
1672 0020-21853 DC ACTUATOR SOURCE
1673 0020-18388 INSERT MO.10-32
1674 0020-18754 BRACKET, LOCK-OUT VALVES
1675 0020-47701 BRACKET CABLE CARRIER LGT STDF
1676 0020-44002 BRACKET CABLE CARRIER RGT STDF
1677 0020-18518 BRACKET, SWITCH, LID INTERLOCK
1678 0020-75735 WATER MANIFOLD 3 METAL BLADE
1679 0040-13002 PINCH COVER NARROW LLA
1680 0041-12399 PLATE COVER LOAD FLANGE,
1681 0020-20945 BRKT, SW MAG/H-SENSOR
1682 0020-18413 HINGE, COVER REV. 3, HDP-CVD
1683 0020-18855 SPACER, NON-HTD FRLN, CENTURA
1684 0020-12754 STUD CLEAN GAS FEED, HDPCVD ULTIMA PLUS
1685 0020-18375 BRACKET, BIAS MATCH SUPPORT, HD
1686 0020-10325 ENG HINGE BLOCK, LEFT ULTIMA
1687 0020-18798 BRACKET, LEFT DUAL GAS SPRING
1688 0020-18404 LATCH BLOCK, LID, HDP-CVD REV.3
1689 0040-39636 PANEL, DRESS LOADLOCK, 200MM
1690 0040-03135 BOX, BIOCON CONNECTION, 200MM
1691 0021-02688 CLAMP, CABLE, OTF FIBER MOUNT
1692 0021-06828 BRACKET, INNER, HOSE MOUNT
1693 0021-06827 BRACKET, OUTER, HOSE, MOUNT
1694 0021-06829 BLANK-OFF FAN SMIF ROBOT
1695 0021-06955 COVER, BIOCON, CONNECTION
1696 0021-76388 BRACKET UPPER, TALL MAN. MOD
1697 0020-05990 BRACKET, LOWER SHORT MANIFOLD
1698 0020-05989 BRACKET, LOWER TALL MANIFOLD
1699 0020-05988 BRACKET, UPPER SHORT MANIFOLD
1700 0020-18376 BRACKET, MATCH, HDPCVD REV 3
1701 0020-10324 END HINGE BLOCK, RIGHT ULTIMA
1702 0040-61153 CATCH, CHAMBER RACK, PROD
1703 0020-18799 BRACKET, RIGHT DUAL GAS SPRING
1704 0021-45464 PRODUCER PILOT GUIDE 1(LEFT) 200MM
1705 0021-45468 PRODUCER PILOT GUIDE 1(LEFT/RIGHT) 200MM
1706 0020-20587 INSERT, SLIT VALVE MACHINED
1707 0021-06956 PLATE, BLOWER MOUNTING, 200MM
1708 0020-53524 GAS LINE SUPPORT, ADJUSTABLE L BRACKET
1709 0040-50949 BRACKET SUPPORT, RPS HDP-CVD
1710 0020-75449 CHILLED WATER VLV BLOCK
1711 0270-04033 SUPPORT PLATE SPACER, SHIPPING U-FRAME
1712 0270-04034 SUPPORT PLATE, SHIPPING U-FRAME,
1713 0020-75450 BRKT, VALVE, CHMB B/D, CENTURA
1714 0020-13579 SHAFT WIDE BODY INDEXER
1715 0040-87410 ADAPTER, WIDE BODY INDEXER CMF
1716 0020-13607 BRACKET, TTF CLAMP HOLD,
1717 0020-60735 REFLECTOR MOUNTING GAUGE, LCF
1718 0020-08759 CLAMP HDPCVD ULTIMA 1.5
1719 0020-18949 COVER, SHIELD CATHODE BASE LIFT
1720 0021-02687 PLATE, OTF FIBER MOUNT, 200MM
1721 0020-40158 L/L GATE DOOR COVER BRACKET
1722 0020-70536 BRKT PCB TURBO INTERCONNECT
1723 0021-36731 BRACKET, NUPRO, N2 TURBO PURGE,
1724 0020-23237 PCB BOARD SENSOR MOUNTING PANEL
1725 0020-29015 CLAMP RING. 8 SNNF, SST, LOW
1726 0040-31834 EPD MONOCHROMATOR BRACKET
1727 0021-20152 CLAMP RING, 8 SNNF WITH SMALL
1728 0021-11269 AL COVER
1729 0040-09679 COVER AC ENCLOSURE THROTTLE/GATE VALVE
1730 0021-35802 BRACKET, MNFRM, NON-HTD GAS LN
1731 0040-20095 ALIGNMENT TOOL FROG LEG ROBOT
1732 0041-27525 LGB RETROFIT, TUBE SUPPORT, BASE
1733 0021-54455 LGB RETROFIT, TUBE SUPPORT, OUTER
1734 0021-54456 LGB RETROFIT, TUBE SUPPORT, MIDDLE
1735 0021-07575 PANEL, RF GENERATOR, ACG-6B
1736 3690-01986 CLAMP
1737 3320-01113 GSKT NEOPRENE 2.12OD X 1.32ID X .031THK
1738 0020-70596 THREELINE BUSSBAR 38HOLE
1739 0021-15894 PLATE, COVER, GPLIS, PROD S, SPLIT FRAME
1740 0020-09054 SENSOR BRACKET
1741 0020-09550 BRKT, GAS SUPPCY
1742 0227-99389 GAS LINE BRACKET
1743 0227-99390 PLATE VDS ASP PALLET
1744 0020-32431 JACK, CONN CLAMP, RF PLATE, ESC
1745 0020-46278 STUD, CRYO/GATE VALVE W/HEX SOCKET FOR W
1746 0020-13345 BLANKOFF, TURBO CNTRL ACCESS
1747 0020-20965 MAIN AC CXTENTION BRAKET PLATE
1748 0021-78969 SHIELD
1749 0020-34577 BLOCK, ROUND PIN RETAINER, R2 CHAMBER
1750 0040-01381 PALLET, 10 GAS LINE, GAS BOX, 31
1751 0040-06000 VIEW PORT ASSEMBLY, ULTIMA, HDP-CVD
1752 0020-21780 FLANGE, BLANKOFF ROTATION
1753 0020-21779 FLANGE, BLANKOFF CCD
1754 0020-26692 SPACER, HTHU UPPER, LIFT
1755 0040-75852 GENERATOR RACK CABLE SUPPORT
1756 0270-18073 COLLAR, 200MM ULTIMA HDP-CVD
1757 0040-05887 CATHODE BASE, TEMP MX, HDP-CVD, ULTIMA
1758 0040-00665 SHELF, INDEXER, SMIF FRONT END, PRODUCER
1759 0021-02691 BRACKET ROBOT SUPPORT LEFT
1760 0040-39310 BRACKET, SMART-COMM, 200MM SMIF-PRODUCER
1761 0021-03010 BRACKET CABLE CARRER LEFT 
1762 0021-39833 BRACKET, SW, SMIF FEND, 200MM PRODUCER
1763 0021-02210 MOUNT, UPPER, END EFFECTOR, SMIF FRONT E
1764 0020-18898 COVER, DETECTOR WAFER MAPPING
1765 0020-21231 COVER, CONN
1766 0040-78191 SKIN UPPER RIGHT FLAT 200MM
1767 0020-36641 BRACKET STRAIN RELIEF UMBILICAL
1768 0020-36642 CLAMP STRAIN RELIEF UMBILICAL
1769 0020-39909 BRKT, LOWER SLD
1770 0020-37946 PLATE, SWITCH CONTACT
1771 0021-37180 COVER, BLANKOFF, ENCLOSURE GPLIS
1772 0021-37182 COVERM ACCESS, ENCLOSURE GPLIS
1773 0020-05240 SLD COVER, COMMON, EXHAUST
1774 0040-32637 PANEL, COVER BOTTOM ENCLOSURE
1775 0020-34777 PANEL, BOTTOM, ENCLOSURE GECO
1776 0010-75518 CASSETTE HANDLER LLB
1777 0010-75517 ASSY, 150MM CASSETTE HANDLER
1778 0020-05601 BRACKET, PHOTOHELIC GAUGE, GP
1779 0020-39908 BRKT, UPPER SLD
1780 0020-31663 BRKT, SYMMETRICAL COIL, LOWER
1781 0040-02938 GAS MANIFOLD REPAIR
1782 0021-04341 BLOCK GAS SPRING LID 200MM
1783 0020-39903 SIDE PANEL SLD
1784 0020-39904 SLD BLK VLV ENCLOSURE
1785 0020-13740 SHLDR SCREW 5/16-18*1L SLIT VALVE
1786 0020-40159 BRACKET, LOAD LOCK
1787 0020-34679 PANEL A, TOP, EXHAUST
1788 0020-21832 BRACKET RIGHT
1789 0020-22127 CATCH, SCREW LOCK
1790 0020-75678 PANEL TOP COVER CENTURA
1791 3810-01123 LONG SHAFT
1792 0020-27942 BRACKET CABLE VHP COVER LIFT
1793 0020-70588 SHIELD, FUSES SHUNT TRIP
1794 0020-29410 BUFFER CRYOPUMP LIGHT BLOCKING
1795 0040-18215 BRACKET, MTG, SEG 1 GAS LINES
1796 0021-11476 COVER CHMBR SET SERIPLEX INTERCONNECT
1797 0040-39720 FORELINE 2.3 W/CONVECTRON ADPTER
1798 0020-28315 SENSOR BRACKET SHUTTER
1799 0020-40779 LOAD LOCK DOOR CYLINDER BLOCK
1800 0040-21713 PANEL LIFTING FIXTURE RIGHT CVD
1801 0040-21714 PANEL LIFTING FIXTURE RIGHT CVD
1802 0040-21715 BRACKET, LIFT SUPPORT
1803 0020-37802 GAS BOX SIDE COVER
1804 0020-31595 INSULATOR, HINGE, UNIBODY COVER
1805 0020-05713 SPACER 1.0, FLN MAIN FRAME
1806 0020-07200 RACK PC COVER
1807 0020-22124 PLATE, HINGE MOUNTING
1808 0020-76833 COVER, PROT SMALL GEN RACK
1809 0020-70537 COVER PROTECTIVE, RF POWER SUPPORT
1810 0040-23466 BLANKOFF DC CONNECTOR VOR IMP
1811 0040-77232 PVC BRACKET
1812 0040-21335 SUB PANEL 3RD MONITOR PCB
1813 0040-06255 PANEL FRONT UPPER MANUAL W/LIGHT
1814 0020-17113 COVER, MOD, CATHODE BASE,
1815 0021-78970 BRACKET, ANGLE, CHASSIS
1816 0021-79251 CHASSIS SUPPORT, PS
1817 0021-20007 STUD, CORNER, AMPULE LIFTER CVD
1818 0040-03731 MNTG PANEL, 15 VALVES, MCE GP
1819 0020-75858 BLANK-OFF CENT. OTF, UPPER
1820 0020-10086 ENCLOSURE BOTTOM COVER
1821 0020-36603 COVER TOP LEFT REM AC BOX
1822 0020-36194 COVER 400A CB UPPER
1823 0021-76314 COVER, TOP RIGHT REMOTE AC
1824 0021-79492 BRACKET 2 KI FLOW VALVE PAD
1825 0021-10585 TC PLATE ASP
1826 0040-86872 HDLBAR, 1ODX5L, 3/8-16 2-END SS
1827 0020-18621 PLATE, TTF CENTER REAR, ULTIMA
1828 0040-54102 LID CHAMBER PRODUCER 200MM
1829 0020-18405 GAS PANEL REPAIR
1830 0020-42323 BRACKET, PNEUMATIC MANIFOLD COVER,
1831 0020-36132 PANEL COVER REMOTES DIST
1832 0040-04289 PVD GAS HEATER REPAIR
1833 0040-37594 SHAFT, PLUG, DXZ+ TOOL FOR
1834 0040-43698 SIDE DOOR
1835 0040-13219 COVER EMO, 480&208V CENTURA
1836 0040-13162 COVER DRVR SIDE, LOWER
1837 0040-13161 COVER, DRVR SIDE, UPPER
1838 0021-01769 BRACKET LOCKOUT VALVES(12)
1839 0020-78512 MOUNTING PLATE KI RECIRC SPRAY
1840 0020-78849 HOLDER SPRAY GUN KI WATER
1841 0020-18657 BRKT 1 FINAL VALVE FUJIKIN
1842 0040-32773 PALLET, SIDE, PROD S, SPLIT
1843 0021-76777 BRACKET, FUJIKIN BV1 VALVE
1844 0021-26980 BRACKET O3 DIVERT STICK SUPPORT
1845 0020-39603 BRACKET FUJIKIN BV3 MANIFOLD
1846 0021-13303 BAR, SIDE PALLET MTG SPCR, GAS
1847 0021-01918 BRACKET, LOCKOUT VALVE, GP
1848 0020-26321 INSULATOR, MAGNETIC SWITCH LIGHT
1849 0040-02198 PANEL, FLOOR, DPS CHBR POS A, MCE
1850 0015-35482 ENCLOSURE REMOTE A/C II,
1851 0040-22360 BRACKET, ISO AMP MODULE
1852 0040-39642 SIDE PAMEL REPAIR
1853 0021-01716 FRONT PANEL (LOWER)
1854 0260-46600 ULTEM CHAMBER RING SUPPORT
1855 0021-76017 PANEL SIDE COVER FRONT COMMON
1856 0021-64518 PIN, RESTRAINT, HTESC
1857 0022-77194 BASE PLATE INTERLOCK SLURRY
1858 0040-38576 PLATE, BLANKOFF INTERFACE
1859 0020-26191 RING 4 DUAL ROBOT
1860 0021-35822 CLAMP ASP
1861 3780-01106 SCREW HOLD POLISHING SPRING
1862 0020-20794 COVER, A/C DISTRIBUTION
1863 0020-29028 BUSS BARS, K1 LINE, RIGHT, 600A
1864 0020-29026 BUSS BARS, K1 LINE, LEFT, 600A
1865 0020-29027 BUSS BARS, K1 LINE, CENTER, 600A
1866 0020-29126 SCREW STUD REDUCER
1867 0700-01029 COIL WATER COOLING KIT SEIKO
1868 0020-10004 COVER, THROTTLE DRIVE
1869 0020-75448 PROTECTIVE COVER FRONT DRIVE
1870 0020-20232 LANGE, EXHAUST FAN
1871 0021-04572 GAS PANEL SIDE COVER
1872 0020-29975 RF CONNECTOR BAR
1873 0020-36472 PANEL BLANK 19 X 8.72
1874 0020-75998 BRACKET, SUPPORT, WBLL FASTER
1875 0270-77036 SHIPPING RESTRAINT MIRRA
1876 0040-22259 TOP COVER
1877 0020-76217 BRACKET BREAKER PANEL SUPPORT
1878 0021-10588 PLATE, INTERNAL PUMPIGN CHNL
1879 3480-01104 MOUNT LUL FT STUD 2.5DIA 5/8
1880 0270-01143 FICTURE FORK TUBE 200MM CLEANER
1881 0020-27408 SIDE COVER
1882 0021-79624 LEFT WALL MEGASONIC MESA 200MM
1883 0020-06029 BRACKET, ETI EMO SWITCH, TOP&BOTTOM
1884 0040-34937 PANEL, FLOOR, XFER, EXHAUST
1885 0020-79478 NUT PLATE, SLURRY VALVE CMP
1886 0020-79473 STAND SLURRY PUMP
1887 0021-19681 CMP COVER PLATE LIGHTED PROCESS
1888 0020-78127 PFA MANIFOLD(CMP)
1889 0020-78126 PFA MANIFOLD(CMP)
1890 0010-19457 COVER
1891 0040-09624 COVER, FRONT BRUSH MOTOR, MESA
1892 0020-20036 COVER, CHAMBER INTERCONNECT
1893 0020-77943 GASKET PAD CONDITIONER MOUNT
1894 0020-77457 BRACKET, BELT TENSIONER
1895 0040-75174 COVER, DRIVERS, LOWER
1896 0021-36716 BLOCK, MOUNTING, GASLINE, NYLON
1897 0021-35776 BRACKET, MOUNTING, PID CONTROLL
1898 0020-31478 VDS TEFRON RING
1899 0021-04658 PLATE VDS ASP PALLET
1900 0021-76932 COVER, BACK SLOT, 31 ENCLOSURE
1901 0020-12560 BRACKET, HORIZONTAL V-BLOCK,
1902 0021-04653 BRACKET 4 POSITION, ASP PALLET
1903 0040-09771 COVER, CHAMBER BODY, RIGHT, POS C, ASP
1904 0040-09772 COVER, CHAMBER BODY, LEFT, POS D, ASP
1905 0040-09632 COVER, LID, RIGHT, POSN C, ASP
1906 0040-09631 COVER, LID, LEFT, POSN C, ASP
1907 0040-09629 COVER KID, LEFT, POSN D, ASP
1908 0040-09681 COVER, CHAMBER BODY, LEFT, POSN
1909 0040-09630 COVER LID, RIGHT, POSN D, ASP
1910 0040-09684 COVER, CHAMBER BODY, RIGHT,
1911 0021-79631 COVER, SEC ENCL TOP
1912 0240-13076 KIT, VHP TRANSFER DRIVERS
1913 0040-06377 BRACKET, MAINFRAME HEATED GASLINE
1914 0040-01134 MOUNT RING
1915 0010-93010 ASS'Y, FAST COOL DOWN CHBR
1916 0020-30707 COVER, ELECTRICAL, H20 VDSII
1917 0021-03940 CLAMP, DOME, 200MM DPS E-DTCU
1918 0021-08118 WATER COVER, COOLDOWN, DPS 200
1919 0040-47496 PAN, INPUT UPPER DRIP PAN, 200MM
1920 0040-40602 DRAIN WETQUEUE TANK MESA SYSTEM
1921 0040-09537 COVER, ENCLOSURE, H20 VDSII
1922 0020-02221 CLAMP, VALVE, SHUTOFF, MDPS+
1923 0040-36872 GP DOOR INTERLOCK SWITCH BRACKET
1924 0050-31457 WATER LINE,LOWER CHAMBER,DPS
1925 0040-32136 CHAMBER BODY, ASP+
1926 0040-09558 LID, TOP, ASP
1927 0020-31554 ASP INTERFACE B/D COVER
1928 0020-31260 ASP ATM SWITCH BRACKET
1929 0021-10582 SPACER, TC ASP
1930 0020-34986 COVER, BELT, MOTOR DRIVE, THROTTLE
1931 0020-70604 PANEL BOTTOM RF GEN CABINET
1932 3300-03852 FTG   ELBOW 90DEG MITERED 1"OD X 1.88L
1933 0021-37079 PANEL,FLOOR,DPS CHBR,POS"B",PH-II FAC
1934 0090-09171 ELECTRICAL ASSY, CATHODE MAINT., BACK
1935 0050-39339 PERISCOPE 1.50 BOTTOM DPS CHAMBER
1936 0040-09577 COVER,SAFETY,WAVEGUIDE, ASP
1937 0021-70282 COVER,BACK,CHMBR COOLING,DPS POLY
1938 0021-36242 SPACER, FRLN MNFRM
1939 0040-09525 ASP PUMPING PORT
1940 0050-10033 FTG 90DEG 7/16-20 TO # 1/4VCR ASP
1941 0040-09115 FEED THROUGH
1942 0020-31519 PLUNGER, INTERLOCK SWITCH ASP
1943 0050-10047 WELDMENT, 2 MANOMETER, ASP
1944 0020-10187 CLAMP RING Q WINDOW 200MM
1945 0020-31763 BRACKET SOLENOID MOUNTING ASP
1946 0020-31480 SPACER, MTG. HANDLE, ASP
1947 0040-09439 PLATE, FRAME, PRSP3
1948 0040-35483 BRK, CLAMP TOP LID, MXP CENTURA
1949 0040-09661 ENCLOSURE LAMP, COVER, POSN.D
1950 0021-10589 PLATE INTERNAL, PUMPING CHNL,
1951 0021-70281 COVER, FRONT, CHMBR COOLING
1952 0040-09401 SUBPLATE MTG, PREFIRE PWR SUP,
1953 0021-35823 FLANGE2 ASP
1954 0021-10854 ASP LIFT AMP BRACKET
1955 0021-36730 BRACKET, MAIN FACILITIES, DPS
1956 0040-09434 FRAME, CHAMBER I/F, PRSP3
1957 0021-36748 COVER, THROTTLE, 5 PHASE, DPS
1958 0050-75079 FORELINE 316L SST XFER CHAMBER
1959 0020-13126 COVER DC, LOWER G12, FLAME RETARDANT
1960 0010-01648 CLEAR LID ASSY, 200MM PRODUCER
1961 0050-75080 FORELINE 316L SST SHORT XFER CHAMBER SPO
1962 0021-36241 BRACKET, SUPPORT, GAS LN
1963 0050-76038 VACCUM LINE LLC B DIFF LOWER
1964 0020-31268 STANDOFF, CHAMBER, ASP
1965 0040-20031 ADAPTOR, ION GAUGE
1966 0021-03882 BRACKET FORELINE SUPPORT, PRODUCER
1967 0020-13652 CLAMP, VIEWPORT DETECTOR
1968 0020-75093 L/L VIEW PORT, WINDOW
1969 0020-40852 BRACKET
1970 0020-22066 COVER NEW BUSS-SYS AC
1971 0021-36632 PANEL,LOWER FLOOR,DPS CHBR,POS"C",
1972 0021-36634 PANEL,LOWER FLOOR,DPS CHBR,POS"D",PH-II
1973 0021-38019 PANEL, UPPER FLOOR, ASP CHBR, POS C,
1974 0021-38020 PANEL, UPPER FLOOR, ASP CHBR, POS D, PH-
1975 0040-76532 COVER ANALOG SYNC PWA, FAST WAFER MAPPIN
1976 0020-38183 COVER, PID CONTROLLER-R2 CHAMBER
1977 0020-38184 HEATSINK, SSR-PID CONTROLLER
1978 0040-35519 HOUSING, PID CNTRLR-R2 CHMBR
1979 0270-18038 BLANKOFF, REMOTE PLASMA PORT
1980 0020-18368 INSULATOR, RF POST, BIAS, HDP-CVD
1981 0020-18369 CONNECTOR, RF POST, BIAS, HDP-CVD
1982 0020-18370 INSULATOR, FEEDER, BIAS, HDP-CVD
1983 0020-18506 INSULATOR, BIAS RF MATCH ADAPTOR
1984 3690-04613 SCR SHLDR 5/16-18X.375ODX2.25L
1985 0020-18483 CLAMP, IR SENSOR STANDOFF
1986 0020-40691 SPACER, HINGE
1987 0020-18402 STANDOFF, LATCH KEEPER, HDP-CVD
1988 0020-18459 INSULATOR, TOP COIL, B2 MK2
1989 0020-18359 FLAG, SENSOR, LIFT, HDP-CVD
1990 0020-18360 FLAG, SENSOR, LIFT, HDP-CVD
1991 0040-02606 BRKT, CHAMBER PNEUM, MOUNTING
1992 0020-18499 CLAMP IV SENSOR/TOP COIL IN
1993 0020-18371 RF FEEDER, BIAS, HDP-CVD
1994 0040-39061 WELDMENT, BARATRON MANIFOLD
1995 0040-42755 PLATE, RPS MOUNT, ULTIMA+
1996 0020-18373 INSULATOR, PLUG, HDP-CVD
1997 0020-18306 SPRING BASE, REV. 3.2 RF QUICK
1998 0020-05656 MODIFIED FASTENER GND SHLD
1999 0020-18352 BOLT,MODIFIED, CATHODE, HDP-CVD
2000 0020-18353 BRACKET, LIFT, HDPCVD
2001 0020-18361 SCREW, SHOULDER, HDP-CVD
2002 0020-18363 SCREW, MODIFIED SHOULDER, HDP-CVD
2003 0020-40240 INSERT CHAMBER/FINGER THRU
2004 3060-01630 BRGBALL .253FT .625ODX.196W SST
2005 0020-18294 SCREW, MODIFIED , 1/4-20*.37
2006 0020-18544 STRIP2 SIDE COIL, UPPER CHAMBER
2007 0040-40173 HINGE RIGHT END
2008 0020-01926 BAND GROUND, TOP COIL, ULTIMA
2009 0020-18267 HALF RING THROTTLE VALVE HDP-CVD
2010 0020-18265 COVER, SHAFT THRU HDP-CVD
2011 0020-10703 SPACER, BRG THROTTLE VALVE TEOS
2012 0020-31531 SPACER WHSR THROTTLE VALVE
2013 0020-29959 PIN DOWEL .375 DIA 3.0 LG SST
2014 0200-18107 RF INSULATOR QUICK CONNECT, ULTIMA
2015 0020-18517 EXTENDER, SWITCH, LID INTERLOCK
2016 0020-61800 BRACKET, ACTUATOR, HDP-CVD
2017 0020-07515 COVER DRIVE THV ULTIMA HDP-CVD
2018 0020-33405 PLATE, MOUNTING THROTTLE VALVE
2019 0020-18380 HE BLOCK,D/F CATHODE, HDP-CVD
2020 0020-12753 STUD BLOCK CLEAN GAS FEED
2021 3040-01033 BALLPRCN5 / 16DI ASST
2022 0020-18759 COVER CURRENT TRANSFORMER
2023 0020-20524 HUB LEFT, CORNER COVER LAMP 
2024 0040-40928 BRACKET ASSY, PROGRAMMABLE
2025 0020-13601 TRACKING, MOUNTING, FLOWETER
2026 0020-13605 BRACKET, MTG REGULATOR, NON TOXIC GASES
2027 0021-70165 BRACKET, TALL MANIFOLD CENTURA
2028 0021-09508 BULKHEAD, WATER, LOWER CHAMBER, COMMON, DPS
2029 0021-09614 PLATE, MOUNT, FLTNG JNT, MAIN CYL, DPS
2030 0020-34476 CLAMP, TOP, CYLINDER, DPS
2031 0021-09565 PLATE, END, CYLINDER, MAIN LIFT, DPS
2032 0021-36725 BULKHEAD, CATHODE, WATER, DPS
2033 0020-39930 SLD LEFT, RIGHT COVER
2034 0020-39906 BOTTOM PANEL SLD
2035 0020-37936 DIVIDER, ENCLOSUREGECO
2036 0020-39913 SLD DOOR
2037 0020-04193 CAPTIVE SCREW 1/4-20X1.25LG
2038 0020-31230 PLATE, MTG INTERCONNECT, PCB, H20 VDSII
2039 0020-31232 PIN, REGISTRATION, BLOCK, MFC HEATER, H20 VDSII
2040 0020-31233 WINDOW, FRONT SHELL, H20 VDSII
2041 0020-31234 WINDOW, COVER ENCLOSURE, H20 VDSII
2042 0020-31251 PLATE, MTG, NUPRO VALVES, H20 VDSII]
2043 0020-31262 PLATE, VESSEL SUPORT H20 VDSII
2044 0020-31277 PLATE, BASE, MFC HEATER BLOCK, H20 VDSII
2045 0020-31278 BLOCK, MFC HEATER, H20 VDSII
2046 0020-31481 SPACER, H20  VDSII
2047 0040-09473 BRKT, VESSEL-VAPOR OUT, H20 VDSII
2048 0040-09476 CLAMP, TC, VAPOR LINE, H20 VDSII
2049 0040-09481 BOX, ELECTRICAL, H20 VDSII
2050 0040-09511 SHELL, FRONT, VESSEL, H20 VDSII
2051 0040-09512 SHELL, REAR, VESSEL, H20 VDSII
2052 3690-02566 SCR CAPTIVE PANEL 8-32X7/16L SLOTTED FIL HD SST
2053 0021-09598 BRACKET, NUPRO VALVES, DPS
2054 0021-09599 BRACKET, MOUNTING, NEEDLE VLAVES, DPS
2055 0021-36719 BULKHEAD, WATER, LOWER CHAMBER, MAIN, DPS
2056 0040-32201 WELDMENT, SUPPORT, CHAMBER, DPS
2057 0020-40085 MOUNT, BRAKE INDEXER
2058 0020-40708 FLAG, Z DIR, INDEXER
2059 0020-31857 STANDOFF, CHAMBER, 1.50 X #10-32, ASP
2060 0021-38028 COVER, SHROUD, FR PANEL 29" GAS PANEL
2061 0020-09413 GUIDE-NUT, LIMT SWITCH
2062 0021-13223 BRACKET 4 BLOCK VALVES
2063 0021-36626 CLAMP, VIEWPORT, LOWER CHAMBER, DPS
2064 0021-36718 BRACKET, NUPRO, HE DUMP, DPS
2065 0021-36732 SHROUD, PINCH POINT, FRONT, DPS
2066 0021-09568 PLATE, RESTRANT, MAIN LIFT, DPS
2067 0021-09580 BLOCK, BRACKET, MAIN, LOWER CHAMBER, DPS
2068 0020-38363 SPINDLE, LIFT DPS CHAMBER SUPPORT
2069 0021-09586 BRACKET, INTERLOCK, SIDE DOOR, DPS
2070 0021-09597 BLOCK, NUPRO BRACKET, DPS
2071 0021-36144 SCREEN, VIEWPORT, LOWER CHAMBER, DPS
2072 0020-33779 HOUSING, BUSHING, HOOP LIFT, DPS
2073 0020-31122 PLATE, PRSP3
2074 0040-09584 CLAMP, TOP LID, ASP
2075 0040-35400 RAIL, MTG, GAS BOX, UPPER FRAME
2076 0040-00637 PANEL, CONNECTOR CENTURA CMF VR2
2077 0020-39912 SOLID SLD COVER TOP/BOTTOM FEED
2078 0020-70647 PLATE, MFC-STEC LINE, N2 PURGE
2079 0020-31770 STANDOFF, COVER, 1.02 X 1/4-20 ASP
2080 0040-70116 SIDE PANEL, CONTR/GENERATOR CABINETS
2081 0040-76288 SIDE PANEL, CONTROLLER/AC
2082 0021-03731 BRACKET, VALVE SUPPORT, CENTURA
2083 0021-09526 BLOCK, MOUNTING, WATER LIFT, DPS
2084 0041-04164 BRACKET, MTG, MAGNETRON, ASP, MXP
2085 0021-76326 PANEL, BOTTOM FEED AC, PHASE I, CENTURA
2086 0020-33565 HOUSING, BEARING, THROTTLE, DPS
2087 0020-34987 PLATE, MOUNTING, MOTOR, THROTTLE, DPS
2088 0021-09516 PULLY, 1/5 PITCH, 15 GROVE, 37WIDE BELT, 5PHASE
2089 0021-09581 BRIDGE, STRUT, DPS CHBR, POS "A"
2090 0021-01424 KEY, DOME CLAMP, ADAPTER, R1 DOME FOR RO
2091 0021-06063 END PLATE-AUTO HANDLER, 200MM UNIV
2092 0020-05142 GENERATOR RACK COVER 1
2093 0020-67683 GENERATOR RACK COVER 2
2094 0020-20775 COVER, CABLE BRIDGE
2095 0020-76785 GENERATOR RACK COVER 3
2096 0020-20418 GENERATOR RACK COVER 4
2097 0020-13963 WBLL BRKT, LED BOARD MOUNT, FAST WAFER M
2098 0020-10038 BRACKET SWITCH
2099 0021-09540 ACTUATOR, INTERLOCK, CATHODE
2100 0021-76320 COVER, MJ7 BRACKET, MAINFRAME
2101 0040-13605 BRACKET, DIFFERENTIAL TRANSMITTER
2102 0021-35560 BRACKET, INERT GAS POST, ETCH, COMM
2103 0021-37155 SPACER, TERMINAL BLOCK
2104 0040-13273 SIDE COVER, CHAMBER TRAY AC, CENTURA
2105 0020-76392 BRACKET, TERMINAL BLOCK AC ENCLOSURE
2106 0020-76393 PLATE, BLANKOFF, CENTURA CHAMBER FAC
2107 0020-76390 ENCLOSURE, AC, CENTURA CHAMBER FAC
2108 0021-04509 RECEIVER 200MM CASSATTE FOR PA200-8MHEI
2109 0040-03985 BRACKET, MTG, ENI RF GEN, ACG-6B
2110 0021-35571 PANEL, FLOOR, BLANK, FRONT, POS C/D
2111 0021-38017 PANEL, FLOOR, REAR DPS CHBR,POS A/C,PH-I
2112 0040-13250 COVER, FRONT DOOR, N.B. LLC, COND
2113 0021-09582 BRIDGE, STRUT, DPS CHBR, POS "B"
2114 0020-13282 PLATE, 120VAC, RECEPT, MOUNTING, CENTURA
2115 0040-46257 RECEPT, BOX, 120VAC MOUNTING, CENTURA
2116 0040-76367 CLAMP #2, SHROUD RACEWAY, HEATED PROCESS LN
2117 0020-22126 COVER LIFT PVD
2118 0020-52776 PLATE, HX. SUP. - RET. VALVE, CII, MMF
2119 0040-76368 MANIFOLD SHORT
2120 0021-09615 BUTTON, MOUNTING, HV FILTER
2121 0020-39489 CLAMP, CLUTCH, LID HINGE, DXZ PLUMPING
2122 0020-34317 SPACER, LEVELING PLTAE
2123 0021-02365 C-CLAMP, SACVD
2124 0020-33572 BOLT CAPTIVE 5/16-18X1.25L
2125 0021-70283 BULKHEAD, WATER, LWR CHMBR, DPS POLY
2126 0021-09604 SHROUD, PINCH POINT, BACK, DPS
2127 0021-76535 PANEL, A/C FR, B/D FR COVER SIDE EQ, MF
2128 0021-76309 COVER, DET. ADJUST ASSY, FAST WAFER
2129 0021-37078 PANEL, FLOOR, DPS CHBR, POS"A", PH-II FAC
2130 0021-01021 FLOOR COVER REAR MIDDLE, .19 THICK
2131 0021-35561 PANEL, FLOOR, XFER, EXHAUST
2132 0021-38018 PANEL, FLOOR, REAR DPS CHBR, POS A/C, PH-II FAC
2133 0021-35563 PANEL, FLOOR, XFER, N2 PURGE
2134 0010-30575 SIMPLIFIED LID ASSEMBLY, GIGA-FILL
2135 0021-09735 CHAMBER BODY, DXZ
2136 0021-06452 COVER, REAR PANEL, GPLIS II ENC
2137 0021-09613 BLOCK, MOUNTM MAIN LIFT CYLINDER, DPS1
2138 0021-36724 BRACKET, MOUNTING, PONTOON, FACILITIES, DPS
2139 0040-01246 TRAY, MCE CHAMBER
2140 0040-09472 BRACKET, N2/MID-FILL VALVES REMOTE
2141 0020-34477 CLAMP, BOTTOM, CYLINDER, DPS
2142 0021-36729 SLIDE, FACILITIES BRACKET, DPS
2143 0020-31162 SCR PAN HD 8-32X1/4 ALUM VENTED SLOT
2144 0020-40008 CLAMP, SHAFT BEARING
2145 0020-40084 HOLDER, WIPER INDEXER
2146 0020-40301 SHAFT, CAM FOLLOWER DOOR MECH
2147 0020-40359 RETAINER SPRING DOOR MECH
2148 0020-40360 LINKAGE CARRIAGE DOOR MECH
2149 0020-40716 CARRIAGE, LHS
2150 0020-40717 CARRIAGE, RHS
2151 0020-40729 STOP BEARING MOUNT LLC DOOR
2152 0020-40888 SUPPORT, CARRIAGE, LLC
2153 0020-41193 PLATE, SIDE, LHS DOOR ME
2154 0020-70558 TRACK LOAD LOCK DOOR MECHA NISM
2155 0030-40008 BRACKET, TRAVELING
2156 0021-35726 6GAS PANEL VALVE PLATE #1
2157 0020-37481 GAS PANEL VALVE PLATE #2
2158 0021-09515 PLATE, MOUNT, MOTOR, THROTTLE, 5 PHASE DPS
2159 0020-75037 STOP LL DOOR
2160 0040-75227 WB DOOR CYL SW MT BRACKET
2161 0020-13965 COVER WAFER MAP LED, FAST WAFER MAPPING
2162 0021-09503 CLAMP RING, DOME, DPS
2163 3690-03983 SCR CAP SKT HD 5/16-18X1-5/8L HEX SKT SST SP
2164 0021-09506 MOUNTING RING, DOME, DPS
2165 0021-37886 LOCK, BALL-END LEVELING STUD
2166 0021-34288 BRKT MTG PLATE DISK DRIVE
2167 0021-34289 PNL FRONT DISK DRIVE
2168 3060-01076 BRG BALL 1/2ODX1/4IDX3/16W 1ROW FLGD 
2169 0020-38813 PLATE IDENTIFIER EV#2
2170 0021-70046 YOKE, LEFT, ENP CENTURA LID LIFT D.E ROBOT
2171 0021-70047 YOKE, RIGHT, ENP CENTURA LID LIFT D.E ROBOT
2172 0020-37483 BRKT, #11, GAS BOX, MXP CENTURA
2173 0020-26912 BRACKET CABLE MOUNTING ENDURA LID
2174 0040-09536 ENCLOSURE, DRIP PAN, H20 VDSII
2175 0020-33991 CHASSIS, TOP COVER, P/C END POINT 19 RACK MNT
2176 0020-01925 BAND TOP COIL/IV SENSOR, ULTIMA
2177 0020-01927 CLAMP TOP COIL, UPPER CHAMBER, ULTIMA
2178 0020-01928 CLAMP PLATE UPPER CHAMBER, ULTIMA
2179 0040-01330 LL BLKHD COVER BRKT
2180 0010-93287 ASSY, FAST COOLDOWN CHAMBER, CENTURA
2181 0040-04738 LID, TRANSFER CHAMBER W/RELIEF, VHP
2182 0190-10673 ASSEMBLY, SIGNAL TOWER WITH BUZZER
2183 0040-02569 PANEL, FLOOR, DPS CHBR POS C #1, MCE
2184 0040-02568 PANEL, FLOOR, DPS CHBR POS B, MCE
2185 0021-38022 PANEL, UPPER FLOOR, DPS CHBR, POS D, PH-II FAC
2186 0040-02570 PANEL, FLOOR, DPS CHBR POS D, MCE
2187 0020-13063 EMC COMP., PANEL REMOTES DIST
2188 0020-11625 SCREW, PIVOT, BARRIER SLIT VALVE
2189 0021-36722 ENCLOSURE CATH MAIN BACK LEFT DPS
2190 0020-15683 PLATE, THROTTLE VALVE, BLANK-OFF, METAL
2191 0150-09099 HARNESS ASSY LIMIT SW
2192 0040-01110 MOUNT DOOR TRANSFER SLIT VALVE
2193 0040-01143 BRK, AC BOX SUPPORT CENTER, MCECHMB
2194 0040-01572 BRK, AC BOX SUPPORT SIDE, MCE
2195 0020-35057 INSERT, LLA & LLB SLIT V
2196 0020-20672 PLUG, CHAMBER, MONOLITH INTERFACE
2197 0020-22551 COLLIMATOR, BRACKET GUIDE SOURCE
2198 0040-00889 PIVOT SLIT VALVE
2199 0020-13968 BRACKET, CONN WFR SENSE VHP ROBOT
2200 0040-34938 PANEL, FLOOR, CABLE M/F
2201 0040-04750 CHBR LID, CLEAR, COOLDOWN, DPS 200MM
2202 3690-03579 SCRCAP SKT HD M10X65MML SST SLVR PLT
2203 0020-06461 COVER, FLOOR REAR L, CH A,C,B, AND/OR
2204 0020-18776 COVER, FLOOR L/L A, BACK, UNIV, CENTURA
2205 0020-18579 COVER FLOOR, FLOOR D POS, OUTER, ULTIMA
2206 0020-18779 COVER, FLOOR, D POS, OUTER, ULTIMA
2207 0020-25631 COVER CLEAR POS A/B
2208 0021-10474 BRACKET ENDPOINT/PYROMETER 
2209 0040-03730 COVER, U-SHAPE, 15 GAS SLD BOX, MCE
2210 3780-02253 SPR GAS 8 STROKE 300LBS #14
2211 0020-23643 SUPP MIRROR SUPPORT
2212 0020-23644 MNT SENSOR MOUNT
2213 0020-23645 CLMP MIRROR CLAMP
2214 0020-23646 HOLD WINDOW HOLDER
2215 0020-23804 PLTE PLATE BACKING MIRROR
2216 0020-29001 CLIP, RETAINER W/TANGS, MIRROR
2217 0015-35236 STRIKE, LATCH, DOME, DPS
2218 0021-04276 COVER
2219 0020-05888 PLATE, AC BOX SPLASH GUARD, CENTURA II
2220 0040-03713 RING, MOUNTING, DOME, ES DTCU, POLY DPS
2221 0021-36728 BRACKET, BULKHEAD, CATHODE WATER, DPS
2222 0040-13013 FLANGE 316SST XFER CHB FORELINE LINE, CE
2223 0020-40117 PLATE, BLOCK OFF 1/40 DIA TRANSFER CHAMBER
2224 0020-31771 STANDOFF, COVER 1.00X10-32, ASP
2225 0020-45220 INSERT, DETECTOR VIEWPORT
2226 0020-75733 BRACKET, SENSOR MOUNT
2227 0020-75732 COVER, SENSOR BRACKET
2228 0040-13624 PANEL ASSY, SIDE COVER W/DOOR CMF RIGHT SIDE
2229 0021-76399 PANEL ASSY, SIDE COVER MIDDLE CMF, LEFT SIDE
2230 0040-13625 PANEL ASSY, SIDE COVER W/DOOR CMF LEFT SIDE
2231 0021-76398 PAENL ASSY, SIDE COVER MIDDLE CMF, RIGHT SIDE
2232 0021-76322 PANEL, SIDE COVER, REAR COMMON MF
2233 0021-39241 COVER TOP SHROUD GAS PANEL
2234 0010-20334 ASSS NARROW BODY LL DOOR COVER
2235 0020-13964 COVER WAFER MAP LED-NB, FAST WAFER
2236 0020-76912 NBLL BEKT LED BOARD MOUNT FAST WAFER MAPPING
2237 0021-09499 CLIP, INTERLOCK, SIDE DOOR, DPS
2238 0021-39160 STATOR UPPER DTCU DPS
2239 0020-33782 HOOP, 8 INCH, WAFER LIFT, DPS
2240 0040-13691 PANEL, CONVENIENCE OUTLETS, CENTURA MAINFRAME
2241 0040-13269 AC ENCLOSURE, FACILITIES TRAY, CENTURA
2242 0020-05941 BRACKETBIASGENLEFT,MCEDPS
2243 0040-02526 BRACKETFACEPLATE,RFGENRACKDPSPLUS
2244 0020-75202 BLANKOFF, CH TRAY INTERCONNECT PCA COVER
2245 0020-33329 BLOCK, CLAMP
2246 0020-37221 BAR GROUND POSITION, CHAMBER TRAY
2247 0020-20774 COVER, ACCESS RF GEN CABINET
2248 0020-20771 COVER, LOWER BOX CIRCUIT BREAKER
2249 0020-20498 COVER, BOX, CIRCUIT BREAKER - 250 AMP
2250 0021-04632 SHELF, EQUIPMENT, MCEGENERATORRACK
2251 0020-54896 BRKT, RF HARMONIC FILTER, DPS CHAMBER
2252 0020-37993 BKT LOCKOUT VALVES 5200
2253 0040-02396 COVER, THV DRIVE, ULTIMA HDPCVD
2254 0040-01093 BRACKET, MJ7 PC BOARD, CENTURA MMF
2255 0020-13518 FLAG, Z HOME, W/ DUMMY CASSETTE
2256 0040-38403 DOOR, LEFT, 31 GAS PANEL
2257 0040-38404 DOOR, RIGHT, 31 ENCLOSURE
2258 0020-18879 SCREW, PIVOT, BARRIER SLIT VALVE, ULTIMA HDP-CVD
2259 0040-61297 WELDMENT, HEAT EXCHG ASSY, HR DTCU, DPS
2260 0020-04788 SHROUD, FACILITIES & I/O, CENTURA MMF
2261 0040-39539 BRACKET, COMMON INTERLOCK PCB
2262 0020-21886 FLAG, Z HOME
2263 0020-28316 INSULATOR SHUTTER SENSOR BRACKET
2264 0020-24779 FLAG SENSORS SHUTTER LINKAGE
2265 0010-21100 LLA DOOR COVER ASSEMBLY
2266 0010-21101 LLB DOOR COVER ASSEMBLY
2267 0020-24514 TOP COVER , FRONT, LOADER INTER CONNECT PCB
2268 0020-20900 TOP COVER PNEUMATIC
2269 0020-10111 TOP COVER CONVECTTON GAUGE
2270 0020-24515 TOP COVER, REAR, LOADER INTERCONNECT PCB
2271 0020-20034 TOP COVER, SYSTEM POWER DISTRIBUTION
2272 0040-13527 OBS, CHAMBER ORIENTER DEGAS NO BLANKOFF
2273 0020-23479 PLATE MNTG PNEUM CYL/MTR LFT
2274 0020-23639 STUD MOUNTING MOTORIZED LIFT
2275 0040-40854 COVER CHAMBER TOP HDP-CVD ULTIMA 1.5
2276 0040-38460 DUCT EXHAUST GP
2277 0040-42260 STAND OFF, SHORT TOP AE
2278 0040-42261 STAND OFF, TOP AE, 200 ULTIMA PLUS HDP-C
2279 0040-96317 ADAPTER BRACKET, TECO PLC
2280 0190-07662 ROLLER PLATE ASY SMIF INTERFACE CENTURA
2281 0020-10162 DIFFUSER 200MM
2282 0020-25693 CLAMP HEATER 1.18 DIA SFT PNEU/MTR LIFT
2283 0020-76430 SIDE PLATE UPPER FRAME CENTURA 5200ST
2284 0040-22202 SPACER, PILLOW BLOCK, VECTRA IMP
2285 0021-37167 MANIFOLD , UPPER, DPA
2286 0021-10429 MANIFOLD, LOWER, DPA-SHRINK
2287 0040-20136 MANIFOLD, SOURCE SWIVEL WATER
2288 0040-22487 FINGER EXTENDED LIFT HOOP 8" B101
2289 0020-29328 BLOCK, MAGNET HOLDER, RH-1, RH-2
2290 0020-20274 CLAMP HOLDER, SOURCE
2291 0021-13892 ADAPTER, THIN,.031, ORIENTER, NARROW HOOP
2292 0040-06542 SEIKO SEIKI CONTROLLER PLATE, ULTIMA
2293 0200-28867 SHUTTER DISK
2294 0020-22950 ADAPTER, COLLIMATOR SOURCE 13
2295 0021-35824 BRKT, ASP
2296 0040-32135 ASSY, HOUSING, ASP
2297 0020-34225 PLATE IDENTIFER EV#1
2298 0020-34454 MANIFOLD BRACKET
2299 0040-35428 ENCLOSURE, UPPER, SLD, METCH
2300 0242-28552 KIT, SIGNAL TOWER, WITH BUZZER AND RED LIGHT
2301 0040-32203 HOUSING, OUTER, CATHODE BULKHEAD, DPS
2302 0021-09448 ADAPTOR, BULKHEAD, 3/4-20
2303 0021-09451 CLAMP, GROUND, TOP, CATHODE, BULKHEAD, DPS
2304 0021-09547 RETAINING RING, CABLE, CATHODE, DPS
2305 0021-09591 PLATE, GROUND, TOP, CATHODE BULKHEAD, DPS
2306 0021-09630 SHIELD, GROUND, 200MM CATHODE, DPS
2307 0021-09612 BOX, CONDUIT HOUSING, DPS
2308 0021-09620 COVER, CONDUIT HOUSING BOX, DPS
2309 0021-09621 INSULATOR, CONNECTOR OUTPUT, DPS
2310 3870-02561 VALVE GATE HEATED & SHIELDED 208VAC 300W
2311 0020-24727 PLATE, SPACER 101%
2312 0040-09635 EPD BRACKET
2313 0040-44182 LID PLATE, STD LLB SWLL, CENTURA AP
2314 0021-09511 INSULATOR, CATHODE BASE, 200MM, DPS
2315 0020-97663 SCR FLAT HAED,10-24 X .50L,25L THD,ANODIZED ALUM
2316 0190-16073 SIGNAL TOWER
2317 0010-10558 P/C END POINT MODULE COVER ASSY -19" RACK MNT
2318 0040-35475 PLATE LOCKOUT SWITCH OPENING CENTURA
2319 0242-12097 KIT, RIGHT STEP, CHAMBER FRAME,DPS-II
2320 0040-75853 BRACKET PC BOARD SMIF INTERCONNECT
2321 0040-75860 COVER PC BOARD SMIF INTERCONNECT
2322 0040-00905 COVER, BOTTOM MODULE, NITRIDE550
2323 0040-00902 HOUSING, BOTTOM MODULE, NITRIDE550
2324 0090-36228 JUMPER ASSY
2325 0020-33773 HOUSING, BUSHING, CATHODE, DPS GECO
2326 0020-38790 HOUSING, BOTTOM CONNECTOR
2327 0020-38792 STRAIN RELIEF COVER
2328 0040-61947 BRACKET, CATHODE PNEUMATIC
2329 0021-38035 TUNNEL, LOWER, GAS PANEL 31" 1
2330 0021-38036 COVER, SHROUD, FR PANEL 31 GAS PANEL
2331 0020-76000 FLAP, THROTTLE
2332 0021-70086 COVER KICK PLATE SMIF STD CENTURA I/F
2333 0040-76394 PANEL, MF CONVENIENCE OUTLETS CENTURA
2334 0020-31423 CLAMP, SWITCH, ETCH UNIBO
2335 0020-35472 VME BOARD BLACK COVER
2336 0020-70095 WINDOW A, LID, 29 POSN STOR ELEV
2337 0040-09548 COVER, WINDOW, SIDE SHIELD, UPPER, UNIVERSAL
2338 0040-09560 COVER, WINDOW, SIDE SHIELD, LOWER, UNIVERSAL
2339 0020-37736 CLAMP, CLAW SERVICABLE, GATE VALVE
2340 0040-38864 BELLOW HOUSING, N SK THROTTLE VALVE, DPS
2341 0040-35375 WBLL FRONT PANEL
2342 0021-76390 BRACKET LOWER, SHORT MAN. MOD CMF
2343 0020-05653 TOP MOUNT, UPPER VENT SUPPORT, 1 OF 2
2344 0020-05654 LOWER MOUNT, UPPER VENT SUPPORT, 1 OF
2345 0040-31954 ADAPTER, GV, BOTTOM CHAMBER, POLY, DPS-A3
2346 0020-17365 HEATSINK BUSHING
2347 0270-00289 TOOL ZERO POSITION DUAL BLADE ROBOT
2348 0021-36726 INSULATOR, BULKHEAD, CATHODE WATER, DPS
2349 0021-36727 COVER, BULKHEAD, CATHODE WATER, DPS
2350 0021-02450 BRACKET, MTG CABLE CONNECTOR ASP+
2351 0040-09574 BRACKET, MTG DISPLAY BOARD ASP
2352 0040-02831 H-12 COIL, ES DTCU, DPS
2353 3780-02423 SPR CPRSN 1.000L X .42OD X .048 WIRE-DIA SST
2354 0010-76700 SUB-ASSEMBLY, ASP HINGE
2355 0040-45770 HOLDER, LASER DIODE
2356 3300-02263 FTG RLF VALVE VENT APTR CRYOPUMP AL
2357 0040-01334 BRKT, PRESSURE SWITCH
2358 0040-01060 ENCLOSURE, I/ODIST BOARD, VME2GPCONT
2359 0020-22979 PLATE CONTACKET DC RIGHT TIN 8" WAFER
2360 0020-29079 GROUND STRIP
2361 0015-01644 POLE, 90 DEGREE ELBOW
2362 0020-40044 CLAMP,BASE 150MM/200MM
2363 0020-76993 COVER DC, LOWER, FLAME RETARDANT
2364 0190-01189 0190-01189 SENSOR FITTING SET
2365 0040-02544 CHAMBER, UPPER, FULL A-COAT, SEALED ON ANODIZE
2366 0040-35419 ENCLOSURE, GAS BOX, MXP CENTURA
2367 0021-02162 BLANKOFF, BACK SLOT, 31" GAS BOX, CENTURA
2368 0020-05008 PLATE TTF SHROUD PANEL, CENTURA MMF
2369 0040-79252 DOOR, LEFT, 31" GAS PANEL
2370 0040-79253 DOOR, RIGHT, 31" ENCLOSURE
2371 0020-05068 PLATE, HX. SUP. - RET. VALVE. CII, MMF
2372 0020-76522 PIN, DOWEL FRAME ALIGNMENT
2373 0240-75812 8" ORIENTER/DEGAS COLLIMATOR
2374 0040-00738 CLAMP, DTCU LIFT
2375 0040-02750 CLAMP, DTCU LIFT (Metal)
2376 0040-02945 COVER, IO BOX, DPS E-DTCU
2377 0200-10296 INSULATOR,BULKHEAD,CATHODE,DPS
2378 0020-34482 INSULATOR, FEED, BULKHEAD, CATHODE, DPS
2379 0020-38923 ENDPOINT PLUG, DPS
2380 0020-32929 COVER, OVERTEMP MONITOR, ASP
2381 0040-09396 BRACKET, MOUNTING HINGE, PRSP
2382 0040-09397 HINGE, CHAMBER, ASP
2383 0020-09263 COVER, REAR
2384 0021-39395 COVER BOX 1-CONNECTOR, C-HX CABLE
2385 0021-02748 BRACKET SWITCH
2386 0040-75851 KICK PLATE SMIF STNDARD CENTURA INTERFACE
2387 0021-36239 BRACKET, CATHODE, MAINT, DPS CENTURA
2388 0020-31772 STANDOFF, COVER 1.88*1/4-20, ASP
2389 0020-36418 NUT, CLAMP TRASNFER CHAMBER
2390 0020-36419 CLAMP TRANSFER CHAMBER
2391 0010-39869 ASSY, ACTUATOR COVER, SLIT LINER DOOR
2392 0040-75661 SUPPORT, SMIF INTERFACE, CENTURA MF
2393 0021-09546 LUG, GROUND, CATHODE, DPS
2394 0040-32437 WELDMENT, GAS PANEL EXHAUST
2395 0040-76420 ENCLOSURE, FLOW METERS
2396 0021-35564 PANEL, FLOOR, CABLE M/F(0040-34938동일)
2397 0040-76557 PLATE BASE PLATFORM WBLL CMF CENTURA
2398 0020-21827 TOP DETECTOR HOUSING
2399 0020-21828 BOTTOM DETECTOR HOUSING
2400 0020-21831 BRACKET LEFT
2401 0040-01487 BRKT 8 POSITION, TB MOUNT CENTURA
2402 0021-35567 COVER, GAGES, CDA
2403 3940-01044 RACK FRONT COVER
2404 0270-35134 ASSEMBLY, VIEW LID, TXZ
2405 0015-20035 SCREW INSULATOR
2406 0020-28952 MOUNTING BRACKET 9RIGHT, LIGHT)
2407 0020-20676 COVER PRECLEAN/COOL DOWN MONOLITH
2408 0020-22910 BELLOWS (TC) TYPE
2409 0021-20369 LIFT SHAFT (TC)
2410 0040-22746 BLOCK MOUNTING 1.18" DIA SHAFT MOTER LIF
2411 0020-22361 TC BOX PLATE
2412 0690-01580 CLIP RETAINING 13MM
2413 0020-25342 HTHU 6 HOOP
2414 0020-26900 HEAT SHIELD HTHU HEATER RIGHT
2415 0020-24839 SPACER, HTHU LOWER LIFT
2416 0020-25227 ADAPTER, HTHU LIFT
2417 0010-21393 ASSY, SHUTTER ROTATION, LINKAGE
2418 0020-21675 ARM LIFTER DEGAS/ ORIENTER
2419 0020-21708 CHUCK 8" SEE
2420 0020-21707 ORIENT CH# LIFTER 8
2421 0040-32213 Bracket 6
2422 0021-09587 COVER, CHANNEL, PONTOON, FACILITIES, DPS
2423 0040-32214 Bracket 7
2424 0040-75414 SADDLE, TRANS, LAMP TEST, RTP
2425 0020-75360 PLUG, BUSHING, LASER
2426 0030-20012 COVER PLATE LASER
2427 3300-03893 FTG TBG CONN BLKHD 1/2T 3/4-16 MALE W/
2428 0020-31017 BUSHING TERMINAL BWCVD
2429 3580-01021 Hex Plug
2430 0020-34430 COVER,BACK,CHAMBER COOLING,DPS MEC
2431 0020-34429 COVER,FRONT,CHAMBER COOLING,DPS MEC
2432 0015-09405 PULLEY,MOD,.313 BORE,WXZ
2433 0020-13283 Phase 2 M/F 110V AC Box
2434 0020-23971 Hoist Controll Panel
2435 0020-21735 COVER PRECLEAN
2436 3300-02260 FTG TEE 2.75 CONFLAT SST 2.75 X 2.46
2437 0040-20033 ADAPTOR TURBO/PRECLEAN INTERFACE
2438 3940-01045 PNL FRONT 19" RACK 1.72 H ANODIZED
2439 0010-39202 MULTI-SLOT COOLDOWN CHAMBER 8"
2440 0021-35922 CHAMBER BODY, TXZ MCVD
2441 0040-37668 GAS BOX, TXZ ENH COOLING
2442 0021-03811 INPUT MANIFOLD TXZ 200MM CIP
2443 0021-39915 MANIFOLD WATER DXZ/TXZ
2444 0020-33341 RF Cap
2445 0021-39883 OUTPUT MANIFOLD, TXZ CIP
2446 0040-39566 LIFT PLATE
2447 0021-39894 LID STRAP, RP
2448 0020-76362 Turbo CNTRL Bracket
2449 0020-34616 STOP,ACME NUT DXZ
2450 0040-09829 ASP Lid Cover
2451 0021-09554 COVER,CONNECTOR,INTLK,OUTPUT,DPS
2452 0021-35897 ENCLOSURE, INTLK, TC AMP, TXZ MCVD
2453 0020-23160 BRKT WAFER SENSOR SM312CV2 MONOLITH COVE
2454 0021-08062 Gas Line Hdder
2455 0040-35736 GAS BOX BRACKET PALLET
2456 0020-29342 NUT RF FEEDTHRU .250 WIDE VECTRA IMP
2457 0010-70271 101 WAFER LIFT ASSY
2458 0020-37482 BRACKET,DUAL V-BLOCK,UNIVERSAL ETCH CENT
2459 0020-20433 VIEWPORT CLAMP, ORIENTER CHAMBER
2460 0020-22939 BRACKET,GAGE SOURCE WATER LINE
2461 0020-29303 BRACKET, SOURCE GUIDE, VECTRA IMP
2462 0020-27135 Actuator Shutter
2463 0021-20444 MOUNTING LEFT BRACKE
2464 0021-20445 MOUNTING RIGHT BRACKE
2465 0020-21232 CATCH BAR
2466 0021-09571 DPS Teflon Insulator
2467 0020-28673 Gas Box Both Side Cover
2468 0021-36744 SHIELD GROUND 150MM CATHODE DPS
2469 0020-34972 HOOP 6 INCH WAFER LIFT DPS
2470 0010-76322 ASSY., COOL DOWN CHAMBER, NON-ENP
2471 3300-02884 Lower chamber water block end-cap screw
2472 0020-13975 L/L Wafer Present&Slid Sensor Braket_B(Wide)
2473 0020-13973 L/L Wafer Present&Slid Sensor Braket_A(Wide)
2474 0010-20292 Wafer Detector Module (Not include board)
2475 single slot Fast cooldown chamber assy
2476 0020-40017 Load Lock Door Sensor Cover
2477 0020-20566 COVER, TRANSFER CHAMBER, MONOLITH
2478 0090-09170 ELECT.ASSY,CATH.MAIN.,BACK RIGHT,DPS
2479 0010-36325 DPS 208VAC Distribution BOX
2480 0040-20006 ARM,WELDMENT SOURCE STD OBSOLETE
2481 0021-35920 HOUSING,RF ADAPTER,TxZ MCVD
2482 0040-21253 ENDURA NSK DRIVER BOX
2483 0045-20002 Actuator Shutter Clamp
2484 0020-24771 COUPLER 4 BAR LINKAGE SHUTTER LINKAGE
2485 0045-20003 CLAMP MAGNETIC COUPLING SHUTTER LINKAGE
2486 0020-24776 PIN PIVOT SHUTTER LINKAGE
2487 0020-24778 MOUNTING BRACKET SENSORS SHUTTER LINKAGE
2488 0020-25370 CLAMP OPTO SENSORS
2489 0020-28255 Shutter Enclosure
2490 0020-24781 Actulator Shutter Support
2491 0020-75293 bracket(transformer cover2)
2492 0020-76181 COVER, COOLDOWN CHAMBER, NON-ENP
2493 0020-35982 box(ac filter box)
2494 0040-09663 COVER,PREFIRE POWER SUPPLY, ASP
2495 0020-31288 ADAPTER, TOP LID, 25MM PRSP3
2496 0020-76403 ENCLOSURE, 208V OUTLET BOX, CENTURA
2497 0010-05955 ASSY, POST CHAMBER
2498 0040-09404 M-Lamp power supply box bracket
2499 0040-09583 BRKT,CLAMP TOP LID, ASP.
2500 0040-09396  ASP Lid Hinge Set
2501 0040-09574  ASP LED Display BD Box
2502 0021-35820 ASP Wafer Lifter Hoop
2503 0021-10589  ASP CH# Pumping Plate
2504 0010-76471 Left Handler Reflector Cassette
2505 0020-09723 TC AMP BD Block Plate
2506 0040-22812 RF ENCLOSURE CABLE INTERLOCK COVER
2507 0021-37094 R1-DTCU TOP RING
2508 0021-37086 R1-DTCU COIL SUPPORT KIT
2509 0227-25150 BLANK-OFF,POSITION E & F,LEXAN,CLEAR
2510 0020-36131 Connector Plate
2511 0020-34453 CARD CAGE ENCLOSURE
2512 0020-33811 COVER,SIDE,LOWER CHAMBER,DPS MEC
2513 0020-75740 Load Lock Out Of Wafer Sensor
2514 0020-22739 CASSETTE SUPPORT
2515 0090-00147 Centura II AC Box Set
2516 0020-22839 PIN, PRECLEAN LIFT
2517 0040-22982 SUS ADAPTOR(TI)
2518 0200-35224 WINDOW, VIEWPORT
2519 0020-21467 ADAPTER SOURCE 11.30"
2520 0040-20313 HOOP LIFT 6" WELDMENT
2521 0020-23635 LIFT HOOP 6" 101% W/B CH
2522 0020-29029 BLADE 6" 101 SHUTTER
2523 0020-53244 CHAMBER SPACER TXZ
2524 0020-20688 CONNECTOR BRACKET
2525 0040-00684 GATE VALVE ADAPTOR PLATE
2526 0021-35919 HOUSING COVER
2527 0021-35875 NUT,ROD LOCK,RF ADAPTER,TxZ MCVD
2528 0021-35876 CONNECTING ROD, RF ADAPTER,TxZ MCVD
2529 0021-35877 HOUSING,ROD,RF ADAPTER,TxZ MCVD
2530 0010-03706 ASSEMBLY, DC BIAS HTHU
2531 0040-01333 BRACKET, PNEUMATIC ASSY
2532 0040-02268 ENCLOSURE, SAFETY INTERLOCK
2533 0021-03977 COVER, SAFETY INTERLOCK
2534 0040-75195 CHASSIS, 2-PHASE DRIVER, MOTOR LIFT
2535 0010-01888 ASSY, V-ELECTRODE, DOME W/O IEP, POLY DP
2536 0020-20662 HEAT SHIELD 8", DEGAS
2537 0021-70093 PANEL,ADAPTER LOWER,IPS HYBRID
2538 0040-61050 SUPPORT,FAST LIFT
2539 0021-39885 LID CLAMP ISOLATOR, TXZ
2540 0020-76188 BRACKET
2541 0020-76527 WB AC COVER
2542 0050-26065 GAS LINE CONN PRESSURE CONTROL
2543 0050-26291 ADAPTER, BYPASS GAS LINE, TXZ
2544 0021-22266 PANEL GAS MODULE TXZ
2545 0021-76708 PEDESTAL CD/PT WAFER 150 MM
2546 0040-38943 PLATE ADAPTER MOD MFA MOUNTING PRODUCER
2547 0020-20716 FINGER HOOP CD/PT 125/150 MM
2548 0040-23909 COVER TOP, REAR
2549 0020-48701 CENTERING SCREW, LONG, PURGE HEATER 200M
2550 0021-02156 RING, MIDDLE, ISOLATOR
2551 0020-06338 DUMMY TARGET, SOURCE
2552 0020-22351 PANEL, HOUSING POSITION D PVD
2553 0040-76554 ARM, WLDMT SOURCE HTHU PVD
2554 0040-76308 WELDMENT 8" HOOP PVD W/B
2555 0021-36605 BRACKET,COIL,REAR BOTTOM,R2
2556 0020-13978 CLAMP, RELIEF, STRAIN WBLL
2557 0021-03980 OUTER SHIELD W/O WINDOW, TXZ
2558 0021-20437 DISK 8" B101 TI SHUTTER
2559 0020-75862 DUMMY TARGET
2560 0020-26852 COVER, END, ADAPTER, WATER COVER, COH
2561 0020-21153 BUSS BAR, GND 8POS
2562 0021-22442 COVER, AC CONNECTION, SMIF KICK
2563 0040-24255 ENCLOSURE, AC CONNECTION
2564 0020-76795 BRACKET(PRECLEAN CH)
2565 0020-20499 WINDOW, PROTECTIVE
2566 0040-21245 BRACKET MOUNTING CIR CONNECTOR
2567 0020-25838 COVER, TRANSFER CHAMBER
2568 0020-25112 SIDE COVER, END CAP
2569 0020-76258 INSERT, SLIT VALVE, ALUMINUM
2570 0021-02469 INSERT LINER EXHAUST TXZ 200MM
2571 0040-20321 HOOP LIFT 8" WELDMENT
2572 0020-13976 BLOCK, MOUNTING BOTTOM
2573 0020-70126 BRKT ENCODER I/F PCBA MOUNTING
2574 0020-21104 CAP 8" BUFFER FROG LEG
2575 0020-21105 CLAMP 8 INCHBUFFERFROG LEG
2576 0010-76992 ASSY, 8 REFLECTOR CASSETTE HANDLER LEFT
2577 0010-76993 ASSY, 8 REFLECTOR CASSETTE HANDLER RIGH
2578 0021-08511 HOUSING QUARTZ TUBE 200MM HP TXZ ISIC
2579 0040-77214 SILL MOUNT CUP SIDE SHORT
2580 0040-77216 SILL MOUNT SIDE REAR
2581 0021-35987 RF STRAP TxZ MCVD
2582 0021-21505 COVER,ELECTRICAL,8" ENHANCED ORIENTER
2583 0021-21504 SHIELD,HEATER,8 ENHANCED ORIENTER DEGAS
2584 0021-07977 COLLIMATOR, 8 HIGH UNIFORMITY CLOSED, 6
2585 0040-21013 ARM LEFT DUAL BLADE ROBOT
2586 0040-21014 ARM RIGHT DUAL BLADE ROBOT
2587 0040-84406 WELDMENT, 8 HOOP, MODIFIED, PVD WB CHAM
2588 0021-22485 BLADE, 8" BUFFER HP+, HTHU, RCF COMPATIB
2589 0020-21028 BLADE 8" TRANSFER FROG LEG
2590 0020-20653 BASE HEATER 8", DEGAS
2591 0020-20654 REFLECTOR HEATER,8" DEGAS
2592 0020-20658 SOCKET RETAINER, 8" DEGAS
2593 0020-20659 COVER ELECTRICAL, 8" DEGAS
2594 0040-76838 LID PLATE, TXZ CIP, UF
2595 0010-21336 BAR ASSY, LINKAGE SHUTTER
2596 0020-24185 SHAFT WING DUAL BLADE ROBOT
2597 0020-42112 CYLINDER, LIFT, AL, 200MM, CERAMIC
2598 0040-02938  SxS MANIFOLD OUTPUT 200MM TXZ CIP
2599 0040-89620-001 BUFFER ROBOT BLADE
2600 0040-01042 LOAD LOCK TRAY
2601 0020-48303 SST LOWER SHIELD W/CLEANCOAT
2602 0020-35294 QUARTZ LOWER CHAMBER
2603 0040-88845 PLATE,ETCH CHAMBER TOP COVER
2604 0020-33666 GAS DISTRIBUTION PLATE INSERT MTG
2605 0020-79378 MIRRA CROSS END SHIELD
2606 0020-31488 GAS DISTRIBUTION PLATE,13 HOLES
2607 0020-32075 HOUSING,OUTER,HRTV
2608 0040-31911 BASE, INNER HV, POLYSI, ESC
2609 0040-01618  MANIFOLD
2610 0040-02817 MANIFOLD, OUTPUT, 1 HOLE, RIGHT, PRODUCE
2611 0021-26274 SCREEN(POLY)
2612 0021-31804 DOOR, ACP ANODIZED SLIT VALVE
2613 0050-08047 WELDMENT,LOWER,HELIUM FEEDTHRU W/SHIELD
2614 0020-14773 VAT LOCKING RING
2615 0020-14774 VAT PENDULUM PLATE
2616 0040-89773 SGD UPPER
2617 0040-46907 COVER, BASEPLATE, EXHAUST BOTTOM
2618 0040-46908 COVER, BASEPLATE, EXHAUST TOP
2619 0040-76683 COVER, BASEPLATE, INJECT TOP
2620 0040-76884 COVER BASE PLATE INJECT BOTTOM
2621 0040-36347 CAP,EXHAUST,W/O COOLING
2622 0040-09920 GAS FEED THRU TUBE
2623 0040-32001 EXTENDED TUBE
2624 0021-00571 INSERT, CHAMBER EXHAUST, EPI 200MM SST
2625 0040-35140 RING, UPPER CLAMP, ATM- EPI
2626 0040-35161 DUCT 6 INCH DEPOSITION CHAMBER
2627 0050-32387 WELDMENT DUAL BARATRON DXZ
2628 0050-31074 WELDMENT ASSY,DUAL BARATRON,VCO
2629 0021-09731 LID PUMPING PLATE TEOS DXZ
2630 0040-35049 CLAMP RING, LOWER
2631 0040-35316 CAP INJECT MACHINED(NON COOLED)
2632 0040-79272 MANIFOLD INPUT DXZ
2633 0040-79273 MANIFOLD OUTPUT DXZ
2634 0040-02936 WATER BOX, TXZ 200MM C I P
2635 0040-02937 WATER MANIFOLD
2636 0040-05294 INPUT MANIFOLD
2637 0020-35624 RING, CLAMP
2638 0020-66635 L1 DIFFUSER
2639 0020-79088 CARRIER PLATE
2640 0021-06243 ESC BODY(VESPEL PIN)
2641 0040-32574 TUBE, LIFT, Ti-xZ
2642 0040-52662 RE-FURB UPPER CHAMBER, DPS, 200MM
2643 0021-35008  PLATE, REFLECTOR, 200MM, MOD II
2644 0040-79925 SLIT DOOR LINER
2645 0021-10666 BLOCK,GAS/WTR,CHAMBER LID,GIGA-FILL SACV
2646 0040-02818 BLOCK, MIXING, LID GIGA-FILL SACVD
2647 0020-28622 ROBOT BLADE 8" HTHU TRANSFER
2648 0020-70285 BLADE 8 INCH, BUFFER, FROG LEG
2649 0021-34196  CATHODE SLEEVE YTTRIUM OXIDE PRODUCER ET
2650 0041-12166 CHAMBER LINER LEFT
2651 0041-12146 CHAMBER LINER RIGHT
2652 0021-27883 COVER SLIT
2653 0020-32073 GAS BOX
2654 0040-06477 CLAMP RING UPPER, RP
2655 0020-05204 VAL RING
2656 0040-02329 CHAMBER LL, RHS
2657 0021-00041 FACEPLATE, SIN, XG, DXZ DCVD
2658 0020-34775 BLOCKER, PERF,SILOX 8",UNIV CH,NON-STEPP
2659 0041-47020 UPPER LINER
2660 0021-96271 PLASMA SCREEN
2661 17-101596-00 FORK RETAINER
2662 15-00729-00 CLAMP PLATE
2663 15-032631-00 FLANGE KEYED
2664 15-258837-00 CLAMP RF STRAP
2665 15-171466-00 WAFER LIFTER ASS,Y
2666 15-00653-00 CLAMP HOUSING
2667 1D10-201429-15  UPPER ELECTRODE
2668 1D10-101475-12  TAPER BAFFLE PLATE
2669 1D10-303124-14  SHIELD DEPO 85-2
2670 1D10-200733-11  RING SHIELD 
2671 1D10-202204-12  UPPER ELECTRODE
2672 1D10-100854-15 BAFFLE PLATE, UNITY DRM
2673 ID10-303124-21  SHIELD DEPO 85-2
2674 1D10-201588-12  UPPER ELECTRODE 
2675 1D10-202177-12  UPPER ELECTRODE 
2676 1D10-300188-12  COVER BELLOWS A-6
2677 1D10-102430-13 PLATE BAFFLE M-3(Y2-Y), DRM2
2678 1D10-203551-13  UPPER ELECTRODE P-Y
2679 1D10-313213-11 SHIELD DEPO 85-M2(Y2-Y), DRM4
2680 1810-121989-11  COOLING PLATE
2681 1D10-308540-12  SUPPORT SHILD DEPO CE-Y
2682 3D10-302734-12 WINDOW PLATE(DEPO SHIELD), TEL DRM
2683 1D10-101680-13 UPPER ELECTRODE P-3, DRM2
2684 1810-221024-14  UPPER COOLING PLATE
2685 1D10-090060-TM  BELLOWS COVER TOP
2686 1D10-303124-21  SHIELD DEPO 85-2
2687 1D10-311417-12  SHUTTER INNER
2688 1D10-100907-12  BOTTOM COVER
2689 1D10-302209-15  FOCUS RING 8"
2690 1D10-103201-11 BAFFLE PLATE, ETE1895 DR
2691 1D10-101398-12  BAFFLE PLATE
2692 1D10-202988-11  COVER BELLOWS A-4
2693 1D10-302586-12 COVER BELLOWS B, DRM2-BTM
2694 1810-224912-11  COOLING PLATE
2695 1810-221584-12  UPPER COOLING PLATE
2696 1805-320140-11  COVER RING INNER (MTBWC250)(SCCM-OX)
2697 1805-220177-22 RING,SHIELD(HARD-LD)(M5 TYPE) 8"
2698 3D10-101194-12 DEPO SHIELD RING
2699 3D10-101187-13  SHIELD PLATE
2700 1D10-309697-11  WINDOW PLATE(DEPO SHILD)
2701 1810-325569-13  EXHAUST PLATE (UP)
2702 715-130081-008  HOLDER WAFER 8"
2703 714-330982-001 E2-CMP
2704 715-018991-208B CATHODE (E) 8"
2705 1810-424110-2 BAFFLE A 8K
2706 32005S-42713 WINDOW PORT
2707 715-140125-001 FACING ELECTRODE
2708 715-140124-001 (BAFFLE 4528 UPPER TPL SET) FACING SEALPLATE
2709 715-011912-083 PLATE UPPER BAFFLE
2710 715-011913-083 PLATE LOWER BAFFLE
2711 715-130080-008  HOLDER WAFER 8"(ELL)
2712 715-011746-161 BOTTOM WAFER CLAMP
2713 715-030136-004 POLY EDGE RING
2714 0200-03313 BASE RING PRODUCER
2715 715-028405-001 HOUSING REACTION CHAMBER
2716 715-4405470-01 MAIN CHAMBER BODY WALL
2717 715-330135-1-D GAS INJECTION RING
2718 715-011535-001 RING CLAMP UPPER ELECTRODE
2719 715-330928-002 LINER PUMP PORT O-SHAPE
2720 714-495015-001 REAR CHAMBER LINER
2721 15045AA-59515 SHIELD DEPO 
2722 S5SD-007 SHIELD DEPO(VESPEL TYPE) 
2723 715-030136-003 HOT EDGE RING
2724 715-140286-001 FOCUS RING
2725 60-00193-00 MVC0057_switch vacuum atmospher
2726 3331R-068 FOCUS RING 6" (F3)
2727 3341R-011 FOCUS RING
2728 3341C-012 AL CLAMP RING 6"
2729 3341A-005 ANODE
2730 3300C-190 METAL SPIDER 
2731 3331l-004 CHAMBER LINER ESC(M)
2732 4302G-008 G.D.P AL
2733 3341R-012 AL FOCUS RING
2734 4305F-007 GAS INJECTION(P)
2735 3233S-005 SPOON, SHUTTLE
2736 7310-0694-01A TOP PLATE
2737 7310-0693-03C BOTTOM PLATE
2738 D127045 CLAMP RING
2739 12754200 STARSHIP
2740 0603-0115-12 PLATE, LOWER BAFFLE 8"
2741 0603-0166-12 PLATE, UPPER BAFFLE 8"
2742 CK950731 (S)FILLER ORIFFICE W/C
2743 0603-0214-12 FOCUS RING 8"
2744 0603-0084-13 BOTTOM ELECTRODE 8"
2745 716-140069-001 PLT Upper Insultr 6" esc
2746 839-011906-001 Electrode Silicon 6"
2747 839-011907-902 ELECTRODE, SILICON,HI TEMP,POLISH,8 INCH
2748 839-440462-306 ASSY CAP ELECTD ESC 6"
2749 853-347147-008 Assembly, Heated, Paddle, PLSH & PLTD, HDWR, 8"
2750 718-094756-081 Elctd,CAP,GROUND RING ESC, 8INCH, NOTCH TYPE
2751 716-443090-202 GROUND UPPER SIC RING
2752 716-011624-001 RING, LOWER INSULATOR
2753 716-443090-002 UPPER QUARTZ RING
2754 716-016394-001 HPT CONFINEMENT RING
2755 713-028487-001 Ring Confinemnt(Vespel)
2756 716-028028-004 Ring Electrode Clamp 6" 12 Bolt
2757 715-028626-001 Plate Upper Baffle 6"
2758 715-028627-002 Plate LWR Baffle 6" MED Edge
2759 716-140163-001 RING,HOT EDGE,15deg,ESC,STD 6"
2760 716-140068-001 RING,FOCUS,ESC,6"
2761 716-140118-001 RING, FOC, ESC 8"
2762 716-331157-014 DISK INTERFEROMETER TOP GAS
2763 716-330122-003 PL, Top, CER F/G
2764 716-011427-001 PL, Top, CER F/G
2765 716-331142-001 RING, EDGE TOP WIDE
2766 716-443179-001 R EDGE BASE
2767 715-330825-006 LNR,CHMBR,AL,EXTND,ALLI
2768 716-443129-001 FOCUS RING ESC INNE 8"
2769 716-443086-408 EXELAN Hot Edge Ring
2770 716-140469-002 CPLG HP ESC 8" RING
2771 839-443215-544 SiC ELECTRODE, HPT. 8, LAM
2772 716-443086-405 EXELAN HPT Hot Edge Ring
2773 839-440462-518 LAM EXELAN HPT ESC
2774 716-140125-100 FACING MIDDLE BAFFLE
2775 715-140126-001 BAFFLE 4528 MIDDLE TPL SET
2776 715-007567-00 BAF, UPR, HP TRIPLE SET
2777 720-443208-010 SCR,SLTD,FH 6-32 UNC,PEEK
2778 720-016278-114 SCR,PNH,SLTD, 250-20 PEEK  
2779 16-137686-00 DOOR GATE
2780 16-126663-01 SHIELD STAGE ESC SPRAYED
2781 17-123793-02  ADAPTER SHIELD HCM
2782 16-137688-00  SHIELD BTM CLAMPLESS SPRAYED
2783 17-157344-00 L BRACKET
2784 16-122744-00 ASSY ANODE HCM ESC
2785 02-111903-00 RF FEEDTHROUGH  ASS'Y
2786 15-149329-00 PLATE, RF, 200MM, ATC
2787 15-149328-00 SEAL PLATE ASSY, 200MM, ATC
2788 16-148815-00 SEAL PLATE ASSY, 200MM, ATC
2789 15-169667-00 INJECTOR TUBE SHORT
2790 15-149982-00 RING
2791 15-335327-00 SHOWER HEAD CRF
2792 02-300478-00 ASSY,PED,BRAZED,IXT PVD HEATER
2793 02-109622-00 ALTUS ACTUATOR ASSY,LIFT PIN
2794 02-159137-00 ASSY, COOL PED.(K-0344)
2795 02-160858-00 ASSY, COOL PED.K-0345 (Cool Pedestal lift assy)
2796 02-255281-00 ASSY, COOL PED LIFT, LDLK, V
2797 17-192026-00 GAS BOX SHUTTER PLATE
2798 15-00399-03 Screw 8.32 x 0.55 INCH-NI Top Spindle
2799 15-108307-00 Clamp RF Strap
2800 20-00212-00 Nut,8-32UNC-2B,Alum
2801 15-118061-00 Ring Manifold Adjustable
2802 15-033874-00 Plug,Injector,Manifold
2803 15-00309-01 Hanger,Nozzle,1.50"(200MM)
2804 15-00685-00 O-SEAL, FEED THRU, 3/8"
2805 15-00229-00 Nut Feed Through 1/2-20UNC*.25
2806 15-00027-02 Guide,Nozzle,Adjuster
2807 27-050054-20 Zig,Turbo Pump Speed
2808 15-00410-00 Filer UV Lean
2809 60-281680-00 Screw,RPC Clamp
2810 60-281681-00 Clamp Plate,RPC
2811 60-281682-00 Center Ring,RPC Clamp
2812 60-281683-00 Ferrule,1/8 ALL Set
2813 60-281684-00 Manifold 3-Way,RPC
2814 60-281685-00 Nut,Manifold RPC
2815 60-281686-00 Endcap,RPC Manifold
2816 15-11188-00 Window,Hatch
2817 21-250660-00 Insert Plate Screw
2818 15-00686-00 Washer,Feedthru,1/2 ID,Alum
2819 26-82317-00 HANDLER(AME)
2820 15-00457-00 HEATER STRAP-SCREW
2821 15-00385-00 NUT HEX #10-32, NI
2822 15-103913-01 FEEDTHRU COPPER
2823 15-103987-00 STRAP ,RF
2824 15-103913-02 CLAMP STRAP FEEDTHRU
2825 15-00935-00 SCREW #10-32*0.50L NICKEL
2826 15-108307-05 CLAMP RF STRAP
2827 15-114331-00 SCREW 1/4-20*0.5L NICKEL
2828 15-108174-00 CUP SCREW COVER
2829 15-00700-00 FORK BOTTOM PLATE
2830 15-00702-00 FORK TOP PLATE
2831 05-50028-00 SHOWERHEAD 6"
2832 15-00730-00 FLANGE KEYED
2833 15-00401-00 SHAFT SPINDLE
2834 15-00931-00 PLATE, RING LIFT, EXCLUSION OPTION
2835 15-052614-001 INDEXER 150mm W/Ni PINS
2836 15-00216-00 SINGLE GROUND STRAP
2837 15-00654-00 CLAMP
2838 15-00399-04 SCREW 1.02 LG TOP SPINDLE
2839 15-00399-05 SCREW 1.12 LG TOP SPINDLE
2840 15-00698-00 SCREW ,FORK
2841 15-00721-00 WASHER #8, NICKEL
2842 15-00386-00 WASHER FLAT #10, NICKEL
2843 15-00951-00 CUP, SCREW COVER #2
2844 15-00701-00 FORK BOTTOM PLATE 6"
2845 15-00703-00 FORK TOP PLATE 6"
2846 03-00258-00 SHOWERHEAD 8"(W)
2847 03-00255-00 ALT, SHOWER HEAD 6"
2848 15-024881-00 FORK TOP AL COVER
2849 15-164412-00 INSERT ,SPLIT, OUTER,C2
2850 15-164413-00 INSERT ,SPLIT, INNER,C2
2851 15-101482-00 FORK TOP PLATE-A
2852 15-101482-01 FORK TOP PLATE-B
2853 15-101482-02 FORK TOP PLATE-C
2854 0200-20315  REST BUTTON B101 VECTRA IMP CERAMIC
2855 0090-35112 CENTURA5200 MxP Metal ESC 8" 
2856 0200-01118 200mm WINDOW QUICK RELEASE ENDPOINT WINDOW
2857 3700-02366 200mm ORING ID 5.859 CSD .145 VITON 75 DURO BR
2858 3700-01232 ORING ID 9.734 CSD .139 VITON75 DURO
2859 3700-02109 Chamber Body Oring (CHEMRAZ SC513)
2860 3700-02105 ORING ID 10.484 CSD .139 CHEMRAZ SC513 W
2861 3700-02065 ESC Back Side O-RING
2862 3700-01757 200mm ORING ID1.112CSD.103FFKM (CHEMRAZ 513) 8
2863 3700-01823 200mm ORING ID .237 CSD .103 CHEMRAZ SC513 80
2864 3700-02327 200mm ORING ID 9.734 CSD .139 CHEMRAZ 80
2865 3700-02064 200mm ORING ID 8.734 CSD .139 CHEMRAZ SC513
2866 3700-02396 200mm ORING ID 1.171 CSD .139 CHEMRAZ SC513
2867 3700-01136 200mm Centura load loack door O RING  (big)
2868 3700-01537 200mm ORING ID 2.359 CSD .139 KALREZ 2037 80 D
2869 3700-01654 200mm ORING ID 5.484 CSD .139 CHEMREZ 80 DURO
2870 3700-01058 200mm O-RING, ID.468 CSD.078
2871 3700-01642 200mm ORING ID 14.00 CSD .139 VITON 2-280 BLK
2872 0200-09444 200mm CAP, TOP, QTZ,25MM TUBE PRSP3
2873 0200-09201 200mm PLATE GAS DIST,LOWER QTZ 8"
2874 0200-09478 200mm PLATE, GAS DIST, UPPER, 200MM ASP PRSP3
2875 0200-36680 200mm LINER, QUARTZ, UPPER, GAS DIST, GROUND,
2876 0200-36682 200mm LINER, QUARTZ, LOWER, GAS DIST, GROUND,
2877 0200-05376 200mm Quartz Tube
2878 3700-02743 ORING ID 13.984 CSD .139 VITON 75DURO BR
2879 3700-02755 ORING ID 14.984 CSD .139 VITON 75DURO
2880 3700-02756 ORING ID 16.955 CSD .139 VITON 75DURO
2881 3700-02744 ORING ID 12.984 CSD .139 VITON 75DURO BR
2882 3700-01426 ORING ID 28.0 CSD .210 VITON 75DURO BRN
2883 3700-01208 ORING ID 12.984 CSD .139 VITON 75DURO BL
2884 3700-01173 O RING VIT 16.955IDX.210
2885 0020-23555 COVER,SOLID,SHIELD PRECLEAN
2886 0020-27309 COVER,RING 8" Ti 101 COVERAGE
2887 0020-33538 PERF,PLATE 200mm ,OX
2888 0020-34445 BLOCKER PLATE, DxZ
2889 0020-34606 BLOCKER PLATE, 100 EH
2890 0020-39369 PERF, PLATE, OX 200mm
2891 0021-00042 FACEPLATE,TEOS,DxZ DCVD
2892 0021-01569 BLOCKER PLATE ,N2,Tin ,GIGA-FILL,SACVD
2893 0021-01570 BLOCKER PLATE ,HE,Tin ,GIGA-FILL,SACVD
2894 0021-03489 FACEPLATE,GIGA-FILL SACVD (SHOWERHEAD FOR USG CHAMBER )
2895 0021-09759 OBS,FACEPLATE,DxZ DCVD
2896 0021-20042 DISK,8" B101,SST,SHUTTER
2897 0021-20399 CLAMP RING 8" HOT,SNNF
2898 0020-34040 LIFT PIN
2899 0020-34041 LIFT PIN
2900 0020-42285 BLOCKER PLATE 8" EC WxZ
2901 0020-42287 SHOWERHEAD FOR WXZ CHAMBER 
2902 0021-03739 PUPING CHANNEL
2903 0021-08015 FACEPLATE,(SACVD),200mm
2904 0020-25279 CLAMP RING 8" SIX "FEET"
2905 0020-27944 CLAMP RING, 6"
2906 0020-30447 BOCKER PLATE 6","SX" TEOS OXIDE
2907 0020-24913 PEDESTAL  8" ,101,COVERAGE
2908 0021-35749 RING,ISOLATOR,TxZ,200mm,SNNF
2909 0020-09933 GAS DISTRIBUTION PLATE,SPUTTER
2910 0020-24840 BLADE,6" HTHU XFER
2911 0020-31147 INSERT BASE,ALUM,150/200mm,flat
2912 0020-32312 SLIT V/V DOOR
2913 0021-02747 INSERT,SLIT V/V-BUFFER
2914 0020-20112 CLAMP RING, 8",SNNF,SST 3.378,AL
2915 0020-24406 CLAMP RING, 8" HOT,SNNF,AL
2916 0021-06097 CLAMP RING, 8",SEMI NOTCH,
2917 0021-06101 CLAMP RING, 8",SNNF,TiN
2918 0021-21320 CLAMP RING, 8",SNNF,CU, E/E 2.5
2919 0021-21936 CLAMP RING 8" SNNF, SST
2920 0021-22028 PEDESTAL  8" ,101,COVERAGE
2921 0021-22602 COVER,RING 8" B101 Ti,10.5
2922 0021-06148 CLAMP RING, 8",SEMI NOTCH,(Ti)
2923 0020-30673 GAS BOX PLATE
2924 0021-23550 INPUT MANIFOLD
2925 0190-09263 PUMPING PLATE ASS,Y ,(PTEOS)
2926 0040-21705 ADAPTOR,Hi-POWER,TTN,WB,H2O
2927 0020-41026 LIFTER 6" ORIENTER
2928 0020-20171 COVER,INSULATOR SOURCE 13"
2929 0020-23316 FRAME SOURCE G3/G4, FLAT TARGET
2930 0020-23437 HEATER MOUNTING BLOCK
2931 0020-28392 DISK 6" ADV 101 SHUTTER
2932 0020-27702 CLAMP RING, 8",SNNF,Ti,3.404
2933 0021-35008 PLATE,REFLECTOR,200mm,XE,CHAM
2934 0200-10169 PLATE,EDGE COVER 
2935 0020-10192 RING WAFER LIFT 200mm
2936 0020-31633 LIFT PIN
2937 0020-39119 FLANGE, ADAPTOR Z-DRIVE COOLD
2938 0020-30059 PUPING PLATE 8", SILANE
2939 0020-08817 PUMPING PORT RING PRODUCER
2940 0020-22242 LIFTER HOOP 8"
2941 0020-20430 COOLIMATOR 8"
2942 0020-23387 LIFTER 8" (TC)
2943 0020-30784 SUSCEPTOR 200mm 
2944 0020-30754 SUSCEPTOR 150mm 
2945 0040-34339 CENTER,GAS FEED BLK,TOP CLE,,ULTIMA
2946 0020-27808 FRAME SOURCE G3, W/SIDE COOL'G
2947 0021-35867 LID PLATE,TxZ
2948 0020-19708 COVER,RING 200mm SLIP Ta(N),Ti
2949 0021-23332 SHIELD,UPPER,STRAIGHT SIP II 200mm
2950 0010-21844 MAGNET Ass`y Dura source TTN Encapsulated G Type
2951 0020-27116 SCREW, PIN, MODIFIED DC BIAS, DURA TTN SHUTTER
2952 0010-20258 Ti A-Type MAGNET
2953 0200-03407 C-CHANNEL SIDE PRODUCER
2954 0200-03414 LINER CERAMIC BOTTOM PRODUCER
2955 714-220096-001 SHUTTLE COVER (Small)
2956 714-220096-003 SHUTTLE COVER (Large)
2957 718-092326-082 ELECTRODE ANODE
2958 715-011531-014 ELECTRODE UPPER  8"(200MM) ANODIZED
2959 715-331218-001 PTX COLLAR
2960 715-028552-001 UPPER CLAMP RING
2961 0010-20225 MAGNET Ass`y 'A'13.0 AL Ass`y
2962 715-140287-002 UPPER CLAMP RING
2963 715-801021-801 WELDMENT LINER
2964 715-802381-104 PLATE ROCKER BARRIER
2965 715-802381-002 PLATE ROCKER BARRIER
2966 716-402452-001 QUARTZ 8" JEIDA RING
2967 715-018991-208 CATHODE(E) 8"
2968 715-330236-001  6" SPLIT CHAMBER
2969 715-028306-001  PLUNGER SET
2970 715-12101-008 ARM HOLDER (XLL)
2971 715-130080-008 HOLDER WAFER 8"(ELL)
2972 715-12110-001 ARM SHAFT COVER LOWER
2973 0010-03840 200mm Producer Ceramic Heater
2974 715-012171-003 ARM AXIS COVER LOWER
2975 715-12205-002 BELLOWS HOUSING
2976 0190-03506 200mm Producer Ceramic Heater
2977 715-011622-001 LIFTER WAFER 4 PIN
2978 0200-03406 C-CHANNEL SIDE PRODUCER
2979 0200-03657 TOP NOZZLE ULTIMA
2980 0200-03691 EXTERNAL INSULATOR PRODUCER
2981 718-094523-281 TCP ESC 8INCH, ESC, NOTCH TYPE
2982 0200-03837 INTERNAL INSULATOR PRODUCER
2983 0200-04619 SINGLE RING DPS II
2984 0200-04635 LIFT PIN HDP CVD
2985 0200-04862 SINGLE RING DPS II
2986 0200-04969 HUB CENTER DUAL SIDE FEED DPS II POLY
2987 0200-04995 GAS INJECTOR
2988 715-330981-001 LINER WINDOW SIDE TCP 9600SE
2989 715-12233-002 INNER GATE PLATE
2990 715-330135-002   BOTTOM GAS FEED RING (ESC)
2991 715-330445-600 PL ADATER UPPER MATCH
2992 715-330135-001 GAS INJECTION RING
2993 715-330825-007 LIR,CHMBR,AL,ALLI BSR 9600
2994 715-495014-001 LIN,CHABER,TRASN,MANF,ADPTR
2995 715-330889-002 AL GROUND RING
2996 839-495013-001 EXTENTION CHAMBER WALL LINER-II
2997 715-330394-010 BRACKET,CHAMBER,LINER,9600 PTX
2998 715-330984-001 GAS INJECTION RING® ALLIANCE 9400 PTX
2999 715-331211-002  LINER,CHAMBER,9600 (P)
3000 715-330394-001 QUARTZ INNER BRACKET, TCP 9400
3001 715-028554-002 PLATE UPPER SEAL 8", RAINBOW 4728
3002 0200-05216 CERAMIC ESC COVER ULTIMA
3003 715-31522-001 PLATE WINDOW TURBO EXIT
3004 715-11035-002 MAIN CHAMBER BASE
3005 715-11002-00 XLL CHAMBER
3006 1810-223289-13 EXHAUST SLIT
3007 715-011219-001 FILLER L/L CHAMBER LEFT RAINBOW
3008 715-330987-001  GAS INJECTION RING (TCP9408)
3009 715-031507-001 HOUSING REACTION CHAMBER TCP 9400
3010 715-007469-002 LOWER ELECTRODE(6")
3011 715-330987-001 GAS INJECTION RING (TCP9408)
3012 715-330746-002 ROD PLUNGER
3013 0010-20328 8" AL MAGNET Ass`y Dura source
3014 715-011913-005  PLATE , LOWER BAFFLE SIN
3015 715-037760-001  AL ELECTRODE UPPER 8"
3016 715-028606-162 PLATE WC 6"
3017 715-330984-300 GAS INJECTION RING
3018 715-011753-001 PLATE UPPER BAFFLE
3019 0010-21810 MAGNET Ass`y, G12+, Encapsulated, Dura source
3020 715-330825-005 WALL LINER
3021 715-045264-200 GROUND RING
3022 715-045263-130 AL GROND BASE RING
3023 715-031986-008 HOUSING LOWER REACTION CHAMBER
3024 715-078385-200 COVER KITS
3025 715-013639-007 GROUND STRAP_3X
3026 715-032012-003 PLATE, WINDOW, CHAMBER LGR
3027 715-027638-014 4 * 2 GDP
3028 888-107103-002 SHAFT CYLINDER SCREW TYPE
3029 715-012165-008 HOLDER WAFER8",TIGHT POKET
3030 715-130092-006 HOLDER WAFER6" ARM EXIT
3031 715-030319-001 COVER SCREW BSR
3032 715-012165-006 WAFER HOLDER TIGHT POKET 6"
3033 715-495013-001 PENDULUM V/V WALL LINER
3034 715-330133-001 RING UPPER CHAMBER FXD CAP2
3035 715-011531-015 AL ELECTRODE (RB4728)
3036 715-011051-001 FRAME CHAMBER WINDOW
3037 715-011039-001 RETAINER UNIVERSAL WINDOW
3038 715-098591-001 PENDULUM V/V PLATE
3039 715-098592-001 ISO V/V COVER
3040 715-12233-003 GATE,INR HD ANDZ
3041 715-032012-004 CAHBER BODY SIDE PLATE EPD
3042 724-071981-002 Vacuum ROBOT PICK 150mm
3043 715-360268-001 PL, CHAMBR, TO VLV
3044 839-331158-003 WLDMT, TOP GAS LINE(9400FM)
3045 715-130080-005 WAFER HOLDER TIGHT POKET5"
3046 715-25106-001 PLATE,LOWER BAFFLE
3047 715-011202-001 ELL CHAMBER BODY
3048 715-011532-006 PLATE, UPPER SEAL(6IN.ELECTRODE)
3049 715-11901-006 LOWER BAFFLE DOMED 6"
3050 715-11900-001 UPPER BAFFLE DOMED 6"
3051 715-074069-004 BASE PLATE
3052 715-11492-006 EXIT ARM 6"
3053 715-330834-001 HOUSING,LOWER REACTION
3054 715-011640-006 FOCUS RING
3055 715-011531-008 AL ELECTRODE(RB4426)
3056 715-018991-006 LAM AL CHATHODE 8"
3057 715-018991-206 AL ELECTRODE
3058 715-015169-011 LINER,TMP SHILD,TOP GAS ANODIZED
3059 715-443178-001 R, EDGE, HOT
3060 715-441352-001 CHAMBER, HIFLOW TCP
3061 715-370861-010 ORF,SYL,55HOLES DIA,052
3062 715-031454-001 CHAMBER WINDOW COVER
3063 720-098325-001 SCR, FLH, SOC, Ti, VENT, 8-32, 1/4L
3064 724-074076-005 SEAL PLATE
3065 715-443223-002 HPT OUT FOCUS RING
3066 856-004863-003 BRACKET 
3067 0200-37359 200mm Producer Ceramic Heater
3068 0040-51612 200mm Producer Ceramic Heater
3069 0040-02539 200mm Producer Ceramic Heater AL Cap#
3070 714-045743-809 LINER, FIXED OUTR, ACME, 23 (ACME Liner out 31)
3071 0040-37593 200mm Producer Ceramic Heater AL Cap#
3072 0200-05465 NOZZLE INSERT DG DPSII POLY
3073 0200-05704 NOZZLE 
3074 839-011907-111 Electrode, silicon, 8" SM,Hole, LR 8" EXELAN
3075 839-440462-508 Lam exelan HP ESC   8" EXELAN
3076 716-443086-301 HOT EDGE RING(301)  8" EXELAN
3077 716-004655-001 UPPER QUARTZ RING  8" EXELAN
3078 716-443083-004 TOP CONFINEMENT RING  8" EXELAN
3079 716-443084-003 QUARTZ RING CONFINEMENT LOWER,  8" EXELAN 
3080 839-443215-101 SILICON,8IN,SM HOLE(Upper Electrode)  EXELAN HP
3081 716-000941-001 QUARTZ BAFFLE  LAM 9600
3082 715-011622-221 4 PIN  LAM 9600
3083 1810-220952-14  COOLING PLATE
3084 1810-224220-12  COOLING PLATE (HOLE Modify)
3085 1010-201588-12  UPPER ELECTRODE
3086 1810-121366-11  AL DEPO SHILD RING(P/C1)
3087 1810-121367-11  AL DEPO SHILD RING(P/C2)
3088 1810-326593-15  SCREW COVER A-C
3089 1010-101475-11  PLATE BAFFLE
3090 1810-121857-12  PLATE BLOCK
3091 1810-121786-12  PLATE RF
3092 1810-121692-12  SHIELD DEPO UPPER-AL P2
3093 1810-224473-13  RING,OUT
3094 1810-328284-12  COVER SCREW A-AL CHAMB
3095 1810-121677-12  PLATE EXHAUST T6 EXH S850DI
3096 1810-431128-11  SCREW
3097 1810-224611-11  SLIT PLATE EXH W1.6 P3
3098 1810-328318-11  AL WALL CHAM(UP) (GND) (STEMP)
3099 1810-328319-11  AL WALL CHAM(LOW) (GND) (STEMP)
3100 1810-328321-11  AL WALL CHAM (L) (GND) (STEMP)
3101 1810-328320-11  AL WALL CHAM (R) (GND) (STEMP)
3102 1810-224951-11  RING, CENTERING TYPE-1
3103 1810-121899-12  PLATE EXHAUST T6 AN
3104 1810-121591-14  LINER A EXH,AN
3105 1810-327572-14  LINER B EXH
3106 1810-329303-11  COVER, BELLOWS A (AD),AN
3107 1810-329022-13  LINER ADAPTER (AL) TYPE 2
3108 1810-224953-12  LINER C GATE CHAMB, AN
3109 1810-329078-11  COVER SCREW A-AL AN
3110 1810-329079-11  COVER SCREW B-AL AN
3111 1810-121903-11  SHIELD DEPO UPPER P1,AN
3112 1810-121898-11  SHIELD DEPO LOWER ,AN
3113 1810-329064-12  WINDOW , AL-3, AN
3114 0021-21617 COVER, RING 8" 55˚ 2 TABS, MASK
3115 0020-34696 FILLER, SLIT VALVE
3116 0010-10327 C5200 MxP-Oxide 8"
3117 0040-99949 C5200 MxP-Oxide 8"
3118 0010-23726  Lift Pin DPS
3119 0020-48183  Door Slit Liner
3120 3D10-100585-R12  NET Mani SET
3121 3D10-400442-12  Screw DT Shutter
3122 3D10-402145-12  Screw Upper Electrode
3123 3D10-400387-11  Screw Pin Lock
3124 1810-120900-13 ESC BOTTOM ELECTRODE TE-8500 8" JEIDA UNITY-II-85DP 
3125 1810-121603-11 TEL UNITY-II-85DI 8" ESC
3126 1810-121296-12 TE-8500 6" UNITY-II-DP ESC
3127 716-330045-001 EDGE RING 9400 (8")
3128