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RNX OEM Used Parts List

Category : OEM Used / New Parts | Download : RNX OEM Used Parts List 20191105.pdf

      RenoNix OEM Used Parts List

                                                                                Date Updated : 11/05/2019

NO. P/N Description
1 MKS AX-7645
2 MKS ASTEX DC POWER
3 MKS ENI DCG 200Z
4 MKS ENI OEM 1250
5 MKS ENI DCG 200
6 MKS ENI OEM 12A
7 MKS ENI OEM 2000
8 MKS ENI DCG-200Z-OPTIMA 
9 MKS ENI GHW-85A
10 MKS AX8405
11 MKS AX8403
12 AE MDX 10K SLAVE
13 AE MDX 10K MASTER
14 AE MDX 20K MASTER
15 AE MDX - MASTER
16 AE PDW 2200
17 AE HFV 8000
18 AE RAPID
19 AE LF-10
20 AE RF-20R
21 AE RF-10S
22 AE PE 5000
23 AE PE 2500
24 AE PDP 3500
25 AE PINACLE
26 AE RF-20M
27 AE RFX 3000
28 AE RF5S
29 AE LF-5
30 AE APEX3013
31 AE PDX 900-2V
32 AE PDX-8000
33 AE PDX 1400
34 AE MDX- L6
35 AE MDX-L12 DC P/S
36 AE MDX-L12M-650
37 AE LF-10A
38 AE MDX-L18M
39 AE MDX-L12M
40 AE MDX20K
41 AE LF-10
42 AE RFG 5500
43 AE RFG-1250
44 AE MDX-L12-650
45 ADTEC AX- 1000 III
46 ADTEC AX-2000 III
47 ADTEC AX-2000
48 ADTEC AX-2000 II
49 ADTEC AX-1000 II
50 ADTEC AX-3000 III
51 0190-07906 DC POWER SUPPLY
52 0190-16526 DC POWER SUPPLY
53 0010-20001 24V Power supply
54 1140-01104 P/S Ion Gauge 8 channel
55 - 15V POWER SUPPLY
56 0190-76030 CDX-2000 Dual RF P/S
57 1140-01086  10KW Power Supply  
58 1140-01092 10KW P/S (Master)
59 0010-20000 15V P/S ASSEMBLY
60 0010-20442 Assy,8" RF Match
61 NP NPG 10K
62 - RFK30-ST1
63 RFM P5000 MATCHER
64 DAIHEN MFG-20SA
65 DAIHEN MFG-20SA3
66 DAIHEN MFG-20SA3
67 COMDEL CPS-1001S
68 COMDEL CPS-1001
69 COMDEL CX-600S
70 COMDEL CX 1250
71 COMDEL CS 600S
72 COMDEL CLK-10KW
73 COMDEL CX-2500S
74 COMDEL CS-10KS
75 COMDEL MFG 15SA
76 0100-76259 ASSY PCB WAFER ORIENTER CONTROLLER BD
77 0100-00634 Gas Detect Board
78 0100-20000 wPCB ASSY,64 CHANNEL MUX
79 0110-20004 PCB FAB, CHAMBER INTERCONNECT
80 0100-20313 CHAMBER INTERCONNECT PCB
81 - Convectron guage board
82 0100-20098 PCB ASSY,DUAL DEGAS DRIVER
83 0100-20078 PCB ASSY LASER DRIVER
84 0100-20004 wPCB ASSY, CHAMBER INTERCONNECT
85 0100-20026 wPCB ASSY,STEPPER DRIVER DISTRIBUTION
86 0100-20216 Stepper Driver/Direct Drive Interface
87 0100-35170 PCB, ASSY,DIVIDER EXHAUST SWITCHING SYS
88 0130-76029 PCB CHBR TRAY INTC A & C CENTURA MCVD
89 0100-09214 PCB ASSEMBLY, CHAMBER INTERFACE BOARD
90 0100-76029 PCB CHBR TRAY INTC A & C CENTURA MCVD
91 0100-76017 PCB ASSY, INTERFACE PROCESSOR DISTRIBUTI
92 0100-76030 PCB CHBR TRAY INTC B & D CENTURA MCVD
93 0100-20069 OBS,PCB WAFER ORIENTER
94 0100-76013 PCB ASSY, CENTURA CHAMBER A/C INTERCONNE
95 0100-35212 PCBA, CHAMBER A/C TRAY, IPS, 5200 MCC
96 0100-00386 PCB, LIGHTPEN SELECT INTERCONNECT
97 0190-10691 CARD CRT VIDEO GRAPHICS CONTROLLER FOR P
98 0100-20183 PCB ASSY VIDEO 3 MONITOR W/SW
99 0100-09058 wPCB ASSY OPERATOR CNTRL PANEL,
100 0100-35054 PCB ASSY,CHMBR INTERFACE
101 0100-35065 PCB ASSY, SERIAL ISOLATOR
102 0100-20009 wPCB ASSY,SYSTEM STEPPER DISTRIBUTION
103 0100-76280 PCB,ASSY SMIF INTERCONNECT BOARD WITH COVER
104 0100-09380 PCB ASSEMBLY HEATER RETRACT WXZ
105 0110-09084 PCB Monitor light pen interconnect
106 0110-09244 AMAT BOARD
107 0110-09162 -
108 0100-09009 PCB ASSY, BUFFER BOARD
109 0100-20063 PCB ASSY, TC GAUGE
110 0100-00008 w PCB TC GAUGE
111 0100-35049 ASSEMBLY PCB SYS RESET/ INTLK SEL BD
112 0100-35250 PCB ASSY,CHAMBER INTERFACE,DPS CENTURA
113 0100-35207 PCB, CHAMBER INTERFACE IPS, 5200
114 0100-00493 PCBA, CHAMBER INTERFACE 5200 HDPCVD ULTI
115 0100-76042 CENTER FINDER PCB ASSY
116 0100-35058 wASSY PCB,LOADLOCK INTERLOCKS
117 0100-35175 CHAMBER INTERFACE BOARD
118 0100-35053 PCB ASSY,MAINFRAME INTERLOCKS
119 0100-35036 PCB ASSY, DUAL GAS LEAK DET
120 0100-00014 PWB OPTO DETECTOR
121 0100-00112 PCB OPTO SW 3 ASSY F/A INDXR
122 603625-104 UMAC-CPCI Turbo CPU
123 0100-09389 TC AMP/INTERLOCK BD
124 0100-20133 SERIAL/VIDEO INTERCONNECT BD
125 0100-35353 PCB ASSY 5 PHASE STEPPER DRIVER INTERFAC
126 0020-22821 Wafer map LED Cover
127 0020-13965 Fast Wafer mapping cover
128 0020-13963 Bracket
129 0100-76038 ASSY, PCB LED-NB, FAST WAFER MAPPING
130 0010-20291 DETECTOR ASSY, LLB, LEFT
131 0010-20292 DETECTOR ASSY, LLB, RIGHT
132 0190-00318
0100-02735
VGA VIDEO CONROLLER ASSY BD
VGA VIDEO CONTROLLER BOARD
133 0100-00499 PCB ASSEMBLY, DC POWER/SERIPLEX BUS DIST
134 0190-00387 CARDMOTION CONTROLEER DEPPRE-VME/OPT VME
135 0100-00752 PCB ASSY, MAINFRAME INTERFACE BD
136 0190-11529 card piii 400mhz 128mb ram vmebus single
137 0100-00215 PCB ASSY, AC DIST
138 0090-00811 ASSEMBLY, PCB DUAL GAS LEAK DETECTOR
139 0100-35231 PCB,SERIPLEX I/O DISTRIBUTION, GPLIS
140 0015-01857 MODIFICATION, ASSY, PCB, CHAMBER SET INT
141 0100-01792 PCB ASSY, 5-PHASE STEPPER DRIVER INTERFA 
142 0090-76133 ASSEMBLY, ELECTRICAL, SYNERGY V452 SBC W V452
143   V440
144 0190-09939 OMS Board
145 0100-20003 OBS DIGITAL INPUT OUTPUT PCB
146 0100-00259 PCB ASSY,SERIPLEX I/O DISTRIBUTION,GPLIS  
147 0100-11001 w PWB, ANALOG OUTPUT
148 0100-11002 PWB DIGITAL I/O **
149 0190-35066 DUAL GAS LEAK DETECTOR
150 0190-09547 SCD, APC VME SERIPLEX BOARD
151 0190-35763 SERIPLEX MUX I/O PCB
152 I4808064 CTI Connect Tech Inc Intellicon FLEX-8 PCB 45807 REV C Board 
153 0190-35762 SERIPLEX MUX I/O PCB(2), (048-079H)
154 0190-35775 MULTIPLEXED I/O CONTROL BOARD, CH C
155 0100-01321 ASSY PCB DIGITAL I/O DIO BD
156 0100-76059 PCB ASSY, MAINFRAME EXPANSION BOARD
157 0100-20153 OBSOLET USE 0100-76059
158 0100-20135 PCB ASSY MAIN FRAME DUAL
159 0190-75084 VGA video interconnect PCB, ESW X3347
160 1381-647847-13 N/A
161 0100-20173 REV A STEPPER CONTROLLER BD ASSY
162 0100-20001 System Electronics interface PCB board
163 0190-76050 VGA VIDEO CONTROLLER
164 0190-09469 PCB,APC CH D
165 0190-35653 SERIPLEX MUX I/O PCB(1),(016H-047H)
166 0100-20100 wPCB ASSY, ANALOG INPUT/ OUTPUT
167 0190-09467 PCB,APC CHAMBER B
168 0100-00003 w PWB VME STEP CONT. I
169 0190-35773 MULTIPLEXED I/O CONTROL BOARD, CH A
170 0100-00396 ASSY PCB ANALOG I/O AIO BD
171 sv21 PCB ASSY CCD
172 810-017095-010 PCB REV,B
173 0100-01996 ASSY, PCB SEI
174 0100-09054 PCB ASSY, ANALOG INPUT
175 0190-35651 SERIPLEX MUX I/O PCB(6), (176H-207H)
176 0120-20162 PCB Artwork, Stepper Controller
177 0040-70360 N/A
178 0040-18053 PEDESTAL, HOLES 200mm BLUE SNNF
179 0010-36278 CHAMBER ASSEMBLY, AXZ
180 0010-20129 BLADE ASSY 6" BUFFER
181 0010-20030 TRANSFER ROBOT ASSY (1 SET FAIL: \500,000)
182 0020-70336 WING FROG LEG
183 0040-13377
0040-13378
WING, LT, ENHANCED HP
184 0010-70264 ASSY HP/HP+ UPGRADE ROBOT DRIVE (UPPER, LOWER)
185 0010-76430 ASSY A.L.L.MOTOR LEFT
186 0010-01711 ASSY, HP, UPGRADE ROBOT, ENDURA (UPPER, LOWER)
187 0010-76061 ASSY CENTURA HP ENP TRANSFER ROBOT  (UPPER, LOWER)
188 0010-70264
0010-13263
ASSY HP/HP+ UPGRADE ROBOT DRIVE (UPPER, LOWER)
189 0020-20667 MOUNT LIFTER BEARING
190 0010-20753 WAFER LIFT ASSEMBLY PRECLEAN 2 
191 0010-76428 ASSY, PVD SLIT VALVE ACTUATOR
192 0010-20681 ASSY SPECIAL HANDLER (L.L.A)
193 0020-41030 TOP PLATE PLATFORM METAL CASSETTE 
194   L/L STAGE SET 
195 3400-01383 HOSEASSY TFE/SST BRD 3/16IDX48"L FEM JIC LONG-EL
196 3400-01384 HOSEASSY TFE/SST BRD 3/16IDX84"L FEM JIC LONG-EL
197 3400-01385 HOSEASSY TFE/SST BRD 3/16IDX84"L FEM JIC ELBOW
198 3400-01386 HOSEASSY TFE/SST BRD 3/16IDX48"L FEM JIC ELBOW
199 0010-04561 ASSEMBLY, BIASED ELECTRODE, AC BOX
200 - P5000 ROBOT BLADE
201 0010-76506 MOTORIZED HP LIFT ASSEMBLY
202 0010-06464 ASSY, SZ BESC MOTORIZED LIFT
203 0020-20913 Box Heater AC Power
204 0020-23438 COVER HOUSING MOTORIZED LIFT
205 0020-23442 COVER PLUMBING MOTORIZED KIT
206 0020-20510 HSNG HTR PKG
207 0040-13569 COVER, RF WATER BOX,HT ESC
208 0020-23441 BRKT PLUMBING MOTORIZED LIFT (WITH 23442)
209 0020-20914 COVER HTR AC POWER BOX
210 0240-76250 KIT, 101% BELLOWS
211 0021-00101 SHIELD TC AMP WXZ
212 0010-30703 INTERLOCK/ TC AMP ENCLOSURE ASSY WXZ
213 0010-20092 OPERATOR CONTROL PANEL ASSY, UHV 5500
214 - ASSY, REMOTE DISTRIBUTION
215 0010-20705 RESONATOR
216 SEC-Z512MGX N2 100 SCCM
217 SEC-Z512MGX N2 550 
218 SEC-Z512MGX N2 3SCLM
219 UFC-8160 1SLIM (MF3)
220 UFC-8160 200SCCM (WF6)
221 UFC-8160 2SLIM (H2)
222 UFC-8160 3SLM (Ar)
223 UFC-8160 30SCCM (SIH4)
224 UFC-8160 N2 500
225 UFC-8161 3SLM(Ar)
226 UFC-8161 200SCCM(Ar)
227 UFC-8161 1SLM(NF3)
228 UFC-1660 5SLM Ar
229 UFC-1660 200SCCM N2 (NF3)
230 UFC-1660 500SCCM
231 UFC-1660 5SLM Ar
232 UFC-1660 1.5SLM
233 UFC-1661 200CC WF6N2
234 UFC-1661 Ar 300SCCM
235 UFC-1661 3L H2 2000
236 UFC-1661 2LH2 N2 300SCCM
237 UFC-1661 300CC N2 WF6
238 UFC-1661 H2 2500 SCCM
239 UFC-1661 2SLM H2
240 UFC-1661 7.5 L Ar
241 UFC-1661 H2 2000SCCM 2L
242 UFC-1661 Ar 5000
243 UFC-1661 H2 2000
244 UFC-1661 N2 200
245 UFC-1661 H2 3000
246 - MKS MASS FLOW CONTROLLER 200 SCCM 1159B-02000RV-ST
247 STEC 4400 NF3 200SCCM
248 STEC 4400 N2 300SCCM
249 STEC 4400 NF3 1000SCCM
250 STEC 4400 N2 200 SCCM
251 STEC 4400 N2 20 SCCM
252 STEC 4400 WF6 30SCCM
253 STEC 4400 SIH4 30SCCM
254 STEC 4400 WF6 200SCCM
255 STEC 4400 Ar 5SLM
256 STEC 4400 N2 100 SCCM
257 STEC 7440 WF6 200SCCM
258 STEC 7440 SIH4 30SCCM
259 STEC 7440 WF6 30SCCM
260 STEC 7440 N2 200 SCCM
261 STEC 7440 N2 100 SCCM
262 STEC 7440 Ar 50 SCCM
263 STEC 7440 N2 50 SCCM
264 UFC-8160 -
265 UFC-8161 -
266 STEC 4400 H2 2SLM
267 STEC 4400 H2 1SLM
268 STEC 4400 Ar 20SCCM
269 STEC 4400 He 500SCCM
270 STEC 4400 H2 20SCCM
271 STEC 4400 N2 100 SCCM
272 STEC 4400 Ar 50 SCCM
273 BROOKS 6256S 200SCCM
274 BROOKS 6256S 1SLPM 
275 BROOKS 6256S 20SCCM
276 BROOKS 5964D 5SLPM
277 3030-13510 MFC
278 3030-08487 MFC
279 MKS 640A-27962
280 0190-36237 VALVE, INJ. 208V TEPO/TEOS 150C STEC
281 3870-02238 VALVE INJECTION CNTRL PNEU TC W/HEATER
282 MFC 1179A-23682
283 MFC 1179A00423CR 18V-K
284 0140-20286 HARNESS ASSY CHAMBER 1 AND 4 AC ( WITH 0020-21405)
285 FC-D980C SIH4 100SCCM
286 FC-D980C SIH4 600SCCM
287   MFC 8160 (Pin Board Type) N2 20 (Working)
288 0020-20817 COVER, FRONT LEG
289 0020-20719 RAIL SUPPORT RF GEN CABINET
290 0020-40158 BRACKET, MOUNTING 
291 - IMP WATER LINE
292 0100-20181  PCB ASSY, OPERATOR CONTROL PANEL WITH IN
293 0010-21616 MAGNET ASSY P4
294 - Signal Tower
295 0030-20101 SOURCE COVER, 13 VECTRA IMP
296 0030-20006 ARM,WELDMENT SOURCE STD OBSOLETE
297 0020-20296 FRAME SOURCE 13
298 0040-21495 13" DEGAS LID FRAME (with Target)
299 0020-20295 wFRAME SOURCE 11.30
300 0020-20164 COVER, INSULATOR SOURCE 11.30
301 0020-20171 COVER, INSULATOR 13
302 _ 11.30 SOURCE
303 _ G-12 SOURCE
304 0010-11925 ASSEMBLY, MAGNET
305 0040-07772  Cover, Insulator, ALPS+ Center Injection source
306 0030-00294 HOIST COVER
307 0030-20020 COVER SOURCE 13" G-12
308 0030-00015 COVER, PULLEY SOURCE 200 CENTER WATER IN
309 0010-20225 MAGNET 'A' 13.O AL ASSY
310 0010-20819 MAGNET ASSY UNCHARGED 13TI ***
311 0010-20768 MAGNET ASSY G-12 8 ***
312 0010-21465 MAGNET ASSY TI DURA SOURCE 11.3
313 0010-20818 MAGNET ASSY A-TYPE 13AL ***
314 0010-20328 MAGNET ASSY DURA SOURCE 13 AL
315 0010-12864 MAGNET ASSY, LP-8.8, SHIM, 200MM SIP ENC
316 _ MAGNET ASSY
317 0010-20389 MAGNET ASSY DURA SOUCRCE 11.3
318 0010-21127 MAGNET ASSY  TI DURASOURCE  13
319 0010-21206 MAGNET ASSY DURA SOURCE 13 JMW1
320 0010-21844 MAGNET ASSY DURASOURCE TTN ENCAPSULATED
321 0010-20258 MAGNET ASSY A-TYPE 13 TI
322 0010-20222 MAGNET,REM 11.3 TIW
323 0240-28279 KIT, FRONT DOOR COVER, NB, CONDUCTIVE PAINT
324   CHILLTER MONITOR
325 - 5 PHASE DRIVER
326 - 2 PHASE DRIVER SYSTEM LECK
327 0870-01003 2 PHASE DRIVER SOURCE
328 0021-35989 LID PLATE, TxZ VIEW LID (1ea 2nd NEW)
329 0010-20722 ASSY BRKT FL METER NESLAP
330 0100-20051 PCB ASSY, TURBO INTERCONNECT (WITH 0020-70536)
331 K0043-D BRUSHLESS DC MOTOR DRIVER
332 0100-20097 WATER LEAK DETECTOR
333 - VI-PU03-EYW 1417
334 0010-09416 ETCH RF MATCH
335 0010-20524  MODIFIED  8 RF MATCH
336 0010-20525  MODIFIED  6" RF MATCH (ENDURA 5500)
337 0010-20442 ASSY, 8” RF MATCH
338 0010-36408 R1 DPS  RF MATCH
339 0010-15877 ASSY, RF MATCH, BIASED ELECTRODE BESC
340 0010-13627 ASSY, HIGH EFFICIENCY RF MATCH-BIAS
341 0010-13602 OBS-ASSY, HIGH EFFICIENCY RF MATCH - BIA
342 0190-35076 120 VAC/30 AMPS
343 0020-20895 BASE HEATER 5/6 DEGAS
344 - EDWARD INTERFACE MODULE
345 0010-20331 DEGAS DRIVER
346 0190-09419 DRIVE SINGLE PHASE, PHASETRONICS
347 0100-20079 ASSY, PVD CHAMBER DRIVER
348 0190-00839 DRIVER, LTESC/LTBESC, PVD DUAL ZONE
349   ONBOARD 3PHSAE CONTROLLER 
350 0190-01485 DRIVER,PVD LAMP/DUAL MODE HEATER 120/120
351 0030-20025 ENCLOSURE 90 DEG COVER LIFT
352 0030-20007 COVER SOURCE 11.30"
353 03911-7351 80498 OPEN SOURCE
354 0020-22983 BRKT, PILLOW BLOCK SOURCE
355 0020-20156 BRKT, PILLOW BLOCK SOURCE
356 0040-76073 ARM, WELDMENT
357 0040-70150 ARM, WELDMENT
358 0040-20911 ARM, WELDMENT
359 0010-17136 LIFT ASSEMBLY, 200MM CWXZ/WALD
360 IRDIA Microwave P/S ASTEX D13765
361 1140-01104 P/S Ion Gauge 8 channel
362 0020-28711 VIEWPORT SHIELD, 10", CH A OR B LID 
363 0040-13527 OBS, CHAMBER ORIENTER DEGAS NO BLANKOFF
364 0040-03734 CHAMBER ORIENTER DEGAS NO BLANKOFF
365 0020-70376 CHAMBER ORIENTER/DEGAS
366 0020-23249 CHAMBER, EXT P/C
367 0010-20317 ASSY 8" DEGAS LAMP 350C
368 0010-20351 5/6" PVD Degas
369 - NT151/361
370 - NT150/360
371 - NT20
372 - IONGUAGE POWER SUPPLY
373 02-147659-00  
374 0010-13897 HEATER ASSY, 8 JMF BIASED ELECTRODE MCA
375   KSI GENERATOR
376 0010-70252 ASSY 6" HEATER VCR W/2 TC'S
377 - 6" 6FINGER
378 0010-21530 ASSEMBLY, NON-NTM ADVANCED 101-6"
379 0040-20136 MANIFOLD, H20 SOURCE 13"
380 0020-23640 BLOCK FTG LIFT MOUNT
381 0020-76432  Bracket, lid
382 0040-22202 SPACER, PILLOW BLOCK, VECTRA IMP
383 0020-21713 PILLOW BLOCK SPACER 1
384 - PILLOW BLOCK SPACER 2
385 0020-22739 CASSETTE SUPPORT
386 0020-20509 CVR HTR PKG
387 0040-22295 BLOCK
388 0020-22296 COVER ORIENTATION PCB
389   BELLOWS 
390   BELLOWS WAFER ORIENTER
391 - KAV-100M-P1034
392 - KIV-075-P
393 - VHV-25-AKK-ENVN
394 3870-01244 VALVE PNEU NW40 FLANGE
395 0020-75852 PLATE TOP PLATFORM WBLL CMF CENTURA
396 0040-76557 PLATE BASE PLATFORM WBLL CMF CENTURA (WITH 0040-13012 3EA)
397 0020-47952 REFLECTOR ADJ PLATFORM WBLL CMF CENTURA
398 0010-13335 Heater Hose Assembly 57", SST
399 0020-22089 SPACER, PVD LIFT
400 0020-26692 HTHU Upper Spacer
401 0020-24839 HTHU Lower Lift Spacer
402 - LUGPING BELLOWS
403   0010-03244 Assy Heater SNNF, 200MM HP TxZ TC
404 0190-09372 ASSY, TC, HTR, WxZ
405 0190-01403 T/C ASSY HEATER WXZ
406 3310-01055 GAUGE CONVECTRON TUBE 1/4 FVCR
407 0020-21024 CLAMP 6 INCH BLADE  TRANSFER FROG LEG (UPPWER LOWER SET)
408 0020-21112 CLAMP 6 BLADE BUFFER ROBOT (UPPWER LOWER SET)
409 0010-22230 WRIST ASSY
410 0021-22419 BLADE, 8 TRANSFER, HP+, CVD COMPATIBLE
411 0021-20390 BLADE, 8" XFR, HTHU/CVD COMPATIBLE
412 0021-22108 BLADE, 6" TRANSFER, HP+, JMF
413 0020-70237 BLADE 6" JMF TRANSFER
414 0020-21114 BLADE 6" BUFFER ROBOT
415 0010-70091 ASSY 6" BLADE JMF TRANSFER (BLADE 0020-70237)
416 0020-21028 BLADE 8" TRANSFER FROG LEG
417 - CERAMIC BLADE
418 0020-21025 CLAMP 8" BLADE TRANSFER FROG LEG
419 0020-21104 CAP 8" BUFFER FROG LEG
420 0020-22570 LIFT HOOP 6", SHUTTER CHAMBER
421 0021-20983 ORIENTER HOOP
422 0020-21707 LIFTER 8"
423 0040-76555 TRAY STORAGE WAFER DUMMY WBLL CMF CENTUR
424 0040-76217 PIVOT ARM ASSY LEFT SIDE ORIENTER HINGE
425 0021-36658 VACCUM PORT ADAPTE AXZ 
426 0020-23035 CAM, RIGHT INBOARD
427 0020-23031 CAM LEFT INBOARD
428 0021-20437 DISK 8" B101 TI SHUTTER
429 0020-05384 DISK, 8" SHUTTER, JMF BESC/ICE W CUTOUT
430 0020-28390 6" JMF DISK, SHUTTER, 101 PROCESS
431 0020-26971 6" TI SHUTTER DISK
432 0040-22651 CLAMP V-BLOCK MAGNET HOLDER
433 0021-15587 BLADE, SHUTTER, 8 B-101
434 0020-27668 BLADE 8 101 SHUTTER
OEM
435 0020-25256 8" 101 SHUTTER DISC
27677 2EA
436 0020-25227 ADAPTER, HTHU LIFT
437 - SPRING SHOCK LONG 
438 - SPRING SHOCK SHORT
439 0020-25226 OBS: HOOP, HTHU 8" HEATER
440 0010-03705 ASSEMBLY, ACTUATOR SUPPORT PLATE (with 0020-27135 3EA)
441 0045-20002 CLAMP ACTUATOR SHUTTER LINKAGE
442 0010-21336 BAR ASSY, LINKAGE SHUTTER
443 0010-21587 SHUTTER ENCLOSUR
444 0021-21469 RING RESTRAINT, 1.574 DIA SHFT, 8 BESC
445 0020-28963 BRACKET, ANTI-ROTATION, 200MM HTBESC TTN
446 0040-01829 BLADE SHUTTER, 8' BESC/ICE W/PIN
447 0020-28258 LIFT HOOP 6" ADV 101 WB
448 0020-29029 BLADE 6" 101 SHUTTER
449 0020-23635 LIFT HOOP 6 101% W/B CH
450 3020-01060 CYL PNEU 2.5L STROLE 63MM BPRE DBL ENDED
451   NCDQ2B50-25DZ-X
452 0010-70876 ASSY, SMC VLV 2.5 BORE 1.0 STRK LFT
453 0021-20494 HEAT SHIELD, LEFT HALF, HTHU
454 0040-23664 PLATFORM, LEVEL
455 3870-01352 VALVE H VAC RTANG 1-1/2" CONFLAT 2-3/4 F
456 0040-23094 PANEL, DISK DRIVE SUPPORT, CONTROLLER 
457 0090-76102 VALVE ASSY, N/C, AUTO SHUT-OFF, HTESC
458 0150-22055 CABLE ASSY, PVD CH WATER SHUT-OFF
459 0030-70084 HOLDOWN RING,VIEWPORT
460 3870-01805 VALVE PNEU RTANG 2-3/4CF NW40XNW40
24VDC (WITH 0140-20910)
461 0020-20790 AC COVER CHAMBERS C, D, E, & F
462 0020-20791 A/C  COVER,  PRECLEAN
463 - 627A-14974
464 127A-11014 127A-11014 .1TORR
465 0015-20002 PULLEY, MODIFIED SOURCE
466 0021-06427 HOOP, LIFT, OPEN, 8" MCA E-CHUCK
 (WITH LIFT FINGER 1EA 0020-22241)
467 0020-23209 lift hoop,8"wide body,101% coverage
468 - GENERATOR CABLE
469 0020-27124 PEDESTAL, PCII 6" JMF/SMF @ C&D
470 0040-22710 PLATE, G-TYPE MAGNET HOLDER
471 0020-20500 SHIELD CRYO,ROUND
472 0020-20815 PLATE, CASSETTE 150MM
473 0040-09920 GAS FEED THRU TUBE
474   LEADSCREW (KNOWN)
475 0020-20831 BAR TIE DOWN PCD CHAMBER
476 0020-70481 BAR TIE-OFF BODY CHAMBER
477 0020-76437 BAR
478 3320-01032 GSKT SHLD RF 172DIA 30LB/LIN-IN STD-FOS
479 3320-01060 GSKT SPIRA SHIELD.097DIA SST (300FT)
480 0021-21873 SHIELD, RF HEATER BOTTOM, 1.574" SHAFT
481 0020-20508 SHLD HTR RF BOT
482 - GENERATOR INTEROCK COVER
483 - WATER FLOW METOR
484 0020-21705 LIFTER 6"
485 0020-27123 PEDESTAL, PCII 8" SNNF
486 03-042622-00 -
487 03-042622-01 CABLE ASSY,PWR,TRBO,BLZ,LT,SPD.
488 03-042620-00 CABLE ASSY,TURBO CNTRL,SPD-S
489 0020-21706 CHUCK 6" SEE
490 0020-27127 PEDESTAL, PC II 8" JMF @ C&D
491 0020-21691 PLATE 8" CCD VACUUM SEAL
492 0020-21261 GUIDE SHAFT WAFER ORIENTER
493 0020-29127 BRACKET FLOW SWITCH PVD IMP
494 0020-22018 FLANGE, HUB, HEATER, 1.574 DIA SHAFT, BESC
495 0020-13974 BLOCK, MOUNTING, BOTTOM SENSOR LLKA, WBL
496 1080-01190 MOTOR SPEED BRUSHLESS 24VDC 4A 1/18.5HP
497 - ONLY MOTOR K0043-M
498 0020-24414 UPPER INTLCK COVER PC 2 CATH INTLK
499 0020-22838 LIFT HOOP, PRELEAN 
500 0020-21690 PLATE 6" CCD VACUUM SEAL
501 0020-23593 BLOCK LASER (WITH CLAMP, WINDOW, CCD,
ORIENTER,  WAFER 1EA 0030-70052)
502 0020-70500 COVER WINDOW PVD CHAMBER
503 0020-13975 BLOCK, MOUNTING, TOP SENSOR LLKB, WBLL
504 0020-13977 COVER, SENSOR, WBLL
505 0020-70732 COVER, PVD CHAMBER VIEWPORT
506 0020-22898 COVER DISC
507 0021-04652 LIFT COVER B101, BLT, 101, HTESC
508 0040-22829 STOP, SHUTTER BLADE, 8" E-CHUCK
509 0020-22665 SPACER, SOURCE CONTACT SPRING
510 0040-23544 BLOCK, MOUNTING 1.575" SHAFT, MOTORIZED LIFT INCOMPLETE
ASSY,  SZ BESC MOTORIZED LIFT
511 0020-23479 PLATE MNTG PNEUM CYL/MTR LFT WITH
0140-20504, 0020-24064 1EA)
512 0020-24064 BRKT FLAG SENSOR MOTO LIFT
513 0020-76383 INTLK TRIP BRACKET, EXT PCII
514 0020-76384 INTLK TRIP BRACKET, PCII RESN
515 - MOTORIZED SENSOR BRACKET
516 0021-21859 SENSOR BRACKET MOTORIZED ENDURA LIFT
517 0020-21708 CHUCK 8" SEE
518 0020-21675 ARM LIFTER DEGAS/ ORIENTER
519 0020-20699 CLAMP AR FLEX 8  GATE VALVE
520 0020-20700 CLAMP END AR FLEX 8" GATE VALVE
521 0020-24836 STD DC BIAS
522 0020-20579 EXTENSION ARM, DC BIAS
523 0020-40063/40030 BRACKET, BOTTOM, MOTOR
524 0020-26829 OBS: CONNECTOR HEAT SHLD HTHU-HTR
525 - CLAMP
526 0020-20587 INSERT, SLIT VALVE MACHINED
527 0020-76258 INSERT, SLIT VALVE, ALUMINUM
528 0020-24057 BRKT VALVE WATER (with 0020-20700)
529 - HEATER AC BOX
530 0040-76528 WELDMENT, 8 HOOP, PVD STD CHAMBER
531 0040-20321 HOOP LIFT 8" WELDMENT
532 0020-23138 BRACKET SENSOR, A.L.L. CASSETTE SENSOR 2 
533 0021-04631 BLOCK, PLUNGER, 2 INTERLOCK, WXZ 
534 0045-20040 COLLAR 1.574" SHFT HTR ISOLATOR 
535 0040-23545 BRACKET,CONNECTOR,1.574 
536 0020-22412 UPPER COVER, SLIT VALVE BELLOWS
537 0020-20938 BRKT CBL TIE SLIT VALVE 
538 0021-76290 RING, RESTRAINT, HTESC, 6", 9MM 
539 0020-02920 BRACKET, SENSOR FLAG, MOTORIZED LIFT, SZ
540 0020-21243 BRACKET SAFETY HTR 
541 0020-20945 BRKT, SW MAG/H-SENSOR
542 0020-23437 BLOCK MOUNTING HEATER MOTORIZED LIFT (WITH ASETAL)
543 0040-13659 BLOCK MTG HEATER 1.18 DIA SFT MTR LIFT H
544 0020-24727 PLATE, SPACER 101%
545 0020-22126 COVER LIFT PVD
546 0050-20099 MANIWATER SOURCE
547 3300-02022 FTG FLG WELD 90 DEG EL 1.0 OD SST
548 3300-02155 FTGTBG TEE UNION FLANGE NW25KF SST304
549 0140-21614 Harness Assy Single Phase UPS Bypass
550 0140-20118 Harness Assy CCD B/D Laser Driver Int  
551 3910-01108 LABEL CE WARNING REMOTE FRM TIPOVER TRIA
552 0020-28867 DISK 8" ADVANCED 101 SHUTTER
553 0020-21266 FLAT COVER, CHAMBER INTERCONNECT BD.
554 0020-20485 COVER LAMP SIDE
555 0021-76309 COVER, DET. ADJUST ASSY, FAST WAFER MAPP
556 0020-13650 COVER, DET ADJUST ASSY, FAST WAFER
557 0020-21444 BRACE, FRONT SKIN
558 0020-21045 HOUSING LAMP HTR POWER
559 0010-21699 ASSY, TC ISOLATION AMPLIFIER
560 0010-20138 ASSY TC AMP HSNG
561 - ASSY, TC ISOLATION AMPLIFIER
562 0090-01432 ASSY TC AMP LOW TEMP BESC
563 - 122B-11441
564 1350-01067 627A.1TBD
565 - 127AA-00001B
566 - 624A-13764
567 - 629B-15894
568 - E28B-24565
569 - 628A01TBE
570 - 627A-13092
571 - 627B01TBC1B
572 0020-22242 LIFT HOOP 8" (WITH IFT FINGER 1EA 0020-22241)
573 0020-27103 Lift Hoop 8" ADV 101 WB
574 0020-21685 PLATE BLANKOFF DEGAS/ ORIENTER
575 0021-70380 BLANK, SHUTTER
576 0020-22548 PLATE BLANKOFF SHUTTER ARM
577 0020-20558 BLANK SLIT VALVE
578 0020-20483 HUB  LAMP CORNER COVER
579 0020-20524 HUB  LEFT CORNER COVER LAMP BAKE OUT
580 0020-21043 COVER, SWITCH W/ CONNECTOR
581 0020-13265 HOUSING,WB ELECTRICAL
582 0040-22164 HOUSING,LAMP/HEATER PWR, HTESC, W/ INNER
583 0040-22165 COVER, LAMP END, HTESC, W/ INNER ZONE CO
584 0020-19708 COVER RING, 200MM SIP TA/TAN, ESC, INTEL
585 0020-23642 GUIDE RF MATCH MODIFIED
586 0040-20048 FEED THRU
587 - FEED THRU (SHORT)
588 0020-20523 CAP, LAMP FEEDTHRU
589 0010-70254 ASSY 8" HEATER VCR W/2 TC'S
590 0010-21246 A101 HEATER (ASSEMBLY, NON-NTM ADVANCED 101 - 8")
591 0620-01164 CABLE ASSY 332CG 6"LG + 2.75" 15P-DSUB /
592 02-046223-00 Vacuum Gauge Assy
593 253B-11203 GATE VALVE
594 3030-05392 CNTRL FLOW MON SIGNAL PROCESSOR 1 CHAN
595 0140-09718 HARNESS, 1/2 ATM/BARO WxZ
596 0150-38434 CABLE ASSY, MICROWAVE INTERLOCK
597 0140-20502 HARN ASSY AC 2-PHASE DRIVER
598 0150-35547 CABLE ASSY-6PIN SPLIT DC PWR
599 0150-36947 UWAVE AUTO TUNER PWR CABLE
600 0140-20038 HARNESS ASSY DI/O INVERTER ENABLE CONTRO
601 10-10164-00  
602 60-00193-00  VACUUM, SWITCH, ATMP
603 0040-13658 CLAMP HEATER 1.18 DIA SFT MTR LIFT HTESC
604 0140-20139 HARNESS ASSY,TURBO ON/OFF CONTROL
605 0150-70047 CABLE NUET 2 GEN RACK 5500
606 0150-20238 CABLE ASSY.,LLA LED PWR
607 0150-20184 CABLE ASSY,SOURCE GND
608 - CYLINDER SENOR (NEW VERSION, NEED REPAIR CONNECT)
609 0100-35279 PCB ASSY, LOAD LOCK BEEPER
610 0090-76034 ASSY, SENSOR, WAFER PRESENT/WAFER SLIDE
611 0090-03823 ASSY, SENSOR, WAFER PRESENT/WAFER SLIDE
612 3060-01186 BRG BALL BSHG 1.0 BORE 1.56OD
613 - 51A31TCA2BA010 30TORR
614 0050-20813 GASLINE MFC BYPASS
615 0050-25198 GAS LINE, VENT CH D W/B UPPER W/ OD CH
616 0050-20961 GAS LINE, VENT CH D W/B UPPER W/ OD CH
617 0090-20003 SENSOR ASSY,VALVE SENSOR AND HARNESS
618 0090-20139 ASSY SENSOR WFR LIFT TOP MID/BOTTOM 1ea sensor Broken
619 - MAGNET SENSOR
620 - FILLAMENT 
621 79-109823-04 DOME LIFT MOTOR
622 45300141 Parker Veriflo Valve, 45300141, 955Y2NC/NCFSFFFREV
623 0090-76035 ASSY, SENSOR, WAFER SLIDE RECEIVER
624 0090-03822 OBSOLETE REPLACED BY 0090-03822
625 39-10138-00 Connector, Bulkhead, HN, F-F
626 0020-23160 BRKT WAFER SENSOR SM312CV2 MONOLITH COVE
627 0020-76522 PIN, DOWEL FRAME ALIGNMENT
628 - PEN
629 0020-28647 PIN SENSOR/GUIDE K3/P4 SOURCE
630 3550-01098 PIN DOWEL 3/8DIA X 1-3/4 LG SST 303
631 0021-09758 MANIFOLD, OUTPUT, DXZ
632   HOKE VALVE 
633 0020-21222 HOOP CD/PT 150 MM
634 0040-87211 BLANKOFF, 200MM MONOLITH
635 0020-70299 Flange Blankoff Orienter Port W/RGA Pos E
636 0020-70203 PLATE CHAMBER BLANKOFF
637 0021-21857 PLATE, MOUNTING, PNEU CYL/MOTOR LIFT
638 0150-20660 CABLE PC II RF MATCH TO CHAMBER
639 0020-22549 PLATE BLANKOFF MGN COUPLING
640 - 3 POS. GATE VALVE INTEG. KIT
641   SLIT VALVE DOOR CENTURA PDD E 38 (DB)
642 0020-20340 DOOR TRANSFER SLIT VALVE
643 683B-29016 MKS Throttle valve 683B-29016
644 - HARD DISK FAIL
645 - FD-253HS
646 0150-22043 CABLE ASSY, MFC TO CONTR BOX & SYST. CON
647 0140-20655 HARNESS ASSY  SERIAL/PARALLEL INTCON
648 0090-20108 ASSY, SENSOR CASSETTE
649 0150-20183 CABLE ASSY CHASSIS GND MDX SLAVE
650 0140-20183 HARNESS ASSY CHAMBER EMO
651 0050-76115 GAS LINE, TOP VENT, WIDE BODY
652 0050-08618 ADAPTER, BARATRON W/B SHUTTER @ 2 & 4 MI
653 - 2PHASE DRIVER BRCAKT
654 0020-21035 BRACKET SOURCE WATER LINE
655 0020-22263 ADAPTER PVD WATER LINES ON BOARD CRYO
656 0020-23487 BRACKET MOUNTING 2-PHASE DRIVER
657 0020-20149 PLATE H-SENSOR SOURCE
658 - BROW VALVE SCREW
659 0140-20039 HARNESS ASSY AI MUX CONTROLLER
660 0140-75335 H/A CD ADAPTER,PHASE I TO PHASE II,WATER
661 0140-20679 HARNESS ASSY RGA VALVE INTFC
662 0140-21314 HARN ASSY, LINE OVERTEMP, CVD ON ENDURA
663 0140-20741 HARNESS ASSY SOURCE COVER PVD
664 153D-15973   Valve, Throttle 153D, Heatable, MKS 153D-15973
665 15-053394-02 fork finger minimum contact
666 15-150214-00 N/A
667 0050-24855 ADAPTER CONVECTRON & BARATRON W/B PVD CH
668 0050-76319 WB, PRESSURE GUAGE ADPTR, CAJON
669 0040-20733 W/B BARATRON ADAPTER
670 0050-26707 ADAPTER ELBOW VCR TO MINI CF LONG ELBOW,
671 0050-24757 ADAPTER, PRESS GAUGES, SHTR, W/B CH AT 3
672 0020-21073 BLANK FLANGE TRANSFER W/RGA PORT 
673 0020-70223 PLATE CHAMBER MONOLITH
674 0020-40564 BLANK-OFF POSITION E&F NON-ENP
675 - GATE VALVA PLATE
676 0520-01011 ACTR VALVE 3 POS 8" GATE
677 0020-20512 Shld Htr RF Top
678 0040-20726 SHIELD,HTHU HEATER RF TOP
679 0021-21874 SHIELD, RF HEATER TOP, 1.574" SHAFT
680 - DC MOUNT KIT
681 0150-16166 C/A, SMIF-ASYST LPT2200 INTERFACE, LLA
682 0140-76362 HARNESS ASSY, W/ ORIENTER CH E LIFT INTE
683 0150-75008 N/A
684 0140-20649 HARNESS ASSY MFRM SMK SNSR INTCON
685 0150-21890 CABLE ASSY, WATER LEAK DET 2 GEN
686 0150-70162 CBL, SEC GEN RACK WATER FLOW INTLK
687 1341054A 4.5 FT MASTER AND SLAVE CABLE
688 1342795B SCT06509
689 0140-00334 HARNESS ASSY,LLA & LLB MODULE STD CNTRLS
690 0140-20366 HARNESS ASSY, L/L DOOR INTERLOCK, EXTERN
691 0140-70410 H/A SMIF ADAPTED WB LLA INTRCNCT PHASE I
692 0090-00768 LOADLOCK BRAKE INDEXER ASSEMBLY
693 0140-76294 HARNESS ASSY, 5-PHASE AC VHP
694 0140-76223 HARNESS ASSY, INTERCONNECT CH. 1/2
695 0140-70413 HarnessSMIF24VDCLickPaneltoPCB
696 0140-20688 HARNESS ASSY  STORAGE CH LIFT/COVER
697 0150-20716 CABLE ASSY FINAL VLV/INTLK DI REMOTE
698 0140-20603 HARNESS ASSY JUMPER
699 0620-01078 CABLE ASSY CONVECTRON CONTROL 11 FT
700 0140-35240 CA ASSY, WxZ CHAMBER
701 0140-20242 HARNESS ASSY EBARA PUMP EMO
702 0140-07702 HARNESS ASSY, WAFER SLIPPAGE W/B LLK ON
703 0150-20762 CABLE ASSEMBLY, CENTURA MAINFRAME, WATER
704 0140-20710 HARNESS ASSY PCII CHBR MATCH INTERLOCK
705 0140-20709 HARNESS ASSY  EXTERNAL C & D PCII INTERC
706 0140-20694 HARNESS ASSY PVD SHUTTER SENSORS
707 0150-20640 CABLE ASSY 2-PHASE DRIVER OUTPUT
708 0140-21528 HARNESS ASSY, H20 FLOW CH1-4
709 0140-76222 HARNESS ASSY, INTERCONNECT CH. W/B
710 0150-36084 CABLE ASSY,OVERTEMP SWITCH TxZ,MCVD
711 0140-20501 HARN ASSY DRVR +24/+5 POWER
712 0020-20835 BRKT MTG PLATE DISK DR
713 1360-01048 XFMR PWR MULTI TAP PRI 24 VAC SEC34A 50
714 - VA22-XX2-B15
715 - 1GB SCSI Flash Drive
716 - HARD DISK
717 - 5PHASE STEPPER MOTOR 
718 - PANASONIC AC SERVOMOTOR  MSM0ZZAIEU
719 0090-75010 2PHASE STEPPER MOTOR (WITH 0090-75010)
720   TRANSFORMER 
721 0190-13041 VALVE, TWO STAGE INLINE NW40 316L
722 0040-32695 CAVITY APPLICATOR UWAVE MCVD
723 0040-07564 CAVITY, APPLICATOR, UWAVE MCVD
724   DC POWER CABLE CONNECT
725   PANASONIC  DV-707
726   MO VALVE 
727 - 5PHASE STEPPER MOTOR  DFUS14W
728 0020-21825 PLATE DOOR
729 0140-70414 HARNESS ASSEMBLY, SMIF EMO INTERCONNECT
730 0150-21778 CABLE ASSY MF, PNEU DIST TO GAS INTLK,
731 0140-02655 H/A, SMIF WB LLB INTRCNCT PHASE 2 FACIL 
732 0150-76156 CABLE ASSY, INSERTION FLOW SENSOR
733 0150-22451 HARNESS, 13.56MHZ MATCH INTEGRATION
734 0140-75000 craHARN ASSY LOAD LOCK DOOR SENSORS
735 0140-70112 HARN ASSY, PRI GEN RACK PWR SPL DIST
736 - Control Valve
737 0140-20693 HARNESS ASSY NEW MAIN CONNECT SHUTTER
738 0140-20257 HARNESS ASSY., F/A LOAD LOCK
739 0140-20651 HARNESS  GEN RACK SMK SNSR INTCON
740 0150-10047 CABLE ASSY, UPC INTERCONN
741 0150-10049 CABLE ASSY, UPC FEEDBACK D-CONN
742 0150-76770 CABLE ASSY INSERTION FLOW SENSOR MCVD PH
743 0140-20361 HARNESS ASSY, WATER LEAK DETECTOR EMO
744 0150-20639 CABLE ASSY 2-PHASE DRIVER INPUT
745 0140-20563 HARNESS ASSY OVERTEMP DEGAS
746 0140-20092 HARNESS ASSY, 5-PHASE DRIVER TRANSFER
747 0140-20054 HARNESS
748 0140-20056 HARNESS AC 5-PHASE
749 0140-70441 HARNESS ASSEMBLY, SMIF EMO INTERCONNECT
750 0140-21983 HARNESS ASSY, 24V KICKPLATE TO PCB
751 0150-02955 C/A, INTRLCK TO KICKPLATE JENOPTIC LLB
752 0150-20378 CABLE ASSY, SMOKE DETECT MAINFRAME
753 0150-02953 C/A, INTRLCK TO KICKPLATE JENOPTIC LLA
754 0150-22296 CABLE ASSY ENDURA INTEGRATED SMIF 50' RS
755 0150-22813 CABLE ASSY, SMIF PCB TO KICKPLATE, LLA
756 0150-22814 CABLE ASSY, SMIF PCB TO KICKPLATE, LLB
757 0150-00882 FLOW SENSOR CABLE A/C/E POS CHAMBER HX
758 0150-00881 FLOW SENSOR CABLE
759 0150-20470 CABLE ASY,COAXIAL 400KHZ
760 0150-76315 CABLE ASSY, COAXIAL 13.56 MHZ
761 0150-21686 CABLE ASSY, HN(M), STR TO N(M), STR RG-217 52FT 
762 0150-20181 CABLE ASSY,EMO INTERCONN SYS. AC/MAIN FR
763 0150-20075 Cable Assy EMO Interconnect
764 0150-20260 CABLE ASSY,CRYO UPS UMBILICAL
765 0150-21665 CABLE ASSY, N(M), R/A TO N(M), STR RG-21 
766 0050-83207 HOSE ASSEMBLY HEAT EXCHANGER 1/2 DIA 10FT , NEW 
767 0190-13325/13321 CABLE, 75' UMBILICAL, HTESC
768 0150-21666 CABLE ASSY, HN(M), R/A TO SQ(M), STR RG-393 52FT
769 0150-21667 CABLE ASSY, HN(M), R/A TO SQ(M), STR RG-
770 0190-70059 PURCH SPEC 45FT NUDE ION GAUGE CABLE
771 0190-03283 PURCHASE SPEC. 75' NUDE ION GAUGE CABLE
772 0150-21221 CABLE ASSY24V POWER INTCNT 52FT 
773 0190-21305 PURCH SPEC 60FT NUDE ION GAUGE CABLE
774 0150-70148 CABLE ASSY CHAMBER DC SOURCE INT
775 0150-20209 CABLE ASSY., FINAL VAL EXTERNAL INTL
776 3400-01084  HOSESTEEL FLEX W/ELBOW 39"LE 
777 0150-76288 CABLE ASSY 50FT DC SOURCE - MDL
778 8112463G050
8112463G500
CTI CRYOGENICS
779 0140-21408 
0150-20197
HARNESS ASSY PVD W/B CH INTERCONN Harness Assy TC Interface
780 0150-20262 CABLE ASSY DEGAS AC
781 0620-01079 CABLE ASSY CONTROLLER ONBOARD 50'L SP-CIRCCONN M/F
782 0150-21695 CABLE ASSY, ICE DC SOURCE, QDS, UHF, 75'
783 0150-20389 CABLE ASSY, RFR POWER I20.0LONG
784 0150-21939 CABLE ASSY,ENDURA INTEGRATED ASYST SMIF
785 0140-16128 H/A, SMIF-JENOPTIK PLC OUTPUT
786 0140-25820 N/A
787 0150-21936 CABLE ASSY, ENDURA INTEGRATED SMIF - LLA
788 0150-76116 ROBOT CALIBRATION CABLE
789 0150-21241 CABLE ASSYEMO FRONT BEZEL INTCNT65FT
790 0140-11619 HARNESS ASSY WAFER SLIPPAGE W/B LLK ON
791 0140-76877 H/A, SMIF INTEGRATED WB LLA INTRCNT PHAS
792 0140-20944 HARNESS ASSY WAFER SLIP W/B LLK ON ENDUR
793 0150-76821 CABLE, HEATER AC, HTESC, POS 1,2,3,4,C &
794 0150-03091 CABLE ASSY, MOTOR CONTROL, CWXZ
795 0140-36020 N/A
796 600-1002-P50 RS485 CABLE
797 600-10003-P1 RS485 CABLE
798 600-1002-P30 RS485 CABLE
799 600-1002-P10 RS485 CABLE
800 0140-21104 HARNESS, SMIF INTERFACE, PCB PWR
801 0140-21107 HARNESS, SMIF I/F, CASSETTE IN PLACE
802 0620-02271  CABLE ASSY CONTROLLER ONBOARD 15'L 9P-CIRCCONN M/F 
803 - 3POIONT CONTECTOR SENSOR
804 0150-76461 CABLE,COAX,COUNTERMATCH,DXZ
805 0150-76458 CABLE, 79 FT RF COAXIAL 13.56 MHz, W/CON
806 03-00288-03 Novellus RF Cable CA57
807 8115161G020 SIGNAL CABLE
808 0140-04267 HRNS ASSY MF INTERCONNECT
809 0190-21841 CABLE ASSY,SQS(M)R/A TO SQS(M)STR.W/INTL
810 0150-21692 CABLE ASSY. SQ RIGHT ANGLE W/ INTERLOCK
811 0090-20129 HOIST UPDOWN CABLE
812 0150-36085 CABLE ASSY, GATE VALVE, CLOSED SW, TxZ, MCVD
813 0050-25326 ADAPTER, ELBOW TURBO PUMP PCII @ C OR D
814 0050-76884 EXHAUST LINE, NBLL, CENTURA COMMON M/F
815 0020-60772 RING
816 0040-23670 BRACKET, WATER FLOW
817 0190-35864 AC INOUT CABLE, 2015P-MS CONNECTOR
818 - Housing Gate Valve
819 - Gate valve Sealkit Plate
820 CIRKIT 3P15A (WITH 0020-23958)
821 - 2POSITUIB 45A
822 - 1POSITION 60A
823 - 1POSITION 40A
824 - 1POSITION 15A
825 - 2POSITION 15A
826 - 3POSITION 20A
827 - 3POSITION 50A
828 - 3POSITION 30A
829 - 1POSITION 20A
830 - 1POSITION 15A
831 - 2POSITION 15A
832 - 3POSITION 40A
833 - CIRKIT JD 35K
834 - CIRKIT KD 35K
835 0020-21089 COVER, CHAMBER INTERCONNECT BD.
836 - EH 550
837 - BuSS Bar
838 0040-02653  LANE CLOSURE
839 - CC040329
840 1400-01047 SNSR SMOKE DETECTOR SENSING HEAD
841 CIRKIT UPL111-1-64-403
842 CIRKIT CA3-BO-42-650-121-D
843 CIRKIT 3POSITION 15A
844 CIRKIT 3POSITION 30A
845 05-134263-00 200mm Novellus Speed HDP ESC
846 0010-76097 Monitor Base Assy
847 0021-35744 PLATE,BLOCKER,TXZ 200MM
848 0020-20691 PEDESTAL CD/PT WAFER200 MM
849   6" PEDESTAL
850 0021-76708 PEDESTAL CD/PT WAFER 150 MM
851 0020-70459 PLATE, CONVERSION ROBOT TRANSFER CHAMBER
852 0020-21218 BASE CD WAFER 200 MM
853 0020-24230 BASE PRECLEAN 2
854 0020-42082 PLATE, PUMPING, 8 FC, WXZ
855 0050-20237 NT LINE CH 4
856 0050-20257 GAS LINE # 1 CH4, PROCESS, MFC15
857 0050-70078 GAS LINE PRCS CH 4 W/B UPPER
858 0051-12673 AMAT 0051-12673 WELDMENT FOR FACILITY WO6225-2 LOT OF 2 
859   CH 4  Gas Line MFC 5.6
860 0010-13445 Base
861 0150-20061
0090-20020
0150-09884
cable
862 0020-75998 BRACKET, SUPPORT, WBLL FASTER WAFER MAPP
863 0020-20896 REFLECTOR HEATER, 5/6", DEGAS
864 0020-42287 PLATE,PERF 8 EC WXZ
865 0040-31980 GAS BOX EC WXZ
866 0040-20549 ELBOW CRYO ON BOARD HT HTR
867 - SEIKO STP-H200CV
868 - SEIKO STP-H200C
869 0020-40706 108383 338 9343390
870 0020-40705 108383 158 S98857C
871 0020-40704 11764601
872 0190-13321 POWER SUPPLY, 1.5KV DC, HTESC
873   E-chuck Power Supply
874 - IONGUAGE POWER SUPPLY
875 0010-70385 wASSY, VGA VIDEO MONITOR THRU THE WALL
876 0010-13524 SIDE LOCAL MATCH ASSY, BALANCED COIL
877 0020-09533 HANDLE, GAS BOX
878 0200-20492 INSULATOR, RCPT, RIGID SUPPORT, VECTRA-
879 0140-21407 HARNESS ASSY 2MHZ RF MATCH/WTR FLOW INTL
880 0040-86016 GAS FEED BLOCK, TOP CLEAN, 200MM ULTIMA PLUS, HDPCVD
881 - Entegris Filter
882 - UNIT MFC NF3 2SLM
883 0100-76013 PCB ASSY, CENTURA CHAMBER A/C INTERCONNE
884 0100-76014 PCB ASSY, CENTURA CHAMBER B/D INTERCONNE
885 0190-06279 CARD, DIGITAL DNET DIO 391-4
886 0020-70285 8" BUFFER BLADE FROG LEG
887 0020-28622 ROBOT BLADE 8" HTHU TRANSFER
888 0010-76317 CENTURA INDEXER MOTOR ASSY.
889 0010-76859 DETECTOR ASSY, LEFT FAST WAFER MAPPING
890 3020-00573  
891 3300-05482 FTG TBG EL 3/4T X 3/4MNPT SST
892 - TC Guage DV 
893 0100-00975 ASSY PCB STEPPER CONTROLLER2
894 0020-22841 RF ROD, PRECLEAN
895 0190-01404 SERIPLEX VME CONTROL BOARD SPXVME6U1V2
896 0100-35124 PCB,SERIPLEX I/O DISTRIBUTION
897   MFC 8160 (Pin Board Type) N2 20 (Working)
898 - Z512 STEC MFC N2 100SCCM
899 0660-01809 SQUARE D VME 30299-083 SERIPLEX BUS VME 6U1V2
900   CQ2Z63-YVR07-20
901 0020-18357 ARM, LIFT, HDP-CVD
902 0200-20163 INSULATOR, LAMP COVER, LEFT
903 0090-05790 INDEXER BRAKE ASSY ENDURA
904 0010-02171 ASSY, RIGHT HAND PIVOT AND BEARING, HP+/
905 0021-01333 CAPTIVE SCREW LIFT PLATE 200MM TXZ
906 0100-20086 wPCB ASSY,WAFER MAP LED
907 0090-20036 MOTOR MODIFIED ORIENTER
908 0100-09287 CENTURA APC MATRIX BD
909 0090-20120 ELECT ASSY LIFT MOTOR
910 1080-01131 GEAR BOX REDUCTION 7.5:1 1/2" DIA. OUTPU
911 3030-04879 SNSR FLOW INSERTION SST
912 - SS-4-VCR-1-00032
913 0150-05412 CABLE ASSY, HEATER 200MM HP TXZ
914   FDD
915 0020-23046 ADAPTER 13" SOURCE WIDE BODY CHAMBER
916 0190-18427 VALVE,TURBO ISO,FITTING AT 180DEG ULTIMA
917 0680-01187 CB MAG THERM 3P 600VAC 250A INTCHG TRIP
918 0200-20331 COVER RING 8" B101 CERAMIC, 10.75" OD
919 0040-23753 Cover
920 - Ceramic Top Ring
921 0020-22647 SHIELD, COHERENT UPPER 
922 0200-10144 ISOLATOR,PUMPING PLATE,DXZ GECO
923 0150-76318 CABLE COAXIAL
924 0020-22648 CLAMP SHIELD COHERENT LOWER 11.3
925 0190-18122 RF CABLE ETO BIAS ULTIMA HDP-CVD
926 0020-21468 CLAMP SHIELD 5 & 6
927 - CDQ2WB50-G0476-75
928 - NCDQ2WBS63-G0639-50
929 02-109457-01 TOXIC GAS DETECTOR
930 02-048752-00 N/A
931 02-282305-00 Multiple Pedestal Position
932 - Novellus Doom Assy
933 - Gate Valve
934 27-255873-00 MERCURY 3013 MATCH
935 27-258087-00 Controller, NTM 500, Detachable Fiber
936 - VAT, F03-112494145 03009-NA24-1001
937 03-252573-00 N/A
938 19-10094-00 PULLY
939 19-134725-00 PULLY
940 16-103973-00 SCRN,TURBO PUMP, 8 INCH,ALUM
941 03-258416-00 PCB,  7/8  CHANNEL  GAS  BOX  INTLK
942 02-116197-00 Detector Power Controller
943 05-118790-01 Cable Interface
944 27-10348-00 VALVE, NOVEL 
945 27-10324-00  
946 15-105432-05 Screen ,Louvered,TMP
947 15-146603-00 Hub,200mm,Pedestal Conc Lift 35CW
948 15-119981-00 N/A
949 - ET-202 (STS)
950 - Differential Output Amplifier P>100MT
951 02-057438-27 LPB Assy, Speed-S Rev.7
952 38-138582-00 AC, PWR CORD, IEC 3 METERS
953 - 99D0362
954 10-10350-00 CAL WELD
955 1006329 Verity Model SD2048DL
956 02-150749-00 ATC Ass'y
957 02-253272-00 RF MATCH,HI-PWR STD,TUNABLE,C2SPD.
958 1270-01475  SW FLW H20 1"FNPT 0-20LPM 3500 PSI Dual 
959 1005972 Verity Model PC,NVLS,30mm
960 02-053788-00 Assy,PNEU,SED-S 7/8 6B
961 02-029723-00 Assy,HPM/GAS SHTDWN Box,SPD-S
962 03-166293-00 Assy,PCA,TOGGLE Clean, HDP
963 03-251777-00 GE FANUC IC200PWR001A,IC200MDD845D,
IC200ALG431 2PCS,NOVELLUS BD
964   ATP-15B
965 0020-26967 PC II GAS TRENCH COVER
966 0020-21667 CLAMP SHIELD 8 WAFER
967 0020-23074 SHIELD TIN LOWER SST 8 WAFER
968 0020-29161 SHIELD, 8" CLAMP TYPE, SST
969 0020-26588 SHIELD 8" PCII @C & D
970 0020-21665 SHIELD AL/TI 8" WAFER (WITH 0020-27710)
971 0020-23043 SHILD TIN, UPPER 8 INCH WAFER
972 0020-23277 SHIELD LOWER, SST, 8 101% TIN
973 0020-22499 SHIELD, COLLIMATOR LOWER 8"
974 0020-29344 SHIELD 8 101 .190 THK AL 3 SPRTS VECTR
975 0020-29343 SHIELD CLAMP, DARKSPACE .727 TALL VECTR
976 0020-25077 SHIELD  LOWER 8 101 G-12 SST
977 0020-22498 SHIELD, COLLIMATOR UPPER 8
978 0020-22509 CLAMP RING AL/TI 8"JMP REDUCED EDGE 
979 0020-23585 SHIELD/LOWER 8 WAFER G-12
980 0020-25920 SHIELD LOWER 8 G12 SST
981 0020-24746 SHIELD LOWER HIGH COND 101 AL 8
982 0020-24531 SHIELD ADAPTER G-12 SST
983 0020-47723 SHIELD LOWER, PVD CLEAN TUNGSTEN (W) / D
984 0020-22494 HONEYCOMB COLLIMATOR 1/2 HEX 1:1  8
985 0020-47722 SHIELD UPPER, PVD CLEAN TUNGSTEN (W) / D
986 0020-25730 shield upper g12 dbl knee sst
987 0040-21178 PRECLEAN II BELL JAR
988 0020-23041 Clamp Shield 8" Wafer
989 0200-07448 HOUSING, DOUBLE RF CONN, 300MM SIP ENCOR
990 0020-23168 COVER RING  SST  8 101 COVERAGE
991 _ CLAMP PEDESTAL
992 0020-24804 COVER RING SST 8 101
993 0020-23023 REDUCED EDGE CLAMP RING 6"" TI
994 0020-28754 PEDESTAL COVER 8
995 0021-20610 PEDESTAL, 8"A101(FLAT)-CUST PRVD FLM SPR
996 0020-20061 SENSOR BRACKET
997 0020-24435 8 PC II JMF EXT INSULATOR TI PEDESTAL
998 0200-20285 PEDESTAL COVER UPPER 8" B101 V
999 15-032503-00 RING,INSULATOR
1000 0020-00632 Shadow Ring
1001 0200-00622 Outer Ring
1002 0200-00624 Purge Ring
1003 0020-20462 VIEWPORT COVER TRANSFER CHAMBER
1004 0020-27191 CLAMP RING 8 TIN SNNF 11402ARS ACAM SST
1005  0020-48987 COVER PEDESTAL
1006 0020-24912 N/A
1007 0020-27455 DISK  8 ADVANCED 101 SHUTTER
1008 0020-27842 PEDESTAL 8 PINLESS 101% AL COVERAGE
1009 0020-22237 cover ring 8" 101% TIN coverage
1010 0020-24914 CONVER RING
1011 0020-24913 PEDESTAL SST 8 101 COVERAGE
1012 0021-20718 PEDESTAL COVER LOWER 8 B101 REV 2.1 SST
1013 0150-70038 RG 217U RF CABLE
1014 8112099G017 CABLE, ON_BOARD POWER
1015   TARGET
1016 0020-21664 INSULATOR SOURCE 13
1017 0200-09072 SHIELD 200MM
1018 0020-22975 COVER RING 8" B101 CERAMIC, 10
1019 0020-22547 ADAPTER 11.3 SOURCE WIDE BODY CHAMBER
1020 0020-22671 ADAPTER,13 SOURCE SHUTTER CHAMBER
1021 0020-23042 ADAPTER SOURCE 13
1022 0020-21668 ADAPTER 13 SOURCE HIGH NECK,
1023 0020-21467 ADAPTER SOURCE 11.30
1024 0020-25938 ADAPTER EXT PCII, W/CRYO BELLJAY
1025 0020-02513 SHIELD, RF EMISSIONS, SIDE, SIP TTN SOUR
1026 0020-02514 SHIELD, RF EMISSIONS, CRYOSIDE, SIP TTN
1027 0020-02515 SHIELD, RF EMISSIONS, SIDE, SIP TTN SOUR
1028 0040-07287/00721 PLATE, RF EMISSIONS GROUNDING, SIP SOURC
1029 0020-22982 ADAPTER TIN 8 WAFER CHAMBER 16
1030 0040-21377 ADAPTER G-12 WB M3 SCREW FLAT TARGET COM
1031 0040-21705 ADAPTER,HI-PWR TTN,WB,H2O COOLED,TOP/BTM
1032 0040-03932 ADAPTOR UPPER, SIP-CU 290MM, WATER COOLE
1033 0020-22950 ADAPTER, COLLIMOTER SOURCE 13"
1034 0040-22274 ADAPTER, REV 4.3/4.2 VECTRA IMP
1035 0040-20705 ADAPTER,HI-PWR TTN,WB,H2O COOLED,TOP/BTM 
1036 - Blade Assy 8"
1037 0021-23836 PLATE, LEVELING, 200MM HEATER, HP+ TXZ
1038 0020-24385 SHIELD UPPER 5/6" 101 SST/MATL
1039 0150-20801 CABLE ASSY 75FT WATER LEAK GEN RACK INTC
1040 0150-20802 CABLE ASSY 75FT SMK DET GEN RACK INTCNT
1041 0150-04642 CABLE ASSY, 2-PHASE DRIVER SIGNAL I/F 75
1042 0200-18081 COVER LOW PROFILE HDP-CVD,ULTIMA
1043 0021-18436 Cover Ring 8"
1044 3020-01070 CYCL PENUMATIC 2-1/2 BORE .787 STROKE
1045 0020-29582 GUARD, LEAD SCREW
1046 0020-20818 COVER PANEL PNEUMATIC DISTR BD
1047 - FILTER DIFFUSER ISO NVV25 FLANGE 1/4" MALE GASKET SEAL WG3D25LR2
1048 0021-36689 PLATE LEVELING, HEATER, TXZ
1049 0020-22846 GAS TRENCH COVER
1050 0020-26312 Shield Upper 8" Durasource TTN SST
1051 0020-26311 Shield Lower 8" Dura TTN SST
1052 0020-22646 CLAMP, SHIELD, COHERENT UPPER 11.3.
1053 0020-22652 6" Hex Foil Collimator Plate 
1054 0020-22892 PIN, PRECLEAN PEDESTAL.
1055 0240-26778 KIT, SHIELD CLAMP, DARKSPACE, REV 4.5-VE
1056 0020-22852 SHIELD,8, PRECLEAN
1057 0020-24243 SHIELD UPPER SST FLAME SP AL
1058 - B4Y9612-01 MLAKK105501
1059 0021-20645 SHIELD, OUTER CONTAINMENT, HI PWR G3
1060   IMP PROCESS KIT SHILED
1061 0040-63457 WATER BOX TXZ 200MM CIP
1062 - CDG1FA63-S4268-100
1063 - ManiFold Box(JMP Box)
1064 Cable 8147061G001
1065 Cable 8147064G001
1066 0140-00246 HARNESS ASSY,WXZ WALL/LID WATER FLOW SEN
1067 0150-20580 CABLE ASSY 2-PHS DRVR OUT MTR
1068 0150-20509 CABLE ASSY,LLA WAFER MAP CASS.SENSE
1069 0150-20584 CABLE ASSY LOFT CH 3 4 C& D
1070 0150-20583 CABLE ASSY, MTR LIFT CH 1 & 2 DIST
1071 0020-13336 COVER, ORIENTER CHAMBE
1072 0140-20866 HARNESS ASSY.
1073 0150-76367 N/A
1074 0150-20257 CABLE ASSY, MAIN AC SPARES
1075 0150-21249 CABLE ASS. 2-PHASE DRIVER 
1076 0140-20504 HARN ASSY LIFT UP/DOWN SENSOR
1077 ACE2000128 N/A
1078 - B4Y9611-01 MLAKK104114
1079 0010-76764 ASSY, OTF RECEIVER, 200MM BANK
1080 3300-09255 FTG TBG 4-WAY CROSS NW50-NW25 SST 
1081 0200-20216 PIN, COVER RF SCREW, VECTRA IMP
1082 0020-70529 BRKT WATER SWITCH
1083 0190-25635 SPECIFICATION, SOFT-PUMP ANGLE VALVE, NW
1084 0190-01546 .08 GPM SST WATER FLOW SWITCH (TWO PORTS
1085 0050-22087 VENT LINE AR INLET #1 CAJON ONLY
1086 0150-20510 CABLE ASSY,LLB WAFER MAP/CASS. SENSE
1087 0040-02798 DUPLEX CLAMP, HP ROBOT WRIST, NON
1088 0100-20040 REMOTE SUPPLY DISTRIBUTION PCB
1089 0620-01092 COLD HEAD CABLE
1090 0270-20082 TOOL 6" HOOP ADJUST W/B CHB
1091 0270-70047 6" LIFT TO ROBOT CAL PLATE, REVISED
1092 0270-20058 WAFER,TEST ORIENTOR 8"
1093 0010-38424 PLATE ASSY, TUBE LIFT, DXZ
1094 0150-21772 CABLE ASSY, GASBOX TO GASBOX INTERCONNEC
1095 - SELAKIT GAS KET
1096 - SELAKIT GATE
1097 0041-04443 N/A
1098 0242-70466 KIT, HEATER HOSE CH 2, CH 3, CH D, SST
1099 0010-76087 WAFER VALVE ASSY. CH 2,4,& D
1100 0010-76765 ASSY, OTF EMITTER, 200MM BANK
1101 0270-76128 DC BIAS POST WB ALIGN JIG
1102 0021-17725 DISK, SNNF, SHUTTER, TA/BESC, AL-APRAYED
1103 0190-75080 BRG BALL 8.62 ODX8 ID X .3125 W 4-PT W/C
1104 0020-22844 PEDESTAL SHIELD, 8 PRECLEAN
1105 0010-70823 ASSY, SMC VLV 2.5" BORE SRTK 200003SNSR
1106 0020-76473 BRKT, GEN RACK, FLOOR MOUNT
1107 0021-70378 MANIFOLD,WATER,INPUT,TXZ
1108 - DV707S200A(PANASSONIC)
1109 0040-75117 ENCLOSURE, VALVE, REAR, RIGHT
1110 0040-23559 BRACKET, RF MATCH MOUNT
1111 0150-18061 CABLE ASSY, HTR CARTRIDGE, ULTIMA HDP-CV
1112 0020-18280 SHAFT, DRIVEN THV HDP-CVD
1113 0040-22487 FINGER EXTENDED LIFT HOOP 8" B101
1114 0020-76954 BRACKET CLAMP 1 1/2-2 1/2
1115 3880-01311 WSHR LKG SPLIT .190ID X .334OD
1116 0020-22737 WEIGHT, 200MM CASSETTE CLAMPING
1117 3700-02717 SLIT VALVE DOOR SEAL
1118 0090-75024 ASSY, FAST COOLDOWN AIR CYLINDER
1119 0020-18279 SHAFT, SIDE THV HDP-CVD
1120 0021-42604 N/A
1121 0020-21221 HOOP CD 200MM
1122 - NETWORK CABLE 75FT
1123 0020-22909 PEDESTAL SHIELD, 6" PRECLEAN
1124 0020-34444 FACEPLATE, DXZ, DCVD
1125 0020-24641 6" JMF TIN/SST CLAMP RING
1126 0020-24386 COVER RING 6 101 SST/MATL
1127 0150-00479 CABLE ASSY LIFT HEATER CHAMBERS B/C SACV
1128 0150-18896 CABLE ASSY 75FT DC SOURCE - MDL(OEM NEW)
1129 0150-21340 CHAMBER 2 INTERCONNECT
1130 0150-21234 CABLE ASSYCHAMBER 1 INTCNT 50FT
1131 0620-01254 CABLE NETWORK TERM I/F FOR ON-BRD CRYO 3
1132 0150-21342 CHAMBER 4 INTERCONNECT, (EMC COMPLIANT)
1133 0021-22090 PLATE, FRONT SKIN, AMAT LOGO, PAINTED
1134 0021-22084 PLATE, FRONT SKIN, ENDURA HP, PAINTED
1135 1010-01116 LAMP HALOGEN 120V 800W
1136 0060-00964 VALVE ASSY, THROTTLE MXP
1137 0020-40085 MOUNT,BRAKE INDEXER
1138 0040-23558 CLAMP, RF MATCH MOUNT
1139 0020-21007 BLOCK, WALL CLAMP
1140 0020-75890 CLAMP, PIVOT, EXTENDED REACH WRIST
1141 0010-76858 DETECTOR ASSY, RIGHT FAST WAFER MAPPING
1142 0190-00879 VALVE ISOLATION 90DEG ELBOW NW-40
1143 3620-02332 KYPD REMOTE W/CABLE FOR ONBOARD CRYO PUM
1144 0880-01004 ENCDR, OPTICAL
1145 0990-01004 KT HTR TAPE END SEAL FOR SLF-REG HEATING
1146 - KAYDON BEARING
1147 0030-20041 SOURCE COVER, PVD DEGAS 13 SOURCE
1148 0190-13035 LAMP, BAKEOUT WITH LUGS
1149 0150-20537 CABLE ASSY,PUMP CONTROL CH C
1150 0150-20197 HARNESS ASSY, TC INTERFACE
1151 0010-00865 BAKEOUT LAMP CLAMP ASSEMBLY
1152 0150-09607 CABLE ASSY,FLOW SWITCH, CVD, SST
1153 - A3723-9215
1154 1200-01081 AMAT RLY CNTOR 3P 600V 32A,RES 45A,NONRES 1200-01081
1155 0242-76611 KIT, ELEC, PER HTESC PVE CHAMBER, ENDURA
1156 0680-01258 CB MAG THERM 1P 240VAC 10A BOLT-ON QOB-T
1157 0680-01207 CIRCUIT BREAKER 2P 15A
1158 0020-34112 PLATE,REFERENCE,INDICATOR
1159 0190-21067 LOADLOCK DIFFUSER
1160 0020-28946 SPACER, SOURCE STAND-OFF, VECTRA IMP
1161 0020-20123 HEATER, ISOLATOR CERAMIC
1162 0020-23352 DISK HEATER
1163 0020-20511 HUB HTR INSULATOR
1164 3060-01233 BRG   SNAP RTNR .250ID X .75OD DBL SHIEL
1165   VALVE BLANK PLATE ASSY FOR SMC DOUVBLE
1166 3870-01281 VALVE BLANK PLATE ASSY FOR SMC
1167 0090-20033 SENSOR ASSY,VALVE SENSOR AND HARNESS
1168 3500-01153 NUT LOCK NO 6 SST
1169 0020-29342 NUT RF FEEDTHRU .250" WIDE VECTRA IMP
1170 0020-28889 BLANK-OFF ADAPTER, GASLINE
1171 3780-02265 SPR   CPRSN 1.25FL X .300OD X
1172 0020-29975 BAR RF CONNECTOR .125"L SHLDR VECTRA IMP
1173 0020-07375 BLOCK, GROUNDING BUTTON SUPPORT
1174 0020-22805 PLATE ADAPTER CLAMP WIDE BODY CHAMBER
1175 0020-20522 WSHR,INSULATOR LIFTER
1176 0020-25897 TUBE INSULATOR, 3.60"
1177 0020-26577 TUBE INSULATOR 1.60"
1178 0200-09716 PIN, LIFT, HEATER, WxZ
1179 0020-28744 PLATE, COVER
1180 0020-75982 HT ESC SPRING GRAND
1181 3220-01051 CPLG FLOATING JOINT 1/2-20 UNF 1061 OD
1182 0020-05750 PLUG, W/B LOADLOCK, ENDURA INTERFACE
1183 0020-21336 BAR, SUPPORT TRANSFORMER
1184   SPACER 2MM MAGNET ROTARY FEEDTHRU SHIM
1185 0021-20207 SPACER 3.5MM MAGNET ROTARY FEEDTHRU SHIM
1186 0020-27885 SHIM, MAGNET ASSY, .50MM, SST
1187 0020-21863 SHIM,ROTARY FEED THRU .06 THICK
1188 0020-21804 SHIM,TIN ROTARY FEEDTHRU
1189 0020-27886 SHIM, MAGNET ASSY, .75MM, SST
1190 0020-28773 RING CLAMP, SHIELD INTERNAL
1191 0020-20274 CLAMP HOLDER, SOURCE
1192 - PROCESS KIT, CONSUMABLE KIT
1193 0190-35524 ASSY, PNEUMATIC, MAINTENANCE CONTROL
1194 - RGA ALVE
1195 0010-40155 ASSY, WAFER SENSOR LOW PROFILE TC
1196 0150-36097 C/A MFC ADPTR W/PURGE/SHUT-OFF,9PIN D:CA
1197 0020-28743 BLOCK, WATER
1198 0040-05142 WELDMENT, HEATER CONN HPTXZ 
1199 - NVJ324 WAY VALVE
1200 0020-20484 HUB END LAMP COVER
1201 0040-20054 HTR GAS LINE
1202 0040-20055 FEED THRU ADJ AR
1203 0040-21838 BRACKET, VCR CROSS HEATER BYPASS
1204 0020-16091 BUTTON, REST, PEDESTAL, TIN COATED
1205 0020-29303 BRACKET, SOURCE GUIDE, VECTRA IMP
1206 0020-13999 BRKT, SOURCE ALIGNMENT PIN
1207 0020-22551 COLLIMATOR,BRACKET GUIDE SOURCE
1208 0020-20651 BRACKET GUIDE SOURCE
1209 3300-02263 FTG RLF VALVE VENT APTR CRYOPUMP AL
1210 3690-03071 SCREW
1211 3690-02978 SCR CAP SKT HD 6-32 X 7/16L
1212 3300-01983 FTG TBG INSERT 3/8OD X 1/4ID S
1213 0150-00796 CABLE INTERLOCK, FAN ROTATION
1214 0021-22011 TUBE, FLANGED, HEATER LIFT BEARING, BESC
1215   N2 PURGE KIT
1216 0190-09312 wPCB ASSY VME CPU SYNERG
1217 3300-01405 FTG, REDUCER KF-50 KF-40
1218 0020-20753 PLATE POWER SUPPLY CORD STRAIN RELEIF
1219 0020-20416 PANEL,BLANK-OFF,PLUG,RF GEN, CABINET
1220 0020-76699 PANEL AC 30A OUTLET
1221 0200-20000 LAMP, BAKE OUT (0020-20488 WITH CLAMP BAKE OUT LAMP)
1222 0020-70822 BRACKET, COMMON CONNEC- TOR
1223 0690-01583 FLG 1-1/3 OD CF BLANK
1224 BARTRON 750B12TCD2GA
1225 BARTRON 750B13TCD2GA
1226 - 750B11TCE2GK
1227 0020-20617 BRACKET HANDLE
1228 0010-21558 ASSY PNEUMATIC MNFLD PUMP I/F
1229 0040-20056 ADAPTOR ELBOW .25VCR TO MINI CF, GAS LIN 2ea Short
1230 - MAGNET SENSOR
1231 0200-35780 QUARTZ PIN, STANDOFF, COOLDOWN
1232 0030-70046 MACHINING, BRKT CLAMP SOURCE
1233 0020-23836 PLATE ADAPTER CLAMP G-12
1234 0020-22906 PIN, PRECLEAN PEDESTAL
1235 0020-24236 CLIP SPRING PC II ANTENNA DOWELL
1236 0020-24018 PIN ANTENNA PC II POLI SI, 200MM ENDURA
1237 0190-36174 SEAL METAL RING IS 4.618 CSD .135
1238 0020-20488 CLAMP BAKEOUT LAMP
1239 0020-42317 SCREW BLOCKER VENTED EC LID WXZ
1240 0020-42316 SCREW PER PLATE VENTED EC LID WXZ
1241 0200-35596 WINDOW,SLIT AL203
1242 - TUNGSTEN VIEWPORT
1243 0020-22839 PIN, PRECLEAN LIFT
1244 0020-29640 REST BUTTON,ADV. 101,3.4 MM, FULL-COV.,T
1245 - TXZ LIFT ASSY HARDSTOP
1246 0680-01202 CB K-FRAME PLUG NUT LOAD SIDE
1247 0140-70069 JUMPER HARNESS, SOURCE 5-PHASE STEPPER
1248 - MAGNET SENSOR
1249 3780-01079 SPR CPRSN .375 FL X .240OD X 0.38WIRE DIA SST
1250 3140-01025 BSHG SNAP 1/2 ID X 5/8OD NYLON BLACK
1251 0020-26245 SUPPORT ARM, 6" HTHU HTR HEAT SHIELD
1252 3870-01400 VALVE FLOW CNTRL 10-32 8 TURN
1253 3300-01612 ADAPTOR, 1/8MPX10-32
1254 0020-23837 SPACER 6-12 SOURCE GUIDE PIN G12 10EA, 12.9 10EA
1255 0020-13998 PLATE, SOURCE ALIGNMENT PIN G12 10EA, 12.9 10EA
1256 0150-20103 CABLE ASSY, CCD BD INT.
1257 0090-20152 ASSY OVERTEMP SW DEGAS CHAMBER WITH 0020-24143
1258 - SWAGELOK HOSE
1259 3300-02240 FLG 1-1/3 OD CF BLANK
1260 0720-01598 CONN COAX ADPTR ANGLE JK-PLUG TYPE N UG
1261 0150-20638 CABLE ASSY IGNITION NETWORK
1262 0150-05104 CABLE ASSEMBLY, IGNITION NETWORK
1263 0015-20221 CB PADLOCK 1-3 POLE LOCK OFF ONLY
1264 0020-20114 ISOLATOR, DC BIAS
1265 3690-02848 SCR CAP FLT HD 6-32X1/4L SLOT 82DEG SS
1266 3630-01092 RTNR RING INT 5/8 HSG .035THKSST
1267 0020-25746 PAD  8 ZX HEATER DC BIAS
1268 0190-09132 SW, 15 HG, VCR-4 OPEN DECREASING VAC, P
1269 3300-09254 FTG TBG ADAPTER NW25 X 3/8" TUBE SWAGE
1270 3300-03436 FTG TBG ADPTR NW25 X 1/4MVCR 1.4"LG SS
1271 0200-20215 HOUSING, DOUBLE RF CONNECTOR, VECTRA IMP
1272 - INSULATOR, LAMP COVER, LEFT
1273 0910-01073 FUSE HLDR BODY HI CURRENT SHOCKPROOF PA
1274 0910-01074 FUSE CARR FOR 1/4X1-1/4 FUSES
1275 0020-29974 CLAMP FEEDTHRU COIL SUPPORT 1.365L VECT
1276 0090-01534 SENSOR ASSY, MASK PRESENT, PHOTOMASK
1277 0020-23917 BRACKET CABLE COVER LIFT
1278 0020-27942 BRACKET CABLE VHP COVER LIFT
1279 0140-20233
0140-76169
0140-70172
HARNESS ASSY, SHIELD TREAT/TURBO/ CONT.
with 0720-01243
1280 0720-03443 CONN RCPT SNGLE LOCKING PNL MTG 2P 3WR
1281 3690-02174 SCR CAP SKT HD 10-32 X 1/2L HEX SKT ST
1282 0010-01100 ASSEMBLY, SOURCE LOCKING PIN
1283 0020-20342 PIVOT TRANSFER SLIT VALVE
1284 0020-20752 FINGER HOOP CD/PT 200 MM
1285 0020-25991 SUPPORT BAR  HEAT SHIELD   ZX HEATER
1286 0020-20113 HUB DC BIAS, SHIELD ASSY
1287 3630-01091 RTNRRING EXT 3/4 SFT .062THKSST
1288 - 852B12PCJ2GC
1289   852B13TCA2GC
1290   Cryo Pump Purge Solenoid Valve
1291 3300-02248 FTG ELBOW 1.0OD-TBG X 2.04L X 1.57OD-F
1292 4020-01040 FLTR IN-LN GAS 3000PSIG 1/4-GSKT SEAL M
1293 4020-01203 USE 4020-01285 FLTR GAS 1000PSIG 1/4MVCR
1294 - IMP PROCESS KIT 
1295 3300-02457 FTG TUBE TEE
1296 - CRYO HELIUM "T" LINE
1297 - ZB5 AZ101
1298 0020-20380 ENCLR, PWR TURBO PUMP
1299 0190-13175 LIGHT PEN
1300 3700-01415 O RING STATIC SEALS ID9.225 CSD.210 SILI
1301 0010-20511 ASSY, DC BAIS SHORT MONITOR
1302 3310-01081 GAUGE ION NUDE 2.75 INCH CF WITH CABLE L with ADAPTOR 3ea
1303 - LAMP SWITCH
1304 - EMO SWITCH
1305   IMP TOGGLE
1306 0690-01579 CLAMP TOGGLE GLNG SST 100LB W/VINYL CTD
1307 0150-10076 SENSOR ASSY CABLE ASSY MICROWAVE REMOTE
1308 0140-09596 HARNESS ASSY, CHAMBER ILMINATION
1309 0150-10125 CABLE ASSY, SHORTING, SPARE1, WxZ
1310 0150-10063 CABLE ASSY SAFETY SWITCH JUMPER
1311 - G12 MAGNET SHIM
1312 CL40-76241 TRANSPECTOR POWER SUPPLY CL40-76241
1313 0020-23286 COVER INSULATOR TIN 8" 
1314 AX8403 AX8403 Ozone Generator
1315  AX8405 AX8405 Ozone Generator 
1316 0010-23840 300mm Magnet Ass`y
1317 0010-21767 Magnet Ass`y
1318 0010-26451 Magnet Ass`y
1319 0010-21403 Endura Source TTN Minus G Type
1320 0010-21810 Magnet Ass`y, G12+, Encapsulated, Durasource
1321 0010-21676 RH-2 Magnet Ass`y
1322 0010-21940 Magnet Ass`y, G-3 Encapsulated
1323 0010-01198 G-3 Magnet Ass`y
1324 0010-04065 Magnet Ass`y, SIP-TTN, REV2, 8"
1325 0010-20223 Magnet REM 11.3, TIN Ass`y
13260010-20224

MAGNET -A- 11.3 AL ASSY

13270010-05966

ASSY,ESC/RF, 200MM, NOTCH DUAL ZONE,

SUP (ESC : 0040-39990)

13280010-05994
ASSY,ESC/RF,200MM,NOTCH,DZ,OUTER RIM,EMA (ESC : 0040-40978)
1329 0010-27430

MCA E-chuck, 12" SNNF HTSEC.