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AMAT Ceramic Heater 2nd New

Category : Overhaul / 2nd / OPM New Items | Download : RenoNix Ceramic Heater Profile 2020 R2.pdf

AMAT Ceramic Heater 2nd NEW Items


Producer 2nd NEW C/H List 

 

Centura 2nd NEW C/H List 

     Equipment       P/N            Equipment      P/N

200mm Producer
Ceramic Heater
0010-03840

0010-03841
0010-04978
0010-08901
0010-12282
0010-17871
0010-25323
0010-25415
0010-29675
0010-38516
0010-03287

 

200mm CxZ Ceramic Heater
(Giga fill ALN Heater)

0010-03843

 

200mm DCxZ Cer. Heater AL
Cap# (Giga fill ALN Heater)

0040-00939
0040-36219

 

200mm DCxZ Cer.Heater

Plate# (Giga fill ALN Heater)

0040-37010

 

TC Assy for 200mm DCxZ
Ceramic Heater

0190-01167

200mm  Producer
Ceramic Heater

0190-03506
0200-37359
0040-51612

 

 

 

200mm Producer
Cer. Heater AL Cap#

0040-02539
0040-37593
0040-39947
0040-61254
0040-86625

 

 

 

 

 

 

200mm Producer
Cer. Heater Plate#

0040-45008
0040-47318
0040-61269
0040-70479
0040-86263
0040-MF612
0200-200MC
0200-35527

 

 

 

 

 

 

 

 

 

TC Assy for 200mm
Producer Cer. Heater

0190-01168
0190-35986

     

Performance for  200mm Ceramic Heater

◆ 200mm Wafer Size

◆ Good Thermal Conductivity

◆ High Durability

◆ Excellent Corrosion Resistance

◆ Good Wafer Temperature at Various CVD Process