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LAM Electrode OPM New

Category : Overhaul / 2nd / OPM New Items | Download : RenoNix OPM Electrode Profile 2020 R2.pdf

 LAM 300mm Silicon Upper Electrode

   

NO.

P/N

Type

Condition

Remark

1

839-011906-10

6〞 Normal

OPM New

Bonding Type

2

839-011907-100

8〞Standard

OPM New

3

839-011907-111

8〞Exelan

OPM New

4

839-011907-222

8〞Thicker

OPM New

5

839-443215-101

8〞 HP

OPM New

6

839-443215-502/504

8〞HPT

OPM New

7

839-021113-002/095

12〞INNER

GBE Type

OPM New

Silicon +  Graphite

Bonding Type

8

839-020965-005/020/095

12〞OUTER

GBE Type

OPM New

9

839-052157-010

12〞INNER

ABE Type

OPM New

Silicon + Al 

 Bonding Type

10

839-052158-020

12〞OUTER

ABE Type

OPM New

11

839-044157-431

12〞INNER

MONO

OPM New

Silicon

Bonding Type

12

716-069688-005/022

12〞INNER

TALON

OPM New

Non

13

716-082039-001/002

12〞OUTER

TALON

OPM New

14

3D10-250316-11(SE)

12〞LD Type

2nd New

Non

15

3D10-302020-11

12〞VIGUS

2nd New

Non

16

ES1810-224789-11

12〞VIGUS

2nd New

Non

 Major Area : Silicon Upper Electrode


 Silicon is the unique and high-function materials which is used in the semiconductors area.


 RenoNix  produces the state of the art technology silicon electrodes for the dry etching process.