RNX Novellus OPM / 2ND New Parts List_Rev010_20240613
Category : Overhaul / 2nd / OPM New Items | Download : RenoNix Novellus OPM 2ND Parts List_2024.pdf
No. P/N Condition Description
| 1 | 15-10899-00 | 2nd New | SPRING SEAL PLATE |
| 2 | 02-00205-00 | 2nd New | THERMOCOUPLE FEEDTHRU ASSY |
| 3 | 02-111903-00 | 2nd New | RF FEEDTHRU ASS'Y |
| 4 | 02-141319-00 | 2nd New | Heater ISO BOX, NEW TYPE |
| 5 | 03-00313-04 | 2nd New | CABLE ASSY,CA102-4 |
| 6 | 03-033871-01 | 2nd New | CABLE ASSY RF CNTRL 228 |
| 7 | 03-041149-02 | OPM New | HARN ASSY, Laser Transmit, Right MAP |
| 8 | 03-041150-02 | OPM New | HARN ASSY, Laser Reciecer, Right MAP |
| 9 | 03-10361-00 | 2nd New | N2/VAC INTERLOCK 72FT |
| 10 | 03-10794-01 | 2nd New | R.F Interlock 25FT |
| 11 | 03-114682-03 | 2nd New | Novellus Cable |
| 12 | 03-123072-00 | 2nd New | Interlock B/D SEQ-X |
| 13 | 04-136579-00 | 2nd New | RF Switch Kit, SEQUEL-X(SPML KIT) |
| 14 | 05-140758-00 | 2nd New | HVA Gate Valve used (With Heater Jacket) |
| 15 | 05-164943-00 | 2nd New | Assy 4-shelf CAST COOL STATION |
| 16 | 10-00095-00 | 2nd New | Manifold Gas tube |
| 17 | 15-00027-02 | 2nd New | Guide,Nozzle,Adjuster |
| 18 | 15-00043-02 | 2nd New | PLATE, ADJUSTER CERAMIC GAS |
| 19 | 15-00229-00 | 2nd New | Nut Feed Through 1/2-20UNC*.25 |
| 20 | 15-00309-00 | 2nd New | PRACKET NOZZLE SUPPORT |
| 21 | 15-00309-01 | 2nd New | Hanger,Nozzle,1.50"(200MM) |
| 22 | 15-00386-00 | 2nd New | WASHER FLAT #10, NICKEL |
| 23 | 15-00399-02 | 2nd New | Serw HEX 8-32X.96 NICKEL |
| 24 | 15-00399-03 | 2nd New | Screw 8.32 x 0.55 INCH-NI Top Spindle |
| 25 | 15-00399-04 | 2nd New | SCREW 1.02 LG TOP SPINDLE |
| 26 | 15-00399-05 | 2nd New | SCREW 1.12 LG TOP SPINDLE |
| 27 | 15-00410-00 | 2nd New | WINDOW UV FILTER |
| 28 | 15-00457-00 | 2nd New | HEATER STRAP-SCREW |
| 29 | 15-00475-00 | 2nd New | INSULATOR GAS FEECLT |
| 30 | 15-00558-01 | 2nd New | Sleeve Heater Lead 2.00" Ceramic |
| 31 | 15-00653-00 | 2nd New | CLAMP HOUSING |
| 32 | 15-00654-00 | 2nd New | CLAMP |
| 33 | 15-00680-00 | 2nd New | SLEEVE- TC CERAMIC |
| 34 | 15-00685-00 | 2nd New | O-SEAL, FEED THRU, 3/8" |
| 35 | 15-00686-00 | 2nd New | Washer,Feedthru,1/2 ID,Alum |
| 36 | 15-00699-02 | 2nd New | FORK FINGER 200MM |
| 37 | 15-00700-00 | 2nd New | FORK BOTTOM PLATE |
| 38 | 15-00721-00 | 2nd New | WASHER #8, NICKEL |
| 39 | 15-00729-00 | 2nd New | CLAMP PLATE |
| 40 | 15-032631-00 | 2nd New | FLANGE KEYED |
| 41 | 15-033485-00 | 2nd New | Insert, MESC Port, Inigner |
| 42 | 15-053394-02 | 2nd New | FORK FINGER Minimum contact |
| 43 | 15-100263-00 | 2nd New | ROBOT BLADE 200MM HI PURI |
| 44 | 15-100641-00 | 2nd New | WINDOW INNER, VIEWPORT |
| 45 | 15-108174-00 | 2nd New | CUP SCREW COVER |
| 46 | 15-108307-00 | 2nd New | Clamp RF Strap |
| 47 | 15-110411-00 | 2nd New | Window Sapphire |
| 48 | 15-114331-00 | 2nd New | SCREW 1/4-20*0.5L NICKEL |
| 49 | 15-11606-00 | 2nd New | Instolator, Gas Distribution, Ceramic |
| 50 | 15-119059-00 | 2nd New | SCRW SKT HEX 1/4-20X.25,NICKL |
| 51 | 15-122086-00 | 2nd New | COVER ESC 200MM JEIDA CERAMIC |
| 52 | 15-296010-00 | 2nd New | WINDOW IMPROVED VIEWPORT, PLASTIC |
| 53 | 16-00092-00 | 2nd New | FEEDTHRU STRAP (SHORT LINE) |
| 54 | 16-00098-00 | 2nd New | Wire, Insulated, Ceramic Bead,Long |
| 55 | 16-00123-00 | 2nd New | BELLOWS WELDMENT |
| 56 | 16-033732-00 | 2nd New | Manifold 4in Vaccum/Bulkhead |
| 57 | 16-033931-00 | 2nd New | SHOWER HEAD PINNED 200MM WELDMENT |
| 58 | 16-033932-00 | 2nd New | SHOWER HEAD |
| 59 | 16-041993-00 | 2nd New | Special 4in Vaccum W/HYT Port |
| 60 | 17-101596-00 | 2nd New | FORK RETAINER |
| 61 | 17-103987-00 | 2nd New | Strap RF |
| 62 | 17-110412-00 | 2nd New | Screen ,RF Shield , Etched Short |
| 63 | 17-113692-00 | 2nd New | Bracket strap side RF Dis |
| 64 | 19-00056-00 | 2nd New | Feedthru Assy, Heater |
| 65 | 19-00155-01 | 2nd New | HBLK, 150MM, SLOT |
| 66 | 19-00154-00 | 2nd New | HBLK, 200MM |
| 67 | 02-258799-00 | 2nd New | HBLK, 200MM |
| 68 | 19-00154-01 | 2nd New | HBLK, 200MM, SLOT |
| 69 | 19-024227-00 | 2nd New | HBLK, 200MM, 24HOLE |
| 70 | 19-00154-02 | 2nd New | HBLK, 200MM, 24HOLE |
| 71 | 20-00212-00 | 2nd New | Nut,8-32UNC-2B,Alum |
| 72 | 20-00221-00 | 2nd New | WASHER, FLAT #8 ALUM |
| 73 | 20-00222-00 | 2nd New | WASHER FLAT, 1/4 ALUN |
| 74 | 22-00006-00 | 2nd New | Filter waferguard |
| 75 | 22-00021-01 | 2nd New | O-Ring, 1.984 x 0.139, Buna |
| 76 | 22-00042-00 | 2nd New | O-Ring, 7.984 x 0.139 |
| 77 | 22-00053-00 | 2nd New | O-Ring, 0.676 x 0.070, Viton |
| 78 | 22-00090-00 | 2nd New | Filter waferguard |
| 79 | 22-00174-00 | 2nd New | O-Ring, 6.234 x 0.139, Exhaust Box, Viton |
| 80 | 22-00236-00 | 2nd New | O-Ring, 7.475 x 0.275, Viton |
| 81 | 22-00239-00 | 2nd New | O-Ring, 5.984 x 0.139, Viton |
| 82 | 22-00324-00 | 2nd New | SEAL- LIP(EXT) |
| 83 | 22-00344-00 | 2nd New | O-Ring, 0.364 x 0.070, Viton |
| 84 | 22-00345-00 | 2nd New | O-Ring, 3/8 OD Tube QC F |
| 85 | 22-00361-00 | 2nd New | O-Ring, 31.12 x 0.275, Viton |
| 86 | 22-00391-00 | 2nd New | O-Ring, 0.864 x 0.070, Viton |
| 87 | 22-00608-00 | 2nd New | O-Ring, 1.484 x 0.139 |
| 88 | 22-00656-00 | 2nd New | O-Ring, 7.474 x 0.139, (2-264 Kalrez) |
| 89 | 22-026373-00 | 2nd New | Filter male inlet, female outlet(M/F VCR 1/4") |
| 90 | 22-10018-00 | 2nd New | O-Ring, 15.955 x 0.210, Face Plate |
| 91 | 22-10068-00 | 2nd New | KIMURA O-Ring K23X AS383 |
| 92 | 22-10117-00 | 2nd New | O-Ring, 7.234 x 0.139, Valve Seat |
| 93 | 22-110615-00 | 2nd New | O-Ring 2-249, VITON 747 |
| 94 | 27-00010-01 | 2nd New | TC,TYPE'J',RIGID,1/8 DIA x 12L OMEGA |
| 95 | 27-00079-00 | 2nd New | THERMOCOUPLE TYPE J 1/16" |
| 96 | 27-00117-01 | 2nd New | CNTRLR,TEMP,'E' TYPE INVENSYS |
| 97 | 27-00127-00 | 2nd New | Thermocouple Type E LG |
| 98 | 27-00179-00 | 2nd New | Elbow Union 3/8" O-seal |
| 99 | 27-034083-01 | 2nd New | Actulator, Hoist |
| 100 | 27-10114-00 | 2nd New | Feedthru Assembly heater |
| 101 | 27-277312-00 | 2nd New | Controller over temp type-J |
| 102 | 31-00114-00 | 2nd New | RELAY,SOLID STATE,90A IDEC CORPORATION |
| 103 | 34-103697-00 | 2nd New | Relay SSR, 280AC,12A,3-30VDC |
| 104 | 38-128003-00 | 2nd New | Novellus Cable |
| 105 | 60-00019-00 | 2nd New | Seal Assy NW25 |
| 106 | 60-00026-00 | 2nd New | Seal Assy NW100 |
| 107 | 60-00039-00 | 2nd New | Seal Assy NW40 |
| 108 | 6030-01186 | 2nd New | BALL BUSHING BEARING |
| 109 | 76-268563-00 | 2nd New | Novellus Cable |
| 110 | C2 Dual Sequal | 2nd New | Novellus C2 Dual Sequal RF Clean Kit |
| 111 | E19000940 | 2nd New | VARIAN: VIISION® Drive Shaft |
| 112 | HA-FF23BG1 | 2nd New | MANUAL PORT AC SERVER MOTOR |
| 113 | PK-ST8W-001 | 2nd New | 8" TC Wafer |
| 114 | SS-601-PC | OPM New | Port Connector |
| 115 | SS-6BHT-60 | OPM New | L=155㎝, 3/8" Tube end type teflon hose |
| 116 | SS-6BHT-72 | OPM New | L=185㎝, 3/8" Tube end type teflon hose |
| 117 | 15-250878-00 | 2nd New | MOER Screw |
| 118 | 16-033932-00 | 2nd New | SHOWER HEAD |