RNX LAM OPM / 2nd New Parts List_Rev.10_20240613
Category : Overhaul / 2nd / OPM New Items | Download : RenoNix LAM OPM 2ND Parts List_2024.pdf
No. P/N Condition Description
| 1 | 716-331088-001 | 2nd New | Edge Ring (Lam) |
| 2 | 1810-223289-13 | 2nd New | EXHAUST SLIT |
| 3 | 713-012659-003 | 2nd New | RTNR,FACE SEAL GAS INJCTR |
| 4 | 714-495015-001 | 2nd New | REAR CHAMBER LINER (TCP) |
| 5 | 715-011622-120 | 2nd New | LIFTERWFR4-PINFLE |
| 6 | 715-011913-005 | 2nd New | PLATE , LOWER BAFFLE SIN |
| 7 | 715-018991-208B | 2nd New | CATHODE (E) 8" (LAM RAINBOW 4428) |
| 8 | 715-037760-001 | 2nd New | AL ELECTRODE UPPER 8" |
| 9 | 715-11002-00 | 2nd New | XLL CHAMBER |
| 10 | 715-140125-002 | 2nd New | Q, BAFFLE, LOWER |
| 11 | 715-140126-004 | 2nd New | Q, BAFFLE, MIDDLE |
| 12 | 715-31522-001 | 2nd New | PLATE WINDOW TURBO EXIT |
| 13 | 715-330825-006 | 2nd New | LNR,CHMBR,AL,EXTND (ALLIANCE 9400PTX) |
| 14 | 715-330984-001 | 2nd New | GAS INJECTION RING® ALLIANCE 9400 PTX |
| 15 | 715-495014-001 | 2nd New | LIN,CHABER,TRASN,MANF,ADPTR (TCP) |
| 16 | 716-011009-001 | 2nd New | WINDOW, QUARTZ (Left Side) |
| 17 | 716-011427-001 | 2nd New | DSQ Quartz Window |
| 18 | 716-028454-012 | 2nd New | Window Quartz TCP Top LAM 9400 |
| 19 | 716-028454-512 | 2nd New | Disk Quartz |
| 20 | 716-140125-100 | 2nd New | FACING MIDDLE BAFFLE |
| 21 | 716-140139-311 | 2nd New | R-HOT EDGE-SI-SGL XTAL-8 |
| 22 | 716-330045-381 | 2nd New | 9600 PTX 8" NOTCH NO LANDING (SEE CY) |
| 23 | 716-330121-001 | 2nd New | WINDOW,RF,SHAPED CERAMIC FIXED |
| 24 | 716-330355-001 | 2nd New | WINDOW, QUARTZ, HTD-EP |
| 25 | 716-330504-081 | 2nd New | Ring, Focus, 8" ESC, Guard |
| 26 | 716-331088-404 | 2nd New | R, EDGE, 8, ES, NCH, TOP, BSR, FL |
| 27 | 716-331142-007 | 2nd New | Edge Ring |
| 28 | 716-331157-004 | 2nd New | Quartz Disk (Lam) |
| 29 | 716-443086-408 | 2nd New | EXELAN Hot Edge Ring |
| 30 | 718-043893-801 | 2nd New | ASSY ESC 8" ELECTD NOTCH(ELECTRODE, ESC 9400) |
| 31 | 718-094523-261 | 2nd New | CHUCK ASSY,ELCTD,ESC 6" MJR FLTESC (FLAT TYPE) |
| 32 | 718-094523-281 | 2nd New | TCP ESC 8INCH, ESC, NOTCH TYPE |
| 33 | 718-094756-061 | 2nd New | HAA ESC CHUCK -TCP9600 (Chuck, Cap, Electrode ESC) |
| 34 | 718-094756-081 | 2nd New | Elctd,CAP,GROUND RING ESC, 8INCH, NOTCH TYPE |
| 35 | 76-268563-00 | 2nd New | Novellus Cable |
| 36 | 839-011906-001 | OPM New | 6" SILICON UPPER ELECTRODE (Silicon + Graphite) |
| 37 | 839-011906-10 | OPM New | 6" Silicon Upper Electrode |
| 38 | 839-011907-100 | OPM New | 8" Silicon Upper Standard Electrode |
| 39 | 839-011907-111 | OPM New | 8" Silicon Upper Exelan Electrode |
| 40 | 839-011907-222 | OPM New | 8" Silicon Upper Thicker Electrode |
| 41 | 839-011907-902 | 2nd New | ELECTRODE, SILICON,HI TEMP,POLISH,8 INCH |
| 42 | 839-011907-913 | 2nd New | ELECTRODE, ELASTOMER BONDED, 4520XL 4520I |
| 43 | 839-031766-001 | 2nd New | BELLOWS LIFTER |
| 44 | 839-440462-308 | 2nd New | ASSY,ELCTD,ESC,200mm,SEMI |
| 45 | 839-440462-518 | 2nd New | LAM EXELAN HPT ESC |
| 46 | 839-443215-101 | OPM New | 8" Silicon Upper HP Electrode |
| 47 | 839-443215-502 | OPM New | 8" Silicon Upper HPT Electrode |
| 48 | 839-443215-504 | OPM New | 8" Silicon Upper HPT Electrode |
| 49 | 839-443215-514 | 2nd New | HPT UPPER ELECTRODE |
| 50 | 839-802923-006 | 2nd New | HLDR, QTZ WIN, FCTR, SCRN |
| 51 | 853-347146-006 | 2nd New | PADDLE HEATED DSQ LRC 9600 |
| 52 | 853-347146-008 | 2nd New | LAM TCP9600SE / TCP 9600 DSQ Paddle Heater 8" |
| 53 | 713-018296-003 | 2nd New | INJECTOR SPACER |
| 54 | 713-034964-001 | 2nd New | THICK WASHER 300mm FLEX |
| 55 | 713-034965-001 | 2nd New | THIN WASHER 300mm FLEX |
| 56 | 713-037072-003 | 2nd New | HANGER, 4R-3PC 300mm FLEX |
| 57 | 714-045709-002 | 2nd New | BLK, FLOW, SIM CANTILVR, 23 (Liner or Shutter) |
| 58 | 714-045743-809 | 2nd New | LINER, FIXED OUTR, ACME, 23 (ACME Liner out 31) |
| 59 | 714-045744-008 | 2nd New | LINER, CANTILVR, OUTR LNR (Liner Door) |
| 60 | 714-801511-002 | 2nd New | CHAMBER LINER, NECK 300MM |
| 61 | 715-042721-810 | 2nd New | LINER, SYM, HI FLOW, 2300 (Chamber Liner) |
| 62 | 716-008608-001 | 2nd New | SAPPHIRE WINDOW |
| 63 | 716-012639-117 | 2nd New | QTZ INJ,DUAL,IEP W/ SMOOTHER SURFACE FINISH,LAM2300 |
| 64 | 716-012640-011 | 2nd New | Star Quartz Window 12" Quartz 300mm STAR |
| 65 | 716-012640-012 | OPM New | WDO. GAS INJ, FACE SEAL, QR, Quartz Disk(Kiyo) |
| 66 | 716-013402-053 | OPM New | Hot Edge Cover Ring |
| 67 | 716-018468-092 | OPM New | GND Cover Ring |
| 68 | 716-018468-292 | OPM New | GND Cover Ring |
| 69 | 716-022030-004 | OPM New | SLV,QTZ,STEPPED,PIN(1C) (LAM 300mm FLEX-EX) |
| 70 | 716-026652-902 | 2nd New | RING, EDGE, BOT |
| 71 | 716-031052-002 | 2nd New | WDO, QTZ, HTD, ENDPT |
| 72 | 716-031257-531 | OPM New | TOP EDGE RING |
| 73 | 716-069688-005 | OPM New | LAM 300mm INNER ELECTRODE (TALON Type) |
| 74 | 716-069688-022 | OPM New | LAM 300mm INNER ELECTRODE (TALON Type) |
| 75 | 716-069688-041 | OPM New | TOP ELECTRODE INNER |
| 76 | 716-082039-001 | OPM New | LAM 300mm OUTER ELECTRODE (TALON Type) |
| 77 | 716-082039-002 | OPM New | LAM 300mm OUTER ELECTRODE (TALON Type) |
| 78 | 716-082039-025 | OPM New | TOP ELECTRODE OUTER |
| 79 | 716-087943-812 | OPM New | QUARTZ COVER RING INNER |
| 80 | 716-331142-201 | 2nd New | RING,EDGE TOP WIDE |
| 81 | 716-801568-002 | 2nd New | Window Quartz |
| 82 | 720-092464-008 | 2nd New | MOUNTING SCREW |
| 83 | 734-007524-122 | 2nd New | O-RING,CHEMRAZ,SSE38,1.1 |
| 84 | 734-007524-274 | 2nd New | O-RING,CHEMRAZ,AS568-274 |
| 85 | 734-007524-275 | 2nd New | O-RING,CHEMRAZ,AS568-275 |
| 86 | 734-007524-284 | 2nd New | O-RING,CHEMRAZ,AS568-284 |
| 87 | 734-061280-014 | 2nd New | ORING ID .489 CSD .070 VITON |
| 88 | 734-061280-274 | 2nd New | O-RING,VITON,9.984 ID |
| 89 | 734-061280-275 | 2nd New | O-RING,VITON,10.484ID X |
| 90 | 734-061280-329 | 2nd New | O-RING, VITON |
| 91 | 734-073584-121 | 2nd New | O-RING,KALREZ 9100,1.049 |
| 92 | 839-020965-005 | OPM New | LAM 300mm OUTER ELECTRODE (GBE Type) |
| 93 | 839-020965-020 | OPM New | LAM 300mm OUTER ELECTRODE (GBE Type) |
| 94 | 839-020965-095 | OPM New | LAM 300mm OUTER ELECTRODE (GBE Type) |
| 95 | 839-021113-002 | OPM New | LAM 300mm INNER ELECTRODE (GBE Type) |
| 96 | 839-021113-095 | OPM New | LAM 300mm INNER ELECTRODE (GBE Type) |
| 97 | 839-039317-003 | 2nd New | CAP 300mm FLEX |
| 98 | 839-044157-031 | OPM New | UPPER ELECTRODE INNER FLEX45 |
| 99 | 839-044157-431 | OPM New | LAM 300mm INNER MONO ELECTRODE |
| 100 | 839-045710-807 | 2nd New | ASSY, SYM DOOR, 2300 (Shutter) |
| 101 | 839-052157-010 | OPM New | LAM 300mm INNER ELECTRODE (ABE Type) |
| 102 | 839052158-020 | OPM New | LAM 300mm OUTER ELECTRODE (ABE Type) |
| 103 | 839-052158-020 | 2nd New | ABE AL OUTER |
| 104 | 839-086924-021 | OPM New | ASSY,STUD,SOCKET (LAM 300mm FLEX-45) |
| 105 | 839-086924-025 | OPM New | ASSY,STUD,SOCKET (LAM 300mm FLEX-DX) |