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RNX 12" Total Parts List REV10 20201215

Category : Other Parts Item | Download : RNX OPM, 2nd NEW Parts List 20201215 TOTAL Rev10.pdf

NO.         P/N Condition                        Description
1 839-021113-002 OPM New LAM 300mm INNER ELECTRODE (GBE Type)
2 839-021113-095 OPM New LAM 300mm INNER ELECTRODE (GBE Type)
3 839-020965-005 OPM New LAM 300mm OUTER ELECTRODE (GBE Type)
4 839-020965-020 OPM New LAM 300mm OUTER ELECTRODE (GBE Type)
5 839-020965-095 OPM New LAM 300mm OUTER ELECTRODE (GBE Type)
6 839-052157-010 OPM New LAM 300mm INNER ELECTRODE (ABE Type)
7 839052158-020 OPM New LAM 300mm OUTER ELECTRODE (ABE Type)
8 839-044157-431 OPM New LAM 300mm INNER MONO ELECTRODE
9 716-069688-005 OPM New LAM 300mm INNER ELECTRODE (TALON Type)
10 716-069688-022 OPM New LAM 300mm INNER ELECTRODE (TALON Type)
11 716-082039-001 OPM New LAM 300mm OUTER ELECTRODE (TALON Type)
12 716-082039-002 OPM New LAM 300mm OUTER ELECTRODE (TALON Type)
13 839-086924-021 OPM New ASSY,STUD,SOCKET (LAM 300mm FLEX-45)
14 716-022030-004 OPM New SLV,QTZ,STEPPED,PIN(1C) (LAM 300mm FLEX-EX)
15 839-086924-025 OPM New ASSY,STUD,SOCKET (LAM 300mm FLEX-DX)
16 716-012640-012 OPM New WDO. GAS INJ, FACE SEAL, QR, Quartz Disk(Kiyo)
17 839-044157-031 OPM New UPPER ELECTRODE INNER FLEX45
18 716-082039-025 OPM New TOP ELECTRODE OUTER
19 716-069688-041 OPM New TOP ELECTRODE INNER
20 716-018468-092 OPM New GND Cover Ring
21 716-013402-053 OPM New Hot Edge Cover Ring
22 716-087943-812 OPM New QUARTZ COVER RING INNER
23 716-031257-531 OPM New TOP EDGE RING
24 716-018468-292 OPM New GND Cover Ring
25 0010-01231 OPM New Magnet assy
26 0010-03485 OPM New 300mm Magnet Assy
27 0010-03487 OPM New MAGNET, TIN/TTN ASSY 300MM PVD
28 0010-23840 OPM New 300mm MAGNET ASSY
29 0010-25739 OPM New ENDURA II HY-11, DS-TTN
30 0010-03488 OPM New MAGNET, IMP 300mm PVD
31 713-018296-003 2nd New INJECTOR SPACER
32 720-092464-008 2nd New MOUNTING SCREW
33 714-801511-002 2nd New CHAMBER LINER, NECK 300MM
34 716-008608-001 2nd New SAPPHIRE WINDOW
35 715-042721-810 2nd New LINER, SYM, HI FLOW, 2300 (Chamber Liner)
36 714-045744-008 2nd New LINER, CANTILVR, OUTR LNR (Liner Door)
37 839-045710-807 2nd New ASSY, SYM DOOR, 2300 (Shutter)
38 714-045709-002 2nd New BLK, FLOW, SIM CANTILVR, 23 (Liner or Shutter)
39 714-045743-809 2nd New LINER, FIXED OUTR, ACME, 23 (ACME Liner out 31)
40 0200-04294 2nd New BAFFLE, ALN, 2.47ODX1.14L, 8X.100CLN, 8X
41 0190-00958 2nd New BRG,4PT CONT,8.625OD X 8ID X .3125W W/CA
42 0021-30906 2nd New CLAMP, BLADE 300MM DBR
43 0150-76186 2nd New EMC COMP.,CABLE ASSY,PUMP UMBILICAL
44 0140-20255 2nd New HARNESS ASSEMBLY STEC MFC PANEL 1 SYS
45 0040-54098 2nd New MANIFOLD, INPUT, LID ASSEMBLY, PMD PRODU
46 3700-02137 2nd New ORING ID .924 CSD .103 CHEMRAZ SC513 80
47 3700-02206 2nd New ORING ID 1.174 CSD .103 CHEMRAZ SC513 80
48 0190-21713 2nd New SWITCH, HALF ATM
49 0190-75083 2nd New TC, PROBE K-TYPE QUICK-DISCONNECT INTEGR
50 0020-18899 2nd New WASHER, NOZZLE, ULTIMA HDPCVD
51 16-033932-00 2nd New SHOWER HEAD
52 0020-84596 2nd New FACEPLATE, 300MM SILANE, FLOW TESTED
53 0041-25016 2nd New Face Plate .70 THK No Center Hole 300mm
54 0200-01903 2nd New Insulator 300 mm Endura Preclean Quartz 
55 716-801568-002 2nd New Window Quartz
56 716-012640-011 2nd New Star Quartz Window 12" Quartz  300mm STAR
57 713-034964-001 2nd New THICK WASHER 300mm FLEX
58 839-039317-003 2nd New CAP 300mm FLEX
59 713-037072-003 2nd New HANGER, 4R-3PC  300mm FLEX
60 713-034965-001 2nd New THIN WASHER  300mm FLEX
61 15-250878-00 2nd New MOER Screw
62 3700-01035 2nd New O-RING ID .424 CSD .103 VITON 75DURO AS568-111 VITON BLOCK
63 3700-02183 2nd New ORING ID.546 CSD.139 AS568A-207 VITON BLK
64 3700-01245 2nd New O-RING ID.364 CSD.070 AS568A-012 VITON 75 DURO BLK
65 839-052158-020 2nd New ABE AL OUTER
66 734-073584-121 2nd New O-RING,KALREZ 9100,1.049
67 734-007524-284 2nd New O-RING,CHEMRAZ,AS568-284
68 734-061280-014 2nd New ORING ID .489 CSD .070 VITON
69 734-007524-275 2nd New O-RING,CHEMRAZ,AS568-275
70 734-007524-274 2nd New O-RING,CHEMRAZ,AS568-274
71 734-061280-275 2nd New O-RING,VITON,10.484ID X
72 734-061280-274 2nd New O-RING,VITON,9.984 ID
73 734-061280-329 2nd New O-RING, VITON
74 734-007524-122 2nd New O-RING,CHEMRAZ,SSE38,1.1
75 0010-36734 2nd New 300mm Producer Ceramic Heater
76 0020-20666 2nd New Themal Insulator Lifter
77 716-012639-117 2nd New QTZ INJ,DUAL,IEP W/ SMOOTHER SURFACE FINISH,LAM2300 
78 716-026652-902 2nd New RING, EDGE, BOT
79 0200-04654 2nd New PUMPING Liner, Top SiH4 (Producer SE)
80 0200-02408 2nd New PUMPING RING, CERAMIC C-CHANNEL, SIDE 2
81 0200-02407 2nd New PUMPING RING, CERAMIC C-CHANNEL, SIDE 1
82 0021-27233 2nd New MIXING TUBE, MIXING BLOCK, CHAMBER LID
83 0200-07974 2nd New WEIGHT LIFT PIN 300MM HEATER
84 0040-76820 2nd New FACEPLATE, 1.5D 12MIL. 70THK
85 0040-95475 2nd New FACEPLATE,TEOS HIGH DEP RATE,FACEPLATE
86 716-031052-002 2nd New WDO, QTZ, HTD, ENDPT
87 0200-01197 2nd New LIFT PIN ADJSTBL FAST LIFT ALUMINA NON C
88 0040-32053 2nd New WELDMENT, BELLOWS, WAFER LIFT
89 716-331142-201 2nd New RING,EDGE TOP WIDE
90 0021-17770 2nd New COVER RING,AL,300MM SST (SIP)
91 0020-02344 2nd New SHIELD, LOWER, 300MM SIP
92 0020-08299 2nd New CLAMP, INNER SHIELD,300MM SIP
93 0200-08301 2nd New DEPOSITION RING,BESC (SIP)
94 0021-25014 2nd New DISK, SHUTTER, CENTER PIN
95 0020-02348 2nd New CLAMP, LOWER SHIELD,300MM SIP
96 0020-54777 2nd New SHIELD INNER, AL ,300MM SIP
97 0020-23549 2nd New SHIELD UPPER,AL,SIP
98 0021-21234 2nd New UPPER SHIELD,AL,CH
99 0021-22064 2nd New COVER RING,METAL,CH
100 0021-22065 2nd New LOWER SHIELD,AL,CH
101 0040-07291 2nd New DEPOSITION RING,METAL,CH
102 0021-26609 2nd New SHUTTER DISK,AL,CH
103 0020-19258 2nd New PEDESTAL TITANIUM 300MM PCII
104 0040-86514 2nd New SHIELD, LOWER 300MM PCXT/RPC+
105 0021-19342 2nd New SHIELD INNER 300MM PCII/RPC+
List