Overhaul / 2nd / OPM New Items

LAM / NOVELLUS Heater Block Overhaul / 2nd New

Description			P/N
HBLK, 150mm, SLOT			19-00155-01
HBLK, 200mm			19-00154-00
HBLK, 200mm			02-258799-00
HBLK, 200mm, SLOT			19-00154-01
HBLK, 200mm, 24 HOLE			19-00154-02
HBLK, 200mm, 24 HOLE			19-024227-00
HBLK, 200mm, 4 HOLE			19-024227-02
HBLK, 200mm, SLOT, 20 HOLE			19-024227-01
HBLK, 200mm, SPL HTR, 4 HOLE			02-265577-00
HBLK, 200mm, SLOT, 4 HOLE,               SCRIBED			02-335438-00
HBLK, 200mm, 18 HOLE,     SLD SPRT, EXT BAKE			16-131278-00N
HBLK, 200mm, EXT BAKE			19-00154-00N
HBLK, 150mm, SLOT, 28 HOLE			19-032015-01
HBLK, 150mm, SLOT, 4 HOLE			19-032015-02
HBLK, 150mm			19-00155-00
HBLK, 150mm, 3 BALL			19-027010-00

Recently, domestic product of heater block used in Novellus C1, C2

has shown fail trend during production.

The following problem has shown during production.

◆ System up tim decrease

◆ PM time Increase

◆ Cost Increase

◆ Lower Quality

Therefore, RenoNix here to introduce an product which has qualified by other foundries.