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Heater Block Overhaul / 2nd New

Category : Overhaul / 2nd / OPM New Items | Download : RenoNix Heater Block Profile 2020 R2.pdf


LAM / NOVELLUS Heater Block Overhaul / 2nd New


          Description

        P/N

  HBLK, 150mm, SLOT

 19-00155-01

  HBLK, 200mm

 19-00154-00

  HBLK, 200mm

 02-258799-00

  HBLK, 200mm, SLOT

 19-00154-01

  HBLK, 200mm, 24 HOLE

 19-00154-02

  HBLK, 200mm, 24 HOLE

 19-024227-00

  HBLK, 200mm, 4 HOLE

 19-024227-02

  HBLK, 200mm, SLOT, 20 HOLE

 19-024227-01

  HBLK, 200mm, SPL HTR, 4 HOLE

 02-265577-00

  HBLK, 200mm, SLOT, 4 HOLE,               SCRIBED

 02-335438-00

  HBLK, 200mm, 18 HOLE,  
  SLD SPRT, EXT BAKE

16-131278-00N

  HBLK, 200mm, EXT BAKE

19-00154-00N

  HBLK, 150mm, SLOT, 28 HOLE

19-032015-01

  HBLK, 150mm, SLOT, 4 HOLE

19-032015-02

  HBLK, 150mm

19-00155-00

  HBLK, 150mm, 3 BALL

19-027010-00

Recently, domestic product of heater block used in Novellus C1, C2

has shown fail trend during production.

The following problem has shown during production.

◆ System up tim decrease

◆ PM time Increase

◆ Cost Increase

◆ Lower Quality

Therefore, RenoNix here to introduce an product which has qualified by other foundries.