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OEM New Parts List 20190326

Category : OEM Used / New Parts | Download : OEM New Parts List 20190326.pdf

OEM New Parts List

No.

      P/N

         Description

1 713-018296-003 INJECTOR SPACER (KIYO)
2 720-092464-008 MOUNTING SCREW (KIYO)
3 714-801511-002 MOUNTING PLATE LINER (KIYO)
4 716-008608-001 SAPPHIRE WINDOW (KIYO)
5 715-042721-810 LINER, SYM, HI FLOW, 2300 (Chamber Liner KIYO45)
6 714-045744-008 LINER, CANTILVR, OUTR LNR (Liner Door KIYO45)
7 839-045710-807 ASSY, SYM DOOR, 2300 (Shutter) KIYO45
8 714-045709-002 BLK, FLOW, SIM CANTILVR, 23 (Liner or Shutter) KIYO45
9 714-045743-809 LINER, FIXED OUTR, ACME, 23 (ACME Liner out 31) KIYO45
10 810-010473-009 RF INTERFACE, FLEX45
11 715-008220-105 DOOR, BARRIER, ROCKE
12 0020-42287 FACE PLATE
13 0020-42285 BLOCKER PLATE
14 0200-09072 CERAMIC SHIELD
15 0020-10135 MANIFOLD-WETER SUPPLY
16 0020-01271 PUMPING PLATE
17 0020-42082 PLATE, PUMPING, 8 FC, WXZ
18 0200-00621 CERAMIC SHADOW RING
19 0200-00622 CERAMIC OUTER RING
20 0200-00624 CERAMIC PURGE RING
21 0200-00353 SPACER PIN WXZ HEATER
22 0010-59789 HEATER ASSY, HA-12 TIGHT RF MESH WITN CLAMP T 
23 0020-20818 COVER PANEL PNEWMATIC DISTRIBUTION B.D